Patent US5331853A successfully refreshed from Google Patents.
US5331853A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Micromachined rate and acceleration sensor
Assignee: Honeywell International Inc
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Filing: 1992-01-21
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Granted: 1994-07-26
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Expires: 2012-01-21
Abstract
Abstract A sensor (10) is disclosed for measuring the acceleration and angular rotation rate of a moving body and is micromachined from a silicon substrate (16). First and second accelerometers (32a and b) are micromachined from the silicon substrate (16), each having a force sensing axis (38) and producing an output signal of the acceleration of the moving body along its force sensing axis (38). The first and second accelerometers (32a and b) are mounted within the substrate (16) to be moved along a vibration axis (41). The first and second accelerometers (32a and b) are vibrated or dithered to increase the Coriolis component of the output signals from the first and second accelerometers (32a and b). A sinusoidal drive signal of a predetermined frequency is applied to a conductive path (92) disposed on each of the accelerometers. Further, magnetic flux is directed to cross each of the conductive paths (92), whereby the interaction of the magnetic flux and of the drive signal passing therethrough causes the desired dithering motion. A link (72) is formed within the silicon substrate (16) and connected to each of the accelerometers (32a and b), whereby motion imparted to one results in a like, but opposite motion applied to the other accelerometer (32). Further, a unitary magnet (20) and its associated flux path assembly direct and focus the magnetic flux through the first and second accelerometers (32a and b) formed within the silicon substrate (16).
Inventors
- 👤 II Rand H. Hulsing
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 21:42
CPC Classifications
G; G01; G01C; G01C19/00; G01C19/56; G01C19/5719; F; F02; F02G; F02G1/00; F02G1/04; F02G1/043; F02G1/044; F02G1/0445; F16; F16L; F16L37/00; F16L37/24; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/0802; G01P15/097; G01P15/18; G01P2015/0805; G01P2015/0822; G01P2015/0825; G01P2015/0828
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
158 words
A substrate for use in an acceleration and angular rate sensor comprising: first and second accelerometers formed in said substrate, said first and second accelerometers having generally parallel force sensing axes; a dither frame formed in said substrate; mounting means formed in said substrate for mounting said first and second accelerometers to said dither frame, said mounting means adapted to allow said first and second accelerometers to dither along a dither axis, said dither axis being perpendicular to said force sensing axes of said first and second accelerometers; a linking means interconnecting said first and second accelerometers for allowing said first and second accelerometers to dither at the same frequency; and said linking means further providing means for imparting a reaction force on said first accelerometer along said dither axis when an action force is imparted on said second accelerometer along said dither axis, said action and reaction forces being of substantially equal magnitude and being oppositely directed.
Claim 2
Dependent Claim
158 words
A substrate for use in an acceleration and angular rate sensor comprising: first and second accelerometers formed in said substrate, said first and second accelerometers having generally parallel force sensing axes; a dither frame formed in said substrate; mounting means formed in said substrate for mounting said first and second accelerometers to said dither frame, said mounting means adapted to allow said first and second accelerometers to dither along a dither axis, said dither axis being perpendicular to said force sensing axes of said first and second accelerometers; a linking means interconnecting said first and second accelerometers for allowing said first and second accelerometers to dither at the same frequency; and said linking means further providing means for imparting a reaction force on said first accelerometer along said dither axis when an action force is imparted on said second accelerometer along said dither axis, said action and reaction forces being of substantially equal magnitude and being oppositely directed.
Claim 3
Dependent Claim
20 words
A substrate as claimed in claim 3, wherein said linking means is interiorly disposed between said first and second accelerometers.
Claim 4
Dependent Claim
48 words
A substrate as claimed in claim 1 and further comprising torsion inhibiting means connecting said first and second accelerometers to said ditherframe to place torsional modes of movement of said first and second accelerometers at a frequency significantly above the natural frequency of said first and second accelerometers,
Claim 5
Dependent Claim
32 words
A substrate as claimed in claim 1 wherein said mounting means further provides means for allowing said first and second accelerometers to dither along said dither axis in a pure linear manner,
Claim 6
Dependent Claim
37 words
A substrate as claimed in claim 1 wherein said linking means comprises a pair of exteriorly disposed links interconnecting said first and second accelerometers for allowing said first and second accelerometers to dither at the same frequency,
Claim 7
Dependent Claim
192 words
A generally planar monolithic substrate for use in an acceleration and angular rate sensor comprising: first and second accelerometers formed in said substrate, said first and second accelerometers having generally parallel linear force sensing axes for measuring linear acceleration therealong, each of said first and second accelerometers having a proof mass, a support frame, and at least one flexure connecting said proof mass to said support frame; a dither frame formed in said substrate; a first pair of substantially parallel mounting flexures formed in said substrate and connecting said support frame of said first accelerometer to a first side of said dither frame, said first pair of substantially parallel mounting flexures adapted to allow said first accelerometer to dither along a first dither axis, said first dither axis being perpendicular to said force sensing axes of said first and second accelerometers; and a second pair of substantially parallel mounting flexures formed in said substrate and connecting said support frame of said second accelerometer to a second side of said dither frame, said second pair of substantially parallel mounting flexures adapted to allow said second accelerometer to dither along a second dither axis.
Claim 8
Dependent Claim
192 words
A generally planar monolithic substrate for use in an acceleration and angular rate sensor comprising: first and second accelerometers formed in said substrate, said first and second accelerometers having generally parallel linear force sensing axes for measuring linear acceleration therealong, each of said first and second accelerometers having a proof mass, a support frame, and at least one flexure connecting said proof mass to said support frame; a dither frame formed in said substrate; a first pair of substantially parallel mounting flexures formed in said substrate and connecting said support frame of said first accelerometer to a first side of said dither frame, said first pair of substantially parallel mounting flexures adapted to allow said first accelerometer to dither along a first dither axis, said first dither axis being perpendicular to said force sensing axes of said first and second accelerometers; and a second pair of substantially parallel mounting flexures formed in said substrate and connecting said support frame of said second accelerometer to a second side of said dither frame, said second pair of substantially parallel mounting flexures adapted to allow said second accelerometer to dither along a second dither axis.
Claim 9
Dependent Claim
15 words
A substrate as claimed in claim 6 wherein said first and second dither axes coincide,
Claim 10
Dependent Claim
35 words
A substrate as claimed in claim 7 and further comprising linking means formed in said substrate interconnecting said first and second accelerometers for allowing said first and second accelerometers to dither at the same frequency.
Claim 11
Dependent Claim
55 words
A substrate as claimed in claim 8 wherein said linking means further provides means for imparting a reaction force on said first accelerometer along said dither axis when an action force is imparted on said second accelerometer along said dither axis, said action and reaction forces being of substantially equal magnitude and being oppositely directed,
Claim 12
Dependent Claim
20 words
A substrate as claimed in claim 8 wherein said linking means is interiorly disposed between said first and second accelerometers.
Claim 13
Dependent Claim
65 words
A substrate as claimed in claim 8 wherein said linking means comprises: a link; a pivot flexure connecting said link to said dither frame, said pivot flexure allowing said link to pivot about a pivot point; a first flexure connecting a first end of said link to said first accelerometer; and a second flexure connecting a second end of said link to said second accelerometer.
Claim 14
Dependent Claim
56 words
A substrate as claimed in claim 11 wherein said link comprises: a U-shaped member; and a pair of lever arms extending from said U-shaped member, said first flexure being connected to one lever arm of said pair of lever arms, said second flexure being connected to the other lever arm of said pair of lever arms.
Claim 15
Dependent Claim
76 words
A substrate as claimed in claim 8 wherein said linking means comprises: a link having a mid-portion with a circular arc flexure, said link further having first and second oppositely extending arms extending from said mid-portion; a fulcrum connecting said circular arc flexure to said dither frame; a first flexure connecting said first arm of said link to said first accelerometer; and a second flexure connecting said second arm of said link to said second accelerometer.
Claim 16
Dependent Claim
28 words
A substrate as claimed in claim 6 wherein said first and second pairs of flexures connect said first and second accelerometers to opposite sides of said dither frame.
Claim 17
Dependent Claim
41 words
A substrate as claimed in claim 6 and further comprising a pair of exteriorly disposed linking means formed in said substrate and interconnecting said first and second accelerometers to allow said first and second accelerometers to dither at the same frequency.
Claim 18
Dependent Claim
61 words
A substrate as claimed in claim 15 wherein said pair of exteriorly disposed linking means further provides means for imparting a reaction force on said first accelerometer along said first dither axis when an action force is imparted on said second accelerometer along said second dither axis, said action and reaction forces being of substantially equal magnitude and being oppositely directed.
Claim 19
Dependent Claim
69 words
A substrate as claimed in claim 16 wherein each of said exteriorly disposed linking means comprises: a link; a pivot flexure connecting said link to said dither frame, said pivot flexure allowing said link to pivot about a pivot point; a first flexure connecting a first end of said link to said first accelerometer; and a second flexure connecting a second end of said link to said second accelerometer.
Claim 20
Dependent Claim
56 words
A substrate as claimed in claim 17 wherein said link comprises: a U-shaped member; and a pair of lever arms extending from said U-shaped member, said first flexure being connected to one lever arm of said pair of lever arms, said second flexure being connected to the other lever arm of said pair of lever arms.
Claim 21
Dependent Claim
49 words
A substrate as claimed in claim 7 and further comprising torsion inhibiting means connecting said first and second accelerometers to said dither frame for placing torsional modes of movement of said first and second accelerometers at a frequency significantly above the natural frequency of said first and second accelerometers.
Claim 22
Dependent Claim
56 words
A substrate as claimed in claim 19 wherein said torsion inhibiting means comprises: a first L-shaped flexure extending between said support frame of said first accelerometer and said second side of said dither frame; and a second L-shaped flexure extending between said support frame of said second accelerometer and said first side of said dither frame.
Claim 23
Dependent Claim
44 words
A substrate as claimed in claim 20 wherein said first L-shaped flexure extends from an exterior side of said support frame of said first accelerometer and wherein said second L-shaped flexure extends from an exterior side of said support frame of said second accelerometer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-07-25 | 1998-01-24 | 1998-07-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-07-25 | 2002-01-24 | 2002-07-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-07-25 | 2006-01-24 | 2006-07-26 | $7700.00 | Window Closed / Lapsed |