US6665014B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Microlens and photodetector
Assignee: Intel Corp
•
Filing: 1998-11-25
•
Granted: 2003-12-16
•
Expires: 2018-11-25
Abstract
Abstract An array of photosensitive devices may be formed with improved fill factors by including a diffractive microlens which may have a stepped configuration. The microlens may be formed of a sol-gel material having a photoinitiator, or other materials that may be defined with low temperature techniques commonly used in connection with photoresist. In particular, a gray scale mask may be used to define a plurality of steps in the resulting microlens which have different diffractive characteristics.
Inventors
- 👤 Azar Assadi
- 👤 Kannan Raj
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 22:05
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/40; H04; H04N; H04N1/00; H04N1/024; H04N1/028; H04N1/03; H04N1/031; H04N1/0311; H04N25/00; H10F39/00; H10F39/10; H10F39/12; H10F39/80; H10F39/805; H10F39/8053; H10F39/806; H10F39/8063; H10F77/30; H10F77/306; H10F77/331; H10F77/413
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
50 words
A method comprising: forming a first photodefinable layer; forming a second photodefinable layer over said first photodefinable layer; defining said second photodefinable layer so that the first photodefinable layer extends beyond the second photodefinable layer, creating a stepped structure; and enabling said stepped structure to act as a diffractive microlens.
Claim 2
Independent Claim
50 words
A method comprising: forming a first photodefinable layer; forming a second photodefinable layer over said first photodefinable layer; defining said second photodefinable layer so that the first photodefinable layer extends beyond the second photodefinable layer, creating a stepped structure; and enabling said stepped structure to act as a diffractive microlens.
Claim 3
Dependent Claim
16 words
The method of claim 1 including forming said first and second photodefinable layers of a sol-gel.
Claim 4
Dependent Claim
12 words
The method of claim 1 including aligning a photodetector below said microlens.
Claim 5
Dependent Claim
16 words
The method of claim 1 including forming said first and second photodefinable layers of a photoresist.
Claim 6
Dependent Claim
17 words
The method of claim 4 including forming said first and second photodefinable layers of a positive photoresist.
Claim 7
Dependent Claim
18 words
The method of claim 1 including forming said photodefinable layers by incorporating a photoinitiator in said photodefinable layers.
Claim 8
Dependent Claim
16 words
The method of claim 1 including depositing said first photodefinable layer on a color filter material.
Claim 9
Dependent Claim
47 words
A structure comprising: a first photodefinable layer having a first length; a second photodefinable layer positioned over said first photodefinable layer and having a second length, said second length being shorter than said first length; and said first and second photodefinable layers to create a diffractive microlens.
Claim 10
Dependent Claim
47 words
A structure comprising: a first photodefinable layer having a first length; a second photodefinable layer positioned over said first photodefinable layer and having a second length, said second length being shorter than said first length; and said first and second photodefinable layers to create a diffractive microlens.
Claim 11
Dependent Claim
16 words
The structure of claim 8 wherein said first and second photodefinable layers are formed of sol-gel.
Claim 12
Dependent Claim
16 words
The structure of claim 8 wherein said first and second photodefinable layers are formed of photoresist.
Claim 13
Dependent Claim
12 words
The structure of claim 8 including a photodetector arranged underneath said layers.
Claim 14
Dependent Claim
13 words
The structure of claim 8 including a color filter arranged beneath said layers.
Claim 15
Dependent Claim
45 words
A diffractive microlens comprising: a distinct first layer having a first length; and a distinct second layer positioned over said first distinct layer having a second length, said second length being shorter than said first length, said first and second layers forming a diffractive microlens.
Claim 16
Dependent Claim
45 words
A diffractive microlens comprising: a distinct first layer having a first length; and a distinct second layer positioned over said first distinct layer having a second length, said second length being shorter than said first length, said first and second layers forming a diffractive microlens.
Claim 17
Dependent Claim
12 words
The microlens of claim 13 wherein said layers are formed of sol-gel.
Claim 18
Dependent Claim
12 words
The microlens of claim 13 wherein said layers are formed of photoresist.
Claim 19
Dependent Claim
13 words
The microlens of claim 13 wherein said first and second layers are photodefinable.
References Cited (Backward Citations)
US4667092A
Cited
US5258024A
Cited
US5321297A
Cited
US5323052A
Cited
US5682203A
Cited
US5514888A
Cited
US5811320A
Cited
US5371397A
Cited
US5517279A
Cited
US5672519A
Cited
US5648874A
Cited
US5768023A
Cited
US5610390A
Cited
US5746797A
Cited
US5677200A
Cited
US5871888A
Cited
US5614950A
Cited
US5734190A
Cited
US6150653A
Cited
US6194704B1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2006-12-15 | 2007-06-16 | 2007-12-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-12-15 | 2011-06-16 | 2011-12-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-12-15 | 2015-06-16 | 2015-12-16 | $7700.00 | Window Closed / Lapsed |