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US5365073A Expired / Lapsed US ⏱️ 0.0 years remaining

Nanofabricated structures

Assignee: Hitachi Ltd
•
Filing: 1993-06-24
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Granted: 1994-11-15
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Expires: 2013-06-24
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Abstract

Abstract A method of forming a nano-scale device with a probe (2) such as a STM on a substrate (1) includes the step of rendering the relevant part of the substrate conductive while the device (5) is being formed with the probe so that current can flow from the probe to the substrate. Thereafter, to operate the device, the substrate is rendered non-conductive so as to prevent dissipation of current from the device through the substrate. The substrate can be altered in conductivity by cooling to undergo a Mott transition, can be heated from a normally non-conductive condition to become conductive, or subjected to laser radiation to induce charge carriers to render it conductive.

Inventors

  • 👤 Julian D. White

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 02:15
CPC Classifications
B; B82; B82B; B82B1/00; B82B3/00; H; H10; H10D; H10D30/00; H10D30/40; H10D30/402; H10N; H10N99/00; G; G01; G01Q; G01Q80/00; G11; G11B; G11B9/00; G11B9/12; G11B9/14; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/855; Y10S977/859; Y10S977/86; Y10S977/861; Y10S977/902; Y10S977/932; Y10S977/949; Y10S977/95; Y10S977/951

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 109 words
A method of forming a nano-scale electroconductive structure wherein a probe is used to produce a desired configuration of matter on a substrate, including causing the substrate to change from a relatively low to a relatively high conductivity condition, producing with the probe said desired configuration of matter on the substrate while in said relatively high conductivity condition, and thereafter causing the substrate to assume said relatively low conductivity condition, wherein said substrate assumes said relatively low conductivity condition at room temperature, and is heated to a temperature in excess of room temperature to achieve said relatively high conductivity condition during which said structure is formed with said probe.
Claim 2
Independent Claim 109 words
A method of forming a nano-scale electroconductive structure wherein a probe is used to produce a desired configuration of matter on a substrate, including causing the substrate to change from a relatively low to a relatively high conductivity condition, producing with the probe said desired configuration of matter on the substrate while in said relatively high conductivity condition, and thereafter causing the substrate to assume said relatively low conductivity condition, wherein said substrate assumes said relatively low conductivity condition at room temperature, and is heated to a temperature in excess of room temperature to achieve said relatively high conductivity condition during which said structure is formed with said probe.
Claim 3
Dependent Claim 19 words
A method according to claim 1 including forming said desired configuration of matter on the substrate with a STM.
Claim 4
Dependent Claim 31 words
A method according to claim 1 including producing atomic emission from the probe such as to form a desired deposit of the emitted atoms on the substrate as a conductive structure.
Claim 5
Dependent Claim 24 words
A method according to claim 1 including forming a chain of globules of material emitted from the probe, in a chain on the substrate.
Claim 6
Dependent Claim 19 words
A method according to claim 4 including spacings in said chain which define capacitive couplings and tunnel junction capacitances.
Claim 7
Dependent Claim 23 words
A method according to claim 5 wherein said capacitive couplings are configured to produce Coulomb blockade of single electron tunneling along the chain.

References Cited (Backward Citations)

US4878213A Cited
US4916688A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1997-11-14 1998-05-16 1998-11-15 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2001-11-14 2002-05-16 2002-11-15 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2005-11-14 2006-05-16 2006-11-15 $7700.00 Window Closed / Lapsed

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