US5453315A
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US
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Unitary micro-flexure structure and method of making same
Assignee: Seagate Technology LLC
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Filing: 1992-12-14
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Granted: 1995-09-26
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Expires: 2012-12-14
Abstract
Abstract A unitary micro-flexure structure and a method of making the same, wherein the structure takes the form of an elongate dielectric flexure body having a mounting end and a free end, and which is adapted for cantilevered disposition, wherein the body takes a form which is constructed entirely from thin-film deposition and patterning processes involving the deposition of a metal oxide, and further wherein the body has a topography which is at least partially determined by etch-removable boundary-defining structure.
Inventors
- 👤 Harold J. Hamilton
- 👤 Timothy W. Martin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 09:36
CPC Classifications
G; G11; G11B; G11B5/00; G11B5/48; G11B5/4806; G11B5/484; G11B5/127; G11B5/31; G11B5/3103; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917
Claims Analysis
Total Claims: 41
Claim 1
Independent Claim
54 words
A unitary micro-flexure structure comprising an elongate, dielectric flexure body having a mounting end and a free end, said body taking the form of a solid which has been constructed entirely via thin-film deposition and patterning processes, with the body having a shape which is at least partially determined by ablating a boundary structure.
Claim 2
Dependent Claim
54 words
A unitary micro-flexure structure comprising an elongate, dielectric flexure body having a mounting end and a free end, said body taking the form of a solid which has been constructed entirely via thin-film deposition and patterning processes, with the body having a shape which is at least partially determined by ablating a boundary structure.
Claim 3
Dependent Claim
15 words
The micro-flexure structure of claim 1, wherein said body is formed of a metal oxide.
Claim 4
Dependent Claim
14 words
The micro-flexure structure of claim 1, wherein said body is formed of aluminum oxide.
Claim 5
Dependent Claim
14 words
The micro-flexure structure of claim 1, wherein said body is formed of silicon dioxide.
Claim 6
Dependent Claim
23 words
The micro-flexure structure of claims 1, 2, 3, or 4 wherein said body has an overall mass which is less than about 3.0-milligrams.
Claim 7
Dependent Claim
19 words
The micro-flexure of claims 1,2,3, or 4, wherein the boundary structure includes material which is removable by laser etching.
Claim 8
Dependent Claim
34 words
The micro-flexure structure of claims 1, 2, 3, or 4, wherein said body, intermediate its said two ends, includes a flexure stretch which, progressing therealong, gradually changes in transverse cross-sectional area throughout the stretch.
Claim 9
Dependent Claim
19 words
The structure of claims 1, 2, 3, or 4, wherein said body is formed with a through-the-body void space.
Claim 10
Dependent Claim
16 words
The micro-flexure structure of claim 5, wherein said body is formed with a through-the-body void space.
Claim 11
Dependent Claim
16 words
The micro-flexure structure of claim 7, wherein said body is formed with a through-the-body void space.
Claim 12
Dependent Claim
30 words
The micro-flexure structure of claim 5, wherein said body, intermediate its said two ends, includes a flexure stretch which, progressing therealong, gradually changes in transverse cross-sectional area throughout the stretch.
Claim 13
Dependent Claim
30 words
The micro-flexure structure of claim 6, wherein said body, intermediate its said two ends, includes a flexure stretch which, progressing therealong, gradually changes in transverse cross-sectional area throughout the stretch.
Claim 14
Dependent Claim
19 words
The micro-flexure structure of claim 7, wherein said body has an overall mass which is less than about 3.0-milligrams.
Claim 15
Dependent Claim
19 words
The micro-flexure structure of claim 11, wherein said body has an overall mass which is less than about 3.0-milligrams.
Claim 16
Dependent Claim
19 words
The micro-flexure structure of claim 12, wherein said body has an overall mass which is less than about 3.0-milligrams.
Claim 17
Dependent Claim
40 words
The micro-flexure structure of claims 1, 2, 3, or 4, wherein said body, intermediate its said two ends, includes a flexure stretch which diminishes in lateral dimension progressing therealong in a direction from said mounting end toward said free end.
Claim 18
Dependent Claim
19 words
The micro-flexure structure of claim 16, wherein said body has an overall mass which is less than about 3.0-milligrams.
Claim 19
Dependent Claim
16 words
The micro-flexure structure of claim 16, wherein said body is formed with a through-the-body void space.
Claim 20
Dependent Claim
36 words
The micro-flexure structure of claim 6, wherein said body, intermediate its said two ends, includes a flexure stretch which diminishes in lateral dimension progressing therealong in a direction from said mounting end toward said free end.
Claim 21
Dependent Claim
22 words
The micro-flexure structure of claims 1, 2, 3, or 4, wherein the boundary structure includes material which is removable by reactive-ion etching.
Claim 22
Dependent Claim
22 words
The micro-flexure structure of claims 1, 2, 3, or 4, wherein the boundary structure includes material which is removable by chemical etching.
Claim 23
Dependent Claim
68 words
A unitary micro-flexure structure comprising an elongate, dielectric flexure body having a mounting end and a free end, said body taking the form of a solid which has been constructed entirely via thin-film deposition and patterning processes, with the body having a shape which is at least partially determined by ablating a boundary structure, and wherein said body's shape is characterized at least partially by discontinuous surface topography.
Claim 24
Dependent Claim
68 words
A unitary micro-flexure structure comprising an elongate, dielectric flexure body having a mounting end and a free end, said body taking the form of a solid which has been constructed entirely via thin-film deposition and patterning processes, with the body having a shape which is at least partially determined by ablating a boundary structure, and wherein said body's shape is characterized at least partially by discontinuous surface topography.
Claim 25
Dependent Claim
15 words
The micro-flexure structure of claim 22, wherein said body is formed of a metal oxide.
Claim 26
Dependent Claim
14 words
The micro-flexure structure of claim 22, wherein said body is formed of aluminum oxide.
Claim 27
Dependent Claim
14 words
The micro-flexure structure of claim 22, wherein said body is formed of silicon dioxide.
Claim 28
Dependent Claim
26 words
The micro-flexure structure of claims 1, 2, 3, or 4, wherein said body, intermediate its said two ends and progressing therebetween, changes in transverse cross-sectional area.
Claim 29
Dependent Claim
21 words
The structure of claim 26, wherein the body has a width, said changes including changes in the width of the body.
Claim 30
Dependent Claim
21 words
The structure of claim 26, wherein the body has a thickness, said changes including changes in the thickness of the body.
Claim 31
Dependent Claim
64 words
A unitary micro-flexure structure comprising an elongate, dielectric body having a mounting end and a free end, said body taking the form of a portion of a solid expanse fabricated on a supporting substrate entirely via thin-film and patterning processes including the step of topographically shaping the expanse to provide boundary definition by way of non-machining, laser-based selective removing of material from the expanse.
Claim 32
Dependent Claim
64 words
A unitary micro-flexure structure comprising an elongate, dielectric body having a mounting end and a free end, said body taking the form of a portion of a solid expanse fabricated on a supporting substrate entirely via thin-film and patterning processes including the step of topographically shaping the expanse to provide boundary definition by way of non-machining, laser-based selective removing of material from the expanse.
Claim 33
Dependent Claim
57 words
A unitary micro-flexure structure comprising an elongate, dielectric body having a mounting end and a free end, said body taking the form of a portion of a solid expanse fabricated on a supporting substrate entirely via thin-film and patterning processes including topographical shaping to provide boundary definition by way of non-machining selective material removal from the expanse.
Claim 34
Dependent Claim
57 words
A unitary micro-flexure structure comprising an elongate, dielectric body having a mounting end and a free end, said body taking the form of a portion of a solid expanse fabricated on a supporting substrate entirely via thin-film and patterning processes including topographical shaping to provide boundary definition by way of non-machining selective material removal from the expanse.
Claim 35
Dependent Claim
55 words
A unitary micro-flexure structure comprising an elongate, dielectric-flexure body having a mounting end and a free end adapted to support a transducer capable of reading and writing magnetic images on a relatively moving magnetic recording medium, said body taking the form of a solid which has been constructed entirely via thin-film deposition and patterning processes.
Claim 36
Dependent Claim
55 words
A unitary micro-flexure structure comprising an elongate, dielectric-flexure body having a mounting end and a free end adapted to support a transducer capable of reading and writing magnetic images on a relatively moving magnetic recording medium, said body taking the form of a solid which has been constructed entirely via thin-film deposition and patterning processes.
Claim 37
Dependent Claim
39 words
A unitary micro-flexure structure comprising an elongate, flexure body having a mounting end and a free end adapted to support a transducer capable of reading and writing magnetic images on and while contacting a relatively moving rigid recording medium.
Claim 38
Dependent Claim
39 words
A unitary micro-flexure structure comprising an elongate, flexure body having a mounting end and a free end adapted to support a transducer capable of reading and writing magnetic images on and while contacting a relatively moving rigid recording medium.
Claim 39
Dependent Claim
49 words
A unitary micro-flexure structure comprising an elongate, flexure body having a mounting end and a free end adapted to support a transducer capable of reading and writing magnetic images on a relatively moving rigid recording medium, said body taking the form of an integrated organization of solid thin films.
Claim 40
Dependent Claim
49 words
A unitary micro-flexure structure comprising an elongate, flexure body having a mounting end and a free end adapted to support a transducer capable of reading and writing magnetic images on a relatively moving rigid recording medium, said body taking the form of an integrated organization of solid thin films.
Claim 41
Dependent Claim
28 words
The micro-flexure structure of claim 33 wherein the organization of solid thin films defines a magnetic read/write pole structure and electrical coil structure embedded within a dielectric material.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-09-25 | 1999-03-27 | 1999-09-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-09-25 | 2003-03-27 | 2003-09-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-09-25 | 2007-03-27 | 2007-09-26 | $7700.00 | Window Closed / Lapsed |