Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
65 words
An electrode wiring board comprising: a glass substrate; and an electrode wiring portion formed on said glass substrate; wherein said electrode wiring portion is made of at least one metal material selected from Mo and W, and a variation of a lattice constant of said material to a lattice constant of a bulk state of said material of said electrode wiring portion is within ±3%.
Claim 2
Dependent Claim
65 words
An electrode wiring board comprising: a glass substrate; and an electrode wiring portion formed on said glass substrate; wherein said electrode wiring portion is made of at least one metal material selected from Mo and W, and a variation of a lattice constant of said material to a lattice constant of a bulk state of said material of said electrode wiring portion is within ±3%.
Claim 3
Dependent Claim
36 words
The wiring board according to claim 1, wherein the variation of the lattice constant of said material to the lattice constant of the bulk state of said material of said electrode wiring portion is within ±1%.
Claim 4
Dependent Claim
23 words
The wiring board according to claim 1, wherein said wiring board is used in a semiconductor device or a liquid crystal display device.
Claim 5
Dependent Claim
14 words
The material according to claim 1, wherein Ti is added to said main component.
Claim 6
Dependent Claim
22 words
The material according to claim 1, wherein a content of said W or Mo is 10 atomic % to 95 atomic %.
Claim 7
Dependent Claim
17 words
The material according to claim 1, wherein said electrode wiring portion is formed by a sputtering method.
Claim 8
Dependent Claim
68 words
An electrode wiring board comprising: a glass substrate; and an electrode wiring portion formed on said glass substrate; wherein said electrode wiring portion is made of W or at least one metal material selected from W, Mo and Cr, and a variation of a lattice constant of said material to a lattice constant of a bulk state of said material of said electrode wiring portion is within ±3%.
Claim 9
Dependent Claim
68 words
An electrode wiring board comprising: a glass substrate; and an electrode wiring portion formed on said glass substrate; wherein said electrode wiring portion is made of W or at least one metal material selected from W, Mo and Cr, and a variation of a lattice constant of said material to a lattice constant of a bulk state of said material of said electrode wiring portion is within ±3%.
Claim 10
Dependent Claim
36 words
The wiring board according to claim 7, wherein the variation of the lattice constant of said material to the lattice constant of the bulk state of said material of said electrode wiring portion is within ±1%.
Claim 11
Dependent Claim
23 words
The wiring board according to claim 7, wherein said wiring board is used in a semiconductor device or a liquid crystal display device.
Claim 12
Dependent Claim
14 words
The material according to claim 7, wherein Ti is added to said main component.
Claim 13
Dependent Claim
22 words
The material according to claim 7, wherein a content of said W or Mo is 10 atomic % to 95 atomic %.
Claim 14
Dependent Claim
17 words
The material according to claim 11, wherein said electrode wiring portion is formed by a sputtering method.