Patent US5733798A successfully refreshed from Google Patents.
US5733798A
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Mask generation technique for producing an integrated circuit with optimal polysilicon interconnect layout for achieving global planarization
Assignee: GlobalFoundries Inc
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Filing: 1996-06-05
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Granted: 1998-03-31
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Expires: 2016-06-05
Abstract
Abstract A photolithography mask derivation process is provided for improving the overall planarity of interlevel dielectric deposited upon conductors formed by the derived photolithography mask. The photolithography mask is derived such that non-operational conductors are spaced a minimum distance from each other and from operational conductors to present a regular spaced arrangement of conductors upon which a dielectric layer can be deposited and readily planarized using, for example, chemical-mechanical polishing techniques. The resulting interlevel dielectric upper surface is globally planarized to an even elevational level across the entire semiconductor topography. The operational conductors are dissimilar from non-operational conductors in that the operational conductors are connected within a circuit path of an operational integrated circuit. Non-operational conductors are not connected within the integrated circuit path and generally are floating or are connected to a power supply. The non-operational conductors thereby do not contribute to the integrated circuit functionality other than to provide structural planarity to the overlying interlevel dielectric. The mask derivation process is applicable to either a metal interconnect photolithography mask or a polysilicon interconnect photolithography mask.
Inventors
- 👤 Mark W. Michael
- 👤 Robert Dawson
- 👤 Fred N. Hause
- 👤 Basab Bandyopadhyay
- 👤 H. Jim Fulford, Jr.
- 👤 William S. Brennan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 14:21
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/092; H10P; H10P95/00; H10P95/06; H10P95/062; H10W20/40; H10W20/41; H10W20/43
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
108 words
A method for producing a polysilicon interconnect photolithography mask, comprising: determining locations of polysilicon operational conductors relative to the position of said polysilicon operational conductors across a semiconductor topography; defining a space around the periphery of each said operational conductors; determining locations of polysilicon non-operational conductors spaced by a first amount of said space from the operational conductors and wherein said polysilicon non-operational conductors are spaced by a second amount of said space from each other across the semiconductor topography; and compiling the polysilicon interconnect photolithography mask by forming light transmissive features on the polysilicon interconnect photolithography mask commensurate with the locations of said operational and non-operational conductors.
Claim 2
Independent Claim
108 words
A method for producing a polysilicon interconnect photolithography mask, comprising: determining locations of polysilicon operational conductors relative to the position of said polysilicon operational conductors across a semiconductor topography; defining a space around the periphery of each said operational conductors; determining locations of polysilicon non-operational conductors spaced by a first amount of said space from the operational conductors and wherein said polysilicon non-operational conductors are spaced by a second amount of said space from each other across the semiconductor topography; and compiling the polysilicon interconnect photolithography mask by forming light transmissive features on the polysilicon interconnect photolithography mask commensurate with the locations of said operational and non-operational conductors.
Claim 3
Dependent Claim
31 words
The method as recited in claim 1, wherein said step of compiling comprises computing a position on said photolithography mask of said light transmissive features representing the operational and non-operational conductors.
Claim 4
Dependent Claim
29 words
The method as recited in claim 1, wherein said photolithography mask comprises said light transmissive features which are transferred as said operational and non-operational conductors upon the semiconductor topography.
Claim 5
Dependent Claim
37 words
The method as recited in claim 1, wherein said operational and non-operational conductors comprise a substantially uniform density of polysilicon across said semiconductor topography for improving the uniformity of spacing between each said operational and non-operational conductors.
Claim 6
Dependent Claim
23 words
The method as recited in claim 4, wherein said uniformity is improved to refine line width control of said operational and non-operational conductors.
Claim 7
Dependent Claim
36 words
The method as recited in claim 1, wherein said step of defining comprises applying a square about the periphery of each one of said operational conductors, and wherein the square comprises a side abutting said periphery.
Claim 8
Dependent Claim
36 words
The method as recited in claim 6, wherein the side of said square is of minimum spacing distance between said operational conductors, wherein said minimum spacing distance is according to layout guidelines for the semiconductor topography.
Claim 9
Independent Claim
79 words
A method for producing a polysilicon interconnect photolithography mask, comprising: producing light transmissive regions at regular spaced intervals across the photolithography mask; said light transmissive regions, when printed upon a semiconductor substrate, produce polysilicon operational and non-operational conductors, wherein both said polysilicon operational and non-operational conductors are spaced a uniform distance from each other; and said light transmissive regions extend substantially across the photolithography mask, and wherein said polysilicon operational and non-operational conductors extend substantially across the semiconductor substrate.
Claim 10
Independent Claim
79 words
A method for producing a polysilicon interconnect photolithography mask, comprising: producing light transmissive regions at regular spaced intervals across the photolithography mask; said light transmissive regions, when printed upon a semiconductor substrate, produce polysilicon operational and non-operational conductors, wherein both said polysilicon operational and non-operational conductors are spaced a uniform distance from each other; and said light transmissive regions extend substantially across the photolithography mask, and wherein said polysilicon operational and non-operational conductors extend substantially across the semiconductor substrate.
Claim 11
Dependent Claim
75 words
The method as recited in claim 8, wherein said producing comprises: determining target locations of said operational conductors relative to said semiconductor substrate; determining target locations of said non-operational conductors spaced a uniform distance from the operational conductors and from each other relative to said semiconductor substrate; and compiling said light transmissive regions upon said photolithography mask relative to regions where said target locations of said operational and non-operational conductors exist upon said semiconductor substrate.
Claim 12
Independent Claim
156 words
A method for producing a polysilicon interconnect photolithography mask, comprising: compiling a list of locations upon which a set of polysilicon operational conductors are targeted for existence upon a semiconductor topography; reserving a minimum space about each of the locations which the polysilicon operational conductors exist to define a set of oversized operational areas, wherein said minimum space is according to layout guidelines for the semiconductor topography; through an "OR" function, combining a field region upon the semiconductor topography with said oversized operational area to obtain a set of non-operational areas; compiling a list of locations upon which a set of polysilicon non-operational conductors are targeted for existence within the set of non-operational areas by applying the minimum space at regular intervals across each of the set of non-operational areas; and deriving a set of light transmissive regions at regular spaced intervals across a photolithography mask corresponding to the set of polysilicon operational and non-operational conductors.
Claim 13
Independent Claim
156 words
A method for producing a polysilicon interconnect photolithography mask, comprising: compiling a list of locations upon which a set of polysilicon operational conductors are targeted for existence upon a semiconductor topography; reserving a minimum space about each of the locations which the polysilicon operational conductors exist to define a set of oversized operational areas, wherein said minimum space is according to layout guidelines for the semiconductor topography; through an "OR" function, combining a field region upon the semiconductor topography with said oversized operational area to obtain a set of non-operational areas; compiling a list of locations upon which a set of polysilicon non-operational conductors are targeted for existence within the set of non-operational areas by applying the minimum space at regular intervals across each of the set of non-operational areas; and deriving a set of light transmissive regions at regular spaced intervals across a photolithography mask corresponding to the set of polysilicon operational and non-operational conductors.
Claim 14
Dependent Claim
49 words
The method as recited in claim 10, wherein said compiling comprises applying the minimum space to the non-operational areas in sequential order beginning in a region of each one of the non-operational areas closest to said oversized operational area and continuing into each one of the non-operational areas therefrom.
Claim 15
Dependent Claim
41 words
The method as recited in claim 10, wherein said light transmissive regions, when printed upon the semiconductor topography produce said polysilicon operational and non-operational conductors, wherein both said polysilicon operational and non-operational conductors are spaced a uniform distance from each other.
Claim 16
Dependent Claim
33 words
The method as recited in claim 12, wherein said light transmissive regions extend substantially across the photolithography mask, wherein the corresponding said polysilicon operational and non-operational conductors extend substantially across the semiconductor topography.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-03-30 | 2001-09-29 | 2002-03-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-03-30 | 2005-09-29 | 2006-03-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-03-30 | 2009-09-29 | 2010-03-31 | $7700.00 | Window Closed / Lapsed |