Patent US5872422A successfully refreshed from Google Patents.
US5872422A
Expired / Lapsed
US
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Carbon fiber-based field emission devices
Assignee: Nantero Inc
•
Filing: 1995-12-20
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Granted: 1999-02-16
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Expires: 2015-12-20
Abstract
Abstract Electron field emission devices (cold cathodes), vacuum microelectronic devices and field emission displays which incorporate cold cathodes and methods of making and using same. More specifically, cold cathode devices comprising electron emitting structures grown directly onto a substrate material. The invention also relates to patterned precursor substrates for use in fabricating field emission devices and methods of making same and also to catalytically growing other electronic structures, such as films, cones, cylinders, pyramids or the like, directly onto substrates.
Inventors
- 👤 Xueping Xu
- 👤 Charles P. Beetz
- 👤 George R. Brandes
- 👤 Robert W. Boerstler
- 👤 John W. Steinbeck
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 12:53
CPC Classifications
H; H01; H01J; H01J1/00; H01J1/02; H01J1/30; H01J1/304; B; B82; B82Y; B82Y10/00; H01J2201/00; H01J2201/30; H01J2201/304; H01J2201/30446; H01J2201/30453; H01J2201/30469; H01J2201/319; Y; Y10; Y10S; Y10S977/00; Y10S977/902; Y10S977/932; Y10S977/939
Claims Analysis
Total Claims: 81
Claim 1
Independent Claim
47 words
A field emission device, comprising: a substrate; and at least one electron emitter structure comprising a fiber formed of a carbon-containing material attached to a growth surface on the substrate; wherein the fiber is grown catalytically in situ on the growth surface from a carbon-containing precursor material.
Claim 2
Dependent Claim
47 words
A field emission device, comprising: a substrate; and at least one electron emitter structure comprising a fiber formed of a carbon-containing material attached to a growth surface on the substrate; wherein the fiber is grown catalytically in situ on the growth surface from a carbon-containing precursor material.
Claim 3
Dependent Claim
29 words
A cold cathode vacuum fluorescent light source comprising the field emission device of claim 1 and a phosphor plate opposite the fiber to receive the electrons and emit light.
Claim 4
Dependent Claim
28 words
A field emission device according to claim 1, wherein the substrate comprises at least one material selected from the group consisting of ceramics, glasses, semiconductors, metals or alloys.
Claim 5
Dependent Claim
19 words
The field emission device according to claim 1, wherein the fiber has an average diameter less than 10 microns.
Claim 6
Dependent Claim
22 words
The field emission device according to claim 1, wherein the fiber has an average height to width ratio greater than about 2.
Claim 7
Dependent Claim
23 words
The field emission device of claim 1, further comprising gate means for controlling the application of electric fields to the electron emitter structure.
Claim 8
Dependent Claim
24 words
The field emission device according to claim 6, wherein the gate means comprises a gate opening having a width less than about 10 microns.
Claim 9
Dependent Claim
38 words
The field emission device of claim 7, wherein the fiber comprises a plurality of fibers having emitter ends, wherein the distance between at least one of the emitter ends and gate opening is less than about 5 microns.
Claim 10
Dependent Claim
42 words
The field emission device of claim 1, further comprising an anode, wherein the fiber comprises a plurality of fibers having emitter ends and the distance between at least one of the emitter ends and the anode is less than about 100 microns.
Claim 11
Dependent Claim
30 words
The field emission device according to claim 1, wherein portions of the growth surface have an electron emitter structure density greater than about 0.1 electron emitter structures per square micron.
Claim 12
Dependent Claim
22 words
The field emission device according to claim 1, wherein the fiber comprises a catalyst material comprising at least one transition metal compound.
Claim 13
Dependent Claim
40 words
The field emission device according to claim 11, wherein the at least one transition metal compound is selected from the group consisting of Fe, Co, Ni, Mn, Cr, Mo, W, Re, Ru, Os, Rh, Ir, Pd, Pt, Cu and Zn.
Claim 14
Dependent Claim
16 words
The field emission device according to claim 1, wherein the growth surface comprises a metal film.
Claim 15
Dependent Claim
23 words
The field emission device according to claim 13, wherein the metal film comprises at least one transition metal or compound or alloy thereof.
Claim 16
Dependent Claim
39 words
The field emission device according to claim 14, wherein the at least one transition metal is selected from the group consisting of Fe, Co, Ni, Mn, Cr, Mo, W, Re, Ru, Os, Rh, Ir, Pd, Pt, Cu and Zn.
Claim 17
Dependent Claim
17 words
The field emission device according to claim 1, wherein the growth surface comprises a semiconductor or dielectric.
Claim 18
Dependent Claim
23 words
The field emission device according to claim 1, wherein the device comprises a plurality of electron emitter structures arranged on the growth surface.
Claim 19
Dependent Claim
24 words
The field emission device according to claim 17, further comprising a plurality of electrically isolated regions each having at least one electron emitter structure.
Claim 20
Dependent Claim
27 words
The field emission device according to claim 1, further comprising a means for supplying electric current to the electron emitter structure sufficient to replenish field emitted charge.
Claim 21
Dependent Claim
44 words
The field emission device of claim 19, comprising a plurality of electron emitter structures arranged as a plurality of field emission cathode regions each having a plurality of electron emitter structures, the plurality of field emission cathode regions being spaced apart on the substrate.
Claim 22
Dependent Claim
49 words
The field emission device of claim 20, further comprising a dielectric region formed on the substrate, the dielectric region having a plurality of apertures there through defining the field emission cathode regions; and a plurality of gate electrodes formed on a surface of the dielectric region opposite the substrate.
Claim 23
Dependent Claim
88 words
The field emission device of claim 21, wherein the means for supplying electric current comprises a plurality of row electrodes forming portions of the growth surface on which the electron emitter structures of the plurality of field emission cathode regions are formed, the plurality of field emission cathode regions are arranged in a rectangular pattern on the plurality of row electrodes, and the plurality of gate electrodes are arranged in a plurality of columns with respect to the rectangular pattern of the plurality of field emission cathode regions.
Claim 24
Independent Claim
46 words
A method of making a field emission device comprising growing at least one carbon-containing fiber catalytically on a growth surface of a substrate by heating the substrate in the presence of a carbon source to a temperature sufficient to grow the fiber on the growth surface.
Claim 25
Independent Claim
46 words
A method of making a field emission device comprising growing at least one carbon-containing fiber catalytically on a growth surface of a substrate by heating the substrate in the presence of a carbon source to a temperature sufficient to grow the fiber on the growth surface.
Claim 26
Dependent Claim
27 words
A method according to claim 23, where the heating is carried out at a temperature from about 350° C. to about 1200° C. in a carbon-containing gas.
Claim 27
Dependent Claim
23 words
A method according to claim 24, where the carbon-containing gas is selected from the group consisting of hydrocarbons, carbon-containing compounds and carbon monoxide.
Claim 28
Dependent Claim
19 words
The method according to claim 23, further comprising the use of a catalyst comprising at least one transition metal.
Claim 29
Dependent Claim
38 words
The method according to claim 26, where the catalyst contains at least one transition metal selected from the group consisting of Fe, Co, Ni, Mn, Cr, Mo, W, Re, Ru, Os, Rh, Ir, Pd, Pt, Cu and Zn.
Claim 30
Dependent Claim
41 words
The method according to claim 26, where the catalyst is a compound comprising at least one transition metal selected from the group consisting of Fe, Co, Ni, Mn, Cr, Mo, W, Re, Ru, Os, Rh, Ir, Pd, Pt, Cu and Zn.
Claim 31
Dependent Claim
15 words
The method according to claim 26, where the catalyst comprises Fe 2 O 3 .
Claim 32
Dependent Claim
16 words
The method according to claim 26, where the catalyst is in the form of catalyst particles.
Claim 33
Dependent Claim
19 words
The method according to claim 30, where the catalyst particles have an average diameter less than about 200 nanometers.
Claim 34
Dependent Claim
17 words
The method according to claim 26, where the catalyst is in the form of a catalyst film.
Claim 35
Dependent Claim
18 words
The method according to claim 32, where the catalyst film has a thickness less than about 1 micron.
Claim 36
Dependent Claim
74 words
The method according to claim 23 comprising the steps of: forming a catalyst film onto the growth surface; forming a patterned dielectric film onto the catalyst film; forming a patterned gate metal film onto and corresponding to the patterned dielectric film; and heating the substrate in the presence of a carbon source to the temperature sufficient to grow the electron emitter structure comprising the carbon-containing fiber on the exposed portions of the growth surface.
Claim 37
Dependent Claim
17 words
The method according to claim 34, wherein the growth surface is capable of replenishing field emitted charge.
Claim 38
Dependent Claim
14 words
The method according to claim 34, wherein the growth surface is a resistor layer.
Claim 39
Dependent Claim
72 words
The method according to claim 23, comprising the steps of: forming a patterned dielectric film onto the growth surface; forming a patterned gate metal film onto and corresponding to the patterned dielectric film; forming a catalyst film onto exposed portions of the growth surface; and heating the substrate in the presence of a carbon source to the temperature sufficient to grow electron emitter structures on the exposed portions of the growth surface.
Claim 40
Dependent Claim
17 words
The method according to claim 37, wherein the growth surface is capable of replenishing field emitted charge.
Claim 41
Dependent Claim
14 words
The method according to claim 37, wherein the growth surface is a resistor layer.
Claim 42
Dependent Claim
85 words
The method according to claim 23 comprising the steps of: forming a patterned dielectric film onto the growth surface; forming a patterned gate metal film onto and corresponding to the patterned dielectric film thereby forming gate openings; forming a catalyst film onto exposed portions of the growth surface thereby creating catalytic sites aligned in the center of the gate openings; heating the substrate in the presence of a carbon source to the temperature sufficient to grow electron emitters comprising carbon fibers on the growth surface.
Claim 43
Dependent Claim
17 words
The method according to claim 40, wherein the growth surface is capable of replenishing field emitted charge.
Claim 44
Dependent Claim
14 words
The method according to claim 40, wherein the growth surface is a resistor layer.
Claim 45
Dependent Claim
98 words
The method according to claim 23, comprising the steps of: forming a patterned dielectric film onto a surface of the substrate; forming a patterned gate metal film onto and corresponding to the patterned dielectric film thereby forming gate openings; forming the growth surface which comprises a patterned resistor composition film onto and corresponding to exposed portions of the surface of the substrate; forming a catalyst film onto the growth surface through the gate openings; and heating the substrate in the presence of a carbon source to the temperature sufficient to grow the electron emitters on the growth surface.
Claim 46
Dependent Claim
17 words
The method according to claim 43, wherein the growth surface is capable of replenishing field emitted charge.
Claim 47
Dependent Claim
147 words
The method according to claim 23, comprising the steps of: depositing a dielectric film onto the growth surface; depositing a gate metal film onto the dielectric film; depositing a photoresist film composition onto the gate metal film; exposing the photoresist film to a pattern of radiation; developing the photoresist material to produce a pattern corresponding to the pattern of radiation thereby forming exposed portions of the gate metal film; removing the exposed portions of the gate metal film thereby forming gate openings and exposed portions of the dielectric film; removing the exposed portions of the dielectric film thereby forming exposed portions of the growth surface; depositing a catalyst film onto the exposed portions of the growth surface or fraction thereof; and heating the substrate in the presence of a carbon source to the temperature sufficient to grow electron emitter structures comprising carbon-containing fibers on the growth surface.
Claim 48
Dependent Claim
17 words
The method according to claim 45, wherein the growth surface is capable of replenishing field emitted charge.
Claim 49
Dependent Claim
14 words
The method according to claim 45, wherein the growth surface is a resistor layer.
Claim 50
Dependent Claim
97 words
The method according to claim 23 comprising the steps of: forming a patterned dielectric film onto the growth surface; forming a patterned gate metal film onto and corresponding to the patterned dielectric film; forming a patterned photoresist film composition onto the patterned gate metal film; depositing a catalyst film onto the exposed portions of the growth surface and patterned photoresist film; removing the patterned photoresist film and corresponding portions of the catalytic film; and heating the substrate in the presence of a carbon source to the temperature sufficient to grow electron emitter structures on the growth surface.
Claim 51
Dependent Claim
17 words
The method according to claim 48, wherein the growth surface is capable of replenishing field emitted charge.
Claim 52
Dependent Claim
14 words
The method according to claim 48, wherein the growth surface is a resistor layer.
Claim 53
Dependent Claim
157 words
The method according to claim 23 comprising the steps of: depositing a dielectric film onto the growth surface; depositing a gate metal film onto the dielectric film; forming a patterned photoresist film composition onto the gate metal film; removing portions of the gate metal film thereby forming gate openings corresponding to the patterned photoresist film; removing portions of the dielectric film thereby forming exposed portions of the growth surface corresponding to the patterned photoresist film; depositing a second photoresist composition film; exposing the second photoresist film to a pattern of radiation defining catalytic site openings aligned in the center of the gate openings; depositing a catalyst film onto the exposed portions of the growth surface through the catalytic site openings; removing the second patterned photoresist film; and heating the substrate in the presence of a carbon source to the temperature sufficient to grow electron emitters comprising carbon fibers on the growth surface within the catalytic site openings.
Claim 54
Dependent Claim
17 words
The method according to claim 51, wherein the growth surface is capable of replenishing field emitted charge.
Claim 55
Dependent Claim
14 words
The method according to claim 51, wherein the growth surface is a resistor layer.
Claim 56
Dependent Claim
148 words
The method according to claim 23, comprising the steps of: depositing a dielectric film onto a surface of the substrate; depositing a gate metal film onto the dielectric film; depositing a patterned photoresist film composition onto the gate metal film; removing portions of the gate metal film thereby forming gate openings corresponding to the patterned photoresist film; removing portions of the dielectric film thereby forming exposed portions of the surface of the substrate corresponding to the patterned photoresist film; depositing the growth surface onto the exposed portions of the surface; depositing a catalyst film onto the growth surface through the catalytic site openings; removing the patterned photoresist film along with corresponding portions of the growth surface and catalyst film; and heating the substrate in the presence of a carbon source to the temperature sufficient to grow the electron emitters on the growth surface within the catalytic site openings.
Claim 57
Dependent Claim
14 words
The method according to claim 54, wherein the growth surface comprises a resistor composition.
Claim 58
Dependent Claim
141 words
The method according to claim 23 comprising the steps of: depositing a catalyst film onto the growth surface; depositing a dielectric film onto the catalyst film; depositing a gate metal film onto the dielectric film; depositing a photoresist film composition onto the gate metal film; exposing the photoresist film to a pattern of radiation; developing the photoresist material to produce a pattern corresponding to the pattern of radiation thereby forming exposed portions of the gate metal film; removing the exposed portions of the gate metal film thereby forming exposed portions of the dielectric film and gate openings; removing the exposed portions of the dielectric film thereby forming exposed portions of the catalyst film; and heating the substrate in the presence of a carbon source to the temperature sufficient to grow electron emitter structures comprising the carbon-containing fibers on the growth surface.
Claim 59
Dependent Claim
18 words
The method according to claim 56, wherein the growth surface is capable of replenishing the field emitted charge.
Claim 60
Dependent Claim
14 words
The method according to claim 56, wherein the growth surface is a resistor layer.
Claim 61
Independent Claim
58 words
A method of making a composite structure comprising the step of growing at least one structure comprising a source material catalytically on a growth surface of a substrate by heating the substrate in the presence of a catalyst and a precursor composition comprising the source material to a temperature sufficient to grow the structure on the growth surface.
Claim 62
Independent Claim
58 words
A method of making a composite structure comprising the step of growing at least one structure comprising a source material catalytically on a growth surface of a substrate by heating the substrate in the presence of a catalyst and a precursor composition comprising the source material to a temperature sufficient to grow the structure on the growth surface.
Claim 63
Dependent Claim
20 words
The method according to claim 59, wherein the catalyst is a patterned film on the growth surface of the substrate.
Claim 64
Dependent Claim
19 words
The method according to claim 59, wherein the structure is a film, a cone, a cylinder or a pyramid.
Claim 65
Dependent Claim
55 words
A field emission precursor substrate comprising a substrate material and a catalyst comprising at least one transition metal, wherein the catalyst is in the form of a catalyst film in contact with a growth surface of the substrate and the field emission precursor substrate is suitable for catalytically growing electron emitter structures comprising carbon-containing fibers.
Claim 66
Dependent Claim
55 words
A field emission precursor substrate comprising a substrate material and a catalyst comprising at least one transition metal, wherein the catalyst is in the form of a catalyst film in contact with a growth surface of the substrate and the field emission precursor substrate is suitable for catalytically growing electron emitter structures comprising carbon-containing fibers.
Claim 67
Dependent Claim
16 words
The field emission precursor substrate of claim 62, wherein the growth surface comprises a resistor film.
Claim 68
Dependent Claim
14 words
The field emission precursor substrate of claim 62, further comprising a patterned dielectric film.
Claim 69
Dependent Claim
15 words
The field emission precursor substrate of claim 62, further comprising a patterned conductive metal film.
Claim 70
Dependent Claim
29 words
The field emission precursor substrate claim 62, wherein the catalyst film comprises a plurality of catalytic sites spaced apart on the growth surface and arranged in a pattern thereon.
Claim 71
Dependent Claim
54 words
The field emission precursor substrate of claim 66, further comprising a dielectric region formed on the substrate, the dielectric region having a plurality of apertures there through defining the of catalytic sites on the growth surface; and a plurality of gate electrodes formed on a surface of the dielectric region opposite the growth surface.
Claim 72
Dependent Claim
20 words
The field emission precursor substrate of claim 66, further comprising a means for supplying electric current to the catalytic sites.
Claim 73
Dependent Claim
66 words
The field emission precursor substrate of claim 68, wherein the means for supplying electric current comprises a plurality of row electrodes forming portions of the substrate and the catalytic sites are arranged in a rectangular pattern on the plurality of row electrodes, and a plurality of gate electrodes arranged in a plurality of columns with respect to the rectangular pattern of the plurality of catalytic sites.
Claim 74
Independent Claim
55 words
A method of emitting electrons from a field emission device comprising providing a field emission device comprising a substrate and at least one electron emitter structure comprising a fiber formed of a carbon-containing material grown catalytically on a surface of the substrate; and providing an electric field such that electrons are emitted from the fiber.
Claim 75
Independent Claim
55 words
A method of emitting electrons from a field emission device comprising providing a field emission device comprising a substrate and at least one electron emitter structure comprising a fiber formed of a carbon-containing material grown catalytically on a surface of the substrate; and providing an electric field such that electrons are emitted from the fiber.
Claim 76
Dependent Claim
12 words
The method of claim 70, further providing an electrode opposite the fiber.
Claim 77
Dependent Claim
20 words
The method of claim 70, further providing a phosphor plate opposite the fiber to receive the electrons and emit light.
Claim 78
Dependent Claim
24 words
A vacuum-collector transistor comprising the field emission device of claim 1 and further comprising a collector region comprising a vacuum region and an anode.
Claim 79
Dependent Claim
11 words
A electron microscope comprising the field emission device of claim 1.
Claim 80
Dependent Claim
10 words
A spectrometer comprising the field emission device of claim 1.
Claim 81
Dependent Claim
11 words
A display device comprising the field emission device of claim 1.
References Cited (Backward Citations)
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