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US5514885A Expired / Lapsed US ⏱️ 0.0 years remaining

SOI methods and apparatus

Assignee: Individual
•
Filing: 1995-01-13
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Granted: 1996-05-07
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Expires: 2015-01-13
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Abstract

Abstract A charge coupled device is fabricated from a monocrystalline semiconductor-on-insulator (SOI) composite structure.

Inventors

  • 👤 James J. Myrick

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 14:26
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/24; G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/13; G02B6/132; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/2924; H10P14/2925; H10P14/2926; H10P14/32; H10P14/3202; H10P14/3204; H10P14/3206; H10P14/3238; H10P14/3242; H10P14/3244; H10P14/3248; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3421; H10P14/3451; H10P14/3452; H10P14/3458; H10P14/38; H10P14/3802; H10P90/00; H10P90/19; H10P90/1904; H10P90/1906; H10P90/1912; H10W; H10W10/00; H10W10/10; H10W10/181; H10W20/00; H10W20/40

Claims Analysis

Total Claims: 3
Claim 1
Independent Claim 93 words
A charge coupled device having a low operating capacitance comprising a monocrystalline semiconductor substrate, a dielectric layer atop said substrate, a thin monocrystalline semiconductor layer spitaxially monolithic with said monocrystalline substrate at a plurality of window zones through said dielectric layer, atop said dielectric layer, said thin monocrystalline semiconductor layer having a thickness in the range of from about 0.25 to about 5 microns, and having a defined thin semiconductor charge conduction channel, input and output structures in said channel, and charge transfer electrodes atop said channel between said input and output structures.
Claim 2
Dependent Claim 93 words
A charge coupled device having a low operating capacitance comprising a monocrystalline semiconductor substrate, a dielectric layer atop said substrate, a thin monocrystalline semiconductor layer spitaxially monolithic with said monocrystalline substrate at a plurality of window zones through said dielectric layer, atop said dielectric layer, said thin monocrystalline semiconductor layer having a thickness in the range of from about 0.25 to about 5 microns, and having a defined thin semiconductor charge conduction channel, input and output structures in said channel, and charge transfer electrodes atop said channel between said input and output structures.
Claim 3
Dependent Claim 32 words
A charge coupled device in accordance with claim 1 wherein said device is a buried channel device, and wherein said thin monocrystalline semiconductor layer comprises a p-type layer and an n-type layer.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1999-05-07 1999-11-06 2000-05-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2003-05-07 2003-11-06 2004-05-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2007-05-07 2007-11-06 2008-05-07 $7700.00 Window Closed / Lapsed

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