US5569062A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polishing pad conditioning
Assignee: Speedfam IPEC Corp
•
Filing: 1995-07-03
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Granted: 1996-10-29
•
Expires: 2015-07-03
Abstract
Abstract A rotating polishing wheel having secured to its top surface a polishing pad and a vertically movable carrier element for carrying a workpiece to be polished into contact with the polishing pad and exerting a desired pressure on the workpiece. Operatively attached to the carrier is a conditioning element movable with the carrier and having on its bottom surface cutting means disposed in a circular configuration for conditioning the polishing pad by contact therewith.
Inventors
- 👤 Chris Karlsrud
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 06:00
CPC Classifications
B; B24; B24B; B24B53/00; B24B53/017; B24B37/00; B24B37/02
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
72 words
Apparatus for polishing a workpiece which comprises, in combination, a rotating polishing wheel having secured to its top surface a polishing pad, a vertically movable carrier element for carrying a workpiece to be polished into contact under pressure with said polishing pad, and a conditioning element supported by said carrier element and having on its bottom surface cutting means disposed in a circular configuration for conditioning the polishing pad by contact therewith.
Claim 2
Dependent Claim
72 words
Apparatus for polishing a workpiece which comprises, in combination, a rotating polishing wheel having secured to its top surface a polishing pad, a vertically movable carrier element for carrying a workpiece to be polished into contact under pressure with said polishing pad, and a conditioning element supported by said carrier element and having on its bottom surface cutting means disposed in a circular configuration for conditioning the polishing pad by contact therewith.
Claim 3
Dependent Claim
23 words
The apparatus of claim 1 wherein the bottom surface of the conditioning element terminates in a sharp point to define the cutting means.
Claim 4
Dependent Claim
19 words
The apparatus of claim 1 wherein the conditioning element is provided with spaced cut-out portions along its lower periphery.
Claim 5
Dependent Claim
22 words
The apparatus of claim 1 wherein the cutting means are hard cutting elements secured to the bottom surface of the conditioning element.
Claim 6
Dependent Claim
12 words
The apparatus of claim 1 wherein the cutting means comprise diamond particles.
Claim 7
Dependent Claim
12 words
The apparatus of claim 1 wherein the cutting means comprise cutting teeth.
Claim 8
Dependent Claim
13 words
The apparatus of claim 1 wherein the cutting means comprise a serrated blade.
Claim 9
Independent Claim
83 words
A method of polishing a workpiece which comprises providing a carrier element and a conditioning element, supporting the conditioning element with the carrier element, and contacting the workpiece with the carrier element so as to press the workpiece into contact with a rotating polishing wheel which is covered on its upper surface with a polishing pad, so as to effect polishing of the workpiece, and so as to condition the pad by contacting the pad with the conditioning element while polishing the workpiece.
Claim 10
Independent Claim
83 words
A method of polishing a workpiece which comprises providing a carrier element and a conditioning element, supporting the conditioning element with the carrier element, and contacting the workpiece with the carrier element so as to press the workpiece into contact with a rotating polishing wheel which is covered on its upper surface with a polishing pad, so as to effect polishing of the workpiece, and so as to condition the pad by contacting the pad with the conditioning element while polishing the workpiece.
Claim 11
Dependent Claim
20 words
A method according to claim 8, wherein an abrasive slurry is introduced between the polishing pad and workpiece during polishing.
Claim 12
Dependent Claim
16 words
A method according to claim 8, wherein the conditioning element is rotated while contacting the pad.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-10-29 | 2000-04-29 | 2000-10-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-10-29 | 2004-04-29 | 2004-10-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-10-29 | 2008-04-29 | 2008-10-29 | $7700.00 | Window Closed / Lapsed |