US6870301B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of separating a template from a substrate during imprint lithography
Assignee: The University of Texas System
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Filing: 2003-07-10
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Granted: 2005-03-22
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Expires: 2023-07-10
Abstract
Abstract Processes and associated devices for high precision positioning of a template an substrate during imprint lithography includes a calibration system with a course calibration stage and a fine orientation stage capable of maintaining a uniform gap between the template and substrate. The fine orientation stage includes a pair of flexure members having flexure joints for motion about a pivot point intersected by first and second orientation axes. Actuators lengthen or shorten to expand or contract the flexure members. Separation of the template is achieved using a peel-and-pull method that avoids destruction of imprinted features from the substrate.
Inventors
- 👤 Byung Jin Choi
- 👤 Sidlgata V. Sreenivasan
- 👤 Stephen C. Johnson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 09:01
CPC Classifications
G; G03; G03F; G03F9/00; B; B82; B82Y; B82Y10/00; B82Y40/00; G03F7/00; G03F7/0002
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
80 words
A method of separating a template extending in a first plane from a substrate extending in a second plane, said method comprising: applying a first force to form an oblique angle between said first plane and said second plane; and applying a second force differing from said first force to increase a distance between said template and said substrate so that said template is spaced-apart from said substrate, with said first force and said second force being greater than zero.
Claim 2
Independent Claim
80 words
A method of separating a template extending in a first plane from a substrate extending in a second plane, said method comprising: applying a first force to form an oblique angle between said first plane and said second plane; and applying a second force differing from said first force to increase a distance between said template and said substrate so that said template is spaced-apart from said substrate, with said first force and said second force being greater than zero.
Claim 3
Dependent Claim
30 words
The method as recited in claim 1 wherein applying said first force further includes causing said template to be tilted with respect to said substrate, with said substrate remaining stationary.
Claim 4
Dependent Claim
31 words
The method as recited in claim 1 wherein applying said first force further includes causing said template to be tilted with respect to said substrate, with said template remains remaining stationary.
Claim 5
Dependent Claim
22 words
The method as recited in claim 1 wherein applying said second force further includes applying said second force by a flexure system.
Claim 6
Dependent Claim
72 words
The method as recited in claim 1 wherein applying said second force further includes applying said second force by a piezo actuator, with said piezo actuator containing a first end and a second end positioned opposite to each other, said first end being attached to said template and said second end being in contact with said substrate, with enlarging said piezo actuator causing said template to be pushed away from said substrate.
Claim 7
Dependent Claim
25 words
The method as recited in claim 5 wherein applying said second force further includes having said second end treated with a low surface energy layer.
Claim 8
Independent Claim
122 words
A method of separating a template from a substrate, with a first distance and a second distance defined therebetween, with said first distance being defined opposite to said second distance, said method comprising: applying a first force to increase a first spacing between said substrate and said template so that a rate of change of said first distance is at a higher rate than a rate of change of said second distance; and applying a second force differing from said first force to increase a second spacing between said substrate and said template so that a rate of change of said first distance and said second distance are substantially uniform, with said first force and said second force being greater than zero.
Claim 9
Independent Claim
122 words
A method of separating a template from a substrate, with a first distance and a second distance defined therebetween, with said first distance being defined opposite to said second distance, said method comprising: applying a first force to increase a first spacing between said substrate and said template so that a rate of change of said first distance is at a higher rate than a rate of change of said second distance; and applying a second force differing from said first force to increase a second spacing between said substrate and said template so that a rate of change of said first distance and said second distance are substantially uniform, with said first force and said second force being greater than zero.
Claim 10
Dependent Claim
46 words
The method as recited in claim 7 wherein applying said first force further includes forming a wedge between said template and said substrate at one end of a template substrate interface, with said template being tilted with respect to said substrate and said substrate remaining stationary.
Claim 11
Dependent Claim
45 words
The method as recited in claim 7 wherein applying said first force further includes forming a wedge between said template and said substrate at one end of a template-substrate interface, with said substrate being tilted with respect to said template and said template remaining stationary.
Claim 12
Dependent Claim
24 words
The method as recited in claim 7 wherein applying said second force further includes causing said template to be substantially separated from said substrate.
Claim 13
Dependent Claim
22 words
The method as recited in claim 7 wherein applying said second force further includes applying said second force by a flexure system.
Claim 14
Dependent Claim
73 words
The method as recited in claim 7 wherein applying said second force further includes applying said second force by a piezo actuator, with said piezo actuator containing a first end and a second end positioned opposite to each other, said first end being attached to said template and said second end being in contact with said substrate, with enlarging said piezo actuator causing said the plate to be pushed away from said substrate.
Claim 15
Dependent Claim
25 words
The method as recited in claim 12 wherein applying said second force further includes having said second end treated with a low surface energy layer.
Claim 16
Independent Claim
102 words
A method of separating a template extending in a first plane from an imprinting layer extending in a second plane, said method comprising: applying a first force to form an oblique angle between said first plane and said second plane to cause a wedge between said template and said imprinting layer at one end of a template-imprinting layer interface; and applying a second force differing from said first force to increase a distance between said template and said imprinting layer so that said template is spaced-apart from said imprinting layer, with said first force and said second force being greater than zero.
Claim 17
Independent Claim
102 words
A method of separating a template extending in a first plane from an imprinting layer extending in a second plane, said method comprising: applying a first force to form an oblique angle between said first plane and said second plane to cause a wedge between said template and said imprinting layer at one end of a template-imprinting layer interface; and applying a second force differing from said first force to increase a distance between said template and said imprinting layer so that said template is spaced-apart from said imprinting layer, with said first force and said second force being greater than zero.
Claim 18
Dependent Claim
30 words
The method as recited in claim 14 wherein applying said first force further includes causing said template to be tilted with respect to said substrate, with said substrate remaining stationary.
Claim 19
Dependent Claim
33 words
The method as recited in claim 14 wherein applying said first force to said template further includes causing said template to be tilted with respect to said substrate, with said template remaining stationary.
Claim 20
Dependent Claim
25 words
The method as recited in claim 14 wherein applying said second force to said template further includes applying said second force by a flexure system.
Claim 21
Dependent Claim
74 words
The method as recited in claim 14 wherein applying said second force further includes applying said second force by a piezo actuator, with said piezo actuator containing a first end and a second end positioned opposite to each other, said first end being attached to said template and said second end being in contact with said imprinting layer, with enlarging said piezo actuator causing said template to be pushed away from said imprinting layer.
Claim 22
Dependent Claim
26 words
The method as recited in claim 18 wherein applying said second force further includes having said second end is treated with a low surface energy layer.
Claim 23
Dependent Claim
16 words
The method as recited in claim 1 further including applying said first and second forces concurrently.
Claim 24
Dependent Claim
16 words
The method as recited in claim 7 further including applying said first and second forces concurrently.
Claim 25
Dependent Claim
16 words
The method as recited in claim 14 further including applying said first and second forces concurrently.
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USPTO Annuity & Maintenance Windows
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| 3.5 Years (Year 4) | 2008-03-21 | 2008-09-20 | 2009-03-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2012-03-21 | 2012-09-20 | 2013-03-22 | $3760.00 | Window Closed / Lapsed |
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