Patent US3084008A successfully refreshed from Google Patents.
Patent US5330072A successfully refreshed from Google Patents.
US5330072A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process and apparatus for electronic control of the transfer and delivery of high purity chemicals
Assignee: Air Liquide Electronics US LP
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Filing: 1992-09-21
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Granted: 1994-07-19
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Expires: 2012-09-21
Abstract
Abstract The present invention provides improved method and apparatus for the transfer and delivery of very high purity chemicals for use in semiconductor production and similar processes. By employing a series of vessels arranged in parallel, a vacuum system to draw chemical from one or more bulk sources into the vessels, and a pressure system to deliver chemical under pressure from the vessels, chemicals can be easily delivered from any bulk source to one or more end-users. The use of a vacuum system to draw chemicals through sealed conduits eliminates the need for pumps which are a source of both maintenance problems and contamination in the system. Multiple vessels provide for a variety of flow options, which include continuous and uniform chemical delivery to the end-users, recirculation and regular filtration during periods of low use, and built-in redundancy to avoid system shut down if there is a component failure. Computer controlled process systems provides system flexibility and full automation.
Inventors
- 👤 Edward T. Ferri, Jr.
- 👤 J. Tobin Geatz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 13:35
CPC Classifications
G; G01; G01F; G01F11/00; B; B67; B67D; B67D7/00; B67D7/02; B67D7/0238; B67D7/0266; B67D7/0272; B01; B01F; B01F35/00; B01F35/20; B01F35/22; B01F35/221; B01F35/2217; B01F35/80; B01F35/88; B01F35/882; B24; B24B; B24B37/00; B24B37/04; B67D7/0277; B67D7/0283; G01F11/28; H; H10; H10P; H10P72/00; H10P72/06; H10P72/0604; H10P72/0612; B01F2101/00; B01F2101/2204; Y; Y10; Y10T; Y10T137/00; Y10T137/2931; Y10T137/3109; Y10T137/3115; Y10T137/3124; Y10T137/3127
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
355 words
A process for control of apparatus for transfer and delivery of chemical from at least one bulk source to at least one end-use station which comprises: providing multiple vessels, each such vessel including valving to control flow of chemical into and out of the vessel; providing at least one conduit for the flow of chemical between the bulk source and each such vessel; providing at least one conduit for the flow of chemical between each such vessel and an end-use station; providing means to transfer chemical at a uniform flow rate from a bulk source to each such vessel; providing means to pressurize each such vessel, including valving to control the flow of pressurized gas into each vessel; providing means to sense level of chemical in each such vessel and to provide a signal therefor; providing means to sense demand for chemical at an end-use station and to provide a signal therefor; providing electronic means to analyze the signals from each of the means to sense the presence of chemical in each vessel and the means to sense demand at an end-use station and to regulate the operation of the valving in response thereto; controlling chemical flow through each vessel through the steps comprising: when low chemical level is sensed in a vessel, the electronic means regulates the valving so as to cause chemical to be transferred from a bulk source into the vessel until a high chemical level is sensed; when a high chemical level is sensed in a vessel, the electronic means regulates the valving so as to cause the vessel to be pressurized; and when a demand is sensed at an end-use station, the electronic means regulates the valving to cause chemical to be delivered under pressure from the vessel to the end-use station; and maintaining uniform flow rate of chemical through the system through the steps comprising: when a low chemical level is sensed in a first vessel delivering chemical, the electronic means regulates the valving to cause chemical to be delivered from a second vessel before the first vessel is completely evacuated, so as to assure no interruption in flow.
Claim 2
Dependent Claim
355 words
A process for control of apparatus for transfer and delivery of chemical from at least one bulk source to at least one end-use station which comprises: providing multiple vessels, each such vessel including valving to control flow of chemical into and out of the vessel; providing at least one conduit for the flow of chemical between the bulk source and each such vessel; providing at least one conduit for the flow of chemical between each such vessel and an end-use station; providing means to transfer chemical at a uniform flow rate from a bulk source to each such vessel; providing means to pressurize each such vessel, including valving to control the flow of pressurized gas into each vessel; providing means to sense level of chemical in each such vessel and to provide a signal therefor; providing means to sense demand for chemical at an end-use station and to provide a signal therefor; providing electronic means to analyze the signals from each of the means to sense the presence of chemical in each vessel and the means to sense demand at an end-use station and to regulate the operation of the valving in response thereto; controlling chemical flow through each vessel through the steps comprising: when low chemical level is sensed in a vessel, the electronic means regulates the valving so as to cause chemical to be transferred from a bulk source into the vessel until a high chemical level is sensed; when a high chemical level is sensed in a vessel, the electronic means regulates the valving so as to cause the vessel to be pressurized; and when a demand is sensed at an end-use station, the electronic means regulates the valving to cause chemical to be delivered under pressure from the vessel to the end-use station; and maintaining uniform flow rate of chemical through the system through the steps comprising: when a low chemical level is sensed in a first vessel delivering chemical, the electronic means regulates the valving to cause chemical to be delivered from a second vessel before the first vessel is completely evacuated, so as to assure no interruption in flow.
Claim 3
Dependent Claim
65 words
The process of claim 1 which further comprises providing at least one conduit for the flow of chemical between each such vessel and the bulk source; and wherein when chemical has been contained in a vessel for a predetermined period of time without demand from an end-use station, the electronic means regulates the valving to cause the chemical to be recirculated to the bulk source.
Claim 4
Dependent Claim
104 words
The process of claim 1 wherein said means to transfer chemical at a uniform flow rate from a bulk source to each such vessel comprises providing means to decompress each such vessel, including valving to control the flow of gas from each vessel; and wherein chemical is transferred from the bulk source to each vessel by decompressing the vessel so as to form a vacuum therein and regulating the valving of the vessel so as to cause chemical to be drawn through the conduit between the bulk source and the vessel motivated by the pressure differential between the decompressed vessel and the bulk source.
Claim 5
Dependent Claim
29 words
The process of claim 1 including providing means responsive to the electronic means to convey information to an operator concerning the status of selected operational criteria of the apparatus.
Claim 6
Dependent Claim
26 words
The process of claim 4 wherein said means to provide information to an operator includes providing a visual display identifying the status of the operational criteria.
Claim 7
Dependent Claim
63 words
The process of claim 1 including supplying continuous chemical delivery by: immediately refilling the first vessel once the second vessel is delivering chemical to the end-use station; and when low chemical level is sensed in the second vessel delivering chemical, the electronic means regulates the valving to cause chemical to be delivered from the first vessel before the second vessel is completely evacuated.
Claim 8
Dependent Claim
33 words
The process of claim 6 including increasing capacity of the system by providing at least one additional vessel which may be alternatively filled and evacuated in conjunction with the first and second vessels.
Claim 9
Dependent Claim
45 words
The process of claim 7 including maintaining system operation in an instance where a component of one of the vessels fails to function by employing the electronic means to regulate the valving so that chemical flow is diverted around the vessel with a failed component.
Claim 10
Dependent Claim
29 words
The process of claim 1 including providing means, in fluid communication with a conduit in the system, to filter the chemical, and filtering the chemical to improve its purity.
Claim 11
Dependent Claim
33 words
The process of claim 2 including providing means, in fluid communication with a conduit in the system, to filter the chemical, and filtering the chemical to improve its purity when it is recirculated.
Claim 12
Dependent Claim
34 words
The process of claim 2 including maintaining at least one vessel filled and pressurized to deliver chemical to an end-use station upon demand while chemical from any of the other vessels is being recirculated.
Claim 13
Dependent Claim
32 words
The process of claim 11 including periodically alternating the vessel which is filled and pressurized to deliver chemical upon demand so as to assure a homogenous mixture of chemical throughout the system.
Claim 14
Dependent Claim
100 words
The process of claim 1 wherein said means to transfer chemical at a uniform flow rate from a bulk source to each such vessel comprises providing the bulk source at an elevation above that of the vessels so as to create a pressure differential between the bulk source and the vessels; and wherein chemical is transferred from the bulk source to each vessel by regulating the valving of the vessel so as to cause chemical to be driven through the conduit between the bulk source and the vessel motivated by the pressure differential between the vessel and the bulk source.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-07-18 | 1998-01-17 | 1998-07-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-07-18 | 2002-01-17 | 2002-07-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-07-18 | 2006-01-17 | 2006-07-19 | $7700.00 | Window Closed / Lapsed |