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US5330968A
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Laser ablation process for preparing oxide superconducting thin films
Assignee: Sumitomo Electric Industries Ltd
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Filing: 1992-06-12
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Granted: 1994-07-19
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Expires: 2012-06-12
Abstract
Abstract A laser ablation process for preparing an oxide superconducting thin film characterized in that an electrode is arranged between a substrate and a target. While the film is formed by laser ablation, a bias voltage of 75-100 V is applied between the electrode and the target.
Inventors
- 👤 Tatsuoki Nagaishi
- 👤 Nobuhiro Ota
- 👤 Naoji Fujimori
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 10:08
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0521; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/73; Y10S505/732
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
94 words
In a laser ablation process for preparing a compound copper-oxide superconductor film on a substrate, the improvement comprising arranging an electrode between a substrate and a target, wherein said electrode is of a shape selected from the group consisting of: a planar shape which extends across an area between the substrate and the target and a cylindrical shape; and applying a bias voltage having a potential which is 75 to 100 volts higher than a potential of said target between the electrode and the target while the film is formed by the laser ablation.
Claim 2
Dependent Claim
94 words
In a laser ablation process for preparing a compound copper-oxide superconductor film on a substrate, the improvement comprising arranging an electrode between a substrate and a target, wherein said electrode is of a shape selected from the group consisting of: a planar shape which extends across an area between the substrate and the target and a cylindrical shape; and applying a bias voltage having a potential which is 75 to 100 volts higher than a potential of said target between the electrode and the target while the film is formed by the laser ablation.
Claim 3
Dependent Claim
28 words
A laser ablation process claimed in claim 1 wherein the electrode is arranged at a distance selected in a range of 1 to 20 mm from the substrate.
Claim 4
Dependent Claim
15 words
A laser ablation process claimed in claim 1 wherein the electrode is a metal net.
Claim 5
Dependent Claim
23 words
A laser ablation process claimed in claim 3 wherein the metal is Pt, Au or an alloy which contains either Pt or Au.
Claim 6
Dependent Claim
21 words
A laser ablation process claimed in claim 1 wherein substrate temperature is selected in a range of 400° to 650° C.
Claim 7
Dependent Claim
39 words
A laser ablation process claimed in claim 1 wherein the compound copper-oxide superconductor is selected from the group consisting of a Y-Ba-Cu-O compound oxide superconductor material, a Bi-Sr-Ca-Cu-O compound oxide superconductor material, and a Tl-Ba-Ca-Cu-O compound oxide superconductor material.
Claim 8
Dependent Claim
36 words
A laser ablation process claimed in claim 1 wherein the substrate is a material selected from the group consisting of a MgO (100) substrate, a SrTiO 3 (100) substrate and an yttrium stabilized zirconia (YSZ) substrate.
Claim 9
Dependent Claim
24 words
A laser ablation process claimed in claim 1 wherein gas pressure during laser ablation is selected in a range of 100 to 800 mTorr.
Claim 10
Dependent Claim
33 words
A laser ablation process claimed in claim 1 wherein laser power density of a laser-beam which is directed to the target is selected in a range of 0.5 to 5.0 Joule/cm 2 .
Claim 11
Dependent Claim
27 words
A laser ablation process claimed in claim 1 wherein a distance between the substrate and the target is selected in a range of 30 to 100 mm.
References Cited (Backward Citations)
EP0518772B1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-07-18 | 1998-01-17 | 1998-07-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-07-18 | 2002-01-17 | 2002-07-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-07-18 | 2006-01-17 | 2006-07-19 | $7700.00 | Window Closed / Lapsed |