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US5477013A Expired / Lapsed US ⏱️ 0.0 years remaining

Soundproofing device for a resonant scanner

Assignee: Nikon Corp
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Filing: 1994-01-14
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Granted: 1995-12-19
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Expires: 2014-01-14
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Abstract

Abstract A soundproofing device for a resonant scanner for deflecting a laser beam includes a plate member for fixing the resonant scanner, a plurality of stanchions for supporting the plate member, and a base for fixing the stanchions. The stanchions support the plate member at a position at which an amplitude of the plate member at a resonant frequency of the resonant scanner is minimum.

Inventors

  • 👤 Hisashi Okugawa
  • 👤 Akira Adachi

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-31 09:56
CPC Classifications
G; G10; G10K; G10K11/00; G10K11/16

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 82 words
A soundproofing device for a resonant scanner resonating at a predetermined frequency to deflect a laser beam, comprising: a plate member to support said resonant scanner on a surface of the plate member; a plurality of stanchions supporting said plate member and a base to which said plate member is fixed by said stanchions, said stanchions supporting said plate member at a position at which an amplitude of vibration of said plate member caused by resonance of said resonant scanner is minimum.
Claim 2
Dependent Claim 82 words
A soundproofing device for a resonant scanner resonating at a predetermined frequency to deflect a laser beam, comprising: a plate member to support said resonant scanner on a surface of the plate member; a plurality of stanchions supporting said plate member and a base to which said plate member is fixed by said stanchions, said stanchions supporting said plate member at a position at which an amplitude of vibration of said plate member caused by resonance of said resonant scanner is minimum.
Claim 3
Dependent Claim 38 words
A soundproofing device for a resonant scanner according to claim 1, wherein a size and shape of said plate member are such that said plate member vibrates in an odd-order vibration mode by resonance of said resonant scanner.
Claim 4
Dependent Claim 21 words
A soundproofing device for a resonant scanner according to claim 1, wherein said plate member vibrates in a primary vibration mode.
Claim 5
Dependent Claim 21 words
A soundproofing device for a resonant scanner according to claim 1 wherein said plate member vibrates in a 3-order vibration mode.
Claim 6
Dependent Claim 63 words
A soundproofing device for a resonant scanner according to claim 1, further comprising a soundproofing wall surrounding a space in which said resonant scanner and said plate member are contained, and wherein said soundproofing wall has an opening through which the laser beam irradiated to said resonant scanner passes and an opening through which the laser beam deflected by said resonant scanner passes.
Claim 7
Dependent Claim 63 words
A soundproofing device for a resonant scanner according to claim 5, wherein said soundproofing wall includes an inner wall contacting said space in which said resonant scanner and said plate member are contained to absorb a sound from said resonant scanner, and a metal layer disposed on an opposite side of said space with respect to said inner wall to reflect the sound.
Claim 8
Dependent Claim 77 words
A soundproofing device for a resonant scanner resonating at a predetermined frequency so as to deflect a laser beam, comprising: a plate member to support said resonant scanner on a surface of the plate member; a plurality of stanchions supporting said plate member; and a base to which said plate member is fixed by said stanchions, said stanchions supporting said plate member at nodes of vibration of said plate member caused by resonance Of said resonant scanner
Claim 9
Dependent Claim 77 words
A soundproofing device for a resonant scanner resonating at a predetermined frequency so as to deflect a laser beam, comprising: a plate member to support said resonant scanner on a surface of the plate member; a plurality of stanchions supporting said plate member; and a base to which said plate member is fixed by said stanchions, said stanchions supporting said plate member at nodes of vibration of said plate member caused by resonance Of said resonant scanner
Claim 10
Dependent Claim 40 words
A soundproofing device for a resonant scanner according to claim 7, wherein a size and a shape of said plate member are determined so that said plate member vibrates in an odd-order vibration mode by resonance of said resonant scanner.
Claim 11
Dependent Claim 22 words
A soundproofing device for a resonant scanner according to claim 8 wherein said plate member is vibrated in a primary vibration mode.
Claim 12
Dependent Claim 22 words
A soundproofing device for a resonant scanner according to claim 8 wherein said plate member is vibrated in a 3-order vibration mode.
Claim 13
Dependent Claim 64 words
A soundproofing device for a resonant scanner as recited in claim 7, further comprising: a soundproofing wall surrounding a space in which said resonant scanner and said plate member are contained, and wherein said soundproofing wall has an opening through which the laser beam irradiated to said resonant scanner passes and an opening through which the laser beam deflected by said resonant scanner passes.
Claim 14
Dependent Claim 53 words
A soundproofing device for a resonant scanner as recited in claim 11, wherein said soundproofing wall has an inner wall contacting said space to absorb a sound from said resonant scanner, and a metal layer disposed on the opposite side of said space with respect to said inner wall to reflect the sound.

References Cited (Backward Citations)

US4215763A Cited
US5048904A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1998-12-18 1999-06-19 1999-12-19 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2002-12-18 2003-06-19 2003-12-19 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2006-12-18 2007-06-19 2007-12-19 $7700.00 Window Closed / Lapsed

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