Patent JPS5956718A successfully refreshed from Google Patents.
JPS5956718A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Evaporation apparatus
Assignee: Lincstech Circuit Co Ltd
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Filing: 1982-09-25
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Granted: —
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Expires: 2002-09-25
Abstract
Abstract PURPOSE:To enhance evaporation efficiency and realize oblique evaporation by forming a thin film while a substrate is vibrated in the specified direction. CONSTITUTION:An evaporation source 12 is heated and a ferro-magnetic metal 13 is vaporized and is adhered to a substrate 11. At this time, the substrate 11 is vibrated continuously in the horizontal direction in accordance with a sine wave. Thereby, the ferro-magnetic metal is not adhered vertically but obliquely. Accordingly, obliquely evaporated thin film can be formed substantially.
Inventors
- 👤 Minoru Osada
- 👤 実 長田
- 👤 Soichi Matsuzaki
- 👤 松崎 壮一
- 👤 Seiji Yasui
- 👤 政治 安井
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-30 15:52
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; H; H01; H01F; H01F41/00; H01F41/14; H01F41/20
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
JPS52129409A
Cited
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