US6388293B1
Expired / Lapsed
US
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Nonvolatile memory cell, operating method of the same and nonvolatile memory array
Assignee: Halo LSI Inc
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Filing: 2000-06-16
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Granted: 2002-05-14
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Expires: 2020-06-16
Abstract
Abstract The present invention relates to a nonvolatile memory cell and/or array and a method of operating the same high integrated density nonvolatile memory cell enabling high integration density, low voltage programming and/or high speed programming, a method of programming same and a nonvolatile memory array. A p-well 101 is formed in a surface of a substrate 10 and a channel forming semiconductor region 110 is defined in a surface of the p-well 101 and separated by a first n + region 121 and a second n + region 122 . A carrier-supplying portion (CS: carrier supply) 111 is formed coming into contact with the first n + region 121 and a carrier-acceleration-injection portion 112 (AI: acceleration and injection) is in contact with the second n + region 122 in the channel forming semiconductor region 110 wherein the carrier-supplying portion 111 and carrier-acceleration-injection portion 112 are in contact with each other.
Inventors
- 👤 Seiki O. Ogura
- 👤 Yutaka Hayashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 22:15
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/60; H10D64/66; H10D64/68; H10D64/681; H10D64/685; G; G11; G11C; G11C16/00; G11C16/02; G11C16/04; G11C16/0466; G11C16/0475; H10B; H10B69/00; H10D30/00; H10D30/60; H10D30/69; H10D30/691; H10D64/693; H10D86/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01332; H10D64/01336; H10D64/01344; H10D64/691
Claims Analysis
Total Claims: 42
Claim 1
Independent Claim
445 words
A nonvolatile memory cell wherein first and second impurity regions of a first conductivity type are formed in a main surface of a substrate and separated therebetween by a channel forming semiconductor region of a second conductivity type in said main surface of said substrate the first conductivity type is opposite the second conductivity type, a gate electrode is formed on a gate insulator on said channel forming semiconductor region, and carriers are being injected and stored in a carrier trapping means of said gate insulator further comprising: an acceleration-electrical potential supplying means to selectively supply an acceleration-electrical potential to one out of the first and second impurity regions at one side; said channel forming semiconductor region includes a carrier-supplying portion and a carrier-acceleration-injection portion disposed along a carrier transport direction; said carrier-supplying portion supplies to said carrier-acceleration-injection portion carriers supplied by another one out of said first and second impurity regions at another side; said carrier-acceleration-injection portion makes local injection of carriers supplied from said carrier-supplying portion into said gate insulator in the vicinity of the adjacent said one out of said first and second impurity regions at one side to which said accelerated electrical potential is supplied; said carrier-acceleration-injection portion comprises a first carrier-acceleration-injection portion formed adjacent to said first impurity region and a second carrier-acceleration-injection portion adjacent to said second impurity region said carrier-supplying portion is disposed between said first carrier-acceleration-injection portion and said second carrier-acceleration-injection portion; said gate insulator is comprised of a first gate insulator disposed on said carrier-supplying portion and two second gate insulators disposed on said first carrier-acceleration-injection portion and said second carrier-acceleration-injection portion, respectively; said carrier trapping means is in said second gate insulators; said acceleration-electrical supplying means supplies an acceleration-electrical potential to said second impurity region when injecting carriers from said second carrier-acceleration-injection portion into a second one of said second gate insulators and to said first impurity region when injecting carriers from said first carrier-acceleration-injection portion into a first one of said second gate insulators; and said gate electrode is comprised of a first gate electrode and two second gate electrodes wherein said first gate electrode, a first one of said second gate electrodes and a second one of said second gate electrodes are insulated from each other, wherein said first gate electrode is disposed above said carrier-supplying portion through said first gate insulator and said first one of said second gate electrodes is disposed above said first carrier-acceleration-injection portion through said first one of said second gate insulators, and wherein said second one of said second gate electrodes is disposed above said second carrier-acceleration-injection portion through said second one of said second gate insulators.
Claim 2
Dependent Claim
445 words
A nonvolatile memory cell wherein first and second impurity regions of a first conductivity type are formed in a main surface of a substrate and separated therebetween by a channel forming semiconductor region of a second conductivity type in said main surface of said substrate the first conductivity type is opposite the second conductivity type, a gate electrode is formed on a gate insulator on said channel forming semiconductor region, and carriers are being injected and stored in a carrier trapping means of said gate insulator further comprising: an acceleration-electrical potential supplying means to selectively supply an acceleration-electrical potential to one out of the first and second impurity regions at one side; said channel forming semiconductor region includes a carrier-supplying portion and a carrier-acceleration-injection portion disposed along a carrier transport direction; said carrier-supplying portion supplies to said carrier-acceleration-injection portion carriers supplied by another one out of said first and second impurity regions at another side; said carrier-acceleration-injection portion makes local injection of carriers supplied from said carrier-supplying portion into said gate insulator in the vicinity of the adjacent said one out of said first and second impurity regions at one side to which said accelerated electrical potential is supplied; said carrier-acceleration-injection portion comprises a first carrier-acceleration-injection portion formed adjacent to said first impurity region and a second carrier-acceleration-injection portion adjacent to said second impurity region said carrier-supplying portion is disposed between said first carrier-acceleration-injection portion and said second carrier-acceleration-injection portion; said gate insulator is comprised of a first gate insulator disposed on said carrier-supplying portion and two second gate insulators disposed on said first carrier-acceleration-injection portion and said second carrier-acceleration-injection portion, respectively; said carrier trapping means is in said second gate insulators; said acceleration-electrical supplying means supplies an acceleration-electrical potential to said second impurity region when injecting carriers from said second carrier-acceleration-injection portion into a second one of said second gate insulators and to said first impurity region when injecting carriers from said first carrier-acceleration-injection portion into a first one of said second gate insulators; and said gate electrode is comprised of a first gate electrode and two second gate electrodes wherein said first gate electrode, a first one of said second gate electrodes and a second one of said second gate electrodes are insulated from each other, wherein said first gate electrode is disposed above said carrier-supplying portion through said first gate insulator and said first one of said second gate electrodes is disposed above said first carrier-acceleration-injection portion through said first one of said second gate insulators, and wherein said second one of said second gate electrodes is disposed above said second carrier-acceleration-injection portion through said second one of said second gate insulators.
Claim 3
Dependent Claim
52 words
The nonvolatile memory cell according to claim 1 further comprising a means for supplying electrical potential for attracting a carrier which selectively supplies to one of said second gate electrodes an electrical potential for attracting said carrier toward one of said second gate insulators under said one of said second gate electrodes.
Claim 4
Dependent Claim
95 words
The nonvolatile memory cell according to claim 2 wherein said first carrier-acceleration-injection portion functions as a carrier path to supply carriers from said first impurity region to said carrier-supplying portion when said second carrier-acceleration-injection portion injects into said second one of said second gate insulators carriers supplied from said carrier-supplying portion, and wherein said second carrier-acceleration-injection portion functions as a carrier path to supply carriers from said second impurity region to said carrier-supplying portion when said first carrier-acceleration-injection portion injects into said first one of said second gate insulators carriers supplied from said carrier-supplying portion.
Claim 5
Dependent Claim
94 words
The nonvolatile memory cell according to claim 1 wherein said first carrier-acceleration-injection portion functions as a carrier path to supply carriers from said first impurity region to said carrier-supplying portion when said second carrier-acceleration-injection portion injects into said second one of said second gate insulators carriers supplied from said carrier-supplying portion, and said second carrier-acceleration-injection portion functions as a carrier path to supply carriers from said second impurity region to said carrier-supplying portion when said first carrier-acceleration-injection portion injects into said first one of said second gate insulators carriers supplied from said carrier-supplying portion.
Claim 6
Dependent Claim
31 words
The nonvolatile memory cell according to claim 1 wherein an insulating material is formed at least on end surfaces of one gate electrode out of said first and second gate electrodes.
Claim 7
Dependent Claim
44 words
The nonvolatile memory cell according to claim 5 wherein said insulating material formed on said end surfaces of said one gate electrode is of a sidewall insulating material left after anisotropically etching an insulating material formed uniformly on said main surface of said substrate.
Claim 8
Dependent Claim
33 words
The nonvolatile memory cell according to claim 5 wherein said insulating material formed on said end surfaces of said one gate electrode is an oxide film formed by oxidizing said one gate electrode.
Claim 9
Dependent Claim
27 words
The nonvolatile memory cell according to claim 1 wherein an insulator is formed to insulate said first gate electrode and said second gate electrodes from each other.
Claim 10
Dependent Claim
74 words
The nonvolatile memory cell according to claim 1 wherein said first one of said second gate electrodes and said gate insulator thereof are extended to cover a top surface and an end surface of one side of said first gate electrode, and said second one of said second gate electrode and said gate insulator thereof are extended to cover a top surface and an end surface of another side of said first gate electrode.
Claim 11
Dependent Claim
42 words
The nonvolatile memory cell according to claim 1 wherein said first gate electrode and said insulator thereof are extended to cover a top surface and an end surface of adjacent said first one and said second one of said second gate electrodes.
Claim 12
Dependent Claim
30 words
The nonvolatile memory cell according to claim 1 wherein a step whose sidewall has a vertical component to a carrier-transport direction is formed in a surface of said carrier-acceleration-injection portion.
Claim 13
Dependent Claim
73 words
The nonvolatile memory cell according to claim 1 wherein each said second gate insulator is of a three-layer structure including: a first layer coming in contact with said channel forming semiconductor region; a third layer in contact with said gate electrode; and a second layer between said first layer and said third layer wherein a carrier tunnel probability of said third layer is higher than a carrier tunnel probability of said first layer.
Claim 14
Dependent Claim
24 words
The nonvolatile memory cell according to claim 1 wherein an impurity concentration of said carrier-acceleration-injection portion is more than 2×10 17 atom/cm 3 .
Claim 15
Dependent Claim
41 words
The nonvolatile memory cell according to claim 1 wherein a distance across said carrier-acceleration-injection portion in a direction connecting said first impurity region to said second impurity region is less than fourteen times the mean free path of a hot carrier.
Claim 16
Dependent Claim
78 words
The nonvolatile memory cell according to claim 1 wherein said acceleration-electrical potential forms a space charge region in said carrier-acceleration-injection portion from an adjacent impurity region out of said first impurity region and said second impurity region to which said acceleration-electrical potential is supplied and energy capable of getting over a potential barrier V B formed at an interface with said carrier-acceleration-injection portion and said gate insulator thereover is supplied to carriers reached within said space charge region.
Claim 17
Dependent Claim
163 words
A nonvolatile memory array configured by disposing in the form of a matrix the nonvolatile memory cell as claimed in claim 1 comprising: a plurality of bit lines (L B ) each one of which commonly connects in the direction of a column each of the first and second impurity regions of a pair of nonvolatile memory cells adjacent to the direction of a row; a plurality of word lines (L W ) each one of which connects each of said first gate electrodes of said nonvolatile memory cells disposed on a same row, a plurality of first control lines (L SL ) each one of which connects each of said first one of said second gate electrodes of said nonvolatile memory cells disposed on a same column; and a plurality of second control lines (L SR ) each one of which connects each of said second one of said second gate electrodes of said nonvolatile memory cells disposed on a same column.
Claim 18
Dependent Claim
194 words
A nonvolatile memory array configured by disposing in the form of a matrix the nonvolatile memory cells as claimed in claim 12 comprising: a plurality of common lines (L C ) each one of which commonly connects in the direction of a column each of said impurity regions at one side of a pair of nonvolatile memory cells adjacent to the direction of a row; a plurality of bit lines (L B ) each one of which connects each of said impurity regions at another side of said nonvolatile memory cells disposed on a same row; a plurality of word lines (L W ) each one of which connects each of said first gate electrodes of said nonvolatile memory cells disposed on a same column; a plurality of first control lines (L Sa ) each one of which connects each of said first one of said second gate electrodes of said nonvolatile memory cells disposed on a same column; and a plurality of second control lines (L Sb ) each one of which connects each of said second one of said second gate electrodes of said nonvolatile memory cells disposed on a same column.
Claim 19
Dependent Claim
73 words
The nonvolatile memory cell according to claim 1 wherein each said second gate insulator is of a three-layer structure including: a first layer coming in contact with said channel forming semiconductor region; a third layer in contact with said gate electrode; and a second layer between said first layer and said third layer wherein a carrier tunnel probability of said first layer is higher than a carrier tunnel probability of said third layer.
Claim 20
Dependent Claim
24 words
The nonvolatile memory according to claim 18 wherein the thickness of said first layer is made thinner than the thickness of said third layer.
Claim 21
Dependent Claim
52 words
The nonvolatile memory cell according to claim 1 wherein said second gate insulator is of a three-layer structure including: a first layer coming in contact with said channel forming semiconductor region; a third layer in contact with said gate electrode; and a second layer between said first layer and said third layer.
Claim 22
Dependent Claim
16 words
The nonvolatile memory cell according to 20 wherein said first layer is a silicon oxide film.
Claim 23
Dependent Claim
16 words
The nonvolatile memory cell according to 20 wherein said first layer is a silicon oxide film.
Claim 24
Dependent Claim
17 words
The nonvolatile memory cell according to 20 wherein said first layer is a silicon nitrided oxide film.
Claim 25
Dependent Claim
17 words
The nonvolatile memory cell according to 20 wherein said first layer is a silicon nitrided oxide film.
Claim 26
Dependent Claim
16 words
The nonvolatile memory cell according to 20 wherein said second layer is a silicon nitride film.
Claim 27
Dependent Claim
16 words
The nonvolatile memory cell according to 20 wherein said second layer is a silicon nitride film.
Claim 28
Dependent Claim
24 words
The nonvolatile memory cell according to 20 wherein said second layer is a silicon nitride film in which particulates of conducting material are buried.
Claim 29
Dependent Claim
24 words
The nonvolatile memory cell according to 20 wherein said second layer is a silicon nitride film in which particulates of conducting material are buried.
Claim 30
Dependent Claim
16 words
The nonvolatile memory cell according to 20 wherein said third layer is a silicon oxide film.
Claim 31
Dependent Claim
16 words
The nonvolatile memory cell according to 20 wherein said third layer is a silicon oxide film.
Claim 32
Dependent Claim
17 words
The nonvolatile memory cell according to 20 wherein said third layer is a silicon nitrided oxide film.
Claim 33
Dependent Claim
17 words
The nonvolatile memory cell according to 20 wherein said third layer is a silicon nitrided oxide film.
Claim 34
Dependent Claim
21 words
The nonvolatile memory cell according to 20 wherein the thickness of said first layer is between about 3 and 4 nm.
Claim 35
Dependent Claim
21 words
The nonvolatile memory cell according to 20 wherein the thickness of said first layer is between about 3 and 4 nm.
Claim 36
Dependent Claim
19 words
The nonvolatile memory cell according to 20 wherein the thickness of said second layer is less than 10 nm.
Claim 37
Dependent Claim
19 words
The nonvolatile memory cell according to 20 wherein the thickness of said second layer is less than 10 nm.
Claim 38
Dependent Claim
23 words
The nonvolatile memory cell according to claim 1 , further comprising a silicided layer in the upper surface of said second gate electrode.
Claim 39
Dependent Claim
25 words
The nonvolatile memory cell according to claim 1 , further comprising a silicided layer in the upper surface of said first and second impurity region.
Claim 40
Dependent Claim
38 words
The nonvolatile memory cell according to claim 1 , further comprising a silicided layer in the upper surface of said second gate electrode and a silicided layer in the upper surface of said first and second impurity region.
Claim 41
Dependent Claim
41 words
The nonvolatile cell according to claim 1 , wherein said first and second impurity region has in contact with said carrier-acceleration-injection portion a n-region of which surface impurity concentration is between 1×10 19 atom/cm 3 and 1×10 20 atom/cm 3 .
Claim 42
Dependent Claim
40 words
The nonvolatile cell according to claim 32 , wherein said first and second impurity region has in contact with said n-region a n+-region of which surface impurity concentration is between 1×10 20 atom/cm 3 and 1×10 21 atom/cm 3 .
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-05-13 | 2005-11-12 | 2006-05-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-05-13 | 2009-11-12 | 2010-05-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-05-13 | 2013-11-12 | 2014-05-14 | $7700.00 | Window Closed / Lapsed |