Patent US5456627A successfully refreshed from Google Patents.
US5456627A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Conditioner for a polishing pad and method therefor
Assignee: Novellus Systems Inc
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Filing: 1993-12-20
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Granted: 1995-10-10
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Expires: 2013-12-20
Abstract
Abstract An axially rotating circular polishing pad is conditioned by a rotating end effector that has an abrasion disc in contact with a polishing surface of the pad. The end effector moves along a radius of the polishing pad surface at a velocity that varies to compensate for locations on the polishing pad surface having linear velocities that are directly related to their respective radii. A desired contact force is maintained between the end effector and the polishing pad surface.
Inventors
- 👤 Paul D. Jackson
- 👤 Stephen C. Schultz
- 👤 James E. Sanford
- 👤 Glen Ong
- 👤 Richard B. Rice
- 👤 Parag S. Modi
- 👤 John G. Baca
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 03:12
CPC Classifications
B; B24; B24B; B24B53/00; B24B53/017; B24B49/00; B24B49/18
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
85 words
An apparatus for conditioning a polishing surface of a pad that is rotatable about a pad axis, comprising: end effector means for contacting said polishing surface; arm means coupled to said end effector means for moving said end effector means along a radial line passing through said pad axis; and programming means coupled to said arm means for moving said end effector means across said polishing surface of said pad at a programmable rate to obtain uniform conditioning of said polishing surface of said pad.
Claim 2
Independent Claim
85 words
An apparatus for conditioning a polishing surface of a pad that is rotatable about a pad axis, comprising: end effector means for contacting said polishing surface; arm means coupled to said end effector means for moving said end effector means along a radial line passing through said pad axis; and programming means coupled to said arm means for moving said end effector means across said polishing surface of said pad at a programmable rate to obtain uniform conditioning of said polishing surface of said pad.
Claim 3
Dependent Claim
51 words
An apparatus according to claim 1 further comprising: abrasive disc means coupled to said end effector means for contacting said polishing surface of said pad; said abrasive disc means rotating about a disc axis and simultaneously moving with said end effector means along said radial line passing through said pad axis.
Claim 4
Dependent Claim
50 words
An apparatus according to claim 2, said programming means further comprising rate means for controlling the rate of movement along a radial line of said end effector so that the linear velocity of said abrasion disc relative to said polishing surface of said pad remains constant to produce uniform conditioning.
Claim 5
Dependent Claim
34 words
An apparatus according to claim 3, further comprising: force means coupled to said end effector means for programmably controlling the contact force applied by said abrasion disc on said polishing surface of said pad.
Claim 6
Dependent Claim
122 words
An apparatus according to claim 4, said force means further comprising: controller means for providing a high gain amplifier having a differential input and an output; computer means coupled to said differential input for generating a signal proportional to a programmed level of contact force; transducer means coupled to said differential input for generating a signal proportional to the actual level of contact force applied by said abrasion disc on said polishing surface of said pad; and actuator means coupled to said output of said controller means and operably coupled to said end effector means for moving said end effector means in the direction required to cause said actual level of contact force to be equal to programmed level of contact force.
Claim 7
Dependent Claim
39 words
An apparatus according to claim 1, said arm means further comprising: lead screw means coupled to said end effector means for providing transverse movement to said end effector means; and rotational means for axially rotating said lead screw means.
Claim 8
Dependent Claim
53 words
An apparatus according to claim 6, said arm means further comprising: cantilever arm means coupled to a mounting end and containing said lead screw means and said rotational means for rotating around said mounting end to position said end effector means to allow movement along a radial line passing through said pad axis.
Claim 9
Dependent Claim
26 words
An apparatus according to claim 6, said rotational means further comprising a servomotor coupled to said lead screw means and a resolver coupled to said servomotor.
Claim 10
Independent Claim
91 words
A method for conditioning a polishing surface of a pad that is rotatable about a pad axis, comprising the steps of: providing end effector means for contacting said polishing surface; providing arm means coupled to said end effector means for moving said end effector means along a radial line passing through said pad axis; and providing programming means coupled to said arm means for moving said end effector means across said polishing surface of said pad at a programmable rate to obtain uniform conditioning of said polishing surface of said pad.
Claim 11
Independent Claim
91 words
A method for conditioning a polishing surface of a pad that is rotatable about a pad axis, comprising the steps of: providing end effector means for contacting said polishing surface; providing arm means coupled to said end effector means for moving said end effector means along a radial line passing through said pad axis; and providing programming means coupled to said arm means for moving said end effector means across said polishing surface of said pad at a programmable rate to obtain uniform conditioning of said polishing surface of said pad.
Claim 12
Dependent Claim
55 words
The method according to claim 9 further comprising the step of: providing abrasive disc means coupled to said end effector means for contacting said polishing surface of said pad; said abrasive disc means rotating about a disc axis and simultaneously moving with said end effector means along said radial line passing through said pad axis.
Claim 13
Dependent Claim
50 words
The method according to claim 10, said programming means further comprising rate means for controlling the rate of movement along a radial line of said end effector so that the linear velocity of said abrasion disc relative to said polishing surface of said pad remains constant to produce uniform conditioning.
Claim 14
Dependent Claim
38 words
The method according to claim 11, further comprising the step of: providing force means coupled to said end effector means for programmably controlling the contact force applied by said abrasion disc on said polishing surface of said pad.
Claim 15
Dependent Claim
133 words
The method according to claim 12, said step of providing force means further comprising the steps of: providing controller means for providing a high gain amplifier having a differential input and an output; providing computer means coupled to said differential input for generating a signal proportional to a programmed level of contact force; providing transducer means coupled to said differential input for generating a signal proportional to the actual level of contact force applied by said abrasion disc on said polishing surface of said pad; and providing actuator means coupled to said output of said controller means and operably coupled to said end effector means for moving said end effector means in the direction required to cause said actual level of contact force to be equal to said programmed level of contact force.
Claim 16
Dependent Claim
39 words
The method according to claim 9, said arm means further comprising: lead screw means coupled to said end effector means for providing transverse movement to said end effector means; and rotational means for axially rotating said lead screw means.
Claim 17
Dependent Claim
53 words
The method according to claim 14, said arm means further comprising: cantilever arm means coupled to a mounting end and containing said lead screw means and said rotational means for rotating around said mounting end to position said end effector means to allow movement along a radial line passing through said pad axis.
Claim 18
Dependent Claim
26 words
The method according to claim 15, said rotational means further comprising a servomotor coupled to said lead screw means and a resolver coupled to said servomotor.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-10-09 | 1999-04-10 | 1999-10-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-10-09 | 2003-04-10 | 2003-10-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-10-09 | 2007-04-10 | 2007-10-10 | $7700.00 | Window Closed / Lapsed |