US5859760A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Microelectronic capacitors having tantalum pentoxide dielectrics and oxygen barriers
Assignee: Mosaid Technologies Inc
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Filing: 1997-04-21
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Granted: 1999-01-12
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Expires: 2017-04-21
Abstract
Abstract A microelectronic capacitor is formed by nitrating the surface of a conducting electrode on a microelectronic substrate. The nitrated surface of the conductive electrode is then oxidized. The nitrating and oxidizing steps collectively form a film of silicon oxynitride on the conductive electrode. A tantalum pentoxide film is then formed on the oxidized and nitrated surface of the conductive electrode. The tantalum pentoxide film may then be thermally treated in the presence of oxygen gas. High performance microelectronic capacitors are thereby provided.
Inventors
- 👤 In-sung Park
- 👤 Kyung-hoon Kim
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 00:14
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/60; H10D1/68; H10P; H10P14/00; H10P14/60
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
52 words
A microelectronic capacitor comprising: a conductive electrode on a microelectronic substrate; a silicon oxynitride film on said conductive electrode, opposite said microelectronic substrate; a tantalum pentoxide film on said silicon oxynitride film, opposite said conductive electrode, the tantalum pentoxide film being spaced apart from the conductive electrode by said silicon oxynitride film.
Claim 2
Dependent Claim
52 words
A microelectronic capacitor comprising: a conductive electrode on a microelectronic substrate; a silicon oxynitride film on said conductive electrode, opposite said microelectronic substrate; a tantalum pentoxide film on said silicon oxynitride film, opposite said conductive electrode, the tantalum pentoxide film being spaced apart from the conductive electrode by said silicon oxynitride film.
Claim 3
Dependent Claim
23 words
A microelectronic capacitor according to claim 1 further comprising: a second conductive electrode on said tantalum pentoxide film, opposite said silicon oxynitride film.
Claim 4
Dependent Claim
93 words
An integrated circuit comprising: a microelectronic substrate; an insulating layer on said microelectronic substrate, including a contact hole therein which exposes a portion of the microelectronic substrate; a conductive electrode on the insulating layer, opposite the microelectronic substrate and extending through said contact hole to electrically contact the exposed microelectronic substrate; a silicon oxynitride film on said conductive electrode, opposite said microelectronic substrate; and a tantalum pentoxide film on said silicon oxynitride film, opposite said conductive electrode, the tantalum pentoxide film being spaced apart from the conductive electrode by said silicon oxynitride film.
Claim 5
Dependent Claim
93 words
An integrated circuit comprising: a microelectronic substrate; an insulating layer on said microelectronic substrate, including a contact hole therein which exposes a portion of the microelectronic substrate; a conductive electrode on the insulating layer, opposite the microelectronic substrate and extending through said contact hole to electrically contact the exposed microelectronic substrate; a silicon oxynitride film on said conductive electrode, opposite said microelectronic substrate; and a tantalum pentoxide film on said silicon oxynitride film, opposite said conductive electrode, the tantalum pentoxide film being spaced apart from the conductive electrode by said silicon oxynitride film.
Claim 6
Dependent Claim
23 words
An integrated circuit according to claim 3 further comprising: a second conductive electrode on said tantalum pentoxide film, opposite said silicon oxynitride film.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-01-11 | 2002-07-13 | 2003-01-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-01-11 | 2006-07-13 | 2007-01-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-01-11 | 2010-07-13 | 2011-01-12 | $7700.00 | Window Closed / Lapsed |