RF match detector circuit with dual directional coupler

Claim 2

A detector circuit for controlling an RF match circuit that receives an RF power signal from an RF source and delivers said RF power signal to a load, said RF match circuit including a first variable reactance element and a second variable reactance element, wherein a variable reactance of said first reactance element is controlled by a first control signal and a variable reactance of said second reactance element is controlled by a second control signal, said detector circuit comprising: a dual directional coupler having an input for connecting to the RF source and an output for connecting to the RF match circuit, said dual directional coupler generating a forward signal and a reflected signal, said forward signal being proportional to RF power delivered to the match circuit and said reflected signal being proportional to RF power reflected back from the RF match circuit; a first branch circuit receiving the reflected signal and producing a first and second output signal therefrom; a second branch circuit receiving the forward signal and producing a first and second output signal therefrom; a first phase detector receiving the first output signals of the first and second branch circuits and generating a first phase detection output signal from which said first control signal is derived; and a second phase detector receiving the second output signals of the first and second branch circuits and generating a second phase detection output signal from which said second control signal is derived.

Claim 3

The detector circuit of claim 1 wherein said first branch circuit comprises a first power splitter receiving a signal derived from the reflected signal and generating first and second output signals therefrom, the first and second output signals of said first branch circuit being derived, respectively, from the first and second output signals of the first power splitter.

Claim 4

The detector circuit of claim 2 wherein said second branch circuit comprises a second power splitter receiving a signal derived from the forward signal and generating first and second output signals therefrom, the first and second output signals of said second branch circuit being derived, respectively, from the first and second output signals of the second power splitter.

Claim 5

The detector circuit of claim 3 wherein the first output signal of the first branch circuit is a phase shifted version of the second output signal of the first branch circuit.

Claim 6

The detector circuit of claim 4 wherein the first output signal of the second branch circuit is a phase shifted version of the second output signal of the second branch circuit.

Claim 7

The detector circuit of claim 3 wherein said first branch circuit further comprises a first phase shift element receiving the first output signal of the first power splitter and producing a first phase shifted signal therefrom, said first phase shifted signal being equal to said first output signal of the first power splitter shifted by a first phase shift amount, said first phase shifted signal being said first output signal of the first branch circuit.

Claim 8

The detector circuit of claim 6 wherein said second branch circuit further comprises a second phase shift element receiving the first output signal of the second power splitter and producing a second phase shifted signal therefrom, said second phase shifted signal being equal to said first output signal of the second power splitter shifted by a second phase shift amount, said second phase shifted signal being said first output signal of the second branch circuit.

Claim 9

The detector circuit of claim 3 wherein said first branch circuit further comprises a first phase shift element receiving the second output signal of the first power splitter and producing a first phase shifted signal therefrom, said first phase shifted signal being equal to said second output signal of the first power splitter shifted by a first phase shift amount, said first phase shifted signal being said second output signal of the first branch circuit.

Claim 10

The detector circuit of claim 8 wherein said second branch circuit further comprises a second phase shift element receiving the second output signal of the second power splitter and producing a second phase shifted signal therefrom, said second phase shifted signal being equal to said second output signal of the second power splitter shifted by a second phase shift amount, said second phase shifted signal being said second output signal of the second branch circuit.

Claim 11

The detector circuit of claim 2 wherein the first branch circuit comprises a first harmonic low pass filter receiving said reflected signal and producing said signal derived from the reflected signal.

Claim 12

The detector circuit of claim 10 wherein the second branch circuit comprises a second harmonic low pass filter receiving said forward signal and producing said signal derived from the forward signal.

Claim 13

The detector circuit of claim 1 wherein the RF power signal is characterized by a primary frequency and further comprising a harmonic termination filter connected to the output of the dual directional coupler, wherein the harmonic termination filter terminates harmonics of the primary frequency.

Claim 14

The detector circuit of claim 12 wherein said harmonic termination filter is designed to terminate signals at a 2 nd harmonic of said primary frequency.

Claim 15

The detector circuit of claim 13 wherein said harmonic termination filter is designed to terminate signals at 2 nd and 3 rd harmonics of said primary frequency.

Claim 16

The detector circuit of claim 1 wherein the first phase detector produces a voltage output of zero when the first output signals of the first and second branch circuits are 90° out of phase.

Claim 17

The detector circuit of claim 15 wherein the first phase detector produces a voltage output having a first polarity when the first output signal of the first branch circuit is less than 90° out of phase with the first output signal of the second branch circuit and produces a voltage output having a second polarity when the first output signal of the first branch circuit is greater than 90° out of phase with the first output signal of the second branch circuit, wherein said first polarity is opposite said second polarity.

Claim 18

The detector circuit of claim 15 wherein the second phase detector produces a voltage output having a first polarity when the second output signal of the first branch circuit is less than 90° out of phase with the second output signal of the second branch circuit and produces a voltage output having a second polarity when the second output signal of the first branch circuit is greater than 90° out of phase with the second output signal of the second branch circuit, wherein said first polarity is opposite said second polarity.

Claim 19

The detector circuit of claim 1 further comprising a first low pass filter receiving the first phase detection output signal and producing said first control signal therefrom.

Claim 20

The detector circuit of claim 18 further comprising a second low pass filter receiving the second phase detection output signal and producing said second control signal therefrom.

Claim 21

A RF matching circuit for matching an RF power source to a load, said RF matching circuit comprising: an RF match section connected to the load; and a detector circuit connected between said RF source and said RF match section, said RF match section comprising: a first variable reactance element; a second variable reactance element; a first control circuit controlling the reactance of the first variable reactance element in response to a first control signal; and a second control circuit controlling the reactance of the second variable reactance element in response to a second control signal; said detector circuit comprising: a dual directional coupler having an input for connecting to the RF source and an output connected to the RF match section, said dual directional coupler generating a forward signal and a reflected signal, said forward signal being proportional to RF power delivered to the RF match section and said reflected signal being proportional to RF power reflected back from the RF match section; a first branch circuit receiving the reflected signal and producing a first and second output signal therefrom; a second branch circuit receiving the forward signal and producing a first and second output signal therefrom; a first phase detector receiving the first output signals of the first and second branch circuits and generating a first phase detection output signal from which said first control signal is derived; and a second phase detector receiving the second output signals of the first and second branch circuits and generating a second phase detection output signal from which said second control signal is derived.

Claim 22

A RF matching circuit for matching an RF power source to a load, said RF matching circuit comprising: an RF match section connected to the load; and a detector circuit connected between said RF source and said RF match section, said RF match section comprising: a first variable reactance element; a second variable reactance element; a first control circuit controlling the reactance of the first variable reactance element in response to a first control signal; and a second control circuit controlling the reactance of the second variable reactance element in response to a second control signal; said detector circuit comprising: a dual directional coupler having an input for connecting to the RF source and an output connected to the RF match section, said dual directional coupler generating a forward signal and a reflected signal, said forward signal being proportional to RF power delivered to the RF match section and said reflected signal being proportional to RF power reflected back from the RF match section; a first branch circuit receiving the reflected signal and producing a first and second output signal therefrom; a second branch circuit receiving the forward signal and producing a first and second output signal therefrom; a first phase detector receiving the first output signals of the first and second branch circuits and generating a first phase detection output signal from which said first control signal is derived; and a second phase detector receiving the second output signals of the first and second branch circuits and generating a second phase detection output signal from which said second control signal is derived.

Claim 23

The RF matching circuit of claim 20 wherein said first branch circuit comprises a first power splitter receiving a signal derived from the reflected signal and generating first and second output signals therefrom, the first and second output signals of said first branch circuit being derived, respectively, from the first and second output signals of the first power splitter and wherein said second branch circuit comprises a second power splitter receiving a signal derived from the forward signal and generating first and second output signals therefrom, the first and second output signals of said second branch circuit being derived, respectively, from the first and second output signals of the second power splitter.

Claim 24

The RF matching circuit of claim 21 wherein the first output signal of the first branch circuit is a phase shifted version of the second output signal of the first branch circuit, and wherein the first output signal of the second branch circuit is a phase shifted version of the second output signal of the second branch circuit.

Claim 25

The detector circuit of claim 22 wherein the first branch circuit comprises a first harmonic low pass filter receiving said reflected signal and producing said signal derived from the reflected signal, and wherein the second branch circuit comprises a second harmonic low pass filter receiving said forward signal and producing said signal derived from the forward signal.

Claim 26

The detector circuit of claim 22 wherein the RF power source delivers an RF power signal that is characterized by a primary frequency and further comprising a harmonic termination filter connected to the output of the dual directional coupler, wherein the harmonic termination filter terminates harmonics of the primary frequency.

Claim 27

The detector circuit of claim 20 wherein said first variable reactance element is a first variable capacitor.

Claim 28

The detector circuit of claim 25 wherein said second variable reactance element is a second variable capacitor.

Claim 29

The detector circuit of claim 25 wherein said first variable capacitor includes movable plates which control the capacitance thereof and wherein said first control circuit comprises a first motor that in response to said first control signal moves the plates of the first variable capacitor to vary the capacitance of the first variable capacitor.

Claim 30

The detector circuit of claim 26 wherein said second variable capacitor includes movable plates which control the capacitance thereof and wherein said second control circuit comprises a second motor that in response to said second control signal moves the plates of the second variable capacitor to vary the capacitance of the second variable capacitor.

Claim 31

A plasma processing system comprising: a plasma chamber; an RF matching circuit for matching an RF power source to said plasma chamber, said RF matching circuit comprising: an RF match section connected to the plasma chamber; and a detector circuit connected between said RF power source and said RF match section, said RF match section comprising: a first variable reactance element; a second variable reactance element; a first control circuit controlling the reactance of the first variable reactance element in response to a first control signal; and a second control circuit controlling the reactance of the second variable reactance element in response to a second control signal; said detector circuit comprising: a dual directional coupler having an input for connecting to the RF source and an output for connecting to the RF match circuit, said dual directional coupler generating a forward signal and a reflected signal, said forward signal being proportional to RF power delivered to the match circuit and said reflected signal being proportional to RF power reflected back from the RF match circuit; a first branch circuit receiving the reflected signal and producing a first and second output signal therefrom; a second branch circuit receiving the forward signal and producing a first and second output signal therefrom; a first phase detector receiving the first output signals of the first and second branch circuits and generating a first phase detection output signal from which said first control signal is derived; and a second phase detector receiving the second output signals of the first and second branch circuits and generating a second phase detection signal from which said second control signal is derived.

Claim 32

A plasma processing system comprising: a plasma chamber; an RF matching circuit for matching an RF power source to said plasma chamber, said RF matching circuit comprising: an RF match section connected to the plasma chamber; and a detector circuit connected between said RF power source and said RF match section, said RF match section comprising: a first variable reactance element; a second variable reactance element; a first control circuit controlling the reactance of the first variable reactance element in response to a first control signal; and a second control circuit controlling the reactance of the second variable reactance element in response to a second control signal; said detector circuit comprising: a dual directional coupler having an input for connecting to the RF source and an output for connecting to the RF match circuit, said dual directional coupler generating a forward signal and a reflected signal, said forward signal being proportional to RF power delivered to the match circuit and said reflected signal being proportional to RF power reflected back from the RF match circuit; a first branch circuit receiving the reflected signal and producing a first and second output signal therefrom; a second branch circuit receiving the forward signal and producing a first and second output signal therefrom; a first phase detector receiving the first output signals of the first and second branch circuits and generating a first phase detection output signal from which said first control signal is derived; and a second phase detector receiving the second output signals of the first and second branch circuits and generating a second phase detection signal from which said second control signal is derived.