US7281919B2
Expired / Lapsed
US
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System for controlling a volume of material on a mold
Assignee: Canon Nanotechnologies Inc
•
Filing: 2005-04-07
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Granted: 2007-10-16
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Expires: 2025-04-07
Abstract
Abstract A system for controlling a volume of liquid on a mold that features a body defining a volume with an aperture formed into the body and positioned proximate to the mold. A pump system is in fluid communication with the body, and the aperture and the pump system are established to create a stream of fluid moving between the mold and the volume. In this manner a quantity of fluid is removed while retained upon the mold is a desired portion of the fluid to undertake imprint lithographic processes.
Inventors
- 👤 Steven C. Shackleton
- 👤 Ian M. McMackin
- 👤 Pankaj B. Lad
- 👤 Van N. Truskett
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 14:35
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0002; B; B82; B82Y; B82Y10/00; B82Y40/00; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/887
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
100 words
A system for controlling a volume of liquid on a mold, said system comprising: a body defining a void with an aperture formed into said body and positioned proximate to said mold, with an air bearing being disposed on opposed sides of said aperture, defining a pair of spaced-apart air bearings; and a pump system in fluid communication with said body, with said aperture and said pump system being established to create a stream of fluid moving between said mold and said void to remove a quantity of said fluid while maintaining a portion of said fluid upon said mold.
Claim 2
Independent Claim
100 words
A system for controlling a volume of liquid on a mold, said system comprising: a body defining a void with an aperture formed into said body and positioned proximate to said mold, with an air bearing being disposed on opposed sides of said aperture, defining a pair of spaced-apart air bearings; and a pump system in fluid communication with said body, with said aperture and said pump system being established to create a stream of fluid moving between said mold and said void to remove a quantity of said fluid while maintaining a portion of said fluid upon said mold.
Claim 3
Dependent Claim
41 words
The system as recited in claim 1 wherein said body further includes an island extending from a surface of said body, with said aperture being disposed in said island so that said aperture is disposed between said mold and said surface.
Claim 4
Dependent Claim
29 words
The system as recited in claim 1 wherein said body further includes a recess formed into a surface of said body, with said aperture being disposed within said recess.
Claim 5
Dependent Claim
17 words
The system as recited in claim 1 wherein said pump system generates a vacuum in said void.
Claim 6
Dependent Claim
18 words
The system as recited in claim 1 wherein said pump system generates a positive pressure in said void.
Claim 7
Dependent Claim
52 words
The system as recited in claim 1 further including disposing an air bearing on opposed sides of said aperture, defining a pair of spaced-apart air bearings, with each of said pair of spaced-apart air bearings including an air bearing element comprising a plurality of volumes each of which has differing pressure levels.
Claim 8
Dependent Claim
77 words
The system as recited in claim 1 further including disposing a plurality of air bearing elements on opposing sides of said aperture, each of which includes a plurality of volumes a pair of which are in fluid communication with said pump system to provide one of the volumes of said pair with a positive pressure, with the remaining volume of said pair having a vacuum and separated therefrom by an additional volume held at an ambient pressure.
Claim 9
Dependent Claim
24 words
The system as recited in claim 1 wherein said aperture has a length associated therewith sufficient to extend between opposed sides of said mold.
Claim 10
Independent Claim
146 words
A system for controlling a volume of liquid on a mold, said system comprising: a body defining a void with an aperture formed into said body and positioned proximate to said mold to place said void in fluid communication with said mold, with an air bearing being disposed at each end of said aperture, defining a pair of spaced-apart air bearings; and a pump system in fluid communication with said aperture and said pair of spaced-apart air bearings, with said aperture and said pump system being established to create a stream of fluid moving between said mold and said void to remove a quantity of said fluid while maintaining a portion of said fluid upon said mold and each of said pair of spaced-apart air bearings including an air bearing element comprising a plurality of volumes having dimensions established to be maintained at differing pressure levels.
Claim 11
Independent Claim
146 words
A system for controlling a volume of liquid on a mold, said system comprising: a body defining a void with an aperture formed into said body and positioned proximate to said mold to place said void in fluid communication with said mold, with an air bearing being disposed at each end of said aperture, defining a pair of spaced-apart air bearings; and a pump system in fluid communication with said aperture and said pair of spaced-apart air bearings, with said aperture and said pump system being established to create a stream of fluid moving between said mold and said void to remove a quantity of said fluid while maintaining a portion of said fluid upon said mold and each of said pair of spaced-apart air bearings including an air bearing element comprising a plurality of volumes having dimensions established to be maintained at differing pressure levels.
Claim 12
Dependent Claim
41 words
The system as recited in claim 9 wherein said body further includes an island extending from a surface of said body, with said aperture being disposed in said island so that said aperture is disposed between said mold and said surface.
Claim 13
Dependent Claim
29 words
The system as recited in claim 9 wherein said body further includes a recess formed into a surface of said body, with said aperture being disposed within said recess.
Claim 14
Dependent Claim
17 words
The system as recited in claim 9 wherein said pump system generates a vacuum in said void.
Claim 15
Dependent Claim
18 words
The system as recited in claim 9 wherein said pump system generates a positive pressure in said void.
Claim 16
Independent Claim
81 words
A system for controlling a volume of liquid on a mold, said system comprising: a body defining a void with an aperture formed into said body and positioned proximate to said mold to place said void in fluid communication with an ambient, with an air bearing being disposed at each end of said aperture, defining a pair of spaced-apart air bearings each of which includes an air bearing element comprising a plurality of recessed areas of a surface separated by lands.
Claim 17
Independent Claim
81 words
A system for controlling a volume of liquid on a mold, said system comprising: a body defining a void with an aperture formed into said body and positioned proximate to said mold to place said void in fluid communication with an ambient, with an air bearing being disposed at each end of said aperture, defining a pair of spaced-apart air bearings each of which includes an air bearing element comprising a plurality of recessed areas of a surface separated by lands.
Claim 18
Dependent Claim
48 words
The system as recited in claim 14 wherein said air bearing element further includes said first, second recessed areas, with said second recessed area substantially surrounding said first recessed area, with a said first recessed area defining a volume greater than a volume of said second recessed area.
Claim 19
Dependent Claim
72 words
The system as recited in claim 14 wherein said air bearing element further includes said first, second and third recessed areas, with said second recessed area substantially surrounding said first recessed area, and said third recessed area substantially surrounding said first and second recessed areas, with said third recessed area defining a volume greater than a volume of said second recessed area and less than a volume of said first recessed area.
Claim 20
Dependent Claim
34 words
The system as recited in claim 16 wherein said first recessed area have a rectangular shape, defining a rectangular perimeter, with said second and third recessed areas having a shaping conforming to said perimeter.
Claim 21
Dependent Claim
21 words
The system as recited in claim 15 wherein each of said pair air bearings includes a plurality of air bearing elements.
Claim 22
Dependent Claim
21 words
The system as recited in claim 15 wherein each of said pair of air bearing are integrally formed with said body.
Claim 23
Independent Claim
114 words
A system for controlling a volume of liquid on a mold, said system comprising: a body defining a void with an aperture formed into said body and positioned proximate to said mold, said body further including an island extending from a surface of said body, with said aperture being disposed in said island so that said apertures is disposed between said mold and said surface; and a pump system in fluid communication with said body, with said aperture and said pump system being established to create a stream of fluid moving between said mold and said void to remove a quantity of said fluid while maintaining a portion of said fluid upon said mold.
Claim 24
Independent Claim
114 words
A system for controlling a volume of liquid on a mold, said system comprising: a body defining a void with an aperture formed into said body and positioned proximate to said mold, said body further including an island extending from a surface of said body, with said aperture being disposed in said island so that said apertures is disposed between said mold and said surface; and a pump system in fluid communication with said body, with said aperture and said pump system being established to create a stream of fluid moving between said mold and said void to remove a quantity of said fluid while maintaining a portion of said fluid upon said mold.
Claim 25
Independent Claim
124 words
A system for controlling a volume of liquid on a mold, said system comprising: a body defining a void with an aperture formed into said body and positioned proximate to said mold, with an air bearing on opposed sides of said aperture, defining a pair of spaced-apart air bearings, with each of said pair of spaced-apart air bearings including an air bearing element comprising a plurality of volumes each of which has differing pressure levels; and a pump system in fluid communication with said body, with said aperture and said pump system being established to create a stream of fluid moving between said mold and said void to remove a quantity of said fluid while maintaining a portion of said fluid upon said mold.
Claim 26
Independent Claim
124 words
A system for controlling a volume of liquid on a mold, said system comprising: a body defining a void with an aperture formed into said body and positioned proximate to said mold, with an air bearing on opposed sides of said aperture, defining a pair of spaced-apart air bearings, with each of said pair of spaced-apart air bearings including an air bearing element comprising a plurality of volumes each of which has differing pressure levels; and a pump system in fluid communication with said body, with said aperture and said pump system being established to create a stream of fluid moving between said mold and said void to remove a quantity of said fluid while maintaining a portion of said fluid upon said mold.
Claim 27
Independent Claim
149 words
A system for controlling a volume of liquid on a mold, said system comprising: a body defining a void with an aperture formed into said body and positioned proximate to said mold, with a plurality of air bearing elements on opposing sides of said aperture, each of which includes a plurality of volumes a pair of which are in fluid communication with said pump system to provide one of the volumes of said pair with a positive pressure, with the remaining volume of said pair having a vacuum and separated therefrom by an additional volume held at an ambient pressure; and a pump system in fluid communication with said body, with said aperture and said pump system being established to create a stream of fluid moving between said mold and said void to remove a quantity of said fluid while maintaining a portion of said fluid upon said mold.
Claim 28
Independent Claim
149 words
A system for controlling a volume of liquid on a mold, said system comprising: a body defining a void with an aperture formed into said body and positioned proximate to said mold, with a plurality of air bearing elements on opposing sides of said aperture, each of which includes a plurality of volumes a pair of which are in fluid communication with said pump system to provide one of the volumes of said pair with a positive pressure, with the remaining volume of said pair having a vacuum and separated therefrom by an additional volume held at an ambient pressure; and a pump system in fluid communication with said body, with said aperture and said pump system being established to create a stream of fluid moving between said mold and said void to remove a quantity of said fluid while maintaining a portion of said fluid upon said mold.
Claim 29
Independent Claim
98 words
A system for controlling a volume of liquid on a mold, said system comprising: a body defining a void with an aperture formed into said body and positioned proximate to said mold, wherein said aperture has a length associated therewith sufficient to extend between opposed sides of said mold; and a pump system in fluid communication with said body, with said aperture and said pump system being established to create a stream of fluid moving between said mold and said void to remove a quantity of said fluid while maintaining a portion of said fluid upon said mold.
Claim 30
Independent Claim
98 words
A system for controlling a volume of liquid on a mold, said system comprising: a body defining a void with an aperture formed into said body and positioned proximate to said mold, wherein said aperture has a length associated therewith sufficient to extend between opposed sides of said mold; and a pump system in fluid communication with said body, with said aperture and said pump system being established to create a stream of fluid moving between said mold and said void to remove a quantity of said fluid while maintaining a portion of said fluid upon said mold.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2010-10-15 | 2011-04-16 | 2011-10-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2014-10-15 | 2015-04-16 | 2015-10-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2018-10-15 | 2019-04-16 | 2019-10-16 | $7700.00 | Window Closed / Lapsed |