US5360764A
Expired / Lapsed
US
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Method of fabricating laser controlled nanolithography
Assignee: United States, AS REPRESENTED BY NATIONAL INSTITUTES OF STANDARDS AND TECHNOLOGY
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Filing: 1993-02-16
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Granted: 1994-11-01
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Expires: 2013-02-16
Abstract
Abstract A method of depositing atoms on a substrate in which a beam of atoms is optically focused utilizing a laser beam. The laser beam is used to form a standing wave above the surface of a substrate. As the beam of atoms is passed through the standing wave, the atoms are focused by dipole force interactions. The deposition of atoms is focused into parallel lines which coincide with the minima of the standing wave. The use of two standing waves allows for focusing the atoms into discrete dots or spots. Relative movement between the substrate and the standing wave(s) allows for depositing atoms in a scanning manner. Various nanostructures can be made by the disclosed method.
Inventors
- 👤 Robert J. Celotta
- 👤 Jabez J. McClelland
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 00:45
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/68; G03F1/76; G03F1/78; C; C23; C23C; C23C14/00; C23C14/04; C23C14/048; C30; C30B; C30B23/00; C30B23/002; G03F7/00; G03F7/0005; G03F7/001; G03F7/20; G03F7/2041; G03F7/2043; H; H10; H10P; H10P50/00; H10P50/69; H10P50/691; H10P50/693; H10P50/695; H10P76/00; H10P76/40; H10P76/408; H10P76/4085
Claims Analysis
Total Claims: 57
Claim 1
Independent Claim
35 words
In a process of molecular beam epitaxy wherein a flow of atoms is directed toward a surface for deposition thereon, the improvement which comprises, optically focusing and scanning said flow of atoms over said surface.
Claim 2
Dependent Claim
35 words
In a process of molecular beam epitaxy wherein a flow of atoms is directed toward a surface for deposition thereon, the improvement which comprises, optically focusing and scanning said flow of atoms over said surface.
Claim 3
Independent Claim
78 words
A method of depositing atoms on a substrate which comprises: providing a substrate having a surface; forming a beam of chromium atoms; collimating said beam of chromium atoms to form a collimated beam of atoms; providing at least one laser beam above said surface of said substrate for optically focusing said collimated beam of chromium atoms; and directing said collimated beam of chromium atoms through said at least one laser beam and onto said surface of said substrate.
Claim 4
Independent Claim
78 words
A method of depositing atoms on a substrate which comprises: providing a substrate having a surface; forming a beam of chromium atoms; collimating said beam of chromium atoms to form a collimated beam of atoms; providing at least one laser beam above said surface of said substrate for optically focusing said collimated beam of chromium atoms; and directing said collimated beam of chromium atoms through said at least one laser beam and onto said surface of said substrate.
Claim 5
Dependent Claim
25 words
A method of depositing atoms on a substrate according to claim 2, wherein each of said at least one laser beams comprise a standing wave.
Claim 6
Dependent Claim
23 words
A method of depositing atoms on a substrate according to claim 3, wherein said at least one laser beam comprises two standing waves.
Claim 7
Dependent Claim
22 words
A method of depositing atoms on a substrate according to claim 4, wherein said two standing waves are orthogonal to each other.
Claim 8
Dependent Claim
42 words
A method of depositing atoms on a substrate according to claim 2, wherein said beam of chromium atoms is both collimated and laser cooled prior to being directed through said at least one laser beam and onto said surface of said substrate.
Claim 9
Dependent Claim
37 words
A method of depositing atoms on a substrate according to claim 2, wherein said chromium atoms are deposited onto said surface of said substrate to form a primer layer which is subsequently covered with an additional layer.
Claim 10
Dependent Claim
38 words
A method of depositing atoms on a substrate according to claim 2, wherein said chromium atoms are deposited onto said surface of said substrate in a pattern which is used as a mask in a subsequent process step.
Claim 11
Dependent Claim
31 words
A method of depositing atoms on a substrate according to claim 8, wherein said subsequent process step comprises etching portions of said substrate which are not covered by said chromium atoms.
Claim 12
Dependent Claim
18 words
A method of depositing atoms on a substrate according to claim 9, wherein said etching comprises plasma etching.
Claim 13
Dependent Claim
23 words
A method of depositing atoms on a substrate according to claim 2, wherein said chromium atoms provide a doped region on said substrate.
Claim 14
Dependent Claim
29 words
A method of depositing atoms on a substrate according to claim 2, wherein said substrate is moved with respect to said at least one laser beam during the deposition.
Claim 15
Dependent Claim
29 words
A method of depositing atoms on a substrate according to claim 2, wherein said at least one laser beam is moved with respect to said substrate during the deposition.
Claim 16
Dependent Claim
37 words
A method of depositing atoms on a substrate according to claim 2, wherein at least one filter having at least one aperture is provided between said collimated beam of atoms and said at least one laser beam.
Claim 17
Dependent Claim
23 words
A method of depositing atoms on a substrate according to claim 14, wherein said at least one aperture comprises a plurality of apertures.
Claim 18
Dependent Claim
53 words
A method of depositing atoms on a substrate according to claim 13, wherein at least one filter having at least one aperture is provided between said collimated beam of atoms and said at least one standing wave and said at least one filter is moved together with said at least one laser beam.
Claim 19
Dependent Claim
23 words
A method of depositing atoms on a substrate according to claim 16, wherein said at least one aperture comprises a plurality of apertures.
Claim 20
Dependent Claim
21 words
A method of depositing atoms on a substrate according to claim 17, wherein said at least one filter comprises two filters.
Claim 21
Dependent Claim
22 words
A method of depositing atoms on a substrate according to claim 2, wherein said deposited atoms comprise a chromium oxide magnetic material.
Claim 22
Dependent Claim
23 words
A method of depositing atoms on a substrate according to claim 19, wherein said chromium oxide magnetic material is deposited in a pattern.
Claim 23
Dependent Claim
20 words
A method of depositing atoms on a substrate according to claim 20, wherein said pattern comprises a series of dots.
Claim 24
Dependent Claim
18 words
A method of depositing atoms on a substrate according to claim 20, wherein said pattern comprises a strip.
Claim 25
Dependent Claim
27 words
A method of depositing atoms on a substrate according to claim 19, wherein said chromium oxide magnetic material is formed by co-depositing chromium atoms and oxygen atoms.
Claim 26
Dependent Claim
31 words
A method of depositing atoms on a substrate according to claim 19, wherein said chromium oxide magnetic material is formed by depositing chromium atoms and thereafter oxidizing said deposited chromium atoms.
Claim 27
Dependent Claim
26 words
A method of depositing atoms on a substrate according to claim 2, wherein an additional atomic or molecular species is added together with said chromium atoms.
Claim 28
Dependent Claim
30 words
A method of depositing atoms on a substrate according to claim 25, wherein said additional atomic or molecular species is not optically focused by said at least one standing wave.
Claim 29
Dependent Claim
27 words
A method of depositing atoms on a substrate according to claim 2, wherein said deposition of atoms is observed during the deposition utilizing a scanning electron microscope.
Claim 30
Independent Claim
95 words
A method of depositing atoms on a substrate which comprises: providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; and directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate so as to form a mask pattern on said surface of said substrate which is used in a subsequent process step.
Claim 31
Independent Claim
95 words
A method of depositing atoms on a substrate which comprises: providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; and directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate so as to form a mask pattern on said surface of said substrate which is used in a subsequent process step.
Claim 32
Dependent Claim
31 words
A method of depositing atoms on a substrate according to claim 28, wherein said subsequent process step comprises etching portions of said substrate which are not covered by said mask pattern.
Claim 33
Dependent Claim
18 words
A method of depositing atoms on a substrate according to claim 29, wherein said etching comprises plasma etching.
Claim 34
Independent Claim
82 words
A method of depositing atoms on a substrate which comprises: providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; and directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate to form a doped region on said substrate.
Claim 35
Independent Claim
82 words
A method of depositing atoms on a substrate which comprises: providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; and directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate to form a doped region on said substrate.
Claim 36
Independent Claim
91 words
A method of depositing atoms on a substrate which comprises: providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate; and moving one of said substrate or said at least one standing wave with respect to the other.
Claim 37
Independent Claim
91 words
A method of depositing atoms on a substrate which comprises: providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate; and moving one of said substrate or said at least one standing wave with respect to the other.
Claim 38
Independent Claim
103 words
A method of depositing atoms on a substrate which comprises: providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; providing at least one filter having at least one aperture between said collimated beams of atoms and said at least one standing wave; and directing said collimated beam of atoms through said at least one filter and said at least one standing wave and onto said surface of said substrate.
Claim 39
Independent Claim
103 words
A method of depositing atoms on a substrate which comprises: providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; providing at least one filter having at least one aperture between said collimated beams of atoms and said at least one standing wave; and directing said collimated beam of atoms through said at least one filter and said at least one standing wave and onto said surface of said substrate.
Claim 40
Dependent Claim
23 words
A method of depositing atoms on a substrate according to claim 33, wherein said at least one aperture comprises a plurality of apertures.
Claim 41
Dependent Claim
21 words
A method of depositing atoms on a substrate according to claim 33, wherein said at least one filter comprises two filters.
Claim 42
Independent Claim
86 words
A method of depositing atoms on a substrate which comprises: providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; and directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate, whereby said atoms are deposited as a magnetic material on said substrate.
Claim 43
Independent Claim
86 words
A method of depositing atoms on a substrate which comprises: providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; and directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate, whereby said atoms are deposited as a magnetic material on said substrate.
Claim 44
Dependent Claim
26 words
A method of depositing atoms on a substrate according to claim 36, wherein said magnetic material is deposited in an array of dots on said substrate.
Claim 45
Dependent Claim
24 words
A method of depositing atoms on a substrate according to claim 36, wherein said magnetic material is deposited in a strip on said substrate.
Claim 46
Dependent Claim
33 words
A method of depositing atoms on a substrate according to claim 36, wherein said magnetic material is selected from the group consisting of ferro magnetic materials, ferri magnetic materials, and antiferro magnetic materials.
Claim 47
Independent Claim
90 words
A method of forming a calibration standard which comprises: providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; and directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate so as to deposit said atoms in an absolute pattern for use as a microscopic calibration standard
Claim 48
Independent Claim
90 words
A method of forming a calibration standard which comprises: providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; and directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate so as to deposit said atoms in an absolute pattern for use as a microscopic calibration standard
Claim 49
Independent Claim
81 words
A method of forming an optical grating which comprises: providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; and directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate so as to form an optical grating structure.
Claim 50
Independent Claim
81 words
A method of forming an optical grating which comprises: providing a substrate having a surface; forming a beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; and directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate so as to form an optical grating structure.
Claim 51
Dependent Claim
33 words
A method of forming an optical grating according to claim 41, wherein said substrate is moved with respect to said at least one standing wave during the formation of said optical grating structure.
Claim 52
Dependent Claim
32 words
A method of forming an optical grating according to claim 41, wherein said at least standing wave is moved with respect to said substrate during the formation of said optical grating structure.
Claim 53
Independent Claim
87 words
A method of forming probe structures on a substrate which comprises: providing a substrate having a surface; forming beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; and directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate and thereby form probe structures which extend from said surface of said substrate.
Claim 54
Independent Claim
87 words
A method of forming probe structures on a substrate which comprises: providing a substrate having a surface; forming beam of atoms; collimating said beam of atoms to form a collimated beam of atoms; providing at least one standing wave above said surface of said substrate for optically focusing said collimated beam of atoms; and directing said collimated beam of atoms through said at least one standing wave and onto said surface of said substrate and thereby form probe structures which extend from said surface of said substrate.
Claim 55
Dependent Claim
38 words
In a method of surface analysis wherein atomic or molecular species from a surface are received by a detector the improvement comprising providing at least one laser beam which directs said atomic or molecular species to said detector.
Claim 56
Dependent Claim
38 words
In a method of surface analysis wherein atomic or molecular species from a surface are received by a detector the improvement comprising providing at least one laser beam which directs said atomic or molecular species to said detector.
Claim 57
Dependent Claim
15 words
A method of surface analysis according to claim 45, wherein said detector comprises a microscope.
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| 3.5 Years (Year 4) | 1997-10-31 | 1998-05-02 | 1998-11-01 | $2000.00 | Window Closed / Lapsed |
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