US5247448A
Expired / Lapsed
US
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Using spectral signature analysis in producing substrates for magnetic media
Assignee: Seagate Technology LLC
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Filing: 1991-01-31
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Granted: 1993-09-21
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Expires: 2011-01-31
Abstract
Abstract A formation process has a plurality of process steps performed according to a set of process parameters. The formation process is used to form substrates in magnetic discs. A displacement signal is obtained which is representative of surface displacement of the substrate after at least one of the process steps. A first spectral signature is determined based on the displacement signal. The first spectral signature has characteristics representative of the surface displacement of the substrate when processed according to a first set of process parameters. The first spectral signature is compared with a second spectral signature having characteristics indicative of surface displacement of a substrate when processed according to a second set of process parameters. Based on the comparison, the set of process parameters is identified which provides a spectral signature closest to a desired spectral signature.
Inventors
- 👤 Joseph C. Liu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 07:28
CPC Classifications
G; G11; G11B; G11B5/00; G11B5/84; G11B5/8404; G11B33/00; G11B33/10; G11B5/74; G11B5/82
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
84 words
A method of controlling a process for forming a substrate used in a magnetic disc, the process having a plurality of process steps, the method comprising: obtaining a displacement signal representative of axial displacement of the substrate; determining an acceleration spectrum based on the displacement signal, the acceleration spectrum having an acceleration signature; extracting a feature from the acceleration signature; applying a discriminant function to the feature extracted to obtain discriminants; and controlling the process for forming the substrate based on the discriminants obtained.
Claim 2
Independent Claim
84 words
A method of controlling a process for forming a substrate used in a magnetic disc, the process having a plurality of process steps, the method comprising: obtaining a displacement signal representative of axial displacement of the substrate; determining an acceleration spectrum based on the displacement signal, the acceleration spectrum having an acceleration signature; extracting a feature from the acceleration signature; applying a discriminant function to the feature extracted to obtain discriminants; and controlling the process for forming the substrate based on the discriminants obtained.
Claim 3
Dependent Claim
36 words
The method of claim 1 and further comprising: performing the steps of obtaining a displacement signal, determining an acceleration spectrum, extracting a feature, and applying a discriminant function, after each of the plurality of process steps.
Claim 4
Dependent Claim
19 words
The method of claim 2 and further comprising: performing the step of controlling after each of the process steps.
Claim 5
Dependent Claim
23 words
The method of claim 1 and further comprising: determining, based on the displacement signal, whether the substrate conforms to a desired displacement limit.
Claim 6
Dependent Claim
50 words
The method of claim 1 wherein each process step is performed under process step parameters, and wherein controlling the process comprises: determining whether the process step parameters corresponding to a particular process step are unacceptable based on the discriminants obtained; and generating a correction signal identifying unacceptable process step parameters.
Claim 7
Dependent Claim
22 words
The method of claim 5 wherein controlling the process further comprises: adjusting the unacceptable process step parameters based on the correction signal.
Claim 8
Dependent Claim
27 words
The method of claim 1 and further comprising: averaging the displacement signal synchronously in the time domain; generating an average signal based on the averaged displacement signal.
Claim 9
Dependent Claim
45 words
The method of claim 7 wherein determining an acceleration spectrum comprises: transforming the average signal to the frequency domain to obtain a displacement spectrum; filtering the displacement spectrum; and differentiating the filtered displacement spectrum in the frequency domain two times to obtain the acceleration spectrum.
Claim 10
Dependent Claim
28 words
The method of claim 1 wherein extracting a feature from the acceleration signature comprises: determining spectral energy deviation levels as compared to a known spectral energy reference level.
Claim 11
Independent Claim
107 words
A method of controlling a substrate processing system for processing substrates used in magnetic discs, the method comprising: obtaining a displacement signal representative of surface displacement of the substrate; determining a first spectral signature based on the displacement signal, the first spectral signature having characteristics representative of a current set of process conditions in the substrate processing system; comparing the first spectral signature with a second spectral signature having characteristics representative of a substrate processed in the substrate processing system under a known set of process conditions; and controlling the substrate processing system based on the comparison of the first spectral signature with the second spectral signature.
Claim 12
Independent Claim
107 words
A method of controlling a substrate processing system for processing substrates used in magnetic discs, the method comprising: obtaining a displacement signal representative of surface displacement of the substrate; determining a first spectral signature based on the displacement signal, the first spectral signature having characteristics representative of a current set of process conditions in the substrate processing system; comparing the first spectral signature with a second spectral signature having characteristics representative of a substrate processed in the substrate processing system under a known set of process conditions; and controlling the substrate processing system based on the comparison of the first spectral signature with the second spectral signature.
Claim 13
Dependent Claim
45 words
The method of claim 10 wherein controlling the substrate processing system comprises: identifying particular process conditions in the current set of process conditions causing undesirable differences between the first and second spectral signatures; and adjusting the processing system to change the particular process conditions identified.
Claim 14
Dependent Claim
45 words
The method of claim 10 wherein the substrate processing system processes substrates in a plurality of process steps, and further comprising: repeating the steps of obtaining a displacement signal, determining a first spectral signature, comparing, and controlling, after each of the plurality of process steps.
Claim 15
Dependent Claim
73 words
The method of claim 10 wherein the step of determining a first spectral signature comprises: averaging the displacement signal synchronously in the time domain; generating an average signal based on the averaged displacement signal; transforming the average signal to the frequency domain to obtain a displacement spectrum; filtering the displacement spectrum; and differentiating the filtered displacement spectrum in the frequency domain two times to obtain an acceleration spectrum having the first spectral signature.
Claim 16
Dependent Claim
18 words
The method of claim 10 wherein the first and second spectral signatures are representative of spectral energy levels.
Claim 17
Dependent Claim
24 words
The method of claim 14 wherein the step of comparing comprises: comparing the spectral energy levels represented by the first and second spectral signatures.
Claim 18
Independent Claim
132 words
An apparatus for controlling a substrate formation process used in forming substrates for magnetic discs, the apparatus comprising: a displacement sensor for obtaining a displacement signal representative of surface displacement of the substrate; means for determining a first spectral signature based on the displacement signal, the first spectral signature having characteristics representative of a current set of process conditions in the formation process system; feature extraction means for extracting a feature from the first spectral signature; means for applying a discriminant function to the feature extracted and to classify the feature into a known class, wherein the known class is indicative of the current set of process conditions; identification means for providing an identification signal representative of the class; and a controller for controlling the formation process based on the identification signal.
Claim 19
Independent Claim
132 words
An apparatus for controlling a substrate formation process used in forming substrates for magnetic discs, the apparatus comprising: a displacement sensor for obtaining a displacement signal representative of surface displacement of the substrate; means for determining a first spectral signature based on the displacement signal, the first spectral signature having characteristics representative of a current set of process conditions in the formation process system; feature extraction means for extracting a feature from the first spectral signature; means for applying a discriminant function to the feature extracted and to classify the feature into a known class, wherein the known class is indicative of the current set of process conditions; identification means for providing an identification signal representative of the class; and a controller for controlling the formation process based on the identification signal.
Claim 20
Dependent Claim
25 words
The apparatus of claim 16 wherein the controller comprises: means for adjusting the current process conditions in the formation process based on the identification signal.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-09-20 | 1997-03-22 | 1997-09-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-09-20 | 2001-03-22 | 2001-09-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-09-20 | 2005-03-22 | 2005-09-21 | $7700.00 | Window Closed / Lapsed |