Patent US5337150A successfully refreshed from Google Patents.
US5337150A
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Apparatus and method for performing thin film layer thickness metrology using a correlation reflectometer
Assignee: Integrated Process Equipment Corp
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Filing: 1992-08-04
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Granted: 1994-08-09
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Expires: 2012-08-04
Abstract
Abstract An apparatus (10) that measures the thickness of a thin film layer of a wafer (12) is described. The thickness of the thin film layer is measured by irradiating a reference wafer (22) with a beam (21) of broadband radiation. The reference wafer (22) has a layer structure similar to that of the wafer (12) undergoing measurement, whereby the thin film layer of the reference wafer (22) that corresponds to the thin film layer to be measured is varied over a specific range of known thicknesses. Thus, the incident beam (21) of broadband radiation is reflected from the reference wafer (22) having a unique spectral signature that corresponds to one of these known thicknesses. A reflected beam (23, 25, 27) of unique spectral radiation is projected onto the wafer (12) undergoing measurement, where it is reflected to produce a beam (29) of unique spectral radiation having a characteristic that is indicative of the thickness of the thin film layer to be measured. The characteristic of the beam (29) of unique spectral radiation is captured by a charge coupled device camera (34), and a computer (36) correlates this captured characteristic with one of the known thin film layer thicknesses of the reference wafer (22) to provide an output that corresponds to the thickness of the thin film layer whose thickness is desired to be measured.
Inventors
- 👤 Peter B. Mumola
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 23:52
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0625
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
295 words
A method for measuring the thickness of a test layer of material having a front and a rear surface, wherein said material of said layer has a property that allows radiation to be transmitted therethrough, said method comprising the steps of: providing a reference layer of material having a front and a rear surface, wherein said material of said reference layer has a property like that of said layer of material undergoing measurement, wherein the thickness of said reference layer of material varies over a specific range of known thicknesses, and wherein the thickness of said layer of material undergoing measurement falls within said specific range of knows thickness; irradiating said front surface of said reference layer of material with collimated broadband radiation, wherein said collimated broadband radiation is reflected from said front and rear surfaces of said reference layer of material to provide reflected reference radiation having a unique spectral signature that corresponds to the thickness of said reference layer of material; receiving and collimating said reflected reference radiation to provide collimated reference radiation; projecting said collimated reference radiation onto said front surface of said layer of material undergoing measurement, wherein said reference radiation is reflected from said front and rear surfaces of said test layer of material undergoing measurement to provide reflected test radiation having a characteristic that is indicative of the thickness of said layer of material undergoing measurement; receiving said reflected test radiation having said thickness indicative characteristic for a full aperture image of said test layer; detecting said thickness indicative characteristic correlating said thickness indicative characteristic with one of said thicknesses in said specific range of known thicknesses of said reference layer of material; and providing an output that corresponds to the thickness of said layer of material undergoing measurement.
Claim 2
Independent Claim
295 words
A method for measuring the thickness of a test layer of material having a front and a rear surface, wherein said material of said layer has a property that allows radiation to be transmitted therethrough, said method comprising the steps of: providing a reference layer of material having a front and a rear surface, wherein said material of said reference layer has a property like that of said layer of material undergoing measurement, wherein the thickness of said reference layer of material varies over a specific range of known thicknesses, and wherein the thickness of said layer of material undergoing measurement falls within said specific range of knows thickness; irradiating said front surface of said reference layer of material with collimated broadband radiation, wherein said collimated broadband radiation is reflected from said front and rear surfaces of said reference layer of material to provide reflected reference radiation having a unique spectral signature that corresponds to the thickness of said reference layer of material; receiving and collimating said reflected reference radiation to provide collimated reference radiation; projecting said collimated reference radiation onto said front surface of said layer of material undergoing measurement, wherein said reference radiation is reflected from said front and rear surfaces of said test layer of material undergoing measurement to provide reflected test radiation having a characteristic that is indicative of the thickness of said layer of material undergoing measurement; receiving said reflected test radiation having said thickness indicative characteristic for a full aperture image of said test layer; detecting said thickness indicative characteristic correlating said thickness indicative characteristic with one of said thicknesses in said specific range of known thicknesses of said reference layer of material; and providing an output that corresponds to the thickness of said layer of material undergoing measurement.
Claim 3
Dependent Claim
85 words
The method as defined in Claim 1, wherein said step of detecting said thickness indicative characteristic comprises detecting said characteristic using a charge coupled device camera, wherein said charge coupled device camera provides an output signal that corresponds to said characteristic, and wherein said method includes the additional steps of: digitizing and output signal provided by said charge coupled device camera; and correlating said digitized output signal with one of said thickness in said specific range of known thickness of said reference layer of material.
Claim 4
Dependent Claim
51 words
The method as defined in claim 1 wherein said step of irradiating includes the steps of: providing a source of broadband radiation; and using a fiber optic guide, collimator lens, and a beamsplitter arrangement to receive the broadband radiation and direct the collimated broadband radiation onto said reference layer of material.
Claim 5
Dependent Claim
33 words
The method as defined in claim 1 wherein said step of receiving reflected test radiation includes the step of providing a lens and beamsplitter arrangement to project test radiation onto a detector array.
Claim 6
Dependent Claim
35 words
The method as defined in claim 1 wherein said step of detecting said characteristic includes the step of displaying a test image of the intensity of the reflected test radiation for the entire test layer.
Claim 7
Dependent Claim
37 words
The method as defined in claim 1 wherein said steps of correlating and providing an output includes the steps of: digitizing said test image; and correlating said digitized test image to the thickness of the test layer.
Claim 8
Dependent Claim
19 words
The method as defined in claim 1 wherein said receiving said reflected test radiation includes providing a detector array.
Claim 9
Dependent Claim
33 words
A method as defined in claim 1 wherein said receiving and collimating said reflected reference radiation and said projecting said collimated reference radiation includes the step of using a beamsplitter and lens arrangement.
Claim 10
Independent Claim
112 words
An apparatus for measuring the thickness of a test layer of material, said apparatus comprising: means for irradiating a reference layer with collimated broadband radiation to provide reflected reference radiation; means for receiving and collimating said reflected reference radiation to provide collimated reference radiation; means for projecting collimated reference radiation onto said test layer to provide reflected test radiation; means for receiving said test radiation to provide a full aperture image of said test layer and for providing signals indicative of the intensity of reflected test radiation over the entire test layer; and means for correlating said signals to the thickness of said reference layer to determine the thickness of said layer.
Claim 11
Independent Claim
112 words
An apparatus for measuring the thickness of a test layer of material, said apparatus comprising: means for irradiating a reference layer with collimated broadband radiation to provide reflected reference radiation; means for receiving and collimating said reflected reference radiation to provide collimated reference radiation; means for projecting collimated reference radiation onto said test layer to provide reflected test radiation; means for receiving said test radiation to provide a full aperture image of said test layer and for providing signals indicative of the intensity of reflected test radiation over the entire test layer; and means for correlating said signals to the thickness of said reference layer to determine the thickness of said layer.
Claim 12
Dependent Claim
75 words
The apparatus as defined in claim 9, wherein said means for irradiating comprises: means for providing a source of broadband radiation; a fiber optic light guide for carrying said broadband radiation from said source; a collimator lens for collimating said broadband radiation after it has been carried over said fiber optic light guide; and a thin plate beamsplitter for directing a portion of said collimated broadband radiation onto said front surface of said reference layer.
Claim 13
Dependent Claim
18 words
The apparatus as defined in claim 9, wherein said means for projecting comprises a lens and beamsplitter arrangement.
Claim 14
Dependent Claim
71 words
The apparatus as defined in claim 9, wherein said test layer undergoing measurement is one of a plurality of thin film layers formed on a substrate, wherein said reference layer is also one of a plurality of thin film layers formed on a substrate, and wherein the layer structure and substrate of said test layer undergoing measurement are similar to that of the layer structure and substrate of said reference layer.
Claim 15
Dependent Claim
36 words
The apparatus as defined in claim 12, wherein said material of said test layer to be measured and said material of said reference layer are comprised of silicon, and wherein said substrates are comprised of silicon.
Claim 16
Dependent Claim
37 words
The apparatus as defined in claim 9 further comprising: a display for receiving the intensity signals to provide a test image indicative of the intensity of reflected test radiation and thereby the thickness, of the test layer.
Claim 17
Independent Claim
26 words
The apparatus as defined in claims 14 wherein said means for receiving said test radiation and providing intensity signals and said display includes a CCD camera.
Claim 18
Dependent Claim
37 words
The apparatus as defined in claim 9 further comprising: means for digitizing said signals or test image to provide digitized information; and a computer for correlating the digitized test information to the thickness of the test layer.
Claim 19
Dependent Claim
21 words
The apparatus as defined in claim 9 wherein said means for receiving reflected test radiation includes a beamsplitter and lens arrangement.
Claim 20
Dependent Claim
19 words
The apparatus as defined in claim 9 wherein said means for receiving said test radiation includes a detector array.
References Cited (Backward Citations)
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| 3.5 Years (Year 4) | 1997-08-08 | 1998-02-07 | 1998-08-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-08-08 | 2002-02-07 | 2002-08-09 | $3760.00 | Window Closed / Lapsed |
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