Patent US5486131A successfully refreshed from Google Patents.
US5486131A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for conditioning polishing pads
Assignee: Speedfam IPEC Corp
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Filing: 1994-01-04
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Granted: 1996-01-23
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Expires: 2014-01-04
Abstract
Abstract A device for conditioning the surface of a polishing pad covering a platen mounted on a polishing machine for rotation about a vertical axis, comprising a rigid carrier element carrying cutting means on its bottom surface and which is adapted for vertical movement into and out of engagement with the surface of a polishing pad and which is adapted for oscillating horizontal movement over the surface of the polishing pad. The cutting means are dispersed in a circular or ring configuration.
Inventors
- 👤 Joseph V. Cesna
- 👤 Anthony G. Van Woerkom
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 18:16
CPC Classifications
B; B24; B24B; B24B1/00; B24B53/00; B24B53/017; B24B53/10
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
121 words
A process for simultaneously truing and dressing a polishing pad covering a platen mounted on a polishing machine for rotation about a vertical axis which comprises while said polishing pad is being rotated bringing under pressure into contact with the top exposed surface of said polishing pad and oscillating over the said pad surface a carrier element adapted for vertical movement into and out of substantially perpendicular engagement with the surface of a polishing pad and for oscillating radial movement over the surface of the polishing pad, said carrier element being in the shape of a ring and carrying on its bottom surface cutting means disposed in a circular ring configuration for truing and dressing the polishing pad by contact therewith.
Claim 2
Dependent Claim
121 words
A process for simultaneously truing and dressing a polishing pad covering a platen mounted on a polishing machine for rotation about a vertical axis which comprises while said polishing pad is being rotated bringing under pressure into contact with the top exposed surface of said polishing pad and oscillating over the said pad surface a carrier element adapted for vertical movement into and out of substantially perpendicular engagement with the surface of a polishing pad and for oscillating radial movement over the surface of the polishing pad, said carrier element being in the shape of a ring and carrying on its bottom surface cutting means disposed in a circular ring configuration for truing and dressing the polishing pad by contact therewith.
Claim 3
Dependent Claim
32 words
A process in accordance with claim 1 wherein the carrier element is provided with spaced cut-out portions along its periphery to permit materials to escape from the interior of the carrier element.
Claim 4
Dependent Claim
14 words
A process in accordance with claim 1 wherein the cutting means comprises diamond particles.
Claim 5
Dependent Claim
27 words
A process in accordance with claim 3 in which the diamond cutting means have a particle size of not larger than about 60 mesh, U.S. Sieve Series.
Claim 6
Dependent Claim
18 words
A process in accordance with claim 1 wherein the cutting elements comprise a blade having cutting teeth thereon.
Claim 7
Independent Claim
84 words
A device for simultaneously truing and dressing a polishing pad covering a platen mounted on a polishing machine for rotation about a vertical axis, comprising a carrier element adapted for vertical substantially perpendicular movement into and out of engagement with the surface of a polishing pad and for oscillating radial movement over the surface of the polishing pad, said carrier element having a ring-shaped flange downwardly depending from its bottom surface carrying cutting means for truing and dressing the polishing pad by contact therewith.
Claim 8
Independent Claim
84 words
A device for simultaneously truing and dressing a polishing pad covering a platen mounted on a polishing machine for rotation about a vertical axis, comprising a carrier element adapted for vertical substantially perpendicular movement into and out of engagement with the surface of a polishing pad and for oscillating radial movement over the surface of the polishing pad, said carrier element having a ring-shaped flange downwardly depending from its bottom surface carrying cutting means for truing and dressing the polishing pad by contact therewith.
Claim 9
Dependent Claim
30 words
A device in accordance with claim 6 having spaced cut-out portions along the periphery of the flange element to permit materials to escape from the interior of the carrier element.
Claim 10
Dependent Claim
14 words
A device in accordance with claim 6 wherein the cutting means comprises diamond particles.
Claim 11
Dependent Claim
27 words
A device in accordance with claim 8 in which the diamond cutting means have a particle size of not larger than about 80 mesh, U.S. Sieve Series.
Claim 12
Dependent Claim
19 words
A device in accordance with claim 6 wherein the cutting means comprise a circular blade having cutting teeth thereon.
References Cited (Backward Citations)
US4102084A
Cited
US4663890A
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US4760668A
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US4720938A
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US5081051A
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US5216843A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-01-22 | 1999-07-24 | 2000-01-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-01-22 | 2003-07-24 | 2004-01-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-01-22 | 2007-07-24 | 2008-01-23 | $7700.00 | Window Closed / Lapsed |