Patent US5377708A successfully refreshed from Google Patents.
US5377708A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multi-station semiconductor processor with volatilization
Assignee: Semitool Inc
•
Filing: 1993-04-26
•
Granted: 1995-01-03
•
Expires: 2013-04-26
Abstract
Abstract Disclosed are apparatuses and methods for improved processing of semiconductor wafers and the like using vapor phase processing chemicals, particularly aqueous hydrofluoric acid etchants. Homogeneous vapor mixtures are generated from homogeneous liquid mixtures. Means for recirculating, mixing and agitating the liquid phase reactants are provided. In some embodiments the liquid phase is advantageously circulated through a chemical trench within the processing bowl. Exposure of wafers to vapors from the chemical trench can be controlled by a vapor control valve which is advantageously the bottom of the processing chamber. The wafer is rotated or otherwise moved within the processing chamber to provide uniform dispersion of the homogeneous reactant vapors across the wafer surface and to facilitate vapor circulation to the processed surface. A radiative volatilization processor can be utilized to volatilize reaction by-products which form under some conditions. The apparatuses provide efficient uniform etching with low particle count performance.
Inventors
- 👤 Eric J. Bergman
- 👤 Timothy J. Reardon
- 👤 Raymon F. Thompson
- 👤 Aleksander Owczarz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 20:48
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7608; B; B01; B01F; B01F23/00; B01F23/40; B01F23/49; F; F04; F04B; F04B43/00; F04B43/08; F04B9/00; F04B9/08; F04B9/10; F04B9/103; F04B9/105; H10P72/04; H10P72/0402; H10P72/0404; H10P72/0418; H10P72/0422; H10P72/0424; H10P72/0426; H10P72/7602; H10P72/7624; G; G11; G11B; G11B7/00; G11B7/24; G11B7/26; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 88
Claim 1
Independent Claim
198 words
An apparatus for processing wafers, such as semiconductor wafers, magnetic disks, and optical disks, comprising: a framework; at least one processing bowl mounted to the framework; at least one chemical supply for supplying at least one processing chemical to said at least one processing bowl; at least one processing head mounted for controlled movement between at least one processing position wherein the processing head is in an operative relationship with the processing bowl to define a substantially enclosed processing chamber, and at least one loading position wherein the processing head is removed from the processing bowl for loading or unloading wafers from the at least one processing head; at least one wafer support mounted upon said at least processing head; said at least one wafer support serving to detachably support wafers thereon; said at least one wafer support being mounted upon the processing head to allow controlled motion of the wafer support and any wafer held therein, at least when the processing head is in said at least one processing position; a volatilization processing chamber; a wafer transfer for moving wafers to and from said at least one processing bowl, and to and from said volatilization processing chamber.
Claim 2
Independent Claim
198 words
An apparatus for processing wafers, such as semiconductor wafers, magnetic disks, and optical disks, comprising: a framework; at least one processing bowl mounted to the framework; at least one chemical supply for supplying at least one processing chemical to said at least one processing bowl; at least one processing head mounted for controlled movement between at least one processing position wherein the processing head is in an operative relationship with the processing bowl to define a substantially enclosed processing chamber, and at least one loading position wherein the processing head is removed from the processing bowl for loading or unloading wafers from the at least one processing head; at least one wafer support mounted upon said at least processing head; said at least one wafer support serving to detachably support wafers thereon; said at least one wafer support being mounted upon the processing head to allow controlled motion of the wafer support and any wafer held therein, at least when the processing head is in said at least one processing position; a volatilization processing chamber; a wafer transfer for moving wafers to and from said at least one processing bowl, and to and from said volatilization processing chamber.
Claim 3
Dependent Claim
34 words
An apparatus according to claim 1 and further comprising a wafer inventory which is accessible by the wafer transfer to allow removal and insertion of wafers into the wafer inventory by the wafer transfer.
Claim 4
Dependent Claim
48 words
An apparatus according to claim 1 and further comprising a wafer inventory which is accessible by the wafer transfer to allow removal and insertion of wafers into the wafer inventory by the water transfer; said wafer inventory being constructed to receive and hold wafers in substantially horizontal positions.
Claim 5
Dependent Claim
14 words
An apparatus according to claim 1 wherein said wafer transfer has a swivel base.
Claim 6
Dependent Claim
14 words
An apparatus according to claim 1 wherein said wafer transfer is a robotic system.
Claim 7
Dependent Claim
18 words
An apparatus according to claim 1 wherein said wafer transfer has arms which can move a wafer vertically.
Claim 8
Dependent Claim
26 words
An apparatus according to claim 1 wherein said wafer transfer is a robotic system with a swivel base and arms which can move horizontally and vertically.
Claim 9
Dependent Claim
17 words
An apparatus according to claim 1 wherein the volatilization processing chamber includes a heat generating radiation source.
Claim 10
Dependent Claim
33 words
An apparatus according to claim 1 wherein the volatilization processing chamber comprises: a heat generating radiation source; a wafer protection vessel which is transparent to radiation beamed from said heat generating radiation source.
Claim 11
Dependent Claim
53 words
An apparatus according to claim 1 wherein the volatilization processing chamber comprises: a heat generating radiation source; a wafer protection vessel which is transparent to radiation beamed from said heat generating radiation source; at least one wafer support stand feature within said wafer protection vessel upon which a wafer rests when installed therein.
Claim 12
Dependent Claim
48 words
An apparatus according to claim 1 wherein the volatilization processing chamber comprises: a heat generating radiation source; a wafer protection vessel which is transparent to radiation beamed from said heat generating radiation source; a radiation shield about portions of the wafer protection vessel and heat generating radiation source.
Claim 13
Dependent Claim
51 words
An apparatus according to claim 1 wherein the volatilization processing chamber comprises: a heat generating radiation source; a wafer protection vessel which is transparent to radiation beamed from said heat generating radiation source; an adjustment for adjusting the position of the wafer protection vessel relative to said heat generating radiation source.
Claim 14
Dependent Claim
18 words
An apparatus according to claim 1 and further comprising a protective superstructure which is connected to the framework.
Claim 15
Dependent Claim
40 words
An apparatus according to claim 1 and further comprising: a protective superstructure which is connected to the framework; a gas purge connected to the protective superstructure to supply non-reactive gas to prevent undesirable reaction of wafers held within the superstructure.
Claim 16
Dependent Claim
58 words
An apparatus according to claim 1 wherein at least one processing bowl is provided with a liquid phase chemical chamber for holding liquid phase processing chemical therein; and further comprising chemical chamber valve means for controlling the passage of vapor phase processing chemical from the liquid phase chemical chamber to a wafer being processed in the processing chamber.
Claim 17
Dependent Claim
20 words
An apparatus according to claim 15 wherein the chemical chamber valve means is a movable wall of the processing chamber.
Claim 18
Dependent Claim
21 words
An apparatus according to claim 15 wherein the chemical chamber valve means is a movable bottom wall of the processing chamber.
Claim 19
Dependent Claim
33 words
An apparatus according to claim 15 wherein the chemical chamber valve means is a movable bottom wall of the processing chamber and the liquid phase chemical chamber is about the movable bottom wall.
Claim 20
Dependent Claim
41 words
An apparatus according to claim 15 wherein the chemical chamber valve means is a movable bottom wall of the processing chamber mounted upon a controlled bellows and the liquid phase chemical chamber is an annular trench about the movable bottom wall.
Claim 21
Dependent Claim
67 words
An apparatus according to claim 1 wherein at least one processing bowl is provided with a chemical trench for holding liquid phase processing chemical therein; and further comprising: chemical trench valve means for controlling the passage of vapor phase processing chemical from the chemical trench to a wafer being processed in the processing chamber; at least one vapor exhaust for controllably exhausting vapors from the processing chamber.
Claim 22
Dependent Claim
25 words
An apparatus according to claim 1 wherein at least one processing bowl is provided with a chemical trench for holding liquid phase processing chemical therein.
Claim 23
Dependent Claim
51 words
An apparatus according to claim 1 wherein at least one processing bowl is provided with an annular chemical trench for holding liquid phase processing chemical therein; and further comprising annular trench valve means for controlling the passage of vapor phase processing chemical to a wafer being processed in the processing chamber.
Claim 24
Dependent Claim
19 words
An apparatus according to claim 1 at least one vapor exhaust for controllably exhausting vapors from the processing chamber.
Claim 25
Dependent Claim
22 words
An apparatus according to claim 1 at least one vapor exhaust for controllably exhausting vapors from multiple locations about the processing chamber.
Claim 26
Independent Claim
177 words
An apparatus for processing wafers, such as semiconductor wafers, magnetic disks, and optical disks, comprising: a framework; at least one processing bowl mounted to the framework; at least one chemical supply for supplying at least one processing chemical to said at least one processing bowl; at least one processing head mounted for controlled movement between at least one processing position wherein the processing head is in an operative relationship with the processing bowl to define a substantially enclosed processing chamber, and at least one loading position wherein the processing head is removed from the processing bowl for loading or unloading wafers from the at least one processing head; at least one wafer support for detachably supporting wafers thereon; said at least one wafer support allowing controlled motion of the wafer support and any wafer held therein, at least when the processing head is in said at least one processing position; a second processing chamber; a wafer transfer for moving wafers to and from said at least one processing bowl, and to and from said second processing chamber.
Claim 27
Independent Claim
177 words
An apparatus for processing wafers, such as semiconductor wafers, magnetic disks, and optical disks, comprising: a framework; at least one processing bowl mounted to the framework; at least one chemical supply for supplying at least one processing chemical to said at least one processing bowl; at least one processing head mounted for controlled movement between at least one processing position wherein the processing head is in an operative relationship with the processing bowl to define a substantially enclosed processing chamber, and at least one loading position wherein the processing head is removed from the processing bowl for loading or unloading wafers from the at least one processing head; at least one wafer support for detachably supporting wafers thereon; said at least one wafer support allowing controlled motion of the wafer support and any wafer held therein, at least when the processing head is in said at least one processing position; a second processing chamber; a wafer transfer for moving wafers to and from said at least one processing bowl, and to and from said second processing chamber.
Claim 28
Dependent Claim
16 words
An apparatus according to claim 25 wherein said second processing chamber is a heat volatilization chamber.
Claim 29
Dependent Claim
17 words
An apparatus according to claim 26 wherein the volatilization processing chamber includes a heat generating radiation source.
Claim 30
Dependent Claim
33 words
An apparatus according to claim 26 wherein the volatilization processing chamber comprises: a heat generating radiation source; a wafer protection vessel which is transparent to radiation beamed from said heat generating radiation source.
Claim 31
Dependent Claim
53 words
An apparatus according to claim 26 wherein the volatilization processing chamber comprises: a heat generating radiation source; a wafer protection vessel which is transparent to radiation beamed from said heat generating radiation source; at least one wafer support stand feature within said wafer protection vessel upon which a wafer rests when installed therein.
Claim 32
Dependent Claim
48 words
An apparatus according to claim 26 wherein the volatilization processing chamber comprises: a heat generating radiation source; a wafer protection vessel which is transparent to radiation beamed from said heat generating radiation source; a radiation shield about portions of the wafer protection vessel and heat generating radiation source.
Claim 33
Dependent Claim
51 words
An apparatus according to claim 26 wherein the volatilization processing chamber comprises: a heat generating radiation source; a wafer protection vessel which is transparent to radiation beamed from said heat generating radiation source; an adjustment for adjusting the position of the wafer protection vessel relative to said heat generating radiation source.
Claim 34
Dependent Claim
34 words
An apparatus according to claim 25 and further comprising a wafer inventory which is accessible by the wafer transfer to allow removal and insertion of wafers into the wafer inventory by the wafer transfer.
Claim 35
Dependent Claim
48 words
An apparatus according to claim 25 and further comprising a wafer inventory which is accessible by the wafer transfer to allow removal and insertion of wafers into the wafer inventory by the wafer transfer; said wafer inventory being constructed to receive and hold wafers in substantially horizontal positions.
Claim 36
Dependent Claim
14 words
An apparatus according to claim 25 wherein said wafer transfer has a swivel base.
Claim 37
Dependent Claim
14 words
An apparatus according to claim 25 wherein said wafer transfer is a robotic system.
Claim 38
Dependent Claim
18 words
An apparatus according to claim 25 wherein said wafer transfer has arms which can move a wafer vertically.
Claim 39
Dependent Claim
26 words
An apparatus according to claim 25 wherein said wafer transfer is a robotic system with a swivel base and arms which can move horizontally and vertically.
Claim 40
Dependent Claim
18 words
An apparatus according to claim 25 and further comprising a protective superstructure which is connected to the framework.
Claim 41
Dependent Claim
40 words
An apparatus according to claim 25 and further comprising: a protective superstructure which is connected to the framework; a gas purge connected to the protective superstructure to supply non-reactive gas to prevent undesirable reaction of wafers held within the superstructure.
Claim 42
Dependent Claim
58 words
An apparatus according to claim 25 wherein at least one processing bowl is provided with a liquid phase chemical chamber for holding liquid phase processing chemical therein; and further comprising chemical chamber valve means for controlling the passage of vapor phase processing chemical from the liquid phase chemical chamber to a wafer being processed in the processing chamber.
Claim 43
Dependent Claim
20 words
An apparatus according to claim 40 wherein the chemical chamber valve means is a movable wall of the processing chamber.
Claim 44
Dependent Claim
21 words
An apparatus according to claim 40 wherein the chemical chamber valve means is a movable bottom wall of the processing chamber.
Claim 45
Dependent Claim
33 words
An apparatus according to claim 40 wherein the chemical chamber valve means is a movable bottom wall of the processing chamber and the liquid phase chemical chamber is about the movable bottom wall.
Claim 46
Dependent Claim
41 words
An apparatus according to claim 40 wherein the chemical chamber valve means is a movable bottom wall of the processing chamber mounted upon a controlled bellows and the liquid phase chemical chamber is an annular trench about the movable bottom wall.
Claim 47
Dependent Claim
67 words
An apparatus according to claim 25 wherein at least one processing bowl is provided with a chemical trench for holding liquid phase processing chemical therein; and further comprising: chemical trench valve means for controlling the passage of vapor phase processing chemical from the chemical trench to a wafer being processed in the processing chamber; at least one vapor exhaust for controllably exhausting vapors from the processing chamber.
Claim 48
Dependent Claim
25 words
An apparatus according to claim 25 wherein at least one processing bowl is provided with a chemical trench for holding liquid phase processing chemical therein.
Claim 49
Dependent Claim
51 words
An apparatus according to claim 25 wherein at least one processing bowl is provided with an annular chemical trench for holding liquid phase processing chemical therein; and further comprising annular trench valve means for controlling the passage of vapor phase processing chemical to a wafer being processed in the processing chamber.
Claim 50
Dependent Claim
19 words
An apparatus according to claim 25 at least one vapor exhaust for controllably exhausting vapors from the processing chamber.
Claim 51
Dependent Claim
22 words
An apparatus according to claim 25 at least one vapor exhaust for controllably exhausting vapors from multiple locations about the processing chamber.
Claim 52
Independent Claim
199 words
An apparatus for processing wafers, such as semiconductor wafers, magnetic disks, and optical disks, comprising: a framework; at least one processing bowl mounted to the framework; at least one chemical supply for supplying at least one processing chemical to said at least one processing bowl; at least one processing head mounted for controlled movement between at least one processing position wherein the processing head is in an operative relationship with the processing bowl to define a substantially enclosed processing chamber, and at least one loading position wherein the processing head is removed from the processing bowl for loading or unloading wafers from the at least one processing head; at least one wafer support mounted upon said at least one processing head; said at least one wafer support serving to detachably support wafers thereon; said at least one wafer support being mounted upon the processing head to allow controlled motion of the wafer support and any wafer held therein, at least when the processing head is in said at least one processing position; a second processing chamber; a wafer transfer for moving wafers to and from said at least one processing bowl, and to and from said second processing chamber.
Claim 53
Independent Claim
199 words
An apparatus for processing wafers, such as semiconductor wafers, magnetic disks, and optical disks, comprising: a framework; at least one processing bowl mounted to the framework; at least one chemical supply for supplying at least one processing chemical to said at least one processing bowl; at least one processing head mounted for controlled movement between at least one processing position wherein the processing head is in an operative relationship with the processing bowl to define a substantially enclosed processing chamber, and at least one loading position wherein the processing head is removed from the processing bowl for loading or unloading wafers from the at least one processing head; at least one wafer support mounted upon said at least one processing head; said at least one wafer support serving to detachably support wafers thereon; said at least one wafer support being mounted upon the processing head to allow controlled motion of the wafer support and any wafer held therein, at least when the processing head is in said at least one processing position; a second processing chamber; a wafer transfer for moving wafers to and from said at least one processing bowl, and to and from said second processing chamber.
Claim 54
Dependent Claim
34 words
An apparatus according to claim 50 and further comprising a wafer inventory which is accessible by the wafer transfer to allow removal and insertion of wafers into the wafer inventory by the wafer transfer.
Claim 55
Dependent Claim
48 words
An apparatus according to claim 50 and further comprising a wafer inventory which is accessible by the wafer transfer to allow removal and insertion of wafers into the wafer inventory by the wafer transfer; said wafer inventory being constructed to receive and hold wafers in substantially horizontal positions.
Claim 56
Dependent Claim
14 words
An apparatus according to claim 50 wherein said wafer transfer has a swivel base.
Claim 57
Dependent Claim
14 words
An apparatus according to claim 50 wherein said wafer transfer is a robotic system.
Claim 58
Dependent Claim
18 words
An apparatus according to claim 50 wherein said wafer transfer has arms which can move a wafer vertically.
Claim 59
Dependent Claim
26 words
An apparatus according to claim 50 wherein said wafer transfer is a robotic system with a swivel base and arms which can move horizontally and vertically.
Claim 60
Dependent Claim
18 words
An apparatus according to claim 50 and further comprising a protective superstructure which is connected to the framework.
Claim 61
Dependent Claim
40 words
An apparatus according to claim 50 and further comprising: a protective superstructure which is connected to the framework; a gas purge connected to the protective superstructure to supply non-reactive gas to prevent undesirable reaction of wafers held within the superstructure.
Claim 62
Dependent Claim
58 words
An apparatus according to claim 50 wherein at least one processing bowl is provided with a liquid phase chemical chamber for holding liquid phase processing chemical therein; and further comprising chemical chamber valve means for controlling the passage of vapor phase processing chemical from the liquid phase chemical chamber to a wafer being processed in the processing chamber.
Claim 63
Dependent Claim
20 words
An apparatus according to claim 59 wherein the chemical chamber valve means is a movable wall of the processing chamber.
Claim 64
Dependent Claim
21 words
An apparatus according to claim 59 wherein the chemical chamber valve means is a movable bottom wall of the processing chamber.
Claim 65
Dependent Claim
33 words
An apparatus according to claim 59 wherein the chemical chamber valve means is a movable bottom wall of the processing chamber and the liquid phase chemical chamber is about the movable bottom wall.
Claim 66
Dependent Claim
41 words
An apparatus according to claim 59 wherein the chemical chamber valve means is a movable bottom wall of the processing chamber mounted upon a controlled bellows and the liquid phase chemical chamber is an annular trench about the movable bottom wall.
Claim 67
Dependent Claim
67 words
An apparatus according to claim 50 wherein at least one processing bowl is provided with a chemical trench for holding liquid phase processing chemical therein; and further comprising: chemical trench valve means for controlling the passage of vapor phase processing chemical from the chemical trench to a wafer being processed in the processing chamber; at least one vapor exhaust for controllably exhausting vapors from the processing chamber.
Claim 68
Dependent Claim
25 words
An apparatus according to claim 50 wherein at least one processing bowl is provided with a chemical trench for holding liquid phase processing chemical therein.
Claim 69
Dependent Claim
51 words
An apparatus according to claim 50 wherein at least one processing bowl is provided with an annular chemical trench for holding liquid phase processing chemical therein; and further comprising annular trench valve means for controlling the passage of vapor phase processing chemical to a wafer being processed in the processing chamber.
Claim 70
Dependent Claim
19 words
An apparatus according to claim 50 at least one vapor exhaust for controllably exhausting vapors from the processing chamber.
Claim 71
Dependent Claim
22 words
An apparatus according to claim 50 at least one vapor exhaust for controllably exhausting vapors from multiple locations about the processing chamber.
Claim 72
Independent Claim
74 words
An apparatus for processing wafers, such as semiconductor wafers, magnetic disks, and optical disks, comprising: a framework; a heat generating radiation source; a wafer protection vessel which is transparent to radiation beamed from said heat generating radiation source; an adjustable support ring for supporting the wafer protection vessel in a range of adjustable positions relative to said heat generating radiation source; a wafer transfer for moving wafers to and from said wafer protection vessel.
Claim 73
Independent Claim
74 words
An apparatus for processing wafers, such as semiconductor wafers, magnetic disks, and optical disks, comprising: a framework; a heat generating radiation source; a wafer protection vessel which is transparent to radiation beamed from said heat generating radiation source; an adjustable support ring for supporting the wafer protection vessel in a range of adjustable positions relative to said heat generating radiation source; a wafer transfer for moving wafers to and from said wafer protection vessel.
Claim 74
Dependent Claim
18 words
An apparatus according to claim 69 and further comprising a support ring for supporting the wafer protection vessel.
Claim 75
Dependent Claim
24 words
An apparatus according to claim 69 and further comprising a wafer protection vessel purge for supplying a purge gas into the wafer protection vessel.
Claim 76
Dependent Claim
29 words
An apparatus according to claim 69 and further comprising at least one wafer support stand feature within said wafer protection vessel upon which a wafer rests when installed therein.
Claim 77
Dependent Claim
24 words
An apparatus according to claim 69 and further comprising a radiation shield about portions of the wafer protection vessel and heat generating radiation source.
Claim 78
Dependent Claim
42 words
An apparatus according to claim 69 and further comprising: an adjustment for adjusting the position of the wafer protection vessel relative to said heat generating radiation source; a radiation shield about portions of the wafer protection vessel and heat generating radiation source.
Claim 79
Dependent Claim
62 words
An apparatus according to claim 69 and further comprising: an adjustment for adjusting the position of the wafer protection vessel relative to said heat generating radiation source; a radiation shield about portions of the wafer protection vessel and heat generating radiation source; at least one wafer support stand feature within said wafer protection vessel upon which a wafer rests when installed therein.
Claim 80
Dependent Claim
14 words
An apparatus according to claim 69 wherein said wafer transfer has a swivel base.
Claim 81
Dependent Claim
14 words
An apparatus according to claim 69 wherein said wafer transfer is a robotic system.
Claim 82
Dependent Claim
18 words
An apparatus according to claim 69 wherein said wafer transfer has arms which can move a wafer vertically.
Claim 83
Dependent Claim
25 words
Apparatus according to claim 69 wherein said wafer transfer is a robotic system with a swivel base and arms which can move horizontally and vertically.
Claim 84
Independent Claim
59 words
An apparatus for processing wafers, such as semiconductor wafers, magnetic disks, and optical disks, comprising: a heat generating radiation source; a wafer protection vessel which is transparent to radiation beamed from said heat generating radiation source; an adjustable support ring for supporting the wafer protection vessel in a range of adjustable positions relative to said heat generating radiation source.
Claim 85
Independent Claim
59 words
An apparatus for processing wafers, such as semiconductor wafers, magnetic disks, and optical disks, comprising: a heat generating radiation source; a wafer protection vessel which is transparent to radiation beamed from said heat generating radiation source; an adjustable support ring for supporting the wafer protection vessel in a range of adjustable positions relative to said heat generating radiation source.
Claim 86
Dependent Claim
24 words
An apparatus according to claim 80 and further comprising a wafer protection vessel purge for supplying a purge gas into the wafer protection vessel.
Claim 87
Dependent Claim
29 words
An apparatus according to claim 80 and further comprising at least one wafer support stand feature within said wafer protection vessel upon which a wafer rests when installed therein.
Claim 88
Dependent Claim
24 words
An apparatus according to claim 80 and further comprising a radiation shield about portions of the wafer protection vessel and heat generating radiation source.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-02 | 1998-07-04 | 1999-01-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-02 | 2002-07-04 | 2003-01-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-02 | 2006-07-04 | 2007-01-03 | $7700.00 | Window Closed / Lapsed |