Patent US5366587A successfully refreshed from Google Patents.
US5366587A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for fabricating micromachines
Assignee: Sumitomo Electric Industries Ltd
•
Filing: 1992-05-26
•
Granted: 1994-11-22
•
Expires: 2012-05-26
Abstract
Abstract A process for manufacturing a micromachine comprising a machine element supported on a substrate, comprising the steps of successively depositing on the substrate machine part layers and removable sacrificial layers made of an oxide ceramic material containing a rare earth, Ba, and Cu, and selectively removing the machine parts layer and the sacrificial layers so as to leave the machine element.
Inventors
- 👤 Minoru Ueda
- 👤 Michitomo Iiyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 18:01
CPC Classifications
B; B81; B81C; B81C1/00; B81C1/00015; B81C1/00198; C; C04; C04B; C04B41/00; C04B41/009; C04B41/53; C04B41/80; C04B41/91; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/408; G; G03; G03F; G03F7/00; B81B; B81B2201/00; B81B2201/03; B81B2201/034; B81B2201/035; B81B2201/037; B81B2203/00; B81B2203/05; B81B2203/056; Y; Y10; Y10S; Y10S505/00; Y10S505/775; Y10S505/785
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
63 words
A process for manufacturing a micromachine comprising a machine element supported on a substrate, comprising the steps of: (a) successively depositing on the substrate machine part layers and removable sacrificial layers made of an oxide ceramic material containing a rare earth, Ba, and Cu, and (b) partially removing said sacrificial layers and said machine parts layers so as to leave said machine element.
Claim 2
Dependent Claim
63 words
A process for manufacturing a micromachine comprising a machine element supported on a substrate, comprising the steps of: (a) successively depositing on the substrate machine part layers and removable sacrificial layers made of an oxide ceramic material containing a rare earth, Ba, and Cu, and (b) partially removing said sacrificial layers and said machine parts layers so as to leave said machine element.
Claim 3
Dependent Claim
45 words
The process as set forth in claim 1 wherein at least one of said sacrificial layers is made of an oxide represented by the general formula: Re.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7-x in which Re stands for rare earth elements and x is a number of ±1.
Claim 4
Dependent Claim
27 words
A process as set forth in claim 1, wherein at least one of said sacrificial layers made from said oxide ceramic material, comprises a plurality of sub-layers.
Claim 5
Dependent Claim
40 words
A process as set forth in claim 3, wherein the plurality of sub-layers contains a top and bottom sub-layer wherein the top sub-layer and/or the bottom sub-layer are made of an oxide ceramic material containing rare earth, Ba, and Cu.
Claim 6
Dependent Claim
45 words
A process as set forth in claim 4, wherein said top sub-layer and/or said bottom sub-layer are made of an oxide represented by the general formula: Re.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7-x in which Re stands for rare earth elements and x is a number of ±1.
Claim 7
Dependent Claim
37 words
A process as set forth in claim 4, wherein the plurality of sub-layers contains at least one sub-layer other than said top sub-layer and said bottom sub-layer which is made of silicon nitride or phosphor silicate glass.
Claim 8
Dependent Claim
76 words
A process as set forth in claim 3, wherein the plurality of sub-layers contain a top and bottom sub-layer and at least one intermediate layer, wherein the top sub-layer and the bottom sub-layer are made of a material which does not adversely affect the materials of which said substrate and said machine element are made, and at least one of the intermediate sub-layers is made of an oxide ceramic material containing rare earth, Ba, and Cu.
Claim 9
Dependent Claim
45 words
A process as set forth in claim 7, wherein at least one of said intermediate sub-layers is made of an oxide represented by the general formula: Re.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7-x in which Re stands for rare earth elements and x is a number of ±1.
Claim 10
Dependent Claim
29 words
A process as set forth in claim 7, wherein said top sub-layer and bottom sub-layer in said sacrificial sub-layers are independently made of silicon nitride or phosphor silicate glass.
Claim 11
Dependent Claim
17 words
A process as set forth in claim 1, wherein said machine element is made of polycrystalline silicon.
Claim 12
Dependent Claim
27 words
A process as set forth in claim 1, wherein said machine element is rotatable-supported by a stationary shaft made of polycrystalline silicon and secured to said substrate.
Claim 13
Dependent Claim
21 words
A process as set forth in claim 11, wherein said stationary shaft has flanges made of polycrystalline silicon at opposite ends.
Claim 14
Dependent Claim
16 words
A process as set forth in claim 1, wherein said machine element is a micro gear.
Claim 15
Dependent Claim
42 words
A process as set forth in claim 1, wherein deposition of said machine parts layer and removable sacrificial layers is effected by at least one technique selected from the group consisting of low-pressure chemical vapour deposition plasma chemical vapour deposition, and sputtering.
Claim 16
Dependent Claim
29 words
A process as set forth in claim 1, wherein selective removal of said machine parts layers and removable sacrificial layers is effected by photo-lithography followed by reactive ion etching.
Claim 17
Dependent Claim
17 words
A process as set forth in claim 1, wherein said substrate is a silicon single crystal substrate.
Claim 18
Dependent Claim
22 words
A process as claimed in claim 1, wherein the rare earth is selected from the group consisting of Y, Dy, and Ho.
Claim 19
Dependent Claim
13 words
A process as claimed in claim 17, wherein the rare earth is yttrium.
Claim 20
Dependent Claim
11 words
A process as claimed in claim 2, wherein Re is Y.
Claim 21
Dependent Claim
11 words
A micromachine produced by a process as claimed in claim 1.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-21 | 1998-05-23 | 1998-11-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-21 | 2002-05-23 | 2002-11-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-21 | 2006-05-23 | 2006-11-22 | $7700.00 | Window Closed / Lapsed |