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US5292401A
Expired / Lapsed
US
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Method of forming a fine pattern
Assignee: Mitsubishi Electric Corp
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Filing: 1993-04-08
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Granted: 1994-03-08
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Expires: 2013-04-08
Abstract
Abstract A fine pattern forming apparatus includes a stage and an opposed electrode at least one of which is made of a magnetic material. A magnetic field is applied to this stage or opposed electrode to provide a predetermined gap between the stage and the opposed electrode for a fine pattern formation. In consequence, optimum etching conditions (including etching uniformity, etch rate and etching direction) can be assured without generating dust. As a result, damage caused by the plasma can be reduced, and the etch rate can be increased.
Inventors
- 👤 Masahiro Yoneda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 09:45
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0418; H10P72/0421; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32532; H01J37/3255; H01J37/32568; H01J2237/00; H01J2237/02; H01J2237/022; H01J2237/20
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
108 words
A fine pattern forming method comprising the steps of: placing a sample on which a fine pattern is to be formed on a stage in a vacuum chamber; evacuating the interior of said vacuum chamber to achieve a predetermined degree of vacuum; supplying a reactive gas into said vacuum chamber; applying a magnetic field to levitate one of said stage and an opposed electrode located in said vacuum chamber to maintain a predetermined gap between said stage and said opposed electrode; and generating a plasma of said reactive gas within said vacuum chamber by said stage and said opposed electrode, thereby forming a fine pattern in said sample.
Claim 2
Dependent Claim
108 words
A fine pattern forming method comprising the steps of: placing a sample on which a fine pattern is to be formed on a stage in a vacuum chamber; evacuating the interior of said vacuum chamber to achieve a predetermined degree of vacuum; supplying a reactive gas into said vacuum chamber; applying a magnetic field to levitate one of said stage and an opposed electrode located in said vacuum chamber to maintain a predetermined gap between said stage and said opposed electrode; and generating a plasma of said reactive gas within said vacuum chamber by said stage and said opposed electrode, thereby forming a fine pattern in said sample.
Claim 3
Dependent Claim
20 words
A fine pattern forming method according to claim 1 wherein said fine pattern forming method is a plasma etching method.
Claim 4
Dependent Claim
21 words
A fine pattern forming method according to claim 1 wherein said fine pattern forming method is a reactive ion etching method.
Claim 5
Dependent Claim
24 words
A fine pattern forming method according to claim 1 wherein said fine pattern forming method is a magnetic field supported reactive ion etching method.
Claim 6
Dependent Claim
22 words
A fine pattern forming method according to claim 1 wherein said fine pattern forming method is a electron cyclotron plasma etching method.
Claim 7
Dependent Claim
21 words
A fine pattern forming method according to claim 1 wherein said fine pattern forming method is a neutral beam etching method.
Claim 8
Dependent Claim
21 words
A fine pattern forming method according to claim 1 wherein said fine pattern forming method is a light excited etching method.
Claim 9
Dependent Claim
21 words
A fine pattern forming method according to claim 1, wherein said fine pattern forming method is a light supported etching method.
Claim 10
Dependent Claim
20 words
A fine pattern forming method according to claim 1 wherein said fine pattern forming method is a sputter etching method.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-03-07 | 1997-09-06 | 1998-03-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-03-07 | 2001-09-06 | 2002-03-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-03-07 | 2005-09-06 | 2006-03-08 | $7700.00 | Window Closed / Lapsed |