US6809802B1 — Substrate attracting and holding system for use i…

Claim 1

Independent Claim 119 words

A substrate attracting and holding method, comprising the steps of: supporting a substrate by use of a protrusion provided on a holding table for holding the substrate, wherein the protrusion is disposed to be placed in a predetermined positional relation, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; and attracting and holding the substrate, wherein the substrate is supported so that the position of the alignment mark or the position with respect to which the alignment mark is to be produced is placed above the protrusion.

Claim 2

Dependent Claim 119 words

A substrate attracting and holding method, comprising the steps of: supporting a substrate by use of a protrusion provided on a holding table for holding the substrate, wherein the protrusion is disposed to be placed in a predetermined positional relation, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; and attracting and holding the substrate, wherein the substrate is supported so that the position of the alignment mark or the position with respect to which the alignment mark is to be produced is placed above the protrusion.

Claim 3

Dependent Claim 127 words

A substrate attracting and holding method, comprising the steps of: supporting a substrate by use of a protrusion provided on a holding table for holding the substrate, wherein the protrusion is disposed to be placed in a predetermined positional relation, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; and attracting and holding the substrate, wherein the substrate is supported so that the position of the alignment mark or the position with respect to which the alignment mark is to be produced is placed at a central portion in relation to disposition of the protrusion.

Claim 4

Dependent Claim 127 words

A substrate attracting and holding method, comprising the steps of: supporting a substrate by use of a protrusion provided on a holding table for holding the substrate, wherein the protrusion is disposed to be placed in a predetermined positional relation, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; and attracting and holding the substrate, wherein the substrate is supported so that the position of the alignment mark or the position with respect to which the alignment mark is to be produced is placed at a central portion in relation to disposition of the protrusion.

Claim 5

Dependent Claim 125 words

A substrate attracting and holding method, comprising the steps of: supporting a substrate by use of a protrusion provided on a holding table for holding the substrate, wherein the protrusion is disposed to be placed in a predetermined positional relation, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; and attracting and holding the substrate, wherein the substrate is supported so that the protrusion is placed at the same position with reference to the position of the alignment mark or the position with respect to which the alignment mark is to be produced.

Claim 6

Dependent Claim 125 words

A substrate attracting and holding method, comprising the steps of: supporting a substrate by use of a protrusion provided on a holding table for holding the substrate, wherein the protrusion is disposed to be placed in a predetermined positional relation, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; and attracting and holding the substrate, wherein the substrate is supported so that the protrusion is placed at the same position with reference to the position of the alignment mark or the position with respect to which the alignment mark is to be produced.

Claim 7

Dependent Claim 120 words

A substrate attracting and holding method, comprising the steps of: supporting a substrate by use of a protrusion provided on a holding table for holding the substrate, wherein the protrusion is disposed to be placed in a predetermined positional relation, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; and attracting and holding the substrate, wherein at least a portion of the protrusion surrounds a zone corresponding to the position of the alignment mark or the position with respect to which the alignment mark is to be produced.

Claim 8

Dependent Claim 120 words

A substrate attracting and holding method, comprising the steps of: supporting a substrate by use of a protrusion provided on a holding table for holding the substrate, wherein the protrusion is disposed to be placed in a predetermined positional relation, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; and attracting and holding the substrate, wherein at least a portion of the protrusion surrounds a zone corresponding to the position of the alignment mark or the position with respect to which the alignment mark is to be produced.

Claim 9

Dependent Claim 143 words

A substrate attracting and holding method, comprising the steps of: supporting a substrate by use of a protrusion provided on a holding table for holding the substrate, wherein the protrusion is disposed to be placed in a predetermined positional relation, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; and attracting and holding the substrate, wherein at least a portion of the protrusion surrounds a zone corresponding to the position of the alignment mark of the position with respect to which the alignment mark is to be produced, and further comprising adjusting the pressure of air between the holding table and the substrate in a region as surrounded by the protrusion.

Claim 10

Dependent Claim 143 words

A substrate attracting and holding method, comprising the steps of: supporting a substrate by use of a protrusion provided on a holding table for holding the substrate, wherein the protrusion is disposed to be placed in a predetermined positional relation, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; and attracting and holding the substrate, wherein at least a portion of the protrusion surrounds a zone corresponding to the position of the alignment mark of the position with respect to which the alignment mark is to be produced, and further comprising adjusting the pressure of air between the holding table and the substrate in a region as surrounded by the protrusion.

Claim 11

Dependent Claim 107 words

A substrate attracting and holding system, comprising: a holding table for holding a substrate; and a protrusion provided on said holding table, said protrusion being disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced, wherein the protrusion is disposed so that the position of the alignment mark or the position with respect to which the alignment mark is to be produced is placed above the protrusion.

Claim 12

Dependent Claim 107 words

A substrate attracting and holding system, comprising: a holding table for holding a substrate; and a protrusion provided on said holding table, said protrusion being disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced, wherein the protrusion is disposed so that the position of the alignment mark or the position with respect to which the alignment mark is to be produced is placed above the protrusion.

Claim 13

Dependent Claim 115 words

A substrate attracting and holding system, comprising: a holding table for holding a substrate; and a protrusion provided on said holding table, said protrusion being disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced, wherein the protrusion is disposed so that the position of the alignment mark or the position with respect to which the alignment mark is to be produced is placed at a central portion in relation to disposition of the protrusion.

Claim 14

Dependent Claim 115 words

A substrate attracting and holding system, comprising: a holding table for holding a substrate; and a protrusion provided on said holding table, said protrusion being disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced, wherein the protrusion is disposed so that the position of the alignment mark or the position with respect to which the alignment mark is to be produced is placed at a central portion in relation to disposition of the protrusion.

Claim 15

Dependent Claim 113 words

A substrate attracting and holding system, comprising: a holding table for holding a substrate; and a protrusion provided on said holding table, said protrusion being disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced, wherein the protrusion is provided so that the protrusion is placed at the same position with reference to the position of the alignment mark or the position with respect to which the alignment mark is to be produced.

Claim 16

Dependent Claim 113 words

A substrate attracting and holding system, comprising: a holding table for holding a substrate; and a protrusion provided on said holding table, said protrusion being disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced, wherein the protrusion is provided so that the protrusion is placed at the same position with reference to the position of the alignment mark or the position with respect to which the alignment mark is to be produced.

Claim 17

Dependent Claim 111 words

A substrate attracting and holding system, comprising: a holding table for holding a substrate; and a protrusion provided on said holding table, said protrusion being disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced, wherein at least a portion of the protrusion is disposed to surround a zone corresponding to the position of the alignment mark of the position with respect to which the alignment mark is to be produced.

Claim 18

Dependent Claim 111 words

A substrate attracting and holding system, comprising: a holding table for holding a substrate; and a protrusion provided on said holding table, said protrusion being disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced, wherein at least a portion of the protrusion is disposed to surround a zone corresponding to the position of the alignment mark of the position with respect to which the alignment mark is to be produced.

Claim 19

Dependent Claim 140 words

A substrate attracting and holding system, comprising: a holding table for holding a substrate; and a protrusion provided on said holding table, said protrusion being disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced, wherein at least a portion of the protrusion is disposed to surround a zone corresponding to the position of the alignment mark or the position with respect to which the alignment mark is to be produced, and said system further comprises a pressure adjusting mechanism for adjusting pressure of air between said holding table and the substrate in a region as surrounded by the protrusion.

Claim 20

Dependent Claim 140 words

A substrate attracting and holding system, comprising: a holding table for holding a substrate; and a protrusion provided on said holding table, said protrusion being disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced, wherein at least a portion of the protrusion is disposed to surround a zone corresponding to the position of the alignment mark or the position with respect to which the alignment mark is to be produced, and said system further comprises a pressure adjusting mechanism for adjusting pressure of air between said holding table and the substrate in a region as surrounded by the protrusion.

Claim 21

Dependent Claim 96 words

A substrate attracting and holding system comprising: a plurality of protrusions for supporting a substrate, for attracting and holding the substrate supported on the protrusions, wherein a disposition pitch L of the protrusions and an attraction force P of the substrate are set so as to satisfy a relation: P·L 3 ≦[36 ·E·h 2 ·dxdy ]/[{square root over (3)} ·k·c] where dxdy is a distortion tolerance, E is a longitudinal elasticity coefficient, h is a thickness of the substrate, c is a correction coefficient based on the protrusion disposition and k is a neutral plane coefficient.

Claim 22

Dependent Claim 96 words

A substrate attracting and holding system comprising: a plurality of protrusions for supporting a substrate, for attracting and holding the substrate supported on the protrusions, wherein a disposition pitch L of the protrusions and an attraction force P of the substrate are set so as to satisfy a relation: P·L 3 ≦[36 ·E·h 2 ·dxdy ]/[{square root over (3)} ·k·c] where dxdy is a distortion tolerance, E is a longitudinal elasticity coefficient, h is a thickness of the substrate, c is a correction coefficient based on the protrusion disposition and k is a neutral plane coefficient.

Claim 23

Dependent Claim 52 words

A substrate attracting and holding system comprising: a plurality of protrusions for supporting a substrate, for attracting and holding the substrate supported on the protrusions, wherein a disposition pitch L of the protrusions and an attraction force P of the substrate are set so as to satisfy a relation: P·L 3 ≦0.00427.

Claim 24

Dependent Claim 52 words

A substrate attracting and holding system comprising: a plurality of protrusions for supporting a substrate, for attracting and holding the substrate supported on the protrusions, wherein a disposition pitch L of the protrusions and an attraction force P of the substrate are set so as to satisfy a relation: P·L 3 ≦0.00427.

Claim 25

Dependent Claim 74 words

A system according to claim 11 or 12 , wherein the disposition pitch L and the substrate attraction force P are set to further satisfy relations: G·h·ρ/μ≦P ≦100000 0.0005 ≦L ≦0.005, wherein h is a thickness of the substrate, ρ is a density of the substrate, μ is a stationary friction coefficient of the substrate, and G is a maximum acceleration of a stage on which said substrate attracting and holding system is mounted.

Claim 26

Dependent Claim 58 words

A substrate attracting and holding system comprising: a plurality of protrusions for supporting a substrate, for attracting and holding the substrate supported on the protrusions, wherein a disposition pitch L of the protrusions and an attraction force P of the substrate are set so as to satisfy relations: P·L 3 ≦0.00427 33 ≦P ≦100000, and 0.0005 ≦L ≦0.005.

Claim 27

Dependent Claim 58 words

A substrate attracting and holding system comprising: a plurality of protrusions for supporting a substrate, for attracting and holding the substrate supported on the protrusions, wherein a disposition pitch L of the protrusions and an attraction force P of the substrate are set so as to satisfy relations: P·L 3 ≦0.00427 33 ≦P ≦100000, and 0.0005 ≦L ≦0.005.

Claim 28

Dependent Claim 196 words

A substrate attracting and holding system comprising: a plurality of protrusions for supporting a substrate, for attracting and holding the substrate supported on the protrusions, wherein the protrusions include an outer peripheral protrusion for supporting an outer peripheral portion of the substrate and a central protrusion for supporting a central portion of the substrate, inside the peripheral portion thereof, and that, when a disposition pitch of the central protrusion is La and an attraction force of the substrate at the central protrusion is Pa while a disposition pitch between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion is Lb and an attraction force of the substrate between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion is Pb, the disposition pitches Pa and Pb are set so as to satisfy relations: Pa·La 3 ≦[36 ·E·h 2 ·dxdy ]/[{square root over (3)} ·k·c] Pb·Lb 3 ≦[8 ·E·h 2 ·dxdy]/[k·c], where dxdy is a distortion tolerance, E is a longitudinal elasticity coefficient, h is a thickness of the substrate, c is a correction coefficient based on the protrusion disposition and k is a neutral plane correction coefficient.

Claim 29

Dependent Claim 196 words

A substrate attracting and holding system comprising: a plurality of protrusions for supporting a substrate, for attracting and holding the substrate supported on the protrusions, wherein the protrusions include an outer peripheral protrusion for supporting an outer peripheral portion of the substrate and a central protrusion for supporting a central portion of the substrate, inside the peripheral portion thereof, and that, when a disposition pitch of the central protrusion is La and an attraction force of the substrate at the central protrusion is Pa while a disposition pitch between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion is Lb and an attraction force of the substrate between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion is Pb, the disposition pitches Pa and Pb are set so as to satisfy relations: Pa·La 3 ≦[36 ·E·h 2 ·dxdy ]/[{square root over (3)} ·k·c] Pb·Lb 3 ≦[8 ·E·h 2 ·dxdy]/[k·c], where dxdy is a distortion tolerance, E is a longitudinal elasticity coefficient, h is a thickness of the substrate, c is a correction coefficient based on the protrusion disposition and k is a neutral plane correction coefficient.

Claim 30

Dependent Claim 155 words

A substrate attracting and holding system comprising: a plurality of protrusion for supporting a substrate, for attracting and holding the substrate supported on the protrusions, wherein the protrusions include an outer peripheral protrusions for supporting an outer peripheral portion of the substrate and a central protrusion for supporting a central portion of the substrate, inside the peripheral portion thereof, and that, when a disposition pitch of the central protrusion is La and an attraction force of the substrate at the central protrusion is Pa while a disposition pitch between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion Lb and an attraction force of the substrate between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion is Pb, the disposition pitches La and Lb and the attraction forces Pa and Pb are set so as to satisfy relations: Pa·La 3 ≦0.00427; and Pb·Lb 3 ≦0.00164.

Claim 31

Dependent Claim 155 words

A substrate attracting and holding system comprising: a plurality of protrusion for supporting a substrate, for attracting and holding the substrate supported on the protrusions, wherein the protrusions include an outer peripheral protrusions for supporting an outer peripheral portion of the substrate and a central protrusion for supporting a central portion of the substrate, inside the peripheral portion thereof, and that, when a disposition pitch of the central protrusion is La and an attraction force of the substrate at the central protrusion is Pa while a disposition pitch between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion Lb and an attraction force of the substrate between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion is Pb, the disposition pitches La and Lb and the attraction forces Pa and Pb are set so as to satisfy relations: Pa·La 3 ≦0.00427; and Pb·Lb 3 ≦0.00164.

Claim 32

Dependent Claim 168 words

A substrate attracting and holding system comprising: a plurality of protrusions for supporting a substrate, for attracting and holding the substrate supported on the protrusions, wherein the protrusions include an outer peripheral protrusion for supporting an outer peripheral portion of the substrate and a central protrusion for supporting a central portion of the substrate, inside the peripheral portion thereof, and that, when a disposition pitch of the central protrusion is La and an attraction force of the substrate at the central protrusion is Pa while a disposition pitch between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion is Lb and an attraction force of the substrate between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion is Pb, the disposition pitches La and Lb and the attraction forces Pa and Pb are set so as to satisfy relations: Pa·La 3 ≦0.00427 33 ≦Pa ≦100000 0.0005 ≦La ≦0.005 Pb·Lb 3 ≦0.00164 33 ≦Pb ≦100000; and 0.0005 ≦Lb ≦0.005.

Claim 33

Dependent Claim 168 words

A substrate attracting and holding system comprising: a plurality of protrusions for supporting a substrate, for attracting and holding the substrate supported on the protrusions, wherein the protrusions include an outer peripheral protrusion for supporting an outer peripheral portion of the substrate and a central protrusion for supporting a central portion of the substrate, inside the peripheral portion thereof, and that, when a disposition pitch of the central protrusion is La and an attraction force of the substrate at the central protrusion is Pa while a disposition pitch between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion is Lb and an attraction force of the substrate between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion is Pb, the disposition pitches La and Lb and the attraction forces Pa and Pb are set so as to satisfy relations: Pa·La 3 ≦0.00427 33 ≦Pa ≦100000 0.0005 ≦La ≦0.005 Pb·Lb 3 ≦0.00164 33 ≦Pb ≦100000; and 0.0005 ≦Lb ≦0.005.

Claim 34

Dependent Claim 126 words

A substrate attracting and holding system comprising: a plurality of protrusions for supporting a substrate, for attracting and holding the substrate supported on the protrusions, wherein the protrusions include an outer peripheral protrusion for supporting an outer peripheral portion of the substrate and a central protrusion for supporting a central portion of the substrate, inside the peripheral portion thereof, that a disposition pitch of the central protrusion is made larger than a disposition pitch between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion, and that an attraction force of the substrate at the central protrusion is made smaller than an attraction force of the substrate between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion.

Claim 35

Dependent Claim 126 words

A substrate attracting and holding system comprising: a plurality of protrusions for supporting a substrate, for attracting and holding the substrate supported on the protrusions, wherein the protrusions include an outer peripheral protrusion for supporting an outer peripheral portion of the substrate and a central protrusion for supporting a central portion of the substrate, inside the peripheral portion thereof, that a disposition pitch of the central protrusion is made larger than a disposition pitch between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion, and that an attraction force of the substrate at the central protrusion is made smaller than an attraction force of the substrate between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion.

Claim 36

Dependent Claim 127 words

A substrate attracting and holding system comprising: a plurality of protrusions for supporting a substrate, for attracting and holding the substrate supported on the protrusions, wherein the protrusions include an outer peripheral protrusion for supporting an outer peripheral portion of the substrate and a central protrusion for supporting a central portion of the substrate, inside the peripheral portion thereof, that a disposition pitch of the central protrusion is made not less than a disposition pitch between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion, and that an attraction force of the substrate at the central protrusion is made larger than an attraction force of the substrate between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion.

Claim 37

Dependent Claim 127 words

A substrate attracting and holding system comprising: a plurality of protrusions for supporting a substrate, for attracting and holding the substrate supported on the protrusions, wherein the protrusions include an outer peripheral protrusion for supporting an outer peripheral portion of the substrate and a central protrusion for supporting a central portion of the substrate, inside the peripheral portion thereof, that a disposition pitch of the central protrusion is made not less than a disposition pitch between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion, and that an attraction force of the substrate at the central protrusion is made larger than an attraction force of the substrate between the outer peripheral protrusion and a central protrusion juxtaposed inside the outer peripheral protrusion.

Claim 38

Dependent Claim 42 words

An exposure apparatus, comprising: a substrate attracting and holding system as recited in claim 11 ; and exposure means for transferring, by exposure, a pattern of an original onto a substrate as attracted and held by said substrate attracting and holding system.

Claim 39

Dependent Claim 31 words

A device manufacturing method, characterized by producing a device through manufacturing processes including a process for exposing a substrate by use of an exposure apparatus as recited in claim 20 .

Claim 40

Dependent Claim 42 words

An exposure apparatus, comprising: a substrate attracting and holding system as recited in claim 12 ; and exposure means for transferring, by exposure, a pattern of an original onto a substrate as attracted and held by said substrate attracting and holding system.

Claim 41

Dependent Claim 31 words

A device manufacturing method, characterized by producing a device through manufacturing processes including a process for exposing a substrate by use of an exposure apparatus as recited in claim 22 .

Claim 42

Dependent Claim 42 words

An exposure apparatus, comprising: a substrate attracting and holding system as recited in claim 18 ; and exposure means for transferring, by exposure, a pattern of an original onto a substrate as attracted and held by said substrate attracting and holding system.

Claim 43

Dependent Claim 31 words

A device manufacturing method, characterized by producing a device through manufacturing processes including a process for exposing a substrate by use of an exposure apparatus as recited in claim 24 .

Claim 44

Dependent Claim 42 words

An exposure apparatus, comprising: a substrate attracting and holding system as recited in claim 19 ; and exposure means for transferring, by exposure, a pattern of an original onto a substrate as attracted and held by said substrate attracting and holding system.

Claim 45

Dependent Claim 31 words

A device manufacturing method, characterized by producing a device through manufacturing processes including a process for exposing a substrate by use of an exposure apparatus as recited in claim 26 .

Claim 46

Dependent Claim 126 words

An exposure apparatus, comprising: a holding table for holding a substrate; a protrusion provided on said holding table, said protrusion being disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; and exposure means for transferring, by exposure, a pattern of an original onto the substrate as attracted and held by said holding table, wherein the protrusion is disposed so that the position of the alignment mark or the position with respect to which the alignment mark is to be produced is placed above the protrusion.

Claim 47

Dependent Claim 126 words

An exposure apparatus, comprising: a holding table for holding a substrate; a protrusion provided on said holding table, said protrusion being disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; and exposure means for transferring, by exposure, a pattern of an original onto the substrate as attracted and held by said holding table, wherein the protrusion is disposed so that the position of the alignment mark or the position with respect to which the alignment mark is to be produced is placed above the protrusion.

Claim 48

Dependent Claim 134 words

An exposure apparatus, comprising: a holding table for holding a substrate; a protrusion provided on said holding table, said protrusion being disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; and exposure means for transferring, by exposure, a pattern of an original onto the substrate as attracted and held by said holding table, wherein the protrusion is disposed so that the position of the alignment mark or the position with respect to which the alignment mark is to be produced is placed at a central position in relation to disposition of the protrusion.

Claim 49

Dependent Claim 134 words

An exposure apparatus, comprising: a holding table for holding a substrate; a protrusion provided on said holding table, said protrusion being disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; and exposure means for transferring, by exposure, a pattern of an original onto the substrate as attracted and held by said holding table, wherein the protrusion is disposed so that the position of the alignment mark or the position with respect to which the alignment mark is to be produced is placed at a central position in relation to disposition of the protrusion.

Claim 50

Dependent Claim 132 words

An exposure apparatus, comprising: a holding table for holding a substrate; a protrusion provided on said holding table, said protrusion being disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; and exposure means for transferring, by exposure, a pattern of an original onto the substrate as attracted and held by said holding table, wherein the protrusion is provided so that the protrusion is placed at the same position with reference to the position of the alignment mark or the position with respect to which the alignment mark is to be produced.

Claim 51

Dependent Claim 132 words

An exposure apparatus, comprising: a holding table for holding a substrate; a protrusion provided on said holding table, said protrusion being disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; and exposure means for transferring, by exposure, a pattern of an original onto the substrate as attracted and held by said holding table, wherein the protrusion is provided so that the protrusion is placed at the same position with reference to the position of the alignment mark or the position with respect to which the alignment mark is to be produced.

Claim 52

Dependent Claim 130 words

An exposure apparatus, comprising: a holding table for holding a substrate; a protrusion provided on said holding table, said protrusion being disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; and exposure means for transferring, by exposure, a pattern of an original onto the substrate as attracted and held by said holding table, wherein at least a portion of the protrusion is disposed to surround a zone corresponding to the position of the alignment mark or the position with respect to which the alignment mark is to be produced.

Claim 53

Dependent Claim 130 words

An exposure apparatus, comprising: a holding table for holding a substrate; a protrusion provided on said holding table, said protrusion being disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; and exposure means for transferring, by exposure, a pattern of an original onto the substrate as attracted and held by said holding table, wherein at least a portion of the protrusion is disposed to surround a zone corresponding to the position of the alignment mark or the position with respect to which the alignment mark is to be produced.

Claim 54

Independent Claim 144 words

A device manufacturing method, comprising the steps of: supporting a substrate by use of a protrusion provided on a holding table for holding the substrate, wherein the protrusion is disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; reducing pressure between the holding table and the substrate to attract and hold the substrate; and printing a pattern of an original on the substrate as attracted and held by the holding table, wherein the protrusion is disposed so that the position of the alignment mark or the position with respect to which the alignment mark is to be produced is placed above the protrusion.

Claim 55

Independent Claim 144 words

A device manufacturing method, comprising the steps of: supporting a substrate by use of a protrusion provided on a holding table for holding the substrate, wherein the protrusion is disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; reducing pressure between the holding table and the substrate to attract and hold the substrate; and printing a pattern of an original on the substrate as attracted and held by the holding table, wherein the protrusion is disposed so that the position of the alignment mark or the position with respect to which the alignment mark is to be produced is placed above the protrusion.

Claim 56

Independent Claim 150 words

A device manufacturing method, comprising the steps of: supporting a substrate by use of a protrusion provided on a holding table for holding the substrate, wherein the protrusion is disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; reducing pressure between the holding table and the substrate to attract and hold the substrate; and printing a pattern of an original on the substrate as attracted by the holding table, wherein the protrusion is disposed so that the position of the alignment mark or the position with respect to which the alignment mark is to be produced is placed at a central portion in relation to disposition of the protrusion.

Claim 57

Independent Claim 150 words

A device manufacturing method, comprising the steps of: supporting a substrate by use of a protrusion provided on a holding table for holding the substrate, wherein the protrusion is disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; reducing pressure between the holding table and the substrate to attract and hold the substrate; and printing a pattern of an original on the substrate as attracted by the holding table, wherein the protrusion is disposed so that the position of the alignment mark or the position with respect to which the alignment mark is to be produced is placed at a central portion in relation to disposition of the protrusion.

Claim 58

Independent Claim 148 words

A device manufacturing method, comprising the steps of: supporting a substrate by use of a protrusion provided on a holding table for holding the substrate, wherein the protrusion is disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, and (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; reducing pressure between the holding table and the substrate to attract and hold the substrate; and printing a pattern of an original on the substrate as attracted by the holding table, wherein the protrusion is provided so that the protrusion is placed at the same position with reference to the position of the alignment mark or the position with respect to which the alignment mark is to be produced.

Claim 59

Independent Claim 148 words

A device manufacturing method, comprising the steps of: supporting a substrate by use of a protrusion provided on a holding table for holding the substrate, wherein the protrusion is disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, and (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; reducing pressure between the holding table and the substrate to attract and hold the substrate; and printing a pattern of an original on the substrate as attracted by the holding table, wherein the protrusion is provided so that the protrusion is placed at the same position with reference to the position of the alignment mark or the position with respect to which the alignment mark is to be produced.

Claim 60

Independent Claim 146 words

A device manufacturing method, comprising the steps of: supporting a substrate by use of a protrusion provided on a holding table for holding the substrate, wherein the protrusion is disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; reducing pressure between the holding table and the substrate to attract and hold the substrate; and printing a pattern of an original on the substrate as attracted by the holding table, wherein at least a portion of the protrusion is disposed to surround a zone corresponding to the position of the alignment mark or the position with respect to which the alignment mark is to be produced.

Claim 61

Independent Claim 146 words

A device manufacturing method, comprising the steps of: supporting a substrate by use of a protrusion provided on a holding table for holding the substrate, wherein the protrusion is disposed to be placed in a predetermined positional relationship, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position with respect to which an alignment mark is to be produced; reducing pressure between the holding table and the substrate to attract and hold the substrate; and printing a pattern of an original on the substrate as attracted by the holding table, wherein at least a portion of the protrusion is disposed to surround a zone corresponding to the position of the alignment mark or the position with respect to which the alignment mark is to be produced.

Claim 62

Dependent Claim 84 words

A conveying system, comprising: a cassette for accommodating therein a plurality of chucks being different with respect to disposition of protrusions for supporting a substrate; a conveyance robot for conveying an arbitrary chuck, selected out of said plurality of chucks accommodated in said cassette, on the basis of information related to a processing region on the substrate; and a stage for holding the arbitrary chuck conveyed by said conveyance robot and for supporting the substrate with use of protrusions provided on the arbitrary chuck.

Claim 63

Dependent Claim 84 words

A conveying system, comprising: a cassette for accommodating therein a plurality of chucks being different with respect to disposition of protrusions for supporting a substrate; a conveyance robot for conveying an arbitrary chuck, selected out of said plurality of chucks accommodated in said cassette, on the basis of information related to a processing region on the substrate; and a stage for holding the arbitrary chuck conveyed by said conveyance robot and for supporting the substrate with use of protrusions provided on the arbitrary chuck.

Claim 64

Dependent Claim 23 words

A conveying system according to claim 36 , wherein the information related to the processing region includes positional information of an alignment mark.

Claim 65

Dependent Claim 39 words

An exposure apparatus, comprising: a conveying system as recited in claim 36 ; and exposure means for transferring, by exposure, a pattern of an original onto the substrate as supported with protrusion of an arbitrary chuck selected and conveyed.

Claim 66

Dependent Claim 32 words

A device manufacturing method, characterized by producing a device through manufacturing processes including a process for exposing a substrate by use of a n exposure apparatus as recited in claim 38 .

Claim 67

Dependent Claim 51 words

A substrate holding system, comprising: a holding table for holding a substrate; a protrusion provided on said holding table, said protrusion having a constant relative position with respect to a plurality of alignment marks formed on the substrate or to a plurality of alignment marks to be produced on the substrate.

Claim 68

Dependent Claim 51 words

A substrate holding system, comprising: a holding table for holding a substrate; a protrusion provided on said holding table, said protrusion having a constant relative position with respect to a plurality of alignment marks formed on the substrate or to a plurality of alignment marks to be produced on the substrate.

Claim 69

Dependent Claim 44 words

A substrate holding system, according to claim 40 , wherein, at positions on the substrate where the plurality of alignment marks are formed or positions on the substrate where the plurality of alignment marks are to be produced, the substrate has a constant tilt.

Claim 70

Dependent Claim 36 words

An exposure apparatus, comprising: a substrate holding system as recited in claim 40 ; and exposure means for transferring, by exposure, a pattern of an original onto the substrate as held by said substrate holding system.

Claim 71

Dependent Claim 31 words

A device manufacturing method, characterized by producing a device through manufacturing processes including a process for exposing a substrate by use of an exposure apparatus as recited in claim 42 .

Claim 72

Dependent Claim 37 words

A system according to claim 6 , wherein the position of the alignment mark or the position with respect to which the alignment mark is to be produced is placed outside a processing region of the substrate.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2007-10-26	2008-04-26	2008-10-26	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2011-10-26	2012-04-26	2012-10-26	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2015-10-26	2016-04-26	2016-10-26	$7700.00	Window Closed / Lapsed

Substrate attracting and holding system for use in exposure apparatus

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