Method and apparatus for surface topography measurement by spatial-frequency analysis of interferograms

Claim 1

A method of topographically profiling a surface of an object, comprising the steps of: illuminating the object surface and a reference surface in an interferometer with an illumination source so as produce an interference pattern on a two-dimensional detector optically aligned with the object surface and having a plurality of pixels each corresponding to a respective location on the object surface; (b) varying an optical path difference between the reference surface and the object surface so as to produce at each detector pixel an interferogram for a respective object surface location, each said interferogram being defined by a pixel-received variation in interference illumination intensity for the respective object surface location as the optical path difference is varied; (c) transforming each said interferogram into the spatial frequency domain to define, for each said pixel, transformed interferogram data, wherein said transformed interferogram data for each said pixel represents relative intensity and interferometric phase of the interferogram received at said each pixel as a function of spatial frequency; (d) calculating, for each said pixel, a height of the respective object surface location using said transformed interferogram data by determining interferometric phase of the interferogram as a junction of wavenumber using said transformed interferogram data; and (e) creating a topographical profile of the object surface using the heights calculated in said step (d).

Claim 2

A method of topographically profiling a surface of an object, comprising the steps of: illuminating the object surface and a reference surface in an interferometer with an illumination source so as produce an interference pattern on a two-dimensional detector optically aligned with the object surface and having a plurality of pixels each corresponding to a respective location on the object surface; (b) varying an optical path difference between the reference surface and the object surface so as to produce at each detector pixel an interferogram for a respective object surface location, each said interferogram being defined by a pixel-received variation in interference illumination intensity for the respective object surface location as the optical path difference is varied; (c) transforming each said interferogram into the spatial frequency domain to define, for each said pixel, transformed interferogram data, wherein said transformed interferogram data for each said pixel represents relative intensity and interferometric phase of the interferogram received at said each pixel as a function of spatial frequency; (d) calculating, for each said pixel, a height of the respective object surface location using said transformed interferogram data by determining interferometric phase of the interferogram as a junction of wavenumber using said transformed interferogram data; and (e) creating a topographical profile of the object surface using the heights calculated in said step (d).

Claim 17

A method of determining a height of a location on a three-dimensional object surface, comprising the steps of: (a) varying an optical path difference between a reference surface and the object surface in an interferometer so as to produce an interferogram on a detector optically aligned with the object surface location; (b) transforming the interferogram received at the detector into the spatial frequency domain to define transformed interferogram data, wherein said transformed interferogram data represents relative intensity and interferometric phase of the interferogram as a function of spatial frequency; and (c) calculating the height of the object surface location using said transformed interferogram data by determining the interferometric phase of the interferogram as a function of wavenumber using said transformed interferogram data.

Claim 18

A method of determining a height of a location on a three-dimensional object surface, comprising the steps of: (a) varying an optical path difference between a reference surface and the object surface in an interferometer so as to produce an interferogram on a detector optically aligned with the object surface location; (b) transforming the interferogram received at the detector into the spatial frequency domain to define transformed interferogram data, wherein said transformed interferogram data represents relative intensity and interferometric phase of the interferogram as a function of spatial frequency; and (c) calculating the height of the object surface location using said transformed interferogram data by determining the interferometric phase of the interferogram as a function of wavenumber using said transformed interferogram data.

Claim 24

A method of determining a height of a location on a three-dimensional object surface, comprising the steps of: (a) varying an optical path difference between a reference surface and the object surface in an interferometer so as to produce, on a detector optically aligned with the object surface location, an interferogram comprising a plurality of intensity values produced at successive equally spaced apart intervals as the optical path difference is varied; (b) transforming the interferogram received at the detector into the spatial frequency domain to define transformed interferogram data comprising, for each of a plurality of angular wavenumbers, a relative intensity and an interferometric phase; (c) locating in said transformed interferogram data a region of high relative intensities as a function of angular wavenumber; (d) collecting from said located region a plurality of data pairs each comprising an interferometric phase as a function of angular wavenumber; (e) fitting a polynomial to said data pairs; (f) determining coefficients of the polynomial; and (g) calculating the height of the object surface location using said coefficients.

Claim 25

A method of determining a height of a location on a three-dimensional object surface, comprising the steps of: (a) varying an optical path difference between a reference surface and the object surface in an interferometer so as to produce, on a detector optically aligned with the object surface location, an interferogram comprising a plurality of intensity values produced at successive equally spaced apart intervals as the optical path difference is varied; (b) transforming the interferogram received at the detector into the spatial frequency domain to define transformed interferogram data comprising, for each of a plurality of angular wavenumbers, a relative intensity and an interferometric phase; (c) locating in said transformed interferogram data a region of high relative intensities as a function of angular wavenumber; (d) collecting from said located region a plurality of data pairs each comprising an interferometric phase as a function of angular wavenumber; (e) fitting a polynomial to said data pairs; (f) determining coefficients of the polynomial; and (g) calculating the height of the object surface location using said coefficients.

Claim 29

A method of topographically profiling a surface of an object, comprising the steps of: (a) illuminating the object surface and a reference surface in an interferometer with an illumination source so as produce an interference pattern on a two-dimensional detector optically aligned with the object surface and having a plurality of pixels each corresponding to a respective location on the object surface; (b) varying an optical path difference between the reference surface and the object surface so as to produce at each detector pixel an interferogram for a respective object surface location, each said interferogram being defined by a pixel-received variation in interference illumination intensity for the respective object surface location as the optical path difference is varied; (c) transforming each said interferogram into the spatial frequency domain to define, for each said pixel, transformed interferogram data; (d) calculating, for each said pixel, a height of the respective object surface location using said transformed interferogram data; (e) creating a topographical profile of the object surface using the heights calculated in said step (d); and (f) determining mean wavelength and spectral distribution of an illumination source of the interferometer using said transformed interferogram data; wherein said transformed interferogram data for each said pixel represents relative intensity and interferometric phase of the interferogram received at said each pixel as a function of spatial frequency, and wherein said step (d) comprises, for each said pixel: (i) approximating the interferometric phase as a function of angular wavenumber by a least-squares polynomial fit to said transformed interferogram data; and (ii) calculating the height of the respective object surface location from coefficients of the polynomial; and wherein said step (i) further comprises: (1) locating in said transformed interferogram data a region of high relative intensities as a function of angular wavenumber; (2) collecting from said region a plurality of data pairs each comprising interferometric phase as a function of angular wavenumber; and (3) utilizing said collected data pairs for determining the coefficients in said least-squares polynomial.

Claim 30

A method of topographically profiling a surface of an object, comprising the steps of: (a) illuminating the object surface and a reference surface in an interferometer with an illumination source so as produce an interference pattern on a two-dimensional detector optically aligned with the object surface and having a plurality of pixels each corresponding to a respective location on the object surface; (b) varying an optical path difference between the reference surface and the object surface so as to produce at each detector pixel an interferogram for a respective object surface location, each said interferogram being defined by a pixel-received variation in interference illumination intensity for the respective object surface location as the optical path difference is varied; (c) transforming each said interferogram into the spatial frequency domain to define, for each said pixel, transformed interferogram data; (d) calculating, for each said pixel, a height of the respective object surface location using said transformed interferogram data; (e) creating a topographical profile of the object surface using the heights calculated in said step (d); and (f) determining mean wavelength and spectral distribution of an illumination source of the interferometer using said transformed interferogram data; wherein said transformed interferogram data for each said pixel represents relative intensity and interferometric phase of the interferogram received at said each pixel as a function of spatial frequency, and wherein said step (d) comprises, for each said pixel: (i) approximating the interferometric phase as a function of angular wavenumber by a least-squares polynomial fit to said transformed interferogram data; and (ii) calculating the height of the respective object surface location from coefficients of the polynomial; and wherein said step (i) further comprises: (1) locating in said transformed interferogram data a region of high relative intensities as a function of angular wavenumber; (2) collecting from said region a plurality of data pairs each comprising interferometric phase as a function of angular wavenumber; and (3) utilizing said collected data pairs for determining the coefficients in said least-squares polynomial.

Claim 31

A method of topographically profiling a surface of an object, comprising the steps of: (a) illuminating the object surface and a reference surface in an interferometer with an illumination source so as produce an interference pattern on a two-dimensional detector optically aligned with the object surface and having a plurality of pixels each corresponding to a respective location on the object surface; (b) varying an optical path difference between the reference surface and the object surface so as to produce at each detector pixel an interferogram for a respective object surface location, each said interferogram being defined by a pixel-received variation in interference illumination intensity for the respective object surface location as the optical path difference is varied; (c) transforming each said interferogram into the spatial frequency domain to define, for each said pixel, transformed interferogram data; (d) calculating, for each said pixel, a height of the respective object surface location using said transformed interferogram data; and (e) creating a topographical profile of the object surface using the heights calculated in said step (d); wherein said transformed interferogram data for each said pixel represents relative intensity and interferometric phase of the interferogram received at said each pixel as a function of spatial frequency, and wherein said step (d) comprises, for each said pixel: (i) approximating the interferometric phase as a function of angular wavenumber by a least-squares polynomial fit to said transformed interferogram data; and (ii) calculating the height of the respective object surface location from coefficients of the polynomial; wherein said step (i) further comprises: (1) locating in said transformed interferogram data a region of high relative intensities as a function of angular wavenumber; (2) collecting from said region a plurality of data pairs each comprising interferometric phase as a function of angular wavenumber; and (3) utilizing said collected data pairs for determining the coefficients in said least-squares polynomial; and wherein said step (e) comprises: (A) determining, for pairs of locations on the object surface, a relative height differential Δh between the locations in each said pair using the heights calculated in said step (d); and (B) providing an improved resolution Δh' of said relative height differential determination Δh for each said pair by applying each said Δh value to the formula: ##EQU12## wherein n is an index of refraction, α is a constant phase offset, and φ 0 and k 0 are an interferometric phase and angular wavenumber, respectively, of a mean emission wavelength spectral peak of an illumination source of the interferometer.

Claim 32

A method of topographically profiling a surface of an object, comprising the steps of: (a) illuminating the object surface and a reference surface in an interferometer with an illumination source so as produce an interference pattern on a two-dimensional detector optically aligned with the object surface and having a plurality of pixels each corresponding to a respective location on the object surface; (b) varying an optical path difference between the reference surface and the object surface so as to produce at each detector pixel an interferogram for a respective object surface location, each said interferogram being defined by a pixel-received variation in interference illumination intensity for the respective object surface location as the optical path difference is varied; (c) transforming each said interferogram into the spatial frequency domain to define, for each said pixel, transformed interferogram data; (d) calculating, for each said pixel, a height of the respective object surface location using said transformed interferogram data; and (e) creating a topographical profile of the object surface using the heights calculated in said step (d); wherein said transformed interferogram data for each said pixel represents relative intensity and interferometric phase of the interferogram received at said each pixel as a function of spatial frequency, and wherein said step (d) comprises, for each said pixel: (i) approximating the interferometric phase as a function of angular wavenumber by a least-squares polynomial fit to said transformed interferogram data; and (ii) calculating the height of the respective object surface location from coefficients of the polynomial; wherein said step (i) further comprises: (1) locating in said transformed interferogram data a region of high relative intensities as a function of angular wavenumber; (2) collecting from said region a plurality of data pairs each comprising interferometric phase as a function of angular wavenumber; and (3) utilizing said collected data pairs for determining the coefficients in said least-squares polynomial; and wherein said step (e) comprises: (A) determining, for pairs of locations on the object surface, a relative height differential Δh between the locations in each said pair using the heights calculated in said step (d); and (B) providing an improved resolution Δh' of said relative height differential determination Δh for each said pair by applying each said Δh value to the formula: ##EQU12## wherein n is an index of refraction, α is a constant phase offset, and φ 0 and k 0 are an interferometric phase and angular wavenumber, respectively, of a mean emission wavelength spectral peak of an illumination source of the interferometer.

Claim 33

A method of topographically profiling a surface of an object, comprising the steps of: (a) illuminating the object surface and a reference surface in an interferometer with an illumination source so as produce an interference pattern on a two-dimensional detector optically aligned with the object surface and having a plurality of pixels each corresponding to a respective location on the object surface; (b) varying an optical path difference between the reference surface and the object surface so as to produce at each detector pixel an interferogram for a respective object surface location, each said interferogram being defined by a pixel-received variation in interference illumination intensity for the respective object surface location as the optical path difference is varied; (c) transforming each said interferogram into the spatial frequency domain to define, for each said pixel, transformed interferogram data; (d) calculating, for each said pixel, a height of the respective object surface location using said transformed interferogram data; (e) creating a topographical profile of the object surface using the heights calculated in said step (d); and (f) determining mean wavelength and spectral distribution of an illumination source of the interferometer using said transformed interferogram data; wherein said transformed interferogram data for each said pixel represents relative intensity and interferometric phase of the interferogram received at said each pixel as a function of spatial frequency, and wherein said step (d) comprises, for each said pixel: (i) approximating the interferometric phase as a function of angular wavenumber by a quadratic polynomial fit to said transformed interferogram data; and (ii) calculating the height of the respective object surface location from coefficients of the polynomial; and wherein said step (i) further comprises: (1) locating in said transformed interferogram data a region of high relative intensities as a function of angular wavenumber; (2) collecting from said region a plurality of data pairs each comprising interferometric phase as a function of angular wavenumber; and (3) utilizing said collected data pairs for determining the coefficients in said polynomial.

Claim 34

A method of topographically profiling a surface of an object, comprising the steps of: (a) illuminating the object surface and a reference surface in an interferometer with an illumination source so as produce an interference pattern on a two-dimensional detector optically aligned with the object surface and having a plurality of pixels each corresponding to a respective location on the object surface; (b) varying an optical path difference between the reference surface and the object surface so as to produce at each detector pixel an interferogram for a respective object surface location, each said interferogram being defined by a pixel-received variation in interference illumination intensity for the respective object surface location as the optical path difference is varied; (c) transforming each said interferogram into the spatial frequency domain to define, for each said pixel, transformed interferogram data; (d) calculating, for each said pixel, a height of the respective object surface location using said transformed interferogram data; (e) creating a topographical profile of the object surface using the heights calculated in said step (d); and (f) determining mean wavelength and spectral distribution of an illumination source of the interferometer using said transformed interferogram data; wherein said transformed interferogram data for each said pixel represents relative intensity and interferometric phase of the interferogram received at said each pixel as a function of spatial frequency, and wherein said step (d) comprises, for each said pixel: (i) approximating the interferometric phase as a function of angular wavenumber by a quadratic polynomial fit to said transformed interferogram data; and (ii) calculating the height of the respective object surface location from coefficients of the polynomial; and wherein said step (i) further comprises: (1) locating in said transformed interferogram data a region of high relative intensities as a function of angular wavenumber; (2) collecting from said region a plurality of data pairs each comprising interferometric phase as a function of angular wavenumber; and (3) utilizing said collected data pairs for determining the coefficients in said polynomial.

Claim 35

A method of topographically profiling a surface of an object, comprising the steps of: (a) illuminating the object surface and a reference surface in an interferometer with an illumination source so as produce an interference pattern on a two-dimensional detector optically aligned with the object surface and having a plurality of pixels each corresponding to a respective location on the object surface; (b) varying art optical path difference between the reference surface and the object surface so as to produce at each detector pixel an interferogram for a respective object surface location, each said interferogram being defined by a pixel-received variation in interference illumination intensity for the respective object surface location as the optical path difference is varied; (c) transforming each said interferogram into the spatial frequency domain to define, for each said pixel, transformed interferogram data; (d) calculating, for each said pixel, a height of the respective object surface location using said transformed interferogram data; and (e) creating a topographical profile of the object surface using the heights calculated in said step (d); wherein said transformed interferogram data for each said pixel represents relative intensity and interferometric phase of the interferogram received at said each pixel as a function of spatial frequency, and wherein said step (d) comprises, for each said pixel: (i) approximating the interferometric phase as a function of angular wavenumber by a quadratic polynomial fit to said transformed interferogram data; and (ii) calculating the height of the respective object surface location from coefficients of the polynomial; wherein said step (i) further comprises: (1) locating in said transformed interferogram data a region of high relative intensities as a function of angular wavenumber; (2) collecting from said region a plurality of data pairs each comprising interferometric phase as a function of angular wavenumber; and (3) utilizing said collected data pairs for determining the coefficients in said polynomial; and wherein said step (e) comprises: (A) determining, for pairs of locations on the object surface, a relative height differential Δh between the locations in each said pair using the heights calculated in said step (d); and (B) providing an improved resolution Δh' of said relative height differential determination Δh for each said pair by applying each said Δh value to the formula: ##EQU13## wherein n is an index of refraction, α is a constant phase offset, and φ 0 and k 0 are an interferometric phase and angular wavenumber, respectively, of a mean emission wavelength spectral peak of an illumination source of the interferometer.

Claim 36

A method of topographically profiling a surface of an object, comprising the steps of: (a) illuminating the object surface and a reference surface in an interferometer with an illumination source so as produce an interference pattern on a two-dimensional detector optically aligned with the object surface and having a plurality of pixels each corresponding to a respective location on the object surface; (b) varying art optical path difference between the reference surface and the object surface so as to produce at each detector pixel an interferogram for a respective object surface location, each said interferogram being defined by a pixel-received variation in interference illumination intensity for the respective object surface location as the optical path difference is varied; (c) transforming each said interferogram into the spatial frequency domain to define, for each said pixel, transformed interferogram data; (d) calculating, for each said pixel, a height of the respective object surface location using said transformed interferogram data; and (e) creating a topographical profile of the object surface using the heights calculated in said step (d); wherein said transformed interferogram data for each said pixel represents relative intensity and interferometric phase of the interferogram received at said each pixel as a function of spatial frequency, and wherein said step (d) comprises, for each said pixel: (i) approximating the interferometric phase as a function of angular wavenumber by a quadratic polynomial fit to said transformed interferogram data; and (ii) calculating the height of the respective object surface location from coefficients of the polynomial; wherein said step (i) further comprises: (1) locating in said transformed interferogram data a region of high relative intensities as a function of angular wavenumber; (2) collecting from said region a plurality of data pairs each comprising interferometric phase as a function of angular wavenumber; and (3) utilizing said collected data pairs for determining the coefficients in said polynomial; and wherein said step (e) comprises: (A) determining, for pairs of locations on the object surface, a relative height differential Δh between the locations in each said pair using the heights calculated in said step (d); and (B) providing an improved resolution Δh' of said relative height differential determination Δh for each said pair by applying each said Δh value to the formula: ##EQU13## wherein n is an index of refraction, α is a constant phase offset, and φ 0 and k 0 are an interferometric phase and angular wavenumber, respectively, of a mean emission wavelength spectral peak of an illumination source of the interferometer.

Claim 37

A method of topographically profiling a surface of an object, comprising the steps of: (a) illuminating the object surface and a reference surface in an interferometer with an illumination source so as produce an interference pattern on a two-dimensional detector optically aligned with the object surface and having a plurality of pixels each corresponding to a respective location on the object surface; (b) varying an optical path difference between the reference surface and the object surface so as to produce at each detector pixel an interferogram for a respective object surface location, each said interferogram being defined by a pixel-received variation in interference illumination intensity for the respective object surface location as the optical path difference is varied; (c) transforming each said interferogram into the spatial frequency domain to define, for each said pixel, transformed interferogram data; (d) calculating, for each said pixel, a height of the respective object surface location using said transformed interferogram data; and (e) creating a topographical profile of the object surface using the heights calculated in said step (d); wherein said transformed interferogram data for each said pixel represents relative intensity and interferometric phase of the interferogram received at said each pixel as a function of spatial frequency, and wherein said step (d) comprises: (i) determining mean wavelength and spectral distribution of an illumination source of the interferometer using said transformed interferogram data; (ii) approximating the interferometric phase as a function of angular wavenumber by a polynomial fit to said transformed interferogram data for each said pixel; and (iii) calculating the height of the respective object surface location for each said pixel from coefficients of the polynomial.

Claim 38

A method of topographically profiling a surface of an object, comprising the steps of: (a) illuminating the object surface and a reference surface in an interferometer with an illumination source so as produce an interference pattern on a two-dimensional detector optically aligned with the object surface and having a plurality of pixels each corresponding to a respective location on the object surface; (b) varying an optical path difference between the reference surface and the object surface so as to produce at each detector pixel an interferogram for a respective object surface location, each said interferogram being defined by a pixel-received variation in interference illumination intensity for the respective object surface location as the optical path difference is varied; (c) transforming each said interferogram into the spatial frequency domain to define, for each said pixel, transformed interferogram data; (d) calculating, for each said pixel, a height of the respective object surface location using said transformed interferogram data; and (e) creating a topographical profile of the object surface using the heights calculated in said step (d); wherein said transformed interferogram data for each said pixel represents relative intensity and interferometric phase of the interferogram received at said each pixel as a function of spatial frequency, and wherein said step (d) comprises: (i) determining mean wavelength and spectral distribution of an illumination source of the interferometer using said transformed interferogram data; (ii) approximating the interferometric phase as a function of angular wavenumber by a polynomial fit to said transformed interferogram data for each said pixel; and (iii) calculating the height of the respective object surface location for each said pixel from coefficients of the polynomial.

Claim 41

A method of determining a height of a location on a three-dimensional object surface, comprising the steps of: (a) varying an optical path difference between a reference surface and the object surface in an interferometer so as to produce an interferogram on a detector optically aligned with the object surface location; (b) transforming the interferogram received at the detector into the spatial frequency domain to define transformed interferogram data; (c) calculating the height of the object surface location using said transformed interferogram data; wherein said transformed interferogram data represents relative intensity and interferometric phase of the interferogram as a function of spatial frequency, and wherein said step (c) comprises: (i) determining mean wavelength and spectral distribution of an illumination source of the interferometer using said transformed interferogram data; (ii) approximating the interferometric phase as a function of angular wavenumber by a polynomial fit to said transformed interferogram data; and (iii) calculating the height of the object surface location from coefficients of the polynomial.

Claim 42

A method of determining a height of a location on a three-dimensional object surface, comprising the steps of: (a) varying an optical path difference between a reference surface and the object surface in an interferometer so as to produce an interferogram on a detector optically aligned with the object surface location; (b) transforming the interferogram received at the detector into the spatial frequency domain to define transformed interferogram data; (c) calculating the height of the object surface location using said transformed interferogram data; wherein said transformed interferogram data represents relative intensity and interferometric phase of the interferogram as a function of spatial frequency, and wherein said step (c) comprises: (i) determining mean wavelength and spectral distribution of an illumination source of the interferometer using said transformed interferogram data; (ii) approximating the interferometric phase as a function of angular wavenumber by a polynomial fit to said transformed interferogram data; and (iii) calculating the height of the object surface location from coefficients of the polynomial.