US5380474A
Expired / Lapsed
US
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Methods for patterned deposition on a substrate
Assignee: United States Department of Energy
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Filing: 1993-05-20
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Granted: 1995-01-10
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Expires: 2013-05-20
Abstract
Abstract A method is described for patterned depositions of a material onto a substrate. A surface of a polymeric substrate is first etched so as to form an etched layer having enhanced adhesions characteristics and then selected portions of the etched layer are removed so as to define a pattern having enhanced and diminished adhesion characteristics for the deposition of a conductor onto the remaining etched layer. In one embodiment, a surface of a PTFE substrate is chemically etched so as to improve the adhesion of copper thereto. Thereafter, selected portions of the etched surface are irradiated with a laser beam so as to remove the etched selected portions of the etched surface and form patterns of enhanced and diminished adhesion of copper thereto.
Inventors
- 👤 Robert R. Rye
- 👤 Antonio J. Ricco
- 👤 M. J. Hampden-Smith
- 👤 T. T. Kodas
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 06:33
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/10; H05K3/18; H05K3/181; H05K3/182; H05K3/185; C; C23; C23C; C23C16/00; C23C16/02; C23C16/0227; C23C16/04; C23C16/06; C23C16/18; C23C18/00; C23C18/02; C23C18/12; C23C18/16; C23C18/18; C23C18/20; C23C18/2006; C23C18/2026; C23C18/204; C23C18/22; C23C18/24; C23C18/28; C23C18/285; C23C18/30; C23C18/31; C23C18/38; C23C18/40; C23C18/405; H05K1/00; H05K1/02; H05K1/03; H05K1/0313; H05K1/032; H05K1/034; H05K3/14; H05K3/146; H05K3/38; H05K3/381
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
54 words
A method for patterned deposition of a material onto a substrate, comprising the steps of: a) etching a surface of the substrate to enhance adhesion characteristics of the surface; b) selectively removing portions of the etched surface with a laser; and c) depositing a material only onto the remaining portions of the etched surface.
Claim 2
Independent Claim
54 words
A method for patterned deposition of a material onto a substrate, comprising the steps of: a) etching a surface of the substrate to enhance adhesion characteristics of the surface; b) selectively removing portions of the etched surface with a laser; and c) depositing a material only onto the remaining portions of the etched surface.
Claim 3
Dependent Claim
14 words
The method of claim 1, wherein the step of depositing includes chemical vapor deposition.
Claim 4
Dependent Claim
13 words
The method of claim 1, wherein the step of depositing includes electroless deposition.
Claim 5
Dependent Claim
10 words
The method of claim 1, wherein the material is copper.
Claim 6
Dependent Claim
12 words
The method of claim 1, wherein the substrate material comprises a fluoropolymer.
Claim 7
Dependent Claim
16 words
The method of claim 1, wherein the step of etching the substrate surface comprises chemically etching.
Claim 8
Dependent Claim
15 words
The method of claim 1, wherein the step of etching comprises reactive gas plasma etching.
Claim 9
Dependent Claim
25 words
The method of claim 4, wherein the laser beam is generated with a laser source selected from the group consisting of Argon, Neon, and excimer.
Claim 10
Independent Claim
71 words
A method for patterned deposition of a material onto a substrate, comprising the steps of: a) forming a layer on a surface of the substrate having enhanced adhesion characteristics; b) selectively removing portions of the layer with a laser so as to form patterns of enhanced and diminished adhesion characteristics on the substrate surface; and c) selectively depositing a material onto the substrate according to the pattern of enhanced adhesion characteristics.
Claim 11
Independent Claim
71 words
A method for patterned deposition of a material onto a substrate, comprising the steps of: a) forming a layer on a surface of the substrate having enhanced adhesion characteristics; b) selectively removing portions of the layer with a laser so as to form patterns of enhanced and diminished adhesion characteristics on the substrate surface; and c) selectively depositing a material onto the substrate according to the pattern of enhanced adhesion characteristics.
Claim 12
Dependent Claim
41 words
The method of claim 9, wherein the step of depositing a material onto the substrate comprises a deposition process selected from the group consisting of chemical vapor deposition, ion plating, presputtering, plasma enhanced vapor deposition, heavy ion irradiation and thermal evaporation.
Claim 13
Dependent Claim
12 words
The method of claim 9, wherein the substrate material comprises a fluoropolymer.
Claim 14
Dependent Claim
29 words
The method of claim 11, wherein the substrate material is selected from the group consisting of poly(tetrafluoroethylene) and homologues and derivatives of poly(tetrafluoroethylene), fluorinated ethylene-propylene copolymer, and PFA-perfluoroalkoxy resin.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-09 | 1998-07-11 | 1999-01-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-09 | 2002-07-11 | 2003-01-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-09 | 2006-07-11 | 2007-01-10 | $7700.00 | Window Closed / Lapsed |