Patent US1069299A successfully refreshed from Google Patents.
US5316640A
Expired / Lapsed
US
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Fabricating method of micro lens
Assignee: Panasonic Holdings Corp
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Filing: 1992-06-09
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Granted: 1994-05-31
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Expires: 2012-06-09
Abstract
Abstract A testing sample is formed in a three-story structure consisting of a photo-resist 13, a silicon dioxide film 12, and a GaAs substrate 11. The pattern of the photo-resist 13 is transferred onto the silicon dioxide film 12 by effecting the photo-resist 13 as a mask. Thus obtained silicon dioxide film mask 14 and the GaAs substrate 11 are processed in compliance with a reactive ion beam etching method; that is, the silicon dioxide film mask 14 and the GaAs substrate 11 are irradiated by the chlorine ion beam 15. The silicon dioxide film and the GaAs substrate are gradually etched by the irradiation of the chlorine ion beam 15. In this case, the etching is differently developed in two regions. In one region which is not covered by the mask, the etching advances uniformly in a normal direction with respect to the GaAs substrate at a certain etching rate. On the other hand, in the other region which is covered by the mask, the silicon dioxide film is gradually etched first of all, and the tapered portion of the silicon dioxide film is completely etched earlier than other portion of the silicon dioxide film. Then, the GaAs surface is exposed to the chlorine ion beam at the portion the silicon dioxide film is removed and, in turn, the GaAs substrate is gradually etched by being directly irradiated by the chlorine beam. And, when the silicon dioxide film mask is completely removed, the micro lens is finally formed on the GaAs substrate.
Inventors
- 👤 Shinichi Wakabayashi
- 👤 Hitomaro Tougou
- 👤 Yukio Toyoda
- 👤 Yoshimasa Ohki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 06:41
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/124; G02B6/1245
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
199 words
A fabricating method of a micro lens comprising: a step of forming a first film on a compound semiconductor substrate, said first film having a slower etching rate than that of said compound semiconductor substrate; a first etching step of forming an etching mask having a tapered surface at the peripheral edge thereof by etching said first film until a vertical cross section of said first film is changed into a substantially trapezoidal shape; and a second etching step of etching both said compound semiconductor substrate and said etching mask by exposing said compound semiconductor substrate and said etching mask to a particle beam irradiation which is substantially normal to surfaces of said compound semiconductor substrate and said etching mask until said etching mask is completely removed by said particle beam, thereby causing said second etching step to progress at different rates for each of said compound semiconductor substrate and said etching mask in such a manner so that said etching mask is etched slowly while said compound semiconductor substrate is etched faster due to the difference in their respective etching rates, resulting in the formation of a semi-spherical micro lens on a surface of said compound semiconductor substrate.
Claim 2
Dependent Claim
199 words
A fabricating method of a micro lens comprising: a step of forming a first film on a compound semiconductor substrate, said first film having a slower etching rate than that of said compound semiconductor substrate; a first etching step of forming an etching mask having a tapered surface at the peripheral edge thereof by etching said first film until a vertical cross section of said first film is changed into a substantially trapezoidal shape; and a second etching step of etching both said compound semiconductor substrate and said etching mask by exposing said compound semiconductor substrate and said etching mask to a particle beam irradiation which is substantially normal to surfaces of said compound semiconductor substrate and said etching mask until said etching mask is completely removed by said particle beam, thereby causing said second etching step to progress at different rates for each of said compound semiconductor substrate and said etching mask in such a manner so that said etching mask is etched slowly while said compound semiconductor substrate is etched faster due to the difference in their respective etching rates, resulting in the formation of a semi-spherical micro lens on a surface of said compound semiconductor substrate.
Claim 3
Dependent Claim
24 words
A fabricating method of a micro lens in accordance with claim 1 in which a silicon dioxide film is used as said first film.
Claim 4
Dependent Claim
27 words
A fabricating method of a micro lens in accordance with claim 1 in which said first etching step is carried out by use of a wet etchant.
Claim 5
Dependent Claim
29 words
A fabricating method of a micro lens in accordance with claim 1 in which said first and second etching steps are carried out by use of chlorine ion beams.
Claim 6
Dependent Claim
37 words
A fabricating method of a micro lens in accordance with claim 4 in which said ion beam used in said second etching step has a larger energy than the ion beam used in said first etching step.
Claim 7
Dependent Claim
105 words
A fabricating method of a micro lens comprising: a step of forming a semi-spherical etching mask on a compound semiconductor substrate by dropping a liquid photoresist on a surface of said compound semiconductor substrate; and a step of etching both said etching mask and said compound semiconductor substrate by exposing said etching mask and said compound semiconductor substrate to a particle beam irradiation which is substantially normal to surfaces of said etching mask and said compound semiconductor substrate until said etching mask is completely removed by said particle beam, so as to form a semi-spherical micro lens on a surface of said compound semiconductor substrate.
Claim 8
Dependent Claim
105 words
A fabricating method of a micro lens comprising: a step of forming a semi-spherical etching mask on a compound semiconductor substrate by dropping a liquid photoresist on a surface of said compound semiconductor substrate; and a step of etching both said etching mask and said compound semiconductor substrate by exposing said etching mask and said compound semiconductor substrate to a particle beam irradiation which is substantially normal to surfaces of said etching mask and said compound semiconductor substrate until said etching mask is completely removed by said particle beam, so as to form a semi-spherical micro lens on a surface of said compound semiconductor substrate.
Claim 9
Dependent Claim
187 words
A fabricating method of a micro lens comprising: a step of forming a first film on a compound semiconductor substrate; a step of forming a semi-spherical etching mask on said first film formed on said compound semiconductor substrate by dropping a liquid photo-resist on a surface of said first film formed on said compound semiconductor substrate; a first etching step of etching both said etching mask and said first film formed on the compound semiconductor substrate by exposing said etching mask and said first film to a particle beam irradiation which is substantially normal to surfaces of said etching mask and said first film until said etching mask is completely removed; and a second etching step of etching both said first film formed on said compound semiconductor substrate and said compound semiconductor substrate by exposing said first film and said compound semiconductor substrate to said particle beam which is substantially normal to surfaces of said first film and said compound semiconductor substrate until said first film is completely removed by said particle beam, thereby forming a semi-spherical micro lens on a surface of said compound semiconductor substrate.
Claim 10
Dependent Claim
187 words
A fabricating method of a micro lens comprising: a step of forming a first film on a compound semiconductor substrate; a step of forming a semi-spherical etching mask on said first film formed on said compound semiconductor substrate by dropping a liquid photo-resist on a surface of said first film formed on said compound semiconductor substrate; a first etching step of etching both said etching mask and said first film formed on the compound semiconductor substrate by exposing said etching mask and said first film to a particle beam irradiation which is substantially normal to surfaces of said etching mask and said first film until said etching mask is completely removed; and a second etching step of etching both said first film formed on said compound semiconductor substrate and said compound semiconductor substrate by exposing said first film and said compound semiconductor substrate to said particle beam which is substantially normal to surfaces of said first film and said compound semiconductor substrate until said first film is completely removed by said particle beam, thereby forming a semi-spherical micro lens on a surface of said compound semiconductor substrate.
Claim 11
Dependent Claim
144 words
A fabricating method of a micro lens comprising: a step of forming an etching mask on a compound semiconductor substrate, said etching mask having a tapered surface formed at a peripheral edge thereof; a step of etching both said compound semiconductor substrate and said etching mask by exposing said compound semiconductor substrate and said etching mask to a particle beam irradiation which is substantially normal to surfaces of said compound semiconductor substrate and said etching mask until said etching mask is completely removed by said particle beam; and a step of varying an acceleration voltage of said particle beam in said etching step, thereby causing said etching step to proceed in such a manner so that said compound semiconductor is etched before said etching mask is etched, resulting in the formation of a semi-spherical micro lens on a surface of said compound semiconductor substrate.
Claim 12
Dependent Claim
144 words
A fabricating method of a micro lens comprising: a step of forming an etching mask on a compound semiconductor substrate, said etching mask having a tapered surface formed at a peripheral edge thereof; a step of etching both said compound semiconductor substrate and said etching mask by exposing said compound semiconductor substrate and said etching mask to a particle beam irradiation which is substantially normal to surfaces of said compound semiconductor substrate and said etching mask until said etching mask is completely removed by said particle beam; and a step of varying an acceleration voltage of said particle beam in said etching step, thereby causing said etching step to proceed in such a manner so that said compound semiconductor is etched before said etching mask is etched, resulting in the formation of a semi-spherical micro lens on a surface of said compound semiconductor substrate.
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