Patent US6249342B1 successfully refreshed from Google Patents.
US6249342B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for handling and testing wafers
Assignee: Individual
•
Filing: 1999-07-06
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Granted: 2001-06-19
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Expires: 2019-07-06
Abstract
Abstract Disclosed is a wafer handling and testing apparatus. The wafer handling and testing apparatus includes a support assembly, a wafer handling assembly, and a probe assembly. The support assembly is capable of supporting a wafer to be tested and is also capable of rotating the wafer for testing. The wafer handling assembly is arranged to move the wafer to and from the support assembly. The wafer handling assembly is capable of moving the along a first axis and a second axis. The first axis is preferably orthogonal to the second axis. The wafer probe is arranged to test the wafer when the wafer is placed on the support assembly.
Inventors
- 👤 David Cheng
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 10:15
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/34; H10P72/3402; G; G01; G01R; G01R31/00; G01R31/28; G01R31/2851; G01R31/2886; G01R31/2887; G01R31/282; G01R31/2831
Claims Analysis
Total Claims: 48
Claim 1
Independent Claim
104 words
A wafer handling and testing apparatus comprising: a support assembly capable of supporting a wafer to be tested, the support assembly also being capable of rotating the wafer for testing; a wafer handling assembly arranged to move the wafer to and from the support assembly, the wafer handling assembly capable of moving the wafer only along a first axis and a second axis, the first axis being substantially orthogonal to the second axis, wherein no more than one motor is used for each of said axes; and a probe assembly arrange to test the wafer when the wafer is placed on the support assembly.
Claim 2
Dependent Claim
104 words
A wafer handling and testing apparatus comprising: a support assembly capable of supporting a wafer to be tested, the support assembly also being capable of rotating the wafer for testing; a wafer handling assembly arranged to move the wafer to and from the support assembly, the wafer handling assembly capable of moving the wafer only along a first axis and a second axis, the first axis being substantially orthogonal to the second axis, wherein no more than one motor is used for each of said axes; and a probe assembly arrange to test the wafer when the wafer is placed on the support assembly.
Claim 3
Dependent Claim
15 words
The apparatus as recited in claim 1 , wherein the first axis is an x-axis.
Claim 4
Dependent Claim
15 words
The apparatus as recited in claim 1 , wherein the second axis is a z-axis.
Claim 5
Dependent Claim
17 words
The apparatus as recited in claim 1 , wherein the first axis is in a horizontal plane.
Claim 6
Dependent Claim
17 words
The apparatus as recited in claim 1 , wherein the second axis is in a vertical plane.
Claim 7
Dependent Claim
22 words
The apparatus as recited in claim 1 , wherein the support assembly is capable of rotating the wafer in a x-y plane.
Claim 8
Dependent Claim
22 words
The apparatus as recited in claim 1 , wherein the support assembly is capable of rotating the wafer in a horizontal plane.
Claim 9
Dependent Claim
34 words
The apparatus as recited in claim 1 , further comprising: a wafer carrier adapted to hold a plurality of wafers to be tested for providing the wafer handling assembly with access to the wafers.
Claim 10
Dependent Claim
17 words
The apparatus as recited in claim 8 , wherein the wafer carrier is an enclosed wafer pod.
Claim 11
Dependent Claim
17 words
The apparatus as recited in claim 8 , wherein the wafer carrier is an open wafer cassette.
Claim 12
Dependent Claim
50 words
The apparatus as recited in claim 1 , wherein the support assembly further comprises: a chuck including a platform, the platform being arranged to support the wafer to be tested, the chuck being arranged to rotate the platform and the wafer to a specified angular position for testing the wafer.
Claim 13
Dependent Claim
22 words
The apparatus as recited in claim 1 , wherein the support assembly is capable of moving the wafer along the second axis.
Claim 14
Dependent Claim
56 words
The apparatus as recited in claim 1 , wherein the support assembly further comprises: a chuck including a platform for supporting the wafer to be tested on the platform, the chuck being arranged to rotate the wafer to a specified angular position for testing; and a mechanism arranged to move the platform along the second axis.
Claim 15
Dependent Claim
89 words
The apparatus as recited in claim 1 , wherein the wafer handling assembly further comprises: a carriage assembly arranged to move along the first axis and the second axis; a support arm attached to the carriage assembly to move in response to the movement of the carriage assembly; and a wafer blade attached to the support arm and being adapted to pick up the wafer to be tested such that the movement of the carriage assembly moves the wafer blade and the wafer to and from the support assembly.
Claim 16
Dependent Claim
44 words
The apparatus as recited in claim 14 , wherein the carriage assembly further comprises: a second carriage assembly arranged to move the wafer blade along the second axis; and a first carriage assembly arranged to move the second carriage assembly along the first axis.
Claim 17
Dependent Claim
32 words
The apparatus as recited in claim 15 , wherein the probe assembly is attached to the first carriage assembly such that the probe assembly is capable of moving along the first axis.
Claim 18
Dependent Claim
36 words
The apparatus as recited in claim 15 , wherein the wafer blade is attached to the second carriage assembly such that the wafer blade is capable of moving along the first axis and the second axis.
Claim 19
Dependent Claim
35 words
The apparatus as recited in claim 17 , wherein the probe assembly is attached to the wafer blade such that the probe assembly is capable of moving along the first axis and the second axis.
Claim 20
Dependent Claim
16 words
The apparatus as recited in claim 14 , wherein the wafer blade is a vacuum pick.
Claim 21
Dependent Claim
37 words
The apparatus as recited in claim 1 , wherein the probe assembly is mounted on the wafer handling assembly such that the probe assembly is also capable of moving along the first axis and the second axis.
Claim 22
Dependent Claim
17 words
The apparatus as recited in claim 1 , wherein said probe assembly includes a test probe head.
Claim 23
Dependent Claim
16 words
The apparatus as recited in claim 21 , wherein the wafer blade is an end effector.
Claim 24
Dependent Claim
28 words
The apparatus as recited in claim 1 , further comprising a computer system configured to control the wafer handling assembly and the support assembly for testing the wafer.
Claim 25
Dependent Claim
101 words
An integrated wafer handling and testing apparatus comprising: supporting means for supporting a wafer to be tested, the wafer supporting means being capable of rotating the wafer in a x-y plane for testing; handling means for moving the wafer to and from the wafer support assembly, the handling means capable of moving the wafer only along a first axis and a second axis, the first axis being orthogonal to the second axis, wherein no more than one motor is used for each of said axes; and testing means for testing the wafer when the wafer is placed on the support means.
Claim 26
Dependent Claim
101 words
An integrated wafer handling and testing apparatus comprising: supporting means for supporting a wafer to be tested, the wafer supporting means being capable of rotating the wafer in a x-y plane for testing; handling means for moving the wafer to and from the wafer support assembly, the handling means capable of moving the wafer only along a first axis and a second axis, the first axis being orthogonal to the second axis, wherein no more than one motor is used for each of said axes; and testing means for testing the wafer when the wafer is placed on the support means.
Claim 27
Dependent Claim
16 words
The apparatus as recited in claim 24 , wherein the second axis is a vertical axis.
Claim 28
Dependent Claim
22 words
The apparatus as recited in claim 24 , wherein the supporting means is capable of rotating the wafer in a x-y plane.
Claim 29
Dependent Claim
39 words
The apparatus as recited in claim 24 , further comprising: a wafer carrying means for holding a plurality of wafers to be tested, wherein the handling means moves the wafers between the wafer carrying means and the supporting means.
Claim 30
Dependent Claim
52 words
The apparatus as recited in claim 24 , wherein the supporting means further comprises: a chuck arranged to support the wafer to be tested, the chuck also being arranged to rotate the wafer to a specified angular position for testing; and a mechanism arranged to move the chuck in along a z-axis.
Claim 31
Dependent Claim
22 words
The apparatus as recited in claim 24 , wherein the first axis is an x-axis and the second axis is a z-axis.
Claim 32
Dependent Claim
89 words
The apparatus as recited in claim 29 , wherein the handling means further comprises: a carriage assembly arranged to move along the x-axis and the z-axis; a support arm attached to the carriage assembly and being arranged to move in response to the movement of the carriage assembly; and a wafer blade attached to the support arm and being adapted to pick up the wafer to be tested such that the movement of the carriage assembly moves the wafer blade and the wafer to and from the support assembly.
Claim 33
Dependent Claim
42 words
The apparatus as recited in claim 30 , wherein the carriage assembly further comprises: a second carriage assembly arranged to move the wafer blade along the z-axis; and a first carriage assembly arranged to move the second carriage assembly in the x-axis.
Claim 34
Dependent Claim
28 words
The apparatus as recited in claim 24 , further comprising a control circuit configured to control the wafer handling assembly and the support assembly for testing the wafer.
Claim 35
Independent Claim
100 words
A method for handling a wafer from a stationary wafer carrier for testing, the stationary wafer including a plurality of wafers to be tested, the method comprising: selecting a wafer to be tested; picking up the wafer; moving the wafer only along an x-axis and a z-axis to a support assembly for testing, wherein no more than one motor is used for each of the axes; placing the wafer on the support assembly; rotating the support assembly to place the wafer at a desired test position; and testing the wafer at the desired test position to determine a wafer characteristic.
Claim 36
Independent Claim
100 words
A method for handling a wafer from a stationary wafer carrier for testing, the stationary wafer including a plurality of wafers to be tested, the method comprising: selecting a wafer to be tested; picking up the wafer; moving the wafer only along an x-axis and a z-axis to a support assembly for testing, wherein no more than one motor is used for each of the axes; placing the wafer on the support assembly; rotating the support assembly to place the wafer at a desired test position; and testing the wafer at the desired test position to determine a wafer characteristic.
Claim 37
Dependent Claim
18 words
The method as recited in claim 33 , wherein the wafer is picked up from a wafer carrier.
Claim 38
Dependent Claim
18 words
The method as recited in claim 34 , further comprising returning the tested wafer to the wafer carrier.
Claim 39
Dependent Claim
42 words
The method as recited in claim 35 , wherein the wafer returning further comprises: picking up the tested wafer; moving the tested wafer along an x-axis and a z-axis to the wafer carrier; and placing the tested wafer in the wafer carrier.
Claim 40
Dependent Claim
36 words
The method as recited in claim 33 , wherein the wafer moving further comprises: moving the wafer along the x-axis over the support assembly; and moving the wafer along the z-axis down to the support assembly.
Claim 41
Dependent Claim
30 words
The method as recited in claim 33 , wherein the wafer moving comprises: moving the wafer along the z-axis; and moving the wafer along the x-axis over the support assembly.
Claim 42
Dependent Claim
21 words
The method as recited in claim 33 , wherein the wafer is moved in both the x-axis and the z-axis simultaneously.
Claim 43
Dependent Claim
16 words
The method as recited in claim 33 , wherein the support assembly moves along the z-axis.
Claim 44
Dependent Claim
20 words
The method as recited in claim 33 , wherein the support assembly moves along the z-axis to receive the wafer.
Claim 45
Dependent Claim
20 words
The method as recited in claim 33 , wherein the support assembly moves along the z-axis for testing the wafer.
Claim 46
Dependent Claim
69 words
The method as recited in claim 42 , wherein the wafer testing further comprises: moving a probe assembly along the x-axis over to a desired x-axis test position; moving the support assembly under the probe assembly to a desired z-axis test position, wherein the x-axis test position and z-axis test position define the desired test position; and testing the wafer at the desired test position by the probe assembly.
Claim 47
Dependent Claim
43 words
The method as recited in claim 33 , wherein the wafer testing further comprises: moving a probe assembly along the x-axis and the z-axis over to the desired test position; and testing the wafer at the desired test position by the probe assembly.
Claim 48
Dependent Claim
40 words
The method as recited in claim 33 , wherein the wafer testing further comprises: moving a probe assembly along the x-axis over to the desired test position; and testing the wafer at the desired test position by the probe assembly.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-06-18 | 2004-12-18 | 2005-06-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-06-18 | 2008-12-18 | 2009-06-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-06-18 | 2012-12-18 | 2013-06-19 | $7700.00 | Window Closed / Lapsed |