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US6656568B1 Expired / Lapsed US ⏱️ 0.0 years remaining

Ordered arrays of nanoclusters

Assignee: TECHNOLOGY Corp UNIVERSITY
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Filing: 2000-05-30
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Granted: 2003-12-02
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Expires: 2020-05-30
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Abstract

Abstract A method of manufacturing an array of nanoclusters and a substrate with an ordered array of nanoclusters. In a preferred embodiment of the invention, nanoclusters may be fabricated by depositing adatoms upon a surface containing an array of etched nanoscale wells, wherein the etched nanoscale wells are produced by etching a surface patterned by a mask containing a regular array of nanoscale pores. More preferably, nanoclusters may be fabricated by depositing adatoms upon a surface containing an array of etched nanoscale wells; wherein, the etched nanoscale wells are produced by low damage etching of a surface patterned by a crystalline mask of biological origin containing a regular array of nanoscale pores. A still further embodiment of the invention is a substrate including an ordered array of nanoclusters.

Inventors

  • 👤 Thomas Andrew Winningham
  • 👤 Harry P. Gillis
  • 👤 Kenneth Douglas

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-31 22:15
CPC Classifications
B; B82; B82B; B82B1/00; B82Y; B82Y30/00; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24355; Y10T428/24372; Y10T428/2438; Y10T428/24388; Y10T428/26

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 54 words
A substrate including an ordered array of nanoclusters, wherein: the nanoclusters have a substantially uniform size small enough to allow true quantum confinement behavior; the nanoclusters occur in a repeating geometric pattern; the nanoclusters are formed inside regularly arrayed wells in the substrate; and there is substantially no lattice displacement adjacent to the wells.
Claim 2
Dependent Claim 54 words
A substrate including an ordered array of nanoclusters, wherein: the nanoclusters have a substantially uniform size small enough to allow true quantum confinement behavior; the nanoclusters occur in a repeating geometric pattern; the nanoclusters are formed inside regularly arrayed wells in the substrate; and there is substantially no lattice displacement adjacent to the wells.
Claim 3
Dependent Claim 18 words
The substrate of claim 1 , wherein the nanocluster spacing is between about 3 and about 30 nm.
Claim 4
Dependent Claim 20 words
The substrate of claim 1 , wherein the nanoclusters have a diameter varying from about 2 to about 10 nm.
Claim 5
Dependent Claim 32 words
The substrate of claim 1 , wherein: said substrate includes a plurality of groups of said wells having said nanoclusters formed therein; and wherein said groups are arranged in a predetermined pattern.
Claim 6
Dependent Claim 54 words
A substrate including an ordered array of nanoclusters, wherein: the nanoclusters have a substantially uniform size small enough to allow true quantum confinement behavior; the nanoclusters occur in a repeating geometric pattern; the nanoclusters are formed inside regularly arrayed wells in the substrate; and substantially all of the wells each contain a single nanocluster.
Claim 7
Dependent Claim 54 words
A substrate including an ordered array of nanoclusters, wherein: the nanoclusters have a substantially uniform size small enough to allow true quantum confinement behavior; the nanoclusters occur in a repeating geometric pattern; the nanoclusters are formed inside regularly arrayed wells in the substrate; and substantially all of the wells each contain a single nanocluster.
Claim 8
Dependent Claim 32 words
The substrate of claim 5 , wherein: said substrate includes a plurality of groups of said wells having said nanoclusters formed therein; and wherein said groups are arranged in a predetermined pattern.
Claim 9
Dependent Claim 43 words
A substrate including an ordered array of nanoclusters, wherein: the nanoclusters have a substantially uniform size small enough to allow true quantum confinement behavior; the nanoclusters occur in a repeating geometric pattern; and the nanoclusters comprise a material selected from titanium, germanium, andsilicon.
Claim 10
Dependent Claim 43 words
A substrate including an ordered array of nanoclusters, wherein: the nanoclusters have a substantially uniform size small enough to allow true quantum confinement behavior; the nanoclusters occur in a repeating geometric pattern; and the nanoclusters comprise a material selected from titanium, germanium, andsilicon.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2006-12-01 2007-06-02 2007-12-02 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2010-12-01 2011-06-02 2011-12-02 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2014-12-01 2015-06-02 2015-12-02 $7700.00 Window Closed / Lapsed

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