Patent US5428552A successfully refreshed from Google Patents.
US5428552A
Expired / Lapsed
US
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Data compaction techniques for generation of a complex image
Assignee: International Business Machines Corp
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Filing: 1994-05-05
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Granted: 1995-06-27
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Expires: 2014-05-05
Abstract
Abstract A data compaction technique permits electron beam lithography systems to operate more efficiently in the fabrication of complex computer chips. One or more building block patterns are selected for the design to be encoded. Each shape in the set of building block patterns is given a sequence number for use in a data word for the design. The set of shape descriptors for each block is stored in a reference memory. The data word referencing a block includes a number of bytes which specify the stored block pattern data and control bits corresponding to sequence numbers of the pattern shapes in a maximum shape configuration. Each shape is assigned a bit according to its sequence number.
Inventors
- 👤 John R. Rudert, Jr.
- 👤 Robert A. Simpson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 16:14
CPC Classifications
G; G06; G06T; G06T9/00; G06T9/001
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
270 words
A data compaction system used in computer image generation of a complex image, said complex image being divided into a plurality of blocks, each of said blocks including an identical grid pattern for location of shapes within the block, said data compaction system comprising: a reference memory storing a limited number of a plurality of simple shapes from which a subset of said shapes are selected to generate a portion of said complex image for a specific location of the grid pattern in any one of said plurality of blocks, each of said simple shapes being assigned shape numbers and stored with their assigned shape number; a buffer memory storing bit string patterns for each of said plurality of blocks, each bit string pattern having a sequence corresponding to said shape numbers and indicating which of the simple shapes of said limited number of a plurality of simple shapes are to be generated for a specific location of the grid pattern to produce that portion of said complex image in the block, one or more simple shapes being selected for generation at the specific location with each selected shape adding a different feature to the specific location in the grid pattern; and output means for supplying data words derived from said reference memory and said buffer memory for each of said blocks, each said data word including an address field specifying stored simple shape patterns in said reference memory, said simple shape patterns being used repeatedly at different locations in said grid pattern to reduce the overall volume of data required to define an entire pattern of said complex image.
Claim 2
Dependent Claim
270 words
A data compaction system used in computer image generation of a complex image, said complex image being divided into a plurality of blocks, each of said blocks including an identical grid pattern for location of shapes within the block, said data compaction system comprising: a reference memory storing a limited number of a plurality of simple shapes from which a subset of said shapes are selected to generate a portion of said complex image for a specific location of the grid pattern in any one of said plurality of blocks, each of said simple shapes being assigned shape numbers and stored with their assigned shape number; a buffer memory storing bit string patterns for each of said plurality of blocks, each bit string pattern having a sequence corresponding to said shape numbers and indicating which of the simple shapes of said limited number of a plurality of simple shapes are to be generated for a specific location of the grid pattern to produce that portion of said complex image in the block, one or more simple shapes being selected for generation at the specific location with each selected shape adding a different feature to the specific location in the grid pattern; and output means for supplying data words derived from said reference memory and said buffer memory for each of said blocks, each said data word including an address field specifying stored simple shape patterns in said reference memory, said simple shape patterns being used repeatedly at different locations in said grid pattern to reduce the overall volume of data required to define an entire pattern of said complex image.
Claim 3
Dependent Claim
60 words
The data compaction system used in computer image generation as recited in claim 1 wherein the system is part of a lithography exposure system, further comprising: deflection means for deflecting a beam in accordance with output data from said output means to expose a material block-by-block; and means for supporting and positioning a target to be exposed by said beam.
Claim 4
Dependent Claim
25 words
The data compaction system used in computer image generation as recited in claim 2 wherein the lithography exposure system is an electron beam exposure system.
Claim 5
Dependent Claim
90 words
The data compaction system used in computer image generation of a complex image as recited in claim 1 wherein said output means comprises: address means for supplying said address field from said buffer memory to said reference memory to read out from said reference memory a simple shape for a specific location in the grid pattern; and position means responsive to data read out of said buffer memory and said reference memory for generating position data for the specific location of the simple shape read out of said reference memory.
Claim 6
Independent Claim
264 words
A method of compacting data required to generate complex images by a computer image generation system comprising the steps of: dividing a complex image into a plurality of blocks, each of said blocks including an identical grid pattern of shapes for specific locations within the block; defining a limited number of a plurality of simple shapes from which a subset of said shapes are selected to generate a portion of said complex image for a specific location of the grid pattern in any one of said plurality of blocks; assigning shape numbers to each of said simple shapes; storing said simple shapes with their assigned shape number in a computer reference memory; for each block, generating a bit string pattern of data words in a sequence corresponding to said shape numbers, said bit string pattern indicating which of the simple shapes of said limited number of a plurality of simple shapes are to be generated at a specific location of the grid pattern in the block to produce that portion of said complex image in the block, one or more simple shapes being selected for generation at the specific location with each selected shape adding a different feature to the specific location in the grid pattern, whereby a large number of complex images may be generated from the limited number of simple shapes stored in computer memory; and storing said bit string pattern of data words in a computer buffer memory for access when said complex image is generated, each said data word including an address field specifying stored patterns in said reference memory.
Claim 7
Independent Claim
264 words
A method of compacting data required to generate complex images by a computer image generation system comprising the steps of: dividing a complex image into a plurality of blocks, each of said blocks including an identical grid pattern of shapes for specific locations within the block; defining a limited number of a plurality of simple shapes from which a subset of said shapes are selected to generate a portion of said complex image for a specific location of the grid pattern in any one of said plurality of blocks; assigning shape numbers to each of said simple shapes; storing said simple shapes with their assigned shape number in a computer reference memory; for each block, generating a bit string pattern of data words in a sequence corresponding to said shape numbers, said bit string pattern indicating which of the simple shapes of said limited number of a plurality of simple shapes are to be generated at a specific location of the grid pattern in the block to produce that portion of said complex image in the block, one or more simple shapes being selected for generation at the specific location with each selected shape adding a different feature to the specific location in the grid pattern, whereby a large number of complex images may be generated from the limited number of simple shapes stored in computer memory; and storing said bit string pattern of data words in a computer buffer memory for access when said complex image is generated, each said data word including an address field specifying stored patterns in said reference memory.
Claim 8
Dependent Claim
113 words
The method of compacting data required to generate complex images by a computer image generation system recited in claim 5 further comprising the steps of: accessing said computer buffer memory to read out the stored bit string pattern; addressing said computer reference memory to read out from said computer reference memory simple shapes for specific locations in the grid pattern; generating position data from data read out of said computer buffer memory and said computer reference memory for the specific locations within the grid pattern for the simple shapes read out of said computer reference memory; and generating said complex image by generating said simple shapes within the grid pattern for each block.
Claim 9
Dependent Claim
69 words
The method of compacting data required to generate complex images by a computer image generation system recited in claim 5 wherein the system is part of a lithography exposure system and said step of generating said complex image comprises the steps of: deflecting a beam in accordance with the bit string pattern to expose a material block-by-block; and supporting and positioning a target to be exposed by said beam.
Claim 10
Independent Claim
271 words
A method of data compaction used in generating a complex image by a computer system comprising the steps of: dividing the complex image into a plurality of blocks, each of said blocks including an identical grid pattern of shapes for specific locations within the block; defining a limited number of a plurality of simple shapes from which a subset of said shapes are selected to generate a portion of said complex image for a specific location of the grid pattern in any one of said plurality of blocks; assigning shape numbers to each of said simple shapes; storing said simple shapes with their assigned shape number in computer memory; for each block, generating a bit string pattern in a sequence corresponding to said shape numbers, said bit string pattern indicating which of the simple shapes of said limited number of a plurality of simple shapes are to be generated to produce that portion of said complex image in the block, one or more simple shapes being selected for generation at the specific location with each selected shape adding a different feature to the specific location in the grid pattern; storing said bit string pattern for each block in computer memory; accessing said computer memory to read out data for each block on a step-by-step basis; and as data for each block is read out from computer memory, accessing the bit string for that block and generating the simple shapes according to said bit string to generate the portion of said complex image in the block, thereby generating the complex image from the limited number of simple shapes stored in computer memory.
Claim 11
Independent Claim
271 words
A method of data compaction used in generating a complex image by a computer system comprising the steps of: dividing the complex image into a plurality of blocks, each of said blocks including an identical grid pattern of shapes for specific locations within the block; defining a limited number of a plurality of simple shapes from which a subset of said shapes are selected to generate a portion of said complex image for a specific location of the grid pattern in any one of said plurality of blocks; assigning shape numbers to each of said simple shapes; storing said simple shapes with their assigned shape number in computer memory; for each block, generating a bit string pattern in a sequence corresponding to said shape numbers, said bit string pattern indicating which of the simple shapes of said limited number of a plurality of simple shapes are to be generated to produce that portion of said complex image in the block, one or more simple shapes being selected for generation at the specific location with each selected shape adding a different feature to the specific location in the grid pattern; storing said bit string pattern for each block in computer memory; accessing said computer memory to read out data for each block on a step-by-step basis; and as data for each block is read out from computer memory, accessing the bit string for that block and generating the simple shapes according to said bit string to generate the portion of said complex image in the block, thereby generating the complex image from the limited number of simple shapes stored in computer memory.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-06-26 | 1998-12-26 | 1999-06-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-06-26 | 2002-12-26 | 2003-06-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-06-26 | 2006-12-26 | 2007-06-27 | $7700.00 | Window Closed / Lapsed |