Abstract A method of diminishing a step difference 41 in a multi-layered semiconductor device which comprises determining a location 40 of a step difference 41 on a multi-layered semiconductor device 50 to be formed by utilizing a plurality of conducting layers 35 and a plurality of insulating layers 36 sequentially formed such that the layers are sequentially stacked on a surface of a substrate to form a step difference 41 location 40 on the substrate is disclosed. A conducting layer 3 is deposited on the substrate. A first dummy layer 3C is formed at the step difference location while simultaneously forming a gate electrode 3A and a gate electrode line 3B by performing a mask patterning process. A first insulating layer 5 is deposited on the gate electrode 3A, gate electrode line 3 and the first dummy insulating layer 5A. A second conducting layer 6 is deposited on the first insulating layer 5. A second dummy layer 6B, having a predetermined size to diminish the step difference at the step difference location is formed while simultaneously forming a charge storage electrode 6A by performing a mask patterning process. A second insulating layer 9 is deposited on the resulting structure such that the step difference is diminished to permit overlying layers deposited at the location of the now diminished step difference to be removed without forming a stringer. A semiconductor device which includes the dummy layers is also disclosed.
A method of diminishing a multilayer step difference to prevent the formation of a bridge phenomenon at the multilayer step difference, said method comprising: providing a substrate; determining a location of a step difference on a multilayered semiconductor device to be formed by sequentially forming a plurality of conducting layers and a plurality of insulating layers on the substrate such that the layers are sequentially stacked on a surface of the substrate to form a step difference on the substrate, and where at the location of the step difference a conducting layer to be subsequently deposited is to be etched away; forming a multilayered structure by sequentially performing mask patterning process as a plurality of conducting layers and insulating layers are sequentially stacked and simultaneously forming at least a dummy layer and an insulating layer at the location of the step difference during the sequential formation of the multilayered structure by the mask patterning processes of the plurality of the conducting layers and insulating layers utilized to form the multilayered semiconductor device; and, depositing an insulating layer on the resulting structure including the multilayered structure and the dummy layer, such that the step difference in the resulting structure is diminished to enable a conducting layer to be deposited at the diminished step difference location to be etched away to form a bit line conducting layer without the formation of a stringer, thereby preventing the formation of a bridge phenomenon at the multilayer step difference.
Claim 2
Independent Claim
244 words
A method of diminishing a multilayer step difference to prevent the formation of a bridge phenomenon at the multilayer step difference, said method comprising: providing a substrate; determining a location of a step difference on a multilayered semiconductor device to be formed by sequentially forming a plurality of conducting layers and a plurality of insulating layers on the substrate such that the layers are sequentially stacked on a surface of the substrate to form a step difference on the substrate, and where at the location of the step difference a conducting layer to be subsequently deposited is to be etched away; forming a multilayered structure by sequentially performing mask patterning process as a plurality of conducting layers and insulating layers are sequentially stacked and simultaneously forming at least a dummy layer and an insulating layer at the location of the step difference during the sequential formation of the multilayered structure by the mask patterning processes of the plurality of the conducting layers and insulating layers utilized to form the multilayered semiconductor device; and, depositing an insulating layer on the resulting structure including the multilayered structure and the dummy layer, such that the step difference in the resulting structure is diminished to enable a conducting layer to be deposited at the diminished step difference location to be etched away to form a bit line conducting layer without the formation of a stringer, thereby preventing the formation of a bridge phenomenon at the multilayer step difference.
Claim 3
Dependent Claim
28 words
The method of claim 1 wherein the dummy layer is formed in a stepped shape by selectively varying the width of the plurality of the stacked conducting layers.
Claim 4
Dependent Claim
27 words
The method of claim 1 wherein the dummy layer is formed in pyramidal shape by selectively varying the width of the plurality of the stacked conducting layers.
Claim 5
Dependent Claim
28 words
The method of claim 1 wherein the width and the height of the dummy layer is varied depending upon the width and the height of the multi-layered structure.