Layered low dielectric constant technology

Claim 2

A layered dielectric structure separating a tirst layer of metal interconnects from each other in semiconductor devices and for separating said first layer of metal interconnects from a second, overlying layer of metal interconnects for making electrical contact to said first layer of metal interconnects, said layered dielectric structure comprising: (a) a layer of an organic spin-on-glass material filling gaps between metal interconnects in said first layer of metal interconnects; (b) a layer of an inorganic spin-on-glass material to provide planarization to support said second layer of metal interconnects; and (c) a layer of a chemically vapor deposited oxide comprising silicon-rich silicon dioxide and separating said organic spin-on-glass layer and said inorganic spin-on-glass layer.

Claim 3

The layered dielectric structure of claim 1 wherein said organic spin-on-glass material consists essentially of organic spin-on-glass silicon oxide derived essentially from siloxane containing high carbon concentrations.

Claim 4

The layered dielectric structure of claim 1 wherein said inorganic spin-on-glass material consists essentially of inorganic spin-on-glass silicon oxide derived essentially from silicate or hydrogen silsesquioxane.

Claim 5

The layered dielectric structure of claim 1 wherein said chemically vapor deposited oxide layer has a thickness in the range of about 500 to 1,000 Å.

Claim 6

The layered dielectric structure of claim 1 having a first dielectric constant of about 3.2 associated with a first region of said layered dielectric structure separating said first layer of metal interconnects from each other, and having a second dielectric constant within the range of about 3.36 to 3.46 associated with a second region of said layer dielectric structure separating said first layer of metal interconnects from said second, overlying layer of metal interconnects.

Claim 7

The layered dielectric structure of claim 2 wherein said organic spin-on-glass layer has a thickness that is approximately one-half that of said metal interconnect.

Claim 8

The layered dielectric structure of claim 2 wherein said siloxane containing high carbon concentrations comprises silsesquioxanes having an alkyl functionality.

Claim 9

The layered dielectric structure of claim 2 wherein said organic spin-on-glass silicon oxide has a dielectric constant of about 2.6.

Claim 10

The layered dielectric structure of claim 3 wherein said inorganic spin-on-glass layer has a thickness that is less than about 6,000 Å.

Claim 11

The layered dielectric structure of claim 3 wherein said inorganic spin-on-glass silicon oxide has a dielectric constant of about 3.2

Claim 12

A layered dielectric structure separating a first layer of metal interconnects from each other in semiconductor devices and for separating said first layer of metal interconnects from a second, overlying layer of metal interconnects for making electrical contact to said first layer of metal interconnects, the layered dielectric structure comprising: (a) a first plasma-enhanced, chemically vapor deposited oxide layer comprising silicon-rich silicon dioxide and coating all exposed metal surfaces of said first metal interconnect layer and exposed semiconductor surfaces to form oxide-coated metal interconnects; (b) an organic spin-on-glass material partially filling spaces between said metal interconnects and leaving top portions of said oxide-coated metal interconnects exposed; (c) a second plasma-enhanced chemically vapor deposited layer comprising silicon-rich silicon dioxide and formed on said top portions of said oxide-coated metal interconnects and on said organic spin-on-glass layer; (d) a first inorganic spin-on-glass layer coating said second plasma-enhanced chemically vapor deposited oxide layer; (e) a third plasma-enhanced chemically vapor deposited oxide layer comprising silicon-rich silicon dioxide and coating said first inorganic spin-on-glass layer; (f) a planar, second inorganic spin-on-glass layer coating said third plasma-enhanced chemically vapor deposited layer; and (g) said second layer of metal interconnects on top of said second inorganic spin-on-glass layer.

Claim 13

A layered dielectric structure separating a first layer of metal interconnects from each other in semiconductor devices and for separating said first layer of metal interconnects from a second, overlying layer of metal interconnects for making electrical contact to said first layer of metal interconnects, the layered dielectric structure comprising: (a) a first plasma-enhanced, chemically vapor deposited oxide layer comprising silicon-rich silicon dioxide and coating all exposed metal surfaces of said first metal interconnect layer and exposed semiconductor surfaces to form oxide-coated metal interconnects; (b) an organic spin-on-glass material partially filling spaces between said metal interconnects and leaving top portions of said oxide-coated metal interconnects exposed; (c) a second plasma-enhanced chemically vapor deposited layer comprising silicon-rich silicon dioxide and formed on said top portions of said oxide-coated metal interconnects and on said organic spin-on-glass layer; (d) a first inorganic spin-on-glass layer coating said second plasma-enhanced chemically vapor deposited oxide layer; (e) a third plasma-enhanced chemically vapor deposited oxide layer comprising silicon-rich silicon dioxide and coating said first inorganic spin-on-glass layer; (f) a planar, second inorganic spin-on-glass layer coating said third plasma-enhanced chemically vapor deposited layer; and (g) said second layer of metal interconnects on top of said second inorganic spin-on-glass layer.

Claim 14

The layered dielectric structure of claim 11 wherein said organic spin-on-glass material consists essentially of organic spin-on-glass silicon oxide derived essentially from siloxane containing high carbon concentrations.

Claim 15

The layered dielectric structure of claim 11 wherein said inorganic spin-on-glass material consists essentially of inorganic spin-on-glass silicon oxide derived essentially from silicate or hydrogen silsesquioxane.

Claim 16

The layered dielectric structure of claim 11 having a first dielectric constant of about 3.2 associated with a first region of said layered dielectric structure separating said first layer of metal interconnects from each other, and having a second dielectric constant within the range of about 3.36 to 3.46 associated with a second region of said layer dielectric structure separating said first layer of metal interconnects from said second, overlying layer of metal interconnects.

Claim 17

The layered dielectric structure of claim 12 wherein said siloxane containing high carbon concentrations comprises silsesquioxanes having an alkyl functionality.

Claim 18

The layered dielectric structure of claim 12 wherein said organic spin-on-glass silicon oxide has a dielectric constant of about 2.6.

Claim 19

The layered dielectric structure of claim 13 wherein said inorganic spin-on-glass silicon oxide has a dielectric constant of about 3.2.