Autofocus method and apparatus for imaging microscopy using a predetermined visual imaging feature

Claim 3

A method as set forth in claim 1 wherein the step of positioning includes the steps of: determining a current position of the microscope objective relative to an unknown optimum focus position, the position determination being based upon a local shape of at least one of the overlapping curves; positioning the microscope objective, in accordance with the determined current position of the microscope objective, to a first point that in nearer to the optimum focus position; sampling a predetermined one of the curves at the first point; and repositioning the microscope objective, in accordance with the sampled curve, to a second point that coincides with the optimum focus position.

Claim 4

A method as set forth in claim 1 wherein the step of imaging includes an initial step of forming the at least one predetermined visual feature by a step of projecting a shadow of an object upon the surface, the object being inclined at an angle to a plane of the surface.

Claim 7

A method as set forth in claim 4 wherein the step of imaging includes an initial step of forming the visual feature by a step of projecting a shadow of an object upon the surface, the object being inclined at an angle to a plane of the surface.

Claim 8

A method as set forth in claim 4 wherein the step of imaging forms a two-dimensional image having rows and columns of image pixels, and wherein the step of determining a set of overlapping curves includes a step of compressing the two-dimensional image to a one-dimensional summed sequence of pixel amplitudes.

Claim 9

A method as set forth in claim 6 wherein, for each of the areas of interest, a corresponding FOM curve is determined based on a peak-to-peak amplitude of a gradient of the summed sequence, the gradient being determined as a discrete convolution of a derivative-of-gaussian filter and the summed sequence of pixel amplitudes.

Claim 10

A method as set forth in claim 4 wherein the step of determining a current position includes an initial step of classifying a plurality of possible microscope objective positions, or regions, based upon a local form of one or more of the FOM curves at each of the possible microscope objective positions.

Claim 11

A method as set forth in claim 8 wherein the step of classifying considers a sign of the slope of each of the FOM curves for each of the plurality of possible microscope objective positions.

Claim 12

A method as set forth in claim 8 wherein there are at least three AOIs, including a top AOI, a center AOI, and a bottom AOI, each of the AOIs having a centroid, and wherein the step of classifying classifies a plurality of regions (r) that include: r1, wherein the microscope objective position is too far positive relative to the center AOI centroid, and wherein the top FOM curve is monotonically decreasing; r2, where in the microscope objective position is slightly positive relative to the center AOI centroid, and wherein the top FOM curve is monotonically increasing and the center FOM curve is monotonically decreasing; r3, wherein the microscope objective position is in a near focus condition close to the center AOI centroid, and wherein the center FOM curve is near an amplitude maximum; r4, wherein the microscope objective position is slightly negative relative to the center AOI centroid, and wherein the bottom FOM curve is monotonically decreasing and the center FOM curve is monotonically increasing; r5, wherein the microscope objective position is significantly negative relative to the center AOI centroid, and wherein the bottom FOM curve is monotonically increasing; and r6, wherein the microscope objective position is indeterminate, and wherein all three FOM curves are non-monotonic.

Claim 13

A method as set forth in claim 4 wherein the step of determining a current position of the microscope objective and the step of positioning include the steps of: repositioning the microscope objective a plurality of times and sparsely sampling the FOM curves at each of a plurality of positions; and converging upon a region wherein the optimum focus position is known to be located.

Claim 14

A method as set forth in claim 5 wherein there are at least three AOIs, including a top AOI, a center AOI, and a bottom AOI, and wherein the step of determining a current position includes the steps of: A. with the microscope objective at a sample position n, determining and storing a FOM for each of the areas of interest, each FOM curve being determined based on a peak-to-peak amplitude of a gradient of a summed sequence (SS) of image pixel amplitudes for an associated one of the areas on interest, the gradient being determined as a discrete convolution of a derivative-of-gaussian (DOG) filter and the summed sequence of pixel amplitudes (DOG * SS); B. moving the microscope objective position to a position (n+1), and determining and storing a FOM for each of the areas of interest; C. moving the microscope objective to a position (n-1), and determining and storing a FOM for each of the areas of interest; D. examining the stored FOMs for regions (n-1, n, and n+1) so as to determine a monotonicity characteristic of each examined stored FOM; E. assigning, as a function of the determined monotonicity characteristics, a present position of the microscope objective to one of a plurality of predetermined possible microscope objective position regions; F. repositioning the microscope objective in a direction towards a region known to include the optimum focus position; and G. repeating steps A-F until the microscope objective is determined to be positioned within the region that is known to include the optimum focus position.

Claim 15

A method as set forth in claim 12 and further including the steps of: sampling the FOM of the center area of interest to obtain a first curve; determining a zero crossing point of the first curve and the FOM amplitude; and positioning the microscope objective at a position that corresponds to the zero crossing point, the zero crossing point position being the optimum focus position.

Claim 18

Apparatus for focussing a microscope objective, comprising: means for imaging, through a microscope objective, a surface having at least one visual feature; means for determining, from the image, a plurality of overlapping curves each of which represents a quality of focus for different areas of the visual feature; and means for positioning the microscope objective at an optimum focus position, relative to the surface, based upon the shape of the overlapping curves.

Claim 19

Apparatus for focussing a microscope objective, comprising: means for imaging, through a microscope objective, a surface having at least one visual feature; means for determining, from the image, a plurality of overlapping curves each of which represents a quality of focus for different areas of the visual feature; and means for positioning the microscope objective at an optimum focus position, relative to the surface, based upon the shape of the overlapping curves.

Claim 20

Apparatus as set forth in claim 15 wherein said imaging means includes a two-dimensional detector array having a plurality of image pixels arranged in rows and columns.

Claim 21

Apparatus as set forth in claim 15 wherein said determining means includes data processing means coupled to memory means for storing therein data representing the determined overlapping curves.

Claim 22

Apparatus as set forth in claim 17 wherein said data processing means further includes an output coupled to said positioning means for controllably activating same to position the microscope objective.

Claim 23

Apparatus as set forth in claim 15 and further including means for projecting the visual feature upon the surface.

Claim 24

Apparatus as set forth in claim 15 wherein said microscope objective includes an optical path, said optical path including: means for receiving a collimated radiation beam; reduction optics disposed for illuminating the surface with the collimated radiation beam and for receiving reflected radiation from the surface; beamsplitter means disposed in said optical path for directing at least a portion of the reflected radiation to said imaging means; and a shadow projection wire disposed within said optical path and oriented at an angle with respect to a plane of the surface.