US5885138A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
Assignee: Ebara Corp
•
Filing: 1996-12-16
•
Granted: 1999-03-23
•
Expires: 2016-12-16
Abstract
Abstract A polishing apparatus includes an arrangement of a plurality of units to deal with various operations and a robot having at least one arm. The plurality of units are disposed around the robot and include a loading unit for receiving thereon a, e.g. dry, workpiece to be polished, a polishing system including at least one polishing unit for polishing the workpiece, a washing system and a drying system at least one washing unit for washing and drying the polished workpiece, and an unloading unit for receiving thereon a resultant clean and dry polished workpiece.
Inventors
- 👤 Katsuya Okumura
- 👤 Riichirou Aoki
- 👤 Hiromi Yajima
- 👤 Seiji Ishikawa
- 👤 Manabu Tsujimura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 08:37
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0451; H10P72/0452; B; B08; B08B; B08B1/00; B08B1/30; B08B1/32; B08B1/36; B24; B24B; B24B27/00; B24B27/0023; B24B37/00; B24B37/04; B24B37/34; B24B37/345; B24B51/00; B24B55/00; B24B55/12; F; F24; F24F; F24F3/00; F24F3/12; F24F3/16; F24F3/167; H03; H03M; H03M13/00; H03M13/37; H03M13/39; H04; H04N; H04N5/00; H04N5/44; H04N5/455; H10P72/0402; H10P72/0406; H10P72/0411; H10P72/0412; H10P72/0416; H10P72/0454; H10P72/0468; H10P72/0472; H10P72/30; H10P72/33; H10P72/3304; H10P72/34; H10P72/3411; H04N21/00; H04N21/40; H04N21/41; H04N21/426
Claims Analysis
Total Claims: 137
Claim 1
Independent Claim
90 words
A method for polishing and then washing a workpiece, said method comprising: introducing said workpiece into an enclosing structure suitable for use in a clean room and therein: polishing said workpiece to form a polished workpiece; washing said polished workpiece to form a clean polished workpiece; and drying said clean polished workpiece to form a clean and dry polished workpiece; and removing said clean and dry polished workpiece from said enclosing structure; and said washing comprising conducting plural washing operations including a primary washing operation and a secondary washing operation.
Claim 2
Independent Claim
90 words
A method for polishing and then washing a workpiece, said method comprising: introducing said workpiece into an enclosing structure suitable for use in a clean room and therein: polishing said workpiece to form a polished workpiece; washing said polished workpiece to form a clean polished workpiece; and drying said clean polished workpiece to form a clean and dry polished workpiece; and removing said clean and dry polished workpiece from said enclosing structure; and said washing comprising conducting plural washing operations including a primary washing operation and a secondary washing operation.
Claim 3
Dependent Claim
19 words
A method as claimed in claim 1, wherein said polishing comprises conducting plural polishing operations by plural polishing units.
Claim 4
Dependent Claim
36 words
A method as claimed in claim 1, comprising transferring said clean and dry polished workpiece with at least one first mechanism that is discrete from at least one second mechanism employed to transfer said polished workpiece.
Claim 5
Dependent Claim
25 words
A method as claimed in claim 1, wherein said washing and drying are carried out at a washing and drying station in a washing unit.
Claim 6
Dependent Claim
26 words
A method as claimed in claim 1, wherein said washing and drying are carried out at respective separate washing and drying stations in a washing unit.
Claim 7
Dependent Claim
17 words
A method as claimed in claim 1, wherein said enclosing structure is installed in said clean room.
Claim 8
Dependent Claim
47 words
A method as claimed in claim 6, wherein said introducing comprises carrying said workpiece from the interior of said clean room into said enclosing structure, and said removing comprises carrying said clean and dry polished workpiece from said enclosing structure to said interior of said clean room.
Claim 9
Dependent Claim
24 words
A method as claimed in claim 1, wherein said workpiece comprises a semiconductor wafer, said method is employed during manufacture of a semiconductor device.
Claim 10
Independent Claim
124 words
A method for polishing and then washing a workpiece, said method comprising: introducing said workpiece into an enclosing structure suitable for use in a clean room and therein: polishing said workpiece to form a polished workpiece; washing said polished workpiece to form a clean polished workpiece; and drying said clean polished workpiece to form a clean and dry polished workpiece; removing said clean and dry polished workpiece from said enclosing structure; transferring said workpiece to be polished and said clean and dry polished workpiece with at least one first mechanism that is discrete from at least one second mechanism employed to transfer said polished workpiece; and conducting said polishing and said washing around at least one robot including said at least one first mechanism.
Claim 11
Independent Claim
124 words
A method for polishing and then washing a workpiece, said method comprising: introducing said workpiece into an enclosing structure suitable for use in a clean room and therein: polishing said workpiece to form a polished workpiece; washing said polished workpiece to form a clean polished workpiece; and drying said clean polished workpiece to form a clean and dry polished workpiece; removing said clean and dry polished workpiece from said enclosing structure; transferring said workpiece to be polished and said clean and dry polished workpiece with at least one first mechanism that is discrete from at least one second mechanism employed to transfer said polished workpiece; and conducting said polishing and said washing around at least one robot including said at least one first mechanism.
Claim 12
Dependent Claim
19 words
A method as claimed in claim 9, wherein said polishing comprises conducting plural polishing operations by plural polishing units.
Claim 13
Dependent Claim
26 words
A method as claimed in claim 10, wherein said plural polishing operations comprise plural sequential polishing operations conducted on said workpiece by said plural polishing units.
Claim 14
Dependent Claim
28 words
A method as claimed in claim 10, wherein said plural polishing operations are conducted on plural workpieces simultaneously or at a time lag by said plural polishing units.
Claim 15
Dependent Claim
31 words
A method as claimed in claim 9, wherein said clean and dry polished workpiece has a cleanliness substantially the same as a cleanliness of said workpiece introduced into said enclosing structure.
Claim 16
Independent Claim
106 words
A method for polishing and then washing a workpiece, said method comprising: introducing said workpiece into an enclosing structure suitable for use in a clean room and therein: polishing said workpiece to form a polished workpiece; washing said polished workpiece to form a clean polished workpiece; and drying said clean polished workpiece to form a clean and dry polished workpiece; removing said clean and dry polished workpiece from said enclosing structure; and transferring said workpiece to be polished and said clean and dry polished workpiece with at least one first robot that is discrete from at least one second robot employed to transfer said polished workpiece.
Claim 17
Independent Claim
106 words
A method for polishing and then washing a workpiece, said method comprising: introducing said workpiece into an enclosing structure suitable for use in a clean room and therein: polishing said workpiece to form a polished workpiece; washing said polished workpiece to form a clean polished workpiece; and drying said clean polished workpiece to form a clean and dry polished workpiece; removing said clean and dry polished workpiece from said enclosing structure; and transferring said workpiece to be polished and said clean and dry polished workpiece with at least one first robot that is discrete from at least one second robot employed to transfer said polished workpiece.
Claim 18
Dependent Claim
19 words
A method as claimed in claim 14, wherein said polishing comprises conducting plural polishing operations by plural polishing units.
Claim 19
Dependent Claim
26 words
A method as claimed in claim 15, wherein said plural polishing operations comprise plural sequential polishing operations conducted on said workpiece by said plural polishing units.
Claim 20
Dependent Claim
28 words
A method as claimed in claim 15, wherein said plural polishing operations are conducted on plural workpieces simultaneously or at a time lag by said plural polishing units.
Claim 21
Dependent Claim
31 words
A method as claimed in claim 14, wherein said clean and dry polished workpiece has a cleanliness substantially the same as a cleanliness of said workpiece introduced into said enclosing structure.
Claim 22
Independent Claim
81 words
A method for polishing and then washing a workpiece, said method comprising: introducing said workpiece from the interior of a clean room into an enclosing structure installed in said clean room; polishing said workpiece to form a polished workpiece; washing said polished workpiece to form a clean polished workpiece; drying said clean polished workpiece to form a clean and dry polished workpiece; and removing said clean and dry polished workpiece from said enclosing structure to said interior of said clean room.
Claim 23
Independent Claim
81 words
A method for polishing and then washing a workpiece, said method comprising: introducing said workpiece from the interior of a clean room into an enclosing structure installed in said clean room; polishing said workpiece to form a polished workpiece; washing said polished workpiece to form a clean polished workpiece; drying said clean polished workpiece to form a clean and dry polished workpiece; and removing said clean and dry polished workpiece from said enclosing structure to said interior of said clean room.
Claim 24
Dependent Claim
19 words
A method as claimed in claim 19, wherein said polishing comprises conducting plural polishing operations by plural polishing units.
Claim 25
Dependent Claim
26 words
A method as claimed in claim 20, wherein said plural polishing operations comprise plural sequential polishing operations conducted on said workpiece by said plural polishing units.
Claim 26
Dependent Claim
28 words
A method as claimed in claim 20, wherein said plural polishing operations are conducted on plural workpieces simultaneously or at a time lag by said plural polishing units.
Claim 27
Dependent Claim
31 words
A method as claimed in claim 19, wherein said clean and dry polished workpiece has a cleanliness substantially the same as a cleanliness of said workpiece introduced into said enclosing structure.
Claim 28
Dependent Claim
27 words
A method as claimed in claim 19, wherein said polishing is achieved by pressing said workpiece against an abrasive cloth, and further comprising dressing said abrasive cloth.
Claim 29
Dependent Claim
15 words
A method as claimed in claim 19, wherein said washing comprises conducting plural washing operations.
Claim 30
Dependent Claim
22 words
A method as claimed in claim 25, wherein said plural washing operations include a primary washing operation and a secondary washing operation.
Claim 31
Dependent Claim
16 words
A method as claimed in claim 19, further comprising rinsing said polished workpiece before said washing.
Claim 32
Dependent Claim
29 words
A method as claimed in claim 27, comprising conducting said rinsing at a first position and then conducting said washing at a second position different from said first position.
Claim 33
Dependent Claim
21 words
A method as claimed in claim 28, further comprising transferring said polished workpiece from said first position to said second position.
Claim 34
Dependent Claim
31 words
A method as claimed in claim 19, further comprising exhausting an atmosphere within said enclosing structure to a location discrete from said clean room in which said enclosing structure is located.
Claim 35
Dependent Claim
37 words
A method as claimed in claim 19, further comprising measuring said workpiece at least one time after said introducing of said workpiece into said enclosing structure and before said removing of said workpiece from said enclosing structure.
Claim 36
Dependent Claim
14 words
A method as claimed in claim 31, wherein said enclosing structure is a housing.
Claim 37
Dependent Claim
17 words
A method as claimed in claim 19, wherein said workpiece to be polished is a dry workpiece.
Claim 38
Dependent Claim
36 words
A method as claimed in claim 19, comprising transferring said clean and dry polished workpiece with at least one first mechanism that is discrete from at least one second mechanism employed to transfer said polished workpiece.
Claim 39
Dependent Claim
27 words
A method as claimed in claim 34, wherein said polishing and said washing are conducted around at least one robot including said at least one first mechanism.
Claim 40
Dependent Claim
26 words
A method as claimed in claim 35, comprising one said robot having a robot arm, and conducting said transferring of said workpiece with said robot arm.
Claim 41
Dependent Claim
22 words
A method as claimed in claim 36, comprising conducting said transferring of said clean and dry polished workpiece with said robot arm.
Claim 42
Dependent Claim
24 words
A method as claimed in claim 36, wherein said at least one second mechanism comprises a polishing head supporting arm employed during said polishing.
Claim 43
Dependent Claim
44 words
A method as claimed in claim 35, comprising one said robot having first and second robot arms, conducting said transferring of said workpiece with said first robot arm, and conducting said transferring of said clean and dry polished workpiece with said second robot arm.
Claim 44
Dependent Claim
24 words
A method as claimed in claim 39, wherein said at least one second mechanism comprises a polishing head supporting arm employed during said polishing.
Claim 45
Dependent Claim
35 words
A method as claimed in claim 35, comprising one said robot having a first robot arm comprising said at least one first mechanism and a second robot arm comprising said at least one second mechanism.
Claim 46
Dependent Claim
29 words
A method as claimed in claim 34, comprising a first robot comprising said at least one first mechanism and a second robot comprising said at least one second mechanism.
Claim 47
Dependent Claim
16 words
A method as claimed in claim 19, wherein said drying comprises spin-drying said clean polished workpiece.
Claim 48
Dependent Claim
25 words
A method as claimed in claim 19, wherein said washing and drying are carried out at a washing and drying station in a washing unit.
Claim 49
Dependent Claim
26 words
A method as claimed in claim 19, wherein said washing and drying are carried out at respective separate washing and drying stations in a washing unit.
Claim 50
Dependent Claim
36 words
A method as claimed in claim 19, wherein said polishing is conducted by a polishing apparatus including a top ring for holding said workpiece, and further comprising washing said top ring after releasing said polished workpiece.
Claim 51
Dependent Claim
15 words
A method as claimed in claim 19, further comprising inverting said workpiece before said polishing.
Claim 52
Dependent Claim
30 words
A method as claimed in claim 47, further comprising inverting said polished workpiece after said polishing and before said clean and dry polished workpiece is removed from said enclosing structure.
Claim 53
Dependent Claim
43 words
A method as claimed in claim 19, wherein said workpiece is taken out from a first container on a loading unit containing workpieces to be polished, and said clean and dry polished workpiece is put into a second container at an unloading unit.
Claim 54
Dependent Claim
37 words
A method as claimed in claim 19, wherein said workpiece is taken out from a container on a loading unit containing workpieces to be polished, and said clean and dry polished workpiece is returned into said container.
Claim 55
Dependent Claim
14 words
A method as claimed in claim 19, wherein said enclosing structure is a housing.
Claim 56
Dependent Claim
26 words
A method as claimed in claim 19, wherein said workpiece comprises a semiconductor wafer, said method being a method for use in manufacturing a semiconductor device.
Claim 57
Independent Claim
187 words
An apparatus for polishing and then washing a workpiece, said apparatus comprising: an enclosing structure capable of containing and preventing an atmosphere within said enclosing structure from escaping therefrom to exterior thereof; a loading unit for receipt of a workpiece to be polished; a polishing system within said enclosing structure for polishing the workpiece to form a polished workpiece, said polishing system including an abrasive cloth that is used for polishing; a washing system within said enclosing structure for washing the polished workpiece to form a clean polished workpiece; a drying system within said enclosing structure for drying the clean polished workpiece to form a clean and dry polished workpiece; an unloading unit for receiving the clean and dry polished workpiece; transfer structure for transferring the polished workpiece from said polishing system to said washing system and for transferring the clean and dry polished workpiece from said drying system to said unloading unit; and a dressing mechanism for dressing said abrasive cloth, said dressing mechanism comprising a dressing tool that is removably attached to a polishing head supporting arm of a polishing unit of said polishing system.
Claim 58
Independent Claim
187 words
An apparatus for polishing and then washing a workpiece, said apparatus comprising: an enclosing structure capable of containing and preventing an atmosphere within said enclosing structure from escaping therefrom to exterior thereof; a loading unit for receipt of a workpiece to be polished; a polishing system within said enclosing structure for polishing the workpiece to form a polished workpiece, said polishing system including an abrasive cloth that is used for polishing; a washing system within said enclosing structure for washing the polished workpiece to form a clean polished workpiece; a drying system within said enclosing structure for drying the clean polished workpiece to form a clean and dry polished workpiece; an unloading unit for receiving the clean and dry polished workpiece; transfer structure for transferring the polished workpiece from said polishing system to said washing system and for transferring the clean and dry polished workpiece from said drying system to said unloading unit; and a dressing mechanism for dressing said abrasive cloth, said dressing mechanism comprising a dressing tool that is removably attached to a polishing head supporting arm of a polishing unit of said polishing system.
Claim 59
Independent Claim
169 words
An apparatus for polishing and then washing a workpiece, said apparatus comprising: an enclosing structure capable of containing and preventing an atmosphere within said enclosing structure from escaping therefrom to exterior thereof; a loading unit for receipt of a workpiece to be polished; a polishing system within said enclosing structure for polishing the workpiece to form a polished workpiece; a washing system within said enclosing structure for washing the polished workpiece to form a clean polished workpiece; a drying system within said enclosing structure for drying the clean polished workpiece to form a clean and dry polished workpiece; an unloading unit for receiving the clean and dry polished workpiece; transfer structure for transferring the polished workpiece from said polishing system to said washing system and for transferring the clean and dry polished workpiece from said drying system to said unloading unit; and said washing system including plural washing stations operable to achieve plural washing operations, said plural washing stations including a primary washing station and a secondary washing station.
Claim 60
Independent Claim
169 words
An apparatus for polishing and then washing a workpiece, said apparatus comprising: an enclosing structure capable of containing and preventing an atmosphere within said enclosing structure from escaping therefrom to exterior thereof; a loading unit for receipt of a workpiece to be polished; a polishing system within said enclosing structure for polishing the workpiece to form a polished workpiece; a washing system within said enclosing structure for washing the polished workpiece to form a clean polished workpiece; a drying system within said enclosing structure for drying the clean polished workpiece to form a clean and dry polished workpiece; an unloading unit for receiving the clean and dry polished workpiece; transfer structure for transferring the polished workpiece from said polishing system to said washing system and for transferring the clean and dry polished workpiece from said drying system to said unloading unit; and said washing system including plural washing stations operable to achieve plural washing operations, said plural washing stations including a primary washing station and a secondary washing station.
Claim 61
Dependent Claim
15 words
An apparatus as claimed in claim 54, wherein said polishing system includes plural polishing units.
Claim 62
Dependent Claim
23 words
An apparatus as claimed in claim 55, wherein said plural polishing units are operable to conduct plural sequential polishing operations on the workpiece.
Claim 63
Dependent Claim
22 words
An apparatus as claimed in claim 56, wherein said transfer structure is operable to transfer the workpiece between said plural polishing units.
Claim 64
Dependent Claim
27 words
An apparatus as claimed in claim 55, wherein said plural polishing units are operable to conduct polishing operations on plural workpieces simultaneously or at a time lag.
Claim 65
Dependent Claim
31 words
An apparatus as claimed in claim 54, wherein said polishing system includes an abrasive cloth that is used for polishing, and further comprising a dressing mechanism for dressing said abrasive cloth.
Claim 66
Dependent Claim
14 words
An apparatus as claimed in claim 54, wherein said enclosing structure is a housing.
Claim 67
Dependent Claim
39 words
An apparatus as claimed in claim 54, further comprising a rinsing device for rinsing the polished workpiece at a first position that is upstream of and separate from a second position at which is located said primary washing station.
Claim 68
Dependent Claim
34 words
An apparatus as claimed in claim 54, further comprising an exhaust duct for exhausting an atmosphere within said enclosing structure to a location discrete from a room in which said enclosing structure is located.
Claim 69
Dependent Claim
43 words
An apparatus as claimed in claim 54, further comprising a measuring device for measuring the workpiece at least one time after receipt of the workpiece at said loading unit and before receiving of the clean and dry polished workpiece at said unloading unit.
Claim 70
Dependent Claim
21 words
An apparatus as claimed in claim 54, wherein said loading unit is operable to receive a dry workpiece to be polished.
Claim 71
Dependent Claim
38 words
An apparatus as claimed in claim 54, further comprising a storage unit disposed adjacent to at least one of said loading unit and said unloading unit for storing workpieces to be polished and clean and dry polished workpieces.
Claim 72
Dependent Claim
23 words
An apparatus as claimed in claim 54, further comprising a unit having a meter capable of measuring a polished thickness of the workpiece.
Claim 73
Dependent Claim
32 words
An apparatus as claimed in claim 54, wherein said washing system includes a washing unit, and said drying system comprises a spin-dryer in said washing unit for spin-drying the clean polished workpiece.
Claim 74
Dependent Claim
27 words
An apparatus as claimed in claim 54, wherein said washing system and said drying system include a single combined station for washing and drying the polished workpiece.
Claim 75
Dependent Claim
29 words
An apparatus as claimed in claim 54, wherein said washing system and said drying system include separate washing and drying stations for respectively washing and drying the polished workpiece.
Claim 76
Dependent Claim
30 words
An apparatus as claimed in claim 54, further comprising a washing mechanism for washing a top ring of said polishing system for holding the workpiece after releasing the polished workpiece.
Claim 77
Dependent Claim
19 words
An apparatus as claimed in claim 54, further comprising an inverting mechanism for inverting the workpiece to be polished.
Claim 78
Dependent Claim
17 words
An apparatus as claimed in claim 54, further comprising an inverting mechanism for inverting the polished workpiece.
Claim 79
Dependent Claim
23 words
An apparatus as claimed in claim 54, wherein said loading unit is operable to receive a container for containing workpieces to be polished.
Claim 80
Dependent Claim
24 words
An apparatus as claimed in claim 54, wherein said unloading unit is operable to receive a container for receiving clean and dry polished workpieces.
Claim 81
Dependent Claim
21 words
An apparatus as claimed in claim 54, wherein said loading unit and said unloading unit are operable to receive respective containers.
Claim 82
Dependent Claim
39 words
An apparatus as claimed in claim 54, wherein said loading unit and said unloading unit are formed integrally to be operable to receive a container for containing workpieces to be polished and to receive clean and dry polished workpieces.
Claim 83
Dependent Claim
25 words
An apparatus as claimed in claim 54, wherein the workpiece is a semiconductor wafer, and said apparatus is employable for manufacture of a semiconductor device.
Claim 84
Independent Claim
212 words
An apparatus for polishing and then washing a workpiece, said apparatus comprising: an enclosing structure capable of containing and preventing an atmosphere within said enclosing structure from escaping therefrom to exterior thereof; a loading unit for receipt of a workpiece to be polished; a polishing system within said enclosing structure for polishing the workpiece to form a polished workpiece; a washing system within said enclosing structure for washing the polished workpiece to form a clean polished workpiece; a drying system within said enclosing structure for drying the clean polished workpiece to form a clean and dry polished workpiece; an unloading unit for receiving the clean and dry polished workpiece; and transfer structure for transferring the polished workpiece from said polishing system to said washing system and for transferring the clean and dry polished workpiece from said drying system to said unloading unit, said transfer structure comprising at least one first transfer mechanism for transferring the workpiece to be polished and for transferring the clean and dry polished workpiece, and at least one second transfer mechanism for transferring the polished workpiece, and said at least one first transfer mechanism comprising a single robot arm of a robot operable to transfer both the workpiece to be polished and the clean and dry polished workpiece.
Claim 85
Independent Claim
212 words
An apparatus for polishing and then washing a workpiece, said apparatus comprising: an enclosing structure capable of containing and preventing an atmosphere within said enclosing structure from escaping therefrom to exterior thereof; a loading unit for receipt of a workpiece to be polished; a polishing system within said enclosing structure for polishing the workpiece to form a polished workpiece; a washing system within said enclosing structure for washing the polished workpiece to form a clean polished workpiece; a drying system within said enclosing structure for drying the clean polished workpiece to form a clean and dry polished workpiece; an unloading unit for receiving the clean and dry polished workpiece; and transfer structure for transferring the polished workpiece from said polishing system to said washing system and for transferring the clean and dry polished workpiece from said drying system to said unloading unit, said transfer structure comprising at least one first transfer mechanism for transferring the workpiece to be polished and for transferring the clean and dry polished workpiece, and at least one second transfer mechanism for transferring the polished workpiece, and said at least one first transfer mechanism comprising a single robot arm of a robot operable to transfer both the workpiece to be polished and the clean and dry polished workpiece.
Claim 86
Dependent Claim
15 words
An apparatus as claimed in claim 78, wherein said polishing system includes plural polishing units.
Claim 87
Dependent Claim
14 words
An apparatus as claimed in claim 78, wherein said enclosing structure is a housing.
Claim 88
Dependent Claim
32 words
An apparatus as claimed in claim 78, wherein said washing system includes a washing unit, and said drying system comprises a spin-dryer in said washing unit for spin-drying the clean polished workpiece.
Claim 89
Dependent Claim
39 words
An apparatus as claimed in claim 78, wherein said loading unit and said unloading unit are formed integrally to be operable to receive a container for containing workpieces to be polished and to receive clean and dry polished workpieces.
Claim 90
Dependent Claim
25 words
An apparatus as claimed in claim 78, wherein the workpiece is a semiconductor wafer, and said apparatus is employable for manufacture of a semiconductor device.
Claim 91
Independent Claim
221 words
An apparatus for polishing and then washing a workpiece, said apparatus comprising: an enclosing structure capable of containing and preventing an atmosphere within said enclosing structure from escaping therefrom to exterior thereof; a loading unit for receipt of a workpiece to be polished; a polishing system within said enclosing structure for polishing the workpiece to form a polished workpiece; a washing system within said enclosing structure for washing the polished workpiece to form a clean polished workpiece; a drying system within said enclosing structure for drying the clean polished workpiece to form a clean and dry polished workpiece; an unloading unit for receiving the clean and dry polished workpiece; and transfer structure for transferring the polished workpiece from said polishing system to said washing system and for transferring the clean and dry polished workpiece from said drying system to said unloading unit, said transfer structure comprising at least one first transfer mechanism for transferring the workpiece to be polished and for transferring the clean and dry polished workpiece, and at least one second transfer mechanism for transferring the polished workpieces, and said at least one first transfer mechanism comprising a first robot arm of a robot operable to transfer the workpiece to be polished, and a second robot arm of said robot operable to transfer the clean and dry polished workpiece.
Claim 92
Independent Claim
221 words
An apparatus for polishing and then washing a workpiece, said apparatus comprising: an enclosing structure capable of containing and preventing an atmosphere within said enclosing structure from escaping therefrom to exterior thereof; a loading unit for receipt of a workpiece to be polished; a polishing system within said enclosing structure for polishing the workpiece to form a polished workpiece; a washing system within said enclosing structure for washing the polished workpiece to form a clean polished workpiece; a drying system within said enclosing structure for drying the clean polished workpiece to form a clean and dry polished workpiece; an unloading unit for receiving the clean and dry polished workpiece; and transfer structure for transferring the polished workpiece from said polishing system to said washing system and for transferring the clean and dry polished workpiece from said drying system to said unloading unit, said transfer structure comprising at least one first transfer mechanism for transferring the workpiece to be polished and for transferring the clean and dry polished workpiece, and at least one second transfer mechanism for transferring the polished workpieces, and said at least one first transfer mechanism comprising a first robot arm of a robot operable to transfer the workpiece to be polished, and a second robot arm of said robot operable to transfer the clean and dry polished workpiece.
Claim 93
Dependent Claim
15 words
An apparatus as claimed in claim 84, wherein said polishing system includes plural polishing units.
Claim 94
Dependent Claim
14 words
An apparatus as claimed in claim 84, wherein said enclosing structure is a housing.
Claim 95
Dependent Claim
32 words
An apparatus as claimed in claim 84, wherein said washing system includes a washing unit, and said drying system comprises a spin-dryer in said washing unit for spin-drying the clean polished workpiece.
Claim 96
Dependent Claim
39 words
An apparatus as claimed in claim 84, wherein said loading unit and said unloading unit are formed integrally to be operable to receive a container for containing workpieces to be polished and to receive clean and dry polished workpieces.
Claim 97
Dependent Claim
25 words
An apparatus as claimed in claim 84, wherein the workpiece is a semiconductor wafer, and said apparatus is employable for manufacture of a semiconductor device.
Claim 98
Independent Claim
211 words
An apparatus for polishing and then washing a workpiece, said apparatus comprising: an enclosing structure capable of containing and preventing an atmosphere within said enclosing structure from escaping therefrom to exterior thereof; a loading unit for receipt of a workpiece to be polished; a polishing system within said enclosing structure for polishing the workpiece to form a polished workpiece; a washing system within said enclosing structure for washing the polished workpiece to form a clean polished workpiece; a drying system within said enclosing structure for drying the clean polished workpiece to form a clean and dry polished workpiece; an unloading unit for receiving the clean and dry polished workpiece; and transfer structure for transferring the polished workpiece from said polishing system to said washing system and for transferring the clean and dry polished workpiece from said drying system to said unloading unit, said transfer structure comprising at least one first transfer mechanism for transferring the workpiece to be polished and for transferring the clean and dry polished workpiece, and at least one second transfer mechanism for transferring the polished workpiece, said at least one first transfer mechanism comprising a first robot arm of a robot, and said at least one second transfer mechanism comprising a second robot arm of said robot.
Claim 99
Independent Claim
211 words
An apparatus for polishing and then washing a workpiece, said apparatus comprising: an enclosing structure capable of containing and preventing an atmosphere within said enclosing structure from escaping therefrom to exterior thereof; a loading unit for receipt of a workpiece to be polished; a polishing system within said enclosing structure for polishing the workpiece to form a polished workpiece; a washing system within said enclosing structure for washing the polished workpiece to form a clean polished workpiece; a drying system within said enclosing structure for drying the clean polished workpiece to form a clean and dry polished workpiece; an unloading unit for receiving the clean and dry polished workpiece; and transfer structure for transferring the polished workpiece from said polishing system to said washing system and for transferring the clean and dry polished workpiece from said drying system to said unloading unit, said transfer structure comprising at least one first transfer mechanism for transferring the workpiece to be polished and for transferring the clean and dry polished workpiece, and at least one second transfer mechanism for transferring the polished workpiece, said at least one first transfer mechanism comprising a first robot arm of a robot, and said at least one second transfer mechanism comprising a second robot arm of said robot.
Claim 100
Dependent Claim
15 words
An apparatus as claimed in claim 90, wherein said polishing system includes plural polishing units.
Claim 101
Dependent Claim
14 words
An apparatus as claimed in claim 90, wherein said enclosing structure is a housing.
Claim 102
Dependent Claim
32 words
An apparatus as claimed in claim 90, wherein said washing system includes a washing unit, and said drying system comprises a spin-dryer in said washing unit for spin-drying the clean polished workpiece.
Claim 103
Dependent Claim
39 words
An apparatus as claimed in claim 90, wherein said loading unit and said unloading unit are formed integrally to be operable to receive a container for containing workpieces to be polished and to receive clean and dry polished workpieces.
Claim 104
Dependent Claim
25 words
An apparatus as claimed in claim 90, wherein the workpiece is a semiconductor wafer, and said apparatus is employable for manufacture of a semiconductor device.
Claim 105
Independent Claim
210 words
An apparatus for polishing and then washing a workpiece, said apparatus comprising: an enclosing structure capable of containing and preventing an atmosphere within said enclosing structure from escaping therefrom to exterior thereof; a loading unit for receipt of a workpiece to be polished; a polishing system within said enclosing structure for polishing the workpiece to form a polished workpiece; a washing system within said enclosing structure for washing the polished workpiece to form a clean polished workpiece; a drying system within said enclosing structure for drying the clean polished workpiece to form a clean and dry polished workpiece; an unloading unit for receiving the clean and dry polished workpiece; and transfer structure for transferring the polished workpiece from said polishing system to said washing system and for transferring the clean and dry polished workpiece from said drying system to said unloading unit, said transfer structure comprising at least one first transfer mechanism for transferring the workpiece to be polished and for transferring the clean and dry polished workpiece, and at least one second transfer mechanism for transferring the polished workpiece, said at least one first transfer mechanism comprising a first robot arm of a robot, and said at least one second transfer mechanism comprising a robot arm of another robot.
Claim 106
Independent Claim
210 words
An apparatus for polishing and then washing a workpiece, said apparatus comprising: an enclosing structure capable of containing and preventing an atmosphere within said enclosing structure from escaping therefrom to exterior thereof; a loading unit for receipt of a workpiece to be polished; a polishing system within said enclosing structure for polishing the workpiece to form a polished workpiece; a washing system within said enclosing structure for washing the polished workpiece to form a clean polished workpiece; a drying system within said enclosing structure for drying the clean polished workpiece to form a clean and dry polished workpiece; an unloading unit for receiving the clean and dry polished workpiece; and transfer structure for transferring the polished workpiece from said polishing system to said washing system and for transferring the clean and dry polished workpiece from said drying system to said unloading unit, said transfer structure comprising at least one first transfer mechanism for transferring the workpiece to be polished and for transferring the clean and dry polished workpiece, and at least one second transfer mechanism for transferring the polished workpiece, said at least one first transfer mechanism comprising a first robot arm of a robot, and said at least one second transfer mechanism comprising a robot arm of another robot.
Claim 107
Dependent Claim
15 words
An apparatus as claimed in claim 96, wherein said polishing system includes plural polishing units.
Claim 108
Dependent Claim
14 words
An apparatus as claimed in claim 96, wherein said enclosing structure is a housing.
Claim 109
Dependent Claim
32 words
An apparatus as claimed in claim 96, wherein said washing system includes a washing unit, and said drying system comprises a spin-dryer in said washing unit for spin-drying the clean polished workpiece.
Claim 110
Dependent Claim
39 words
An apparatus as claimed in claim 96, wherein said loading unit and said unloading unit are formed integrally to be operable to receive a container for containing workpieces to be polished and to receive clean and dry polished workpieces.
Claim 111
Dependent Claim
25 words
An apparatus as claimed in claim 96, wherein the workpiece is a semiconductor wafer, and said apparatus is employable for manufacture of a semiconductor device.
Claim 112
Independent Claim
126 words
A method for polishing and then washing a workpiece, said method comprising: transferring a workpiece from a loading unit to a polishing system; polishing said workpiece at said polishing system; transferring said workpiece from said polishing system to a washing system; washing said workpiece at said washing system; transferring said workpiece in a clean and dry condition to an unloading unit; conducting said polishing and said washing in an enclosing structure capable of containing and preventing an atmosphere within said enclosing structure from escaping therefrom to exterior thereof; conducting said transferring of said workpiece in said clean and dry condition to said unloading unit by a transfer structure; and said washing comprising conducting plural washing operations including a primary washing operation and a secondary washing operation.
Claim 113
Independent Claim
126 words
A method for polishing and then washing a workpiece, said method comprising: transferring a workpiece from a loading unit to a polishing system; polishing said workpiece at said polishing system; transferring said workpiece from said polishing system to a washing system; washing said workpiece at said washing system; transferring said workpiece in a clean and dry condition to an unloading unit; conducting said polishing and said washing in an enclosing structure capable of containing and preventing an atmosphere within said enclosing structure from escaping therefrom to exterior thereof; conducting said transferring of said workpiece in said clean and dry condition to said unloading unit by a transfer structure; and said washing comprising conducting plural washing operations including a primary washing operation and a secondary washing operation.
Claim 114
Dependent Claim
23 words
A method as claimed in claim 102, wherein said polishing comprises conducting plural polishing operations by plural polishing units of said polishing system.
Claim 115
Dependent Claim
26 words
A method as claimed in claim 103, wherein said plural polishing operations comprise plural sequential polishing operations conducted on said workpiece by said plural polishing units.
Claim 116
Dependent Claim
28 words
A method as claimed in claim 103, wherein said plural polishing operations are conducted on plural workpieces simultaneously or at a time lag by said plural polishing units.
Claim 117
Dependent Claim
32 words
A method as claimed in claim 102, wherein said workpiece transferred to said unloading unit has a cleanliness substantially the same as a cleanliness of said workpiece transferred to said polishing system.
Claim 118
Dependent Claim
33 words
A method as claimed in claim 102, further comprising rinsing the polished workpiece at a first position, and then conducting said primary washing operation at a second position different from said first position.
Claim 119
Dependent Claim
25 words
A method as claimed in claim 107, further comprising transferring said polished workpiece from said first position to said second position by said transfer structure.
Claim 120
Dependent Claim
35 words
A method as claimed in claim 102, further comprising measuring the workpiece at least one time after introducing of the workpiece into said enclosing structure and before removing of the workpiece from said enclosing structure.
Claim 121
Dependent Claim
24 words
A method as claimed in claim 102, comprising conducting said washing of said workpiece and conducting drying of said workpiece at said washing system.
Claim 122
Dependent Claim
31 words
A method as claimed in claim 102, wherein said polishing system includes a top ring for holding said workpiece, and further comprising washing said top ring after releasing said polished workpiece.
Claim 123
Dependent Claim
45 words
A method as claimed in claim 102, wherein said workpiece is taken out from a first container at said loading unit containing workpieces to be polished, and said workpiece in said clean and dry condition is put into a second container at said unloading unit.
Claim 124
Dependent Claim
39 words
A method as claimed in claim 102, wherein said workpiece is taken out from a container at said loading unit containing workpieces to be polished, and said workpiece in said clean and dry condition is returned into said container.
Claim 125
Independent Claim
198 words
A method for polishing and then washing a workpiece, said method comprising: transferring a workpiece from a loading unit to a polishing system; polishing said workpiece at said polishing system; transferring said workpiece from said polishing system to a washing system; washing said workpiece at said washing system; transferring said workpiece in a clean and dry condition to an unloading unit; conducting said polishing and said washing in an enclosing structure capable of containing and preventing an atmosphere within said enclosing structure from escaping therefrom to exterior thereof; conducting said transferring of said workpiece in said clean and dry condition to said unloading unit by a transfer structure; conducting said transferring of said workpiece from said loading unit to said polishing system by said transfer structure; conducting said transferring of said workpiece to said polishing system and said transferring of said workpiece in said clean and dry condition by at least one first mechanism of said transfer structure that is discrete from at least one second mechanism thereof that is employed to transfer said workpiece to said washing system; and conducting said polishing and said washing around at least one robot including said at least one first mechanism.
Claim 126
Independent Claim
198 words
A method for polishing and then washing a workpiece, said method comprising: transferring a workpiece from a loading unit to a polishing system; polishing said workpiece at said polishing system; transferring said workpiece from said polishing system to a washing system; washing said workpiece at said washing system; transferring said workpiece in a clean and dry condition to an unloading unit; conducting said polishing and said washing in an enclosing structure capable of containing and preventing an atmosphere within said enclosing structure from escaping therefrom to exterior thereof; conducting said transferring of said workpiece in said clean and dry condition to said unloading unit by a transfer structure; conducting said transferring of said workpiece from said loading unit to said polishing system by said transfer structure; conducting said transferring of said workpiece to said polishing system and said transferring of said workpiece in said clean and dry condition by at least one first mechanism of said transfer structure that is discrete from at least one second mechanism thereof that is employed to transfer said workpiece to said washing system; and conducting said polishing and said washing around at least one robot including said at least one first mechanism.
Claim 127
Dependent Claim
23 words
A method as claimed in claim 114, wherein said polishing comprises conducting plural polishing operations by plural polishing units of said polishing system.
Claim 128
Dependent Claim
45 words
A method as claimed in claim 114, comprising one said robot having first and second robot arms, conducting said transferring of said workpiece to said polishing system with said first robot arm, and conducting said transferring to said unloading unit with said second robot arm.
Claim 129
Dependent Claim
24 words
A method as claimed in claim 116, wherein said at least one second mechanism comprises a polishing head supporting arm of said polishing system.
Claim 130
Dependent Claim
24 words
A method as claimed in claim 114, comprising conducting said washing of said workpiece and conducting drying of said workpiece at said washing system.
Claim 131
Dependent Claim
31 words
A method as claimed in claim 114, wherein said polishing system includes a top ring for holding said workpiece, and further comprising washing said top ring after releasing said polished workpiece.
Claim 132
Dependent Claim
17 words
A method as claimed in claim 114, wherein said enclosing structure is installed in a clean room.
Claim 133
Independent Claim
180 words
A method for polishing and then washing a workpiece, said method comprising: transferring a workpiece from a loading unit to a polishing system; polishing said workpiece at said polishing system; transferring said workpiece from said polishing system to a washing system; washing said workpiece at said washing system; transferring said workpiece in a clean and dry condition to an unloading unit; conducting said polishing and said washing in an enclosing structure capable of containing and preventing an atmosphere within said enclosing structure from escaping therefrom to exterior thereof; conducting said transferring of said workpiece in said clean and dry condition to said unloading unit by a transfer structure; conducting said transferring of said workpiece from said loading unit to said polishing system by said transfer structure; and conducting said transferring of said workpiece to said polishing system and said transferring of said workpiece in said clean and dry condition by at least one first robot of said transfer structure that is discrete from at least one second robot thereof that is employed to transfer said workpiece to said washing system.
Claim 134
Independent Claim
180 words
A method for polishing and then washing a workpiece, said method comprising: transferring a workpiece from a loading unit to a polishing system; polishing said workpiece at said polishing system; transferring said workpiece from said polishing system to a washing system; washing said workpiece at said washing system; transferring said workpiece in a clean and dry condition to an unloading unit; conducting said polishing and said washing in an enclosing structure capable of containing and preventing an atmosphere within said enclosing structure from escaping therefrom to exterior thereof; conducting said transferring of said workpiece in said clean and dry condition to said unloading unit by a transfer structure; conducting said transferring of said workpiece from said loading unit to said polishing system by said transfer structure; and conducting said transferring of said workpiece to said polishing system and said transferring of said workpiece in said clean and dry condition by at least one first robot of said transfer structure that is discrete from at least one second robot thereof that is employed to transfer said workpiece to said washing system.
Claim 135
Dependent Claim
23 words
A method as claimed in claim 121, wherein said polishing comprises conducting plural polishing operations by plural polishing units of said polishing system.
Claim 136
Dependent Claim
31 words
A method as claimed in claim 121, wherein said polishing system includes a top ring for holding said workpiece, and further comprising washing said top ring after releasing said polished workpiece.
Claim 137
Dependent Claim
17 words
A method as claimed in claim 121, wherein said enclosing structure is installed in a clean room.
References Cited (Backward Citations)
US4141180A
Cited
JPS5748472A
Cited
JPS63207559A
Cited
US5213118A
Cited
US5333413A
Cited
US5329732A
Cited
US5361545A
Cited
US5618227A
Cited
US5498294A
Cited
US5421768A
Cited
US5616063A
Cited
US5518542A
Cited
US5456627A
Cited
US5655954A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-22 | 2002-09-21 | 2003-03-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-22 | 2006-09-21 | 2007-03-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-22 | 2010-09-21 | 2011-03-23 | $7700.00 | Window Closed / Lapsed |