Patent US6187640B1 successfully refreshed from Google Patents.
US6187640B1
Expired / Lapsed
US
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Semiconductor device manufacturing method including various oxidation steps with different concentration of chlorine to form a field oxide
Assignee: Fujitsu Ltd
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Filing: 1998-11-17
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Granted: 2001-02-13
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Expires: 2018-11-17
Abstract
Abstract In a method of manufacturing a semiconductor device, there are comprised the steps of forming an oxidation preventing layer on a surface of a semiconductor substrate, forming first window in the oxidation preventing layer, placing the semiconductor substrate in a first atmosphere in which an oxygen gas and a first amount of a chlorine gas are supplied through and then heating the semiconductor substrate at a first temperature such that a first selective oxide film is to grown by thermally oxidizing the surface of the semiconductor substrate exposed from the first window, forming a second window by patterning the oxidation preventing layer, and placing the semiconductor substrate in a second atmosphere in which the oxygen gas and a second amount, which is larger than the first amount, of the chlorine gas are supplied through and then heating the semiconductor substrate at a second temperature such that a second selective oxide film is formed and that a thickness of the first selective oxide film formed below the first window is enhanced. Accordingly, generation of projection on bird's beak of a selective oxide film can be prevented in a semiconductor device manufacturing method including a step of growing a local oxidation of silicon film.
Inventors
- 👤 Hiroyuki Shimada
- 👤 Masaaki Higashitani
- 👤 Hideo Kurihara
- 👤 Hideki Komori
- 👤 Satoshi Takahashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 03:57
CPC Classifications
H; H10; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/012; H10W10/0128; H10W10/10; H10W10/13
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
178 words
A method of manufacturing a semiconductor device comprising the steps of: forming an oxidation preventing layer on a surface of a semiconductor substrate; forming a first window by patterning the oxidation preventing layer; placing the semiconductor substrate in a first atmosphere in which an oxygen gas and a first amount of a chlorine or chloride gas are supplied, and then heating the semiconductor substrate at a first temperature such that a first field oxide layer is to grown by thermally oxidizing the surface of the semiconductor substrate exposed from the first window; forming a second window by patterning the oxidation preventing layer; and placing the semiconductor substrate in a second atmosphere in which the oxygen gas and a second amount, which is larger than the first amount by more than 0.5 flow rate percent, of the chlorine or chloride gas are supplied, and then heating the semiconductor substrate at a second temperature such that a second field oxide layer is formed and that a thickness of the first field oxide layer formed below the first window is enhanced.
Claim 2
Independent Claim
178 words
A method of manufacturing a semiconductor device comprising the steps of: forming an oxidation preventing layer on a surface of a semiconductor substrate; forming a first window by patterning the oxidation preventing layer; placing the semiconductor substrate in a first atmosphere in which an oxygen gas and a first amount of a chlorine or chloride gas are supplied, and then heating the semiconductor substrate at a first temperature such that a first field oxide layer is to grown by thermally oxidizing the surface of the semiconductor substrate exposed from the first window; forming a second window by patterning the oxidation preventing layer; and placing the semiconductor substrate in a second atmosphere in which the oxygen gas and a second amount, which is larger than the first amount by more than 0.5 flow rate percent, of the chlorine or chloride gas are supplied, and then heating the semiconductor substrate at a second temperature such that a second field oxide layer is formed and that a thickness of the first field oxide layer formed below the first window is enhanced.
Claim 3
Dependent Claim
40 words
The method as set forth claim 1 , wherein the step of forming the oxidation preventing layer on the surface of the semiconductor substrate is the step of forming a nitride semiconductor layer on the surface of the semiconductor substrate.
Claim 4
Dependent Claim
25 words
The method as set forth claim 1 , the semiconductor substrate is a silicon substrate and the oxidation preventing layer is a silicon nitride layer.
Claim 5
Dependent Claim
23 words
The method as set forth claim 1 , wherein the first temperature and the second temperature are set to less than 1000° C.
Claim 6
Dependent Claim
82 words
The method as set forth claim 1 , further comprising, before the step of forming the second window, the step of placing the semiconductor substrate in a third atmosphere in which the oxygen gas and a third amount, which is smaller than the first amount, of the chlorine gas are supplied; and then heating the semiconductor substrate at a third temperature, which is higher than the first temperature, so as to enhance the thickness as set forth the first selective oxide film.
Claim 7
Dependent Claim
20 words
The method as set forth claim 5 , wherein the third temperature temperature is set to more than 1125° C.
Claim 8
Dependent Claim
102 words
The method as set forth claim 1 , further comprising, after the surface of the semiconductor substrate positioned below the first window and the second window has been thermally oxidized in the second atmosphere, the step of placing the semiconductor substrate in a fourth atmosphere in which the oxygen gas and a forth amount, which is smaller than the second amount, of the chlorine gas are supplied, and then heating the semiconductor substrate at a fourth temperature, which is higher than the second temperature, so as to enhance the thickness of the first selective oxide film and the second selective oxide film.
Claim 9
Dependent Claim
23 words
The method as set forth claim 7 , wherein the third temperature and the fourth temperature are set to more than 1125° C.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-02-13 | 2004-08-14 | 2005-02-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-02-13 | 2008-08-14 | 2009-02-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-02-13 | 2012-08-14 | 2013-02-13 | $7700.00 | Window Closed / Lapsed |