Patent US6071783A successfully refreshed from Google Patents.
US6071783A
Expired / Lapsed
US
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Pseudo silicon on insulator MOSFET device
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1998-08-13
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Granted: 2000-06-06
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Expires: 2018-08-13
Abstract
Abstract A process for forming a MOSFET device, featuring a heavily doped source/drain region, isolated from a semiconductor substrate, via use of a thin silicon oxide layer, has been developed. After formation of a lightly doped source/drain region, an opening is created in the semiconductor substrate, in a region between insulator spacers, on a gate structure, and insulator filled, shallow trench regions, resulting in lightly doped source/drain segments, remaining under the masking insulator spacers. After a thin silicon oxide layer is formed on the exposed silicon surfaces, in the openings, a silicon deposition, and etch back procedures are performed, partially refilling the openings to a depth that still allows the thin silicon oxide layer to be exposed on the sides of the lightly doped source/drain segment. After removal of the exposed portion of the thin silicon oxide layer, and after deposition and etch back of another silicon layer, completely filling the openings, a heavily doped source/drain region is formed in the silicon layers, residing in the openings.
Inventors
- 👤 Mong-Song Liang
- 👤 Jin-Yuan Lee
- 👤 Chue-San Yoo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 17:15
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/01; H10D62/021; H10D62/10; H10D62/113; H10D62/115; H10D62/116; H10D64/00; H10D64/20; H10D64/23; H10D64/251; H10D64/256
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
341 words
A method of fabricating a MOSFET device, on a semiconductor substrate, comprising the steps of: forming isolation regions in said semiconductor substrate; forming a gate insulator layer on said semiconductor substrate; forming an insulator capped, gate structure on said gate insulator layer; forming a lightly doped source/drain region, in regions of said semiconductor substrate, not covered by said insulator capped, gate structure, and not covered by said isolation regions; forming an insulator spacer on the sides of said insulator capped, gate structure; forming first openings in a region of said semiconductor substrate, between insulator spacers, on the side of said insulator capped, gate structure, and said isolation region, removing the portion of said lightly doped source and drain region, exposed between insulator spacers, on the sides of said insulator capped, gate structure, and isolation regions, and leaving lightly doped source/drain segments, under said insulator spacers; growing a thin insulator layer on the exposed surfaces of said first openings, including the growth of said thin insulator layer on the exposed side of said lightly doped source/drain segments; partial filling of said first openings, with a first silicon layer, on said thin insulator layer, in said first openings, creating second openings, located between said insulator spacers, on the sides of said gate structure, and said isolation regions, with said second openings exposing a portion of said thin insulator layer, located on the side of said lightly doped source/drain segments; removing said portion of said thin insulator layer, from the side of said lightly doped source/drain segments, in said second openings; complete filling of said second openings, with a second silicon layer, and with said second silicon layer interfacing the side of said lightly doped source/drain segments, in said second opening; and forming heavily doped source/drain regions in said second silicon layer, and in said first silicon layer, with said heavily doped source/drain regions, interfacing the side of said lightly doped source/drain segments, in a region underlying said insulator spacers, and with said heavily doped source/drain region interfacing, and overlying, said thin insulator layer.
Claim 2
Independent Claim
341 words
A method of fabricating a MOSFET device, on a semiconductor substrate, comprising the steps of: forming isolation regions in said semiconductor substrate; forming a gate insulator layer on said semiconductor substrate; forming an insulator capped, gate structure on said gate insulator layer; forming a lightly doped source/drain region, in regions of said semiconductor substrate, not covered by said insulator capped, gate structure, and not covered by said isolation regions; forming an insulator spacer on the sides of said insulator capped, gate structure; forming first openings in a region of said semiconductor substrate, between insulator spacers, on the side of said insulator capped, gate structure, and said isolation region, removing the portion of said lightly doped source and drain region, exposed between insulator spacers, on the sides of said insulator capped, gate structure, and isolation regions, and leaving lightly doped source/drain segments, under said insulator spacers; growing a thin insulator layer on the exposed surfaces of said first openings, including the growth of said thin insulator layer on the exposed side of said lightly doped source/drain segments; partial filling of said first openings, with a first silicon layer, on said thin insulator layer, in said first openings, creating second openings, located between said insulator spacers, on the sides of said gate structure, and said isolation regions, with said second openings exposing a portion of said thin insulator layer, located on the side of said lightly doped source/drain segments; removing said portion of said thin insulator layer, from the side of said lightly doped source/drain segments, in said second openings; complete filling of said second openings, with a second silicon layer, and with said second silicon layer interfacing the side of said lightly doped source/drain segments, in said second opening; and forming heavily doped source/drain regions in said second silicon layer, and in said first silicon layer, with said heavily doped source/drain regions, interfacing the side of said lightly doped source/drain segments, in a region underlying said insulator spacers, and with said heavily doped source/drain region interfacing, and overlying, said thin insulator layer.
Claim 3
Dependent Claim
34 words
The method of claim 1, wherein said isolation regions, are insulator filled shallow trench regions, formed to a depth between about 2000 to 5000 Angstroms, in said semiconductor substrate, and filled with silicon oxide.
Claim 4
Dependent Claim
30 words
The method of claim 1, wherein said gate insulator layer is silicon dioxide, obtained via thermal oxidation, in an oxygen-steam ambient, at a thickness between about 25 to 100 Angstroms.
Claim 5
Dependent Claim
34 words
The method of claim 1, wherein said insulator capped, gate structure is a polysilicon gate structure, formed from a polysilicon layer, obtained via LPCVD procedures, at a thickness between about 1000 to 3000 Angstroms.
Claim 6
Dependent Claim
36 words
The method of claim 1, wherein the insulator layer, used for said insulator capped, gate structure, is a silicon oxide layer, obtained via LPCVD or PECVD procedures, at a thickness between about 200 to 2500 Angstroms.
Claim 7
Dependent Claim
36 words
The method of claim 1, wherein the insulator layer, used for said insulator capped, gate structure, is a silicon nitride layer, obtained via LPCVD or PECVD procedures, at a thickness between about 200 to 2500 Angstroms.
Claim 8
Dependent Claim
41 words
The method of claim 1, wherein said lightly doped source/drain region is created via ion implantation of arsenic or phosphorous ions, at a energy between about 5 to 30 KeV, at a dose between about 1E13 to 5E14 atoms/cm 2 .
Claim 9
Dependent Claim
31 words
The method of claim 1, wherein said insulator spacers are formed from a silicon oxide layer, obtained using LPCVD or PECVD procedures, at a thickness between about 500 to 2000 Angstroms.
Claim 10
Dependent Claim
32 words
The method of claim 1, wherein said insulator spacers are formed from a silicon nitride layer, obtained from a LPCVD or PECVD procedure, at a thickness between about 500 to 2000 Angstroms.
Claim 11
Dependent Claim
39 words
The method of claim 1, wherein said first openings are formed to a depth between about 1000 to 3000 Angstroms, below the top surface of said semiconductor substrate, via an anisotropic RIE procedure, using Cl 2 as an etchant.
Claim 12
Dependent Claim
40 words
The method of claim 1, wherein said thin insulator layer, on the surface of said first openings, is a silicon dioxide layer, obtained via thermal oxidation procedures, in an oxygen-steam ambient, to a thickness between about 40 to 50 Angstroms.
Claim 13
Dependent Claim
39 words
The method of claim 1, wherein said first silicon layer, used to partially fill said first openings, is a polysilicon layer, or an amorphous silicon layer, obtained via LPCVD procedures, to a thickness between about 1000 to 6000 Angstroms.
Claim 14
Dependent Claim
61 words
The method of claim 1, wherein said partial filling of said first openings, is accomplished via deposition of said first silicon layer, and an anisotropic RIE, etch back procedure, using Cl 2 as an etchant for said first silicon layer, creating said second opening, with a depth between about 300 to 1500 Angstroms, below the top surface of said semiconductor substrate.
Claim 15
Dependent Claim
41 words
The method of claim 1, wherein the portion of said thin insulator layer, exposed in said second opening, located on the side of said lightly doped source/drain segment, is removed using a buffered hydrofluoric acid, or a dilute hydrofluoric acid, solution.
Claim 16
Dependent Claim
38 words
The method of claim 1, wherein said second silicon layer, used to fill said second openings, is a polysilicon layer, or an amorphous silicon layer, obtained via LPCVD procedures, at a thickness between about 1000 to 6000 Angstroms.
Claim 17
Dependent Claim
41 words
The method of claim 1, wherein said heavily doped source/drain region is created via ion implantation of arsenic or phosphorous ions, at an energy between about 10 to 50 KeV, at a dose between about 1E15 to 1E16 atoms/cm 2 .
Claim 18
Independent Claim
363 words
A method of fabricating a MOSFET device, on a semiconductor substrate, using a thin silicon oxide layer to isolate a heavily doped source/drain region, from said semiconductor substrate, comprising the steps of: forming isolation regions in said semiconductor substrate; forming a silicon dioxide gate insulator layer on said semiconductor substrate; forming a silicon oxide capped, polysilicon gate structure, on said silicon dioxide gate insulator layer; forming a lightly doped source/drain region, in a region of said semiconductor substrate, not covered by said silicon oxide capped, polysilicon gate structure, or by said isolation regions; forming silicon oxide spacers on the sides of said silicon oxide capped, polysilicon gate structure; anisotropic etching of a region of said lightly doped source/drain region, and of an underlying portion of said semiconductor substrate, exposed between said silicon oxide spacers, and said isolation region, to create first openings in said semiconductor substrate, leaving lightly doped source/drain segments under said silicon oxide spacers; growing said thin silicon oxide layer on the exposed surfaces of said first opening; depositing a first intrinsic silicon layer, completely filling said first openings; etching of said first intrinsic silicon layer, to a level in which first silicon layer remains in the bottom portion of said first openings, resulting in second openings, located between said silicon oxide spacers, and said isolation regions, with said thin silicon oxide layer, on sides of said lightly doped source/drain segments, exposed in said second openings; removing said thin silicon oxide layer, from the sides of said lightly doped source/drain segments, exposed in said second openings; depositing a second intrinsic silicon layer, completely filling said second opening; etching of said second intrinsic silicon layer, to a level in which said second silicon layer is planar with the top surface of said semiconductor substrate; and forming said heavily doped source/drain regions, in said second intrinsic silicon layer, and in said first intrinsic silicon layer, with said heavily doped source/drain regions overlying said thin silicon oxide layer, in said first openings, and with said heavily doped source/drain regions, interfacing the sides of said lightly doped source/drain segments, in regions of said second openings in which said thin silicon oxide layer has been removed.
Claim 19
Independent Claim
363 words
A method of fabricating a MOSFET device, on a semiconductor substrate, using a thin silicon oxide layer to isolate a heavily doped source/drain region, from said semiconductor substrate, comprising the steps of: forming isolation regions in said semiconductor substrate; forming a silicon dioxide gate insulator layer on said semiconductor substrate; forming a silicon oxide capped, polysilicon gate structure, on said silicon dioxide gate insulator layer; forming a lightly doped source/drain region, in a region of said semiconductor substrate, not covered by said silicon oxide capped, polysilicon gate structure, or by said isolation regions; forming silicon oxide spacers on the sides of said silicon oxide capped, polysilicon gate structure; anisotropic etching of a region of said lightly doped source/drain region, and of an underlying portion of said semiconductor substrate, exposed between said silicon oxide spacers, and said isolation region, to create first openings in said semiconductor substrate, leaving lightly doped source/drain segments under said silicon oxide spacers; growing said thin silicon oxide layer on the exposed surfaces of said first opening; depositing a first intrinsic silicon layer, completely filling said first openings; etching of said first intrinsic silicon layer, to a level in which first silicon layer remains in the bottom portion of said first openings, resulting in second openings, located between said silicon oxide spacers, and said isolation regions, with said thin silicon oxide layer, on sides of said lightly doped source/drain segments, exposed in said second openings; removing said thin silicon oxide layer, from the sides of said lightly doped source/drain segments, exposed in said second openings; depositing a second intrinsic silicon layer, completely filling said second opening; etching of said second intrinsic silicon layer, to a level in which said second silicon layer is planar with the top surface of said semiconductor substrate; and forming said heavily doped source/drain regions, in said second intrinsic silicon layer, and in said first intrinsic silicon layer, with said heavily doped source/drain regions overlying said thin silicon oxide layer, in said first openings, and with said heavily doped source/drain regions, interfacing the sides of said lightly doped source/drain segments, in regions of said second openings in which said thin silicon oxide layer has been removed.
Claim 20
Dependent Claim
34 words
The method of claim 17, wherein said isolation regions are silicon oxide filled, shallow trench regions, formed to a depth between about 2000 to 5000 Angstroms, below the top surface of said semiconductor substrate.
Claim 21
Dependent Claim
28 words
The method of claim 17, wherein said silicon dioxide gate insulator layer is thermally grown, in an oxygen-steam ambient, to a thickness between about 25 to 100 Angstroms.
Claim 22
Dependent Claim
56 words
The method of claim 17, wherein said silicon oxide spacers, on the sides of said silicon oxide capped, polysilicon gate structure, are formed via deposition of a silicon oxide layer, via LPCVD or PECVD procedures, at a thickness between about 500 to 2000 Angstroms, followed by an anisotropic RIE procedure, using CHF 3 as an etchant.
Claim 23
Dependent Claim
41 words
The method of claim 17, wherein said lightly doped source/drain regions are formed via ion implantation of arsenic or phosphorous ions, at an energy between about 5 to 30 KeV, at a dose between about 1E13 to 5E14 atoms/cm 2 .
Claim 24
Dependent Claim
39 words
The method of claim 17, wherein said first openings are created via an anisotropic RIE procedure, using Cl 2 as an etchant, to a depth between about 1000 to 3000 Angstroms, below the top surface of said semiconductor substrate.
Claim 25
Dependent Claim
35 words
The method of claim 17, wherein said thin silicon oxide layer is thermally grown on the exposed surfaces of said first openings, in a oxygen-steam ambient, to a thickness between about 40 to 500 Angstroms.
Claim 26
Dependent Claim
35 words
The method of claim 17, wherein said first intrinsic silicon layer, is an intrinsic polysilicon layer, or an intrinsic amorphous silicon layer, deposited using LPCVD procedures, at a thickness between about 1000 to 6000 Angstroms.
Claim 27
Dependent Claim
38 words
The method of claim 17, wherein said thin silicon oxide layer, on the sides of said lightly doped source/drain segment, exposed in said second openings, is removed using a buffered hydrofluoric acid, or a dilute hydrofluoric acid solution.
Claim 28
Dependent Claim
35 words
The method of claim 17, wherein said second intrinsic silicon layer is an intrinsic polysilicon layer, or an intrinsic amorphous silicon layer, deposited using LPCVD procedures, to a thickness between about 1000 to 6000 Angstroms.
Claim 29
Dependent Claim
54 words
The method of claim 17, wherein said heavily doped source/drain regions are formed in said second intrinsic silicon layer, and in said first intrinsic silicon layer, via ion implantation of arsenic, or phosphorous ions, at an energy between about 10 to 50 KeV, at a dose between about 1E15 to 1E16 atoms/cm 2 .
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2003-06-06 | 2003-12-06 | 2004-06-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-06-06 | 2007-12-06 | 2008-06-06 | $3760.00 | Window Closed / Lapsed |
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