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US6151532A
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Method and apparatus for predicting plasma-process surface profiles
Assignee: Lam Research Corp
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Filing: 1998-03-03
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Granted: 2000-11-21
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Expires: 2018-03-03
Abstract
Abstract The invention provides a method for predicting a process surface profile that a given plasma process will create on a process substrate. The prediction is based on a test surface profile, the experimental outcome of a test process which is in general different from the plasma process of interest. In another aspect, the invention provides a technique for defining a plasma process that will produce a desired surface profile. Thus, in related aspects, the invention also provides apparatus for predicting a process surface profile and determining process values, a method of configuring a plasma reactor, a method of making semiconductor devices requiring limited empirical calibration, and a device made according to the method.
Inventors
- 👤 Maria E. Barone
- 👤 Richard A. Gottscho
- 👤 Vahid Vahedi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 19:48
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32917; H01J37/32935; H01J37/32009; H01J37/32082; H01J37/321; H01J37/32174
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
202 words
A method of determining a respective process value of at least one input variable governing a plasma process sequence for creating a desired surface profile on a process substrate, the method comprising the steps of: a. selecting a respective test value of the at least one input variable; b. performing on a test substrate, a test process defined by the respective test value, thereby creating a test surface profile; c. providing an initial surface profile model in terms of the at least one input variable and at least one unknown coefficient; d. generating an approximate profile prediction from the initial surface profile model and the respective test value of the at least one input variable; e. generating an indicator of difference between the test surface profile and the approximate profile prediction; f. generating a respective optimum value of the at least one unknown coefficient that minimizes the indicator of difference; g. modifing the initial surface profile model to include the at least one optimum value, thereby providing a final model in terms of the at least one input variable; and h. generating the respective process value of the at least one input variable from the final model and the desired surface profile.
Claim 2
Independent Claim
202 words
A method of determining a respective process value of at least one input variable governing a plasma process sequence for creating a desired surface profile on a process substrate, the method comprising the steps of: a. selecting a respective test value of the at least one input variable; b. performing on a test substrate, a test process defined by the respective test value, thereby creating a test surface profile; c. providing an initial surface profile model in terms of the at least one input variable and at least one unknown coefficient; d. generating an approximate profile prediction from the initial surface profile model and the respective test value of the at least one input variable; e. generating an indicator of difference between the test surface profile and the approximate profile prediction; f. generating a respective optimum value of the at least one unknown coefficient that minimizes the indicator of difference; g. modifing the initial surface profile model to include the at least one optimum value, thereby providing a final model in terms of the at least one input variable; and h. generating the respective process value of the at least one input variable from the final model and the desired surface profile.
Claim 3
Dependent Claim
18 words
The method of claim 1 wherein the at least one unknown coefficient comprises a plurality of unknown coefficients.
Claim 4
Dependent Claim
43 words
The method of claim 1 wherein the at least one input variable comprises a plurality of input variables, the approximate profile prediction being generated from the initial surface profile model and the respective test values of each of the plurality of input variables.
Claim 5
Dependent Claim
55 words
The method of claim 1 wherein the test surface profile comprises a plurality of snapshots, the approximate profile prediction including a frame corresponding to each snapshot, the step of generating an indicator of difference between the test surface profile and the approximate profile prediction including pairwise comparison of each snapshot with the respective corresponding frame.
Claim 6
Dependent Claim
25 words
The method of claim 1 wherein generating an approximate profile prediction includes using a respective rough preliminary value of the at least one unknown coefficient.
Claim 7
Dependent Claim
57 words
The method of claim 5 wherein generating a respective optimum value of the at least one unknown coefficient includes changing at least one of said at least one respective rough preliminary value of the at least one unknown coefficient and comparing the test surface profile and the approximate profile prediction incorporating the at least one changed value.
Claim 8
Dependent Claim
18 words
The method of claim 1 wherein the indicator of difference is generated by a multidimensional nonlinear least-squares technique.
Claim 9
Dependent Claim
52 words
A method of processing a process substrate to create a desired surface profile thereon, the process comprising the step of applying a plasma process to the process substrate, the plasma process being defined by the respective process value of the at least one input variable determined by the method of claim 1.
Claim 10
Dependent Claim
35 words
The method of claim 1 further comprising the step of applying a plasma process to the process substrate, the plasma process being defined by the respective process value of the at least one input variable.
Claim 11
Independent Claim
235 words
A method of predictively calculating a process surface profile to be created on a process substrate by a plasma process sequence defined by a respective process value of at least one input variable, the method comprising the steps of: a. selecting a respective test value of the at least one input variable, at least one of said at least one respective test value being unequal to at least one of said at least one respective process value; b. performing, on a test substrate, a test process defined by the respective test value, thereby creating a test surface profile; c. providing an initial surface profile model in terms of the at least one input variable and at least one unknown coefficient; d. generating an approximate profile prediction from the initial surface profile model and the respective test value of the at least one input variable; e. generating an indicator of difference between the test surface profile and the approximate profile prediction; f. generating a respective optimum value of the at least one unknown coefficient that minimizes the indicator of difference; g. modifing the initial surface profile model to include the at least one optimum value, thereby providing a final model in terms of the at least one input variable; and h. introducing the respective process value of the at least one input variable into the final model, thereby forming a description of the process surface profile.
Claim 12
Independent Claim
235 words
A method of predictively calculating a process surface profile to be created on a process substrate by a plasma process sequence defined by a respective process value of at least one input variable, the method comprising the steps of: a. selecting a respective test value of the at least one input variable, at least one of said at least one respective test value being unequal to at least one of said at least one respective process value; b. performing, on a test substrate, a test process defined by the respective test value, thereby creating a test surface profile; c. providing an initial surface profile model in terms of the at least one input variable and at least one unknown coefficient; d. generating an approximate profile prediction from the initial surface profile model and the respective test value of the at least one input variable; e. generating an indicator of difference between the test surface profile and the approximate profile prediction; f. generating a respective optimum value of the at least one unknown coefficient that minimizes the indicator of difference; g. modifing the initial surface profile model to include the at least one optimum value, thereby providing a final model in terms of the at least one input variable; and h. introducing the respective process value of the at least one input variable into the final model, thereby forming a description of the process surface profile.
Claim 13
Dependent Claim
18 words
The method of claim 10 wherein the at least one unknown coefficient comprises a plurality of unknown coefficients.
Claim 14
Dependent Claim
43 words
The method of claim 10 wherein the at least one input variable comprises a plurality of input variables, the approximate profile prediction being generated from the initial surface profile model and the respective test values of each of the plurality of input variables.
Claim 15
Dependent Claim
55 words
The method of claim 10 wherein the test surface profile comprises a plurality of snapshots, the approximate profile description including a frame corresponding to each snapshot, the step of generating an indicator of difference between the test surface profile and the approximate profile description including pairwise comparison of each snapshot with the respective corresponding frame.
Claim 16
Dependent Claim
25 words
The method of claim 10 wherein generating an approximate profile description includes using a respective rough preliminary value of the at least one unknown coefficient.
Claim 17
Dependent Claim
57 words
The method of claim 14 wherein generating a respective optimum value of the at least one unknown coefficient includes changing at least one of said at least one respective rough preliminary value of the at least one unknown coefficient and comparing the test surface profile and the approximate profile prediction incorporating the at least one changed value.
Claim 18
Dependent Claim
18 words
The method of claim 10 wherein the indicator of difference is generated by a multidimensional nonlinear least-squares technique.
Claim 19
Dependent Claim
20 words
The method of claim 10 wherein the respective process value of the at least one input variable varies with time.
Claim 20
Independent Claim
243 words
A method of configuring an apparatus for processing a process substrate according to a plasma process sequence defined by a respective process value of at least one input variable, the apparatus including a plasma reactor, the at least one input variable including at least one reaction variable, the method comprising the steps of: a. selecting a respective test value of the at least one input variable; b. performing, on a test substrate, a test process defined by the respective test value, thereby creating a test surface profile; c. providing an initial surface profile model in terms of the at least one input variable and at least one unknown coefficient; d. generating an approximate profile prediction from the initial surface profile model and the respective test value of the at least one input variable; e. generating an indicator of difference between the test surface profile and the approximate profile prediction; f. generating a respective optimum value of the at least one unknown coefficient that minimizes the indicator of difference; g. modifying the initial surface profile model to include the at least one optimum value, thereby providing a final model in terms of the at least one input variable; h. generating the respective process value of the at least one input variable from the final model and the desired surface profile; and i. configuring the reactor to process the process substrate according to the derived respective process value of the at least one reaction variable.
Claim 21
Independent Claim
243 words
A method of configuring an apparatus for processing a process substrate according to a plasma process sequence defined by a respective process value of at least one input variable, the apparatus including a plasma reactor, the at least one input variable including at least one reaction variable, the method comprising the steps of: a. selecting a respective test value of the at least one input variable; b. performing, on a test substrate, a test process defined by the respective test value, thereby creating a test surface profile; c. providing an initial surface profile model in terms of the at least one input variable and at least one unknown coefficient; d. generating an approximate profile prediction from the initial surface profile model and the respective test value of the at least one input variable; e. generating an indicator of difference between the test surface profile and the approximate profile prediction; f. generating a respective optimum value of the at least one unknown coefficient that minimizes the indicator of difference; g. modifying the initial surface profile model to include the at least one optimum value, thereby providing a final model in terms of the at least one input variable; h. generating the respective process value of the at least one input variable from the final model and the desired surface profile; and i. configuring the reactor to process the process substrate according to the derived respective process value of the at least one reaction variable.
Claim 22
Independent Claim
220 words
An apparatus for determining a respective process value of at least one input variable governing a plasma process sequence for creating a desired surface profile on a process substrate, the apparatus comprising: a. a computer memory for storing the desired surface profile; b. a computer memory for storing a test surface profile, created by performing a test process defined by a respective test value of the at least one input variable on a test substrate; c. means for generating an initial surface profile model in terms of the at least one input variable and at least one unknown coefficient; d. means for generating an approximate profile description from the initial surface profile model and the respective test value of the at least one input variable; e. means for generating an indicator of difference between the test surface profile and the approximate profile prediction; f. means for generating a respective optimum value of the at least one unknown coefficient that minimizes the indicator of difference; g. means for modifying the initial surface profile model to include the at least one optimum value, thereby providing a final model in terms of the at least one input variable; and h. means for generating the respective process value of the at least one input variable from the final model and the desired surface profile.
Claim 23
Independent Claim
220 words
An apparatus for determining a respective process value of at least one input variable governing a plasma process sequence for creating a desired surface profile on a process substrate, the apparatus comprising: a. a computer memory for storing the desired surface profile; b. a computer memory for storing a test surface profile, created by performing a test process defined by a respective test value of the at least one input variable on a test substrate; c. means for generating an initial surface profile model in terms of the at least one input variable and at least one unknown coefficient; d. means for generating an approximate profile description from the initial surface profile model and the respective test value of the at least one input variable; e. means for generating an indicator of difference between the test surface profile and the approximate profile prediction; f. means for generating a respective optimum value of the at least one unknown coefficient that minimizes the indicator of difference; g. means for modifying the initial surface profile model to include the at least one optimum value, thereby providing a final model in terms of the at least one input variable; and h. means for generating the respective process value of the at least one input variable from the final model and the desired surface profile.
Claim 24
Dependent Claim
57 words
The apparatus of claim 19 wherein the test surface profile comprises a plurality of snapshots, the approximate profile prediction including a frame corresponding to each snapshot, the means for generating an indicator of difference between the test surface profile and the approximate profile prediction being configured so as to compare each snapshot with the respective corresponding frame.
Claim 25
Dependent Claim
56 words
The apparatus of claim 19 further comprising a computer memory for storing a respective rough preliminary value of the at least one unknown coefficient, the means for generating an approximate profile description from the initial surface profile model and the respective test value of the at least one input variable employing the respective rough preliminary value.
Claim 26
Dependent Claim
63 words
The method of claim 21 wherein the means for generating a respective optimum value of the at least one unknown coefficient is configured to change at least one of said at least one respective rough preliminary value of the at least one unknown coefficient and to compare the test surface profile and the approximate profile prediction incorporating the at least one changed value.
Claim 27
Dependent Claim
30 words
The method of claim 19 wherein the means for generating an indicator of difference between the test surface profile and the approximate profile prediction employs a multidimensional nonlinear least-squares technique.
Claim 28
Independent Claim
230 words
An apparatus for predictively calculating a process surface profile to be created on a process substrate by a plasma process sequence defined by a respective process value of at least one input variable, the apparatus comprising: a. a computer memory for storing the respective process value; b. a computer memory for storing a test surface profile, the computer memory being created by performing a test process defined by a respective test value of the at least one input variable on a test substrate; c. means for generating an initial surface profile model in terms of the at least one input variable and at least one unknown coefficient; d. means for generating an approximate profile prediction from the initial model and the respective test value of the at least one input variable; e. means for generating an indicator of difference between the test surface profile and the approximate profile prediction; f. means for generating a respective optimum value of the at least one unknown coefficient that minimizes the indicator of difference; g. means for modifing the initial surface profile model to include the at least one optimum value, thereby providing a final model in terms of the at least one input variable; and h. means for introducing the respective process value of the at least one input variable into the final model, thereby forming a description of the process surface profile.
Claim 29
Independent Claim
230 words
An apparatus for predictively calculating a process surface profile to be created on a process substrate by a plasma process sequence defined by a respective process value of at least one input variable, the apparatus comprising: a. a computer memory for storing the respective process value; b. a computer memory for storing a test surface profile, the computer memory being created by performing a test process defined by a respective test value of the at least one input variable on a test substrate; c. means for generating an initial surface profile model in terms of the at least one input variable and at least one unknown coefficient; d. means for generating an approximate profile prediction from the initial model and the respective test value of the at least one input variable; e. means for generating an indicator of difference between the test surface profile and the approximate profile prediction; f. means for generating a respective optimum value of the at least one unknown coefficient that minimizes the indicator of difference; g. means for modifing the initial surface profile model to include the at least one optimum value, thereby providing a final model in terms of the at least one input variable; and h. means for introducing the respective process value of the at least one input variable into the final model, thereby forming a description of the process surface profile.
Claim 30
Dependent Claim
57 words
The apparatus of claim 24 wherein the test surface profile comprises a plurality of snapshots, the approximate profile prediction including a prediction corresponding to each snapshot, the means for generating an indicator of difference between the test surface profile and the approximate profile prediction being configured so as to compare each snapshot with the respective corresponding prediction.
Claim 31
Dependent Claim
38 words
The apparatus of claim 24 further comprising a computer memory for storing a respective rough preliminary value of the at least one unknown coefficient, the means for generating an approximate profile prediction employing the respective rough preliminary value.
Claim 32
Dependent Claim
63 words
The method of claim 26 wherein the means for generating a respective optimum value of the at least one unknown coefficient is configured to change at least one of said at least one respective rough preliminary value of the at least one unknown coefficient and to compare the test surface profile and the approximate profile prediction incorporating the at least one changed value.
Claim 33
Dependent Claim
30 words
The method of claim 24 wherein the means for generating an indicator of difference between the test surface profile and the approximate profile prediction employs a multidimensional nonlinear least-squares technique.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-11-21 | 2004-05-22 | 2004-11-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-11-21 | 2008-05-22 | 2008-11-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-11-21 | 2012-05-22 | 2012-11-21 | $7700.00 | Window Closed / Lapsed |