US5266530A
Expired / Lapsed
US
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Self-aligned gated electron field emitter
Assignee: STANFORD UNIVERSITY OTL LLC
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Filing: 1991-11-08
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Granted: 1993-11-30
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Expires: 2011-11-08
Abstract
Abstract A method of fabricating a self-aligned gated electron field emitter. An oxidation process forms an optimized, atomically sharp needle (18) in a silicon substrate (12). The needle and surrounding planar area are conformally coated with silicon dioxide (22). A dielectric layer (24) is deposited and planarized over the needle. The dielectric layer is then partially etched away so as to expose the coated needle. The silicon dioxide exposed on the needle is isotropically etched so as to undercut the dielectric layer. A gate metal is directionally deposited so as to form a gate layer (26) on the planar portions of the dielectric layer that is electrically isolated from the gate metal (28) deposited on the needle. The metal on the needle is anodically etched by applying the potential only to the silicon and not to the gate layer. Electro-plating may recoat the needle with another metal (30). The silicon substrate may be replaced by a glass substrate (42) on which is deposited a polysilicon or amorphous silicon layer (40). The invention allows the fabrication of an array of emitters with closely spaced gates over large areas and on inexpensive substrates.
Inventors
- 👤 Brian G. Bagley
- 👤 Robert B. Marcus
- 👤 Tirunelveli S. Ravi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 21:03
CPC Classifications
H; H01; H01J; H01J3/00; H01J3/02; H01J3/021; H01J3/022; H01J9/00; H01J9/02; H01J9/022; H01J9/025; Y; Y10; Y10S; Y10S438/00; Y10S438/978
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
160 words
A method for forming a self-aligned electron-emitter structure, comprising the steps of: forming a needle connected to and rising over a body, said needle forming an electron emitter of said electron-emitter structure; conformally forming a first insulating material over said needle and body; depositing and substantially planarizing a second insulating material over said first insulating material; removing a portion of said second insulating material so as to expose a portion of said first insulating material; etching said exposed first insulating material so as to form an undercut underlying said second insulating material; and then directionally depositing a metal over said second insulating material to form a major portion of at least an electrode layer for said electron-emitter structure over said second insulating material, self-aligned with said electron emitter, and having an aperture therethrough overlying said needle for passage of electrons, said directionally depositing preventing said metal from being deposited on a lower portion of said insulating material overhanging said undercut.
Claim 2
Independent Claim
160 words
A method for forming a self-aligned electron-emitter structure, comprising the steps of: forming a needle connected to and rising over a body, said needle forming an electron emitter of said electron-emitter structure; conformally forming a first insulating material over said needle and body; depositing and substantially planarizing a second insulating material over said first insulating material; removing a portion of said second insulating material so as to expose a portion of said first insulating material; etching said exposed first insulating material so as to form an undercut underlying said second insulating material; and then directionally depositing a metal over said second insulating material to form a major portion of at least an electrode layer for said electron-emitter structure over said second insulating material, self-aligned with said electron emitter, and having an aperture therethrough overlying said needle for passage of electrons, said directionally depositing preventing said metal from being deposited on a lower portion of said insulating material overhanging said undercut.
Claim 3
Dependent Claim
24 words
A method as recited in claim 1, wherein said needle and said body both comprise silicon and said needle is formed in said body.
Claim 4
Dependent Claim
15 words
A method as recited in claim 2, wherein said silicon body comprises singly crystalline silicon.
Claim 5
Dependent Claim
20 words
A method as recited in claim 2, wherein a portion of said silicon body comprising said needle comprises polycrystalline silicon.
Claim 6
Dependent Claim
19 words
A method as recited in claim 4, further comprising depositing said silicon body as a film on a substrate.
Claim 7
Dependent Claim
22 words
A method as recited in claim 2, wherein a portion of said silicon body comprising said needle substantially consists of amorphous silicon.
Claim 8
Dependent Claim
19 words
A method as recited in claim 6, further comprising depositing said silicon body as a film on a substrate.
Claim 9
Dependent Claim
35 words
A method as recited in claim 2, wherein said step of depositing and planarizing comprises: spinning on top of said silicon dioxide a liquid containing a polymer; and curing said liquid to form a glass.
Claim 10
Dependent Claim
15 words
A method as recited in claim 8, wherein said second insulating material comprises spin-on glass.
Claim 11
Dependent Claim
14 words
A method as recited in claim 8, wherein said second insulating material comprises polyimide.
Claim 12
Dependent Claim
14 words
A method as recited in claim 1, wherein said removing step exposes said needle.
Claim 13
Dependent Claim
50 words
A method as recited in claim 11, wherein said directionally depositing step deposits a first portion of said metal over said second insulating material and a second portion of said metal over said needle, said first and second portions being electrically isolated, and further comprising anodically etching said second portion.
Claim 14
Dependent Claim
78 words
A method as recited in claim 1, further comprising the steps of: conformally forming a third insulating material over said directionally deposited metal; depositing a second metal over said third insulating material; depositing and substantially planarizing a planarizing material over said second metal; removing a portion of said planarizing material and a portion of said second metal so as to expose a portion of said third insulating material over said needle; and etching said exposed third insulating material.
Claim 15
Dependent Claim
68 words
A method as recited in claim 1, further comprising the steps of: conformally forming a third insulating material over said directionally deposited metal; depositing and substantially planarizing a planarizing material over said third insulating material; removing a portion of said planarizing material so as to expose a portion of said third insulating material over said needle; etching said third insulating material; and then directionally depositing a second metal.
Claim 16
Dependent Claim
83 words
A method as recited in claim 1, further comprising the steps of: depositing a third insulating material over said directionally deposited metal, said third insulating material overlying a central portion of said needle; depositing and defining a second gate metal over said third insulating material and having an aperture over said central portion of said needle so as to expose a portion of said third insulating material; etching said exposed portion of said third insulating material; and then directionally depositing a second metal.
Claim 17
Independent Claim
184 words
A method of forming a gate electrode self-aligned with an electron field emitter, comprising the steps of: forming a mask over an intended emitter area in a silicon body; isotropically etching said silicon body around said mask; oxidizing said etched silicon body to form a silicon needle forming an electron emitter; conformally depositing a silicon dioxide layer on said silicon needle; depositing and substantially planarizing a dielectric layer over said needle; removing said dielectric layer to a depth such as to expose said silicon needle on which said silicon dioxide layer is conformally deposited; etching said silicon dioxide layer with an etching agent that is less reactive with said dielectric layer than with said silicon dioxide layer and to a depth such that said silicon needle is exposed and said dielectric layer is undercut; and depositing a gate metal on an upper surface of said dielectric layer and an upper portion of said exposed silicon needle, said gate metal deposited on said dielectric layer forming a major portion of a gate electrode, and having an aperture therethrough overlying said needle for passage of electrons.
Claim 18
Independent Claim
184 words
A method of forming a gate electrode self-aligned with an electron field emitter, comprising the steps of: forming a mask over an intended emitter area in a silicon body; isotropically etching said silicon body around said mask; oxidizing said etched silicon body to form a silicon needle forming an electron emitter; conformally depositing a silicon dioxide layer on said silicon needle; depositing and substantially planarizing a dielectric layer over said needle; removing said dielectric layer to a depth such as to expose said silicon needle on which said silicon dioxide layer is conformally deposited; etching said silicon dioxide layer with an etching agent that is less reactive with said dielectric layer than with said silicon dioxide layer and to a depth such that said silicon needle is exposed and said dielectric layer is undercut; and depositing a gate metal on an upper surface of said dielectric layer and an upper portion of said exposed silicon needle, said gate metal deposited on said dielectric layer forming a major portion of a gate electrode, and having an aperture therethrough overlying said needle for passage of electrons.
Claim 19
Dependent Claim
28 words
A method as recited in claim 1, wherein said forming step forms said needle to have a tip disposed over a solid and planar portion of said body.
Claim 20
Dependent Claim
27 words
A method as recited in claim 1, wherein said removing step removes upper portions of all of said second insulating material operatively associated with said electron-emitter structure.
Claim 21
Dependent Claim
21 words
A method as recited in claim 1, wherein said directionally depositing step deposits said metal directly onto said second insulating material.
Claim 22
Dependent Claim
48 words
A method as recited in claim 19, wherein said removing step removes only a vertical portion of said first insulating material overlying a peripheral area surrounding a bottom of said needle but removes an entire vertical extent of said first insulating material overlying a tip of said needle.
Claim 23
Dependent Claim
29 words
A method as recited in claim 1, wherein said forming step comprises forming a blunt needle connected to and rising over said body and oxidatively sharpening said blunt needle.
Claim 24
Dependent Claim
14 words
A method as recited in claim 7, wherein said substrate is a glassy substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-11-29 | 1997-05-31 | 1997-11-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-11-29 | 2001-05-31 | 2001-11-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-11-29 | 2005-05-31 | 2005-11-30 | $7700.00 | Window Closed / Lapsed |