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US5814366A
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Method of manufacturing multilayered ceramic substrate
Assignee: Murata Manufacturing Co Ltd
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Filing: 1996-07-17
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Granted: 1998-09-29
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Expires: 2016-07-17
Abstract
Abstract In a method of manufacturing a multilayered ceramic substrate, a capacitor layer is formed on a green sheet of a low temperature co-firable ceramic by means of printing. The green sheet with the capacitor layer and a plurality of other green sheets are laminated together into a substrate laminate. Two release green sheets of alumina system each unsintered below 1,000 DEG C. are further laminated to the top and the bottom of the substrate laminate respectively. The obtained laminate is fired at a temperature ranging between 800 DEG and 1,000 DEG C. under pressure ranging between 2 and 20 kgf/cm2. The release green sheets adherent to the side surfaces of the substrate are removed after the firing. Subsequently, a wiring pattern is printed on the substrate, which is then fired at a temperature ranging between 800 DEG and 1,000 DEG C.
Inventors
- 👤 Junzo Fukuta
- 👤 Koji Shibata
- 👤 Nozomi Tanifuji
- 👤 Masaya Hashimoto
- 👤 Yoshiaki Yamade
- 👤 Hidenori Kataura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 17:39
CPC Classifications
H; H05; H05K; H05K1/00; H05K1/16; H05K1/162; B; B32; B32B; B32B18/00; B32B37/00; B32B37/14; B32B37/26; H10; H10W; H10W44/00; H10W44/601; H10W70/00; H10W70/01; H10W70/05; H10W70/098; H10W70/60; H10W70/611; H10W70/67; H10W70/68; H10W70/685; B32B2309/00; B32B2309/02; B32B2309/12; B32B2315/00; B32B2315/02; B32B9/00; B32B9/04; C; C04; C04B; C04B2235/00; C04B2235/70; C04B2235/74; C04B2235/76; C04B2235/768; C04B2237/00; C04B2237/30; C04B2237/32; C04B2237/34; C04B2237/341; C04B2237/343; C04B2237/345; C04B2237/346; C04B2237/50; C04B2237/56; C04B2237/562; C04B2237/66; C04B2237/68; C04B35/00; C04B35/622; C04B35/64; C04B35/645; H05K1/02; H05K1/03; H05K1/0306; H05K1/167; H05K2201/00; H05K2201/01; H05K2201/0183; H05K2201/0187; H05K2201/09; H05K2201/09209; H05K2201/09654; H05K2201/09763; H05K3/00; H05K3/46; H05K3/4611; H05K3/4626; H05K3/4629
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
172 words
A method of manufacturing a multilayered ceramic substrate with an integrally incorporated capacitor by co-firing the substrate and the capacitor at a substrate firing temperature ranging between 800° to 1,000° C., the method comprising the sequential steps of: forming a substrate laminate having a capacitor interposed between green insulator layers each comprised of a ceramic insulator material, the capacitor comprising a green dielectric layer comprised of a ceramic dielectric material and electrode conductors sandwiching the dielectric layer; laminating release green sheets unsintered at the substrate firing temperature ranging between 800° to 1,000° C. to both sides of the substrate laminate respectively; firing the substrate laminate with the release green sheets at the substrate firing temperature ranging between 800° to 1,000° C. while applying thereto a pressure normal to an exposed surface of one of the release green sheets, the pressure ranging between 2 and 20 kgf/cm 2 ; and removing the release green sheets from both sides of the fired assemblage, thereby fabricating the multilayered ceramic substrate with the integrally incorporated capacitor.
Claim 2
Independent Claim
172 words
A method of manufacturing a multilayered ceramic substrate with an integrally incorporated capacitor by co-firing the substrate and the capacitor at a substrate firing temperature ranging between 800° to 1,000° C., the method comprising the sequential steps of: forming a substrate laminate having a capacitor interposed between green insulator layers each comprised of a ceramic insulator material, the capacitor comprising a green dielectric layer comprised of a ceramic dielectric material and electrode conductors sandwiching the dielectric layer; laminating release green sheets unsintered at the substrate firing temperature ranging between 800° to 1,000° C. to both sides of the substrate laminate respectively; firing the substrate laminate with the release green sheets at the substrate firing temperature ranging between 800° to 1,000° C. while applying thereto a pressure normal to an exposed surface of one of the release green sheets, the pressure ranging between 2 and 20 kgf/cm 2 ; and removing the release green sheets from both sides of the fired assemblage, thereby fabricating the multilayered ceramic substrate with the integrally incorporated capacitor.
Claim 3
Dependent Claim
37 words
The method of claim 1 wherein each green insulator layer comprises an insulator green sheet formed from a ceramic insulator material, and the green dielectric layer is formed by printing a low temperature co-firable ceramic dielectric material.
Claim 4
Dependent Claim
54 words
The method of claim 2 wherein the green dielectric layer is formed by laminating a spacer insulator green sheet having an opening defining a formation area of the dielectric layer to an inside insulator green sheet and filling the opening with the ceramic dielectric material in a process of laminating the insulator green sheets.
Claim 5
Dependent Claim
15 words
The method of claim 1 wherein each electrode conductor comprises Au or an Au alloy.
Claim 6
Dependent Claim
21 words
The method of claim 1 wherein each electrode conductor comprises Ag/Pd having an Ag/Pd weight ratio ranging between 90/10 to 60/40.
Claim 7
Dependent Claim
14 words
The method of claim 1 wherein the dielectric layer comprises a compound of Pb-perovskite.
Claim 8
Dependent Claim
52 words
The method of claim 1 wherein the ceramic insulator material comprises a mixture of a glass powder of a system of CaO-Al 2 O 3 -SiO 2 -B 2 O 3 or a system of MgO-Al 2 O 3 -SiO 2 -B 2 O 3 and an Al 2 O 3 powder.
Claim 9
Dependent Claim
29 words
The method of claim 1 wherein the substrate laminate has inside or surface layers formed with wiring and interlayer via conductors each comprising Au, Ag, Ag/Pd, Ag/Pt, or Cu.
Claim 10
Dependent Claim
26 words
The method of claim 1 wherein the substrate laminate has an inside or surface layer formed with a resistor comprising RuO 2 or an Ru pyrochlore.
Claim 11
Dependent Claim
15 words
The method of claim 1 wherein each release green sheet comprises an alumina green sheet.
Claim 12
Dependent Claim
140 words
A multilayered ceramic substrate with an integrally incorporated capacitor formed by a method comprising the steps of: forming a substrate laminate having a capacitor interposed between green insulator layers each comprised of a ceramic insulator material, the capacitor comprising a green dielectric layer comprised of a ceramic dielectric material and electrode conductors sandwiching the dielectric layer; laminating release green sheets unsintered at a substrate firing temperature ranging between 800° to 1,000° C. to both sides of the substrate laminate respectively; firing the substrate laminate with the release green sheets at the substrate firing temperature ranging between 800° to 1,000° C. while applying thereto a pressure normal to an exposed surface of one of the release green sheets, the pressure ranging between 2 and 20 kgf/cm 2 ; and removing the release green sheets from both sides of the fired assemblage.
Claim 13
Dependent Claim
140 words
A multilayered ceramic substrate with an integrally incorporated capacitor formed by a method comprising the steps of: forming a substrate laminate having a capacitor interposed between green insulator layers each comprised of a ceramic insulator material, the capacitor comprising a green dielectric layer comprised of a ceramic dielectric material and electrode conductors sandwiching the dielectric layer; laminating release green sheets unsintered at a substrate firing temperature ranging between 800° to 1,000° C. to both sides of the substrate laminate respectively; firing the substrate laminate with the release green sheets at the substrate firing temperature ranging between 800° to 1,000° C. while applying thereto a pressure normal to an exposed surface of one of the release green sheets, the pressure ranging between 2 and 20 kgf/cm 2 ; and removing the release green sheets from both sides of the fired assemblage.
References Cited (Backward Citations)
WO1991010630A1
Cited
JPH05163072A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-09-28 | 2002-03-30 | 2002-09-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-09-28 | 2006-03-30 | 2006-09-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-09-28 | 2010-03-30 | 2010-09-29 | $7700.00 | Window Closed / Lapsed |