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Patent US4350116A successfully refreshed from Google Patents.
US4350116A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Holder for liquid phase epitaxial growth
Assignee: International Business Machines Corp
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Filing: 1980-12-22
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Granted: 1982-09-21
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Expires: 2000-12-22
Abstract
Abstract A holder for liquid phase epitaxial (LPE) growth which eliminates mesas on the surface of the film is described. The holder has two legs to which a ring is connected. The ring has holding means so that it can hold one wafer or two wafers back-to-back. One of the two legs extends vertically below the first ring. In a preferred embodiment a second ring having holding means for a pair of wafers back-to-back is attached to the elongated leg. This holder structure prevents a film from the liquid melt from forming when the holder is withdrawn from the liquid growth solution, thereby eliminating the formation of mesas which occur when the film ruptures.
Inventors
- 👤 Johannes Grandia
- 👤 William G. McChesney
- 👤 Hugo A. E. Santini
- 👤 Harold L. Turk
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 19:16
CPC Classifications
C; C30; C30B; C30B19/00; C30B19/06; C30B19/068; Y; Y10; Y10S; Y10S269/00; Y10S269/903
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
80 words
A wafer holder for use in growing liquid phase epitaxial films on wafers comprising: a first leg extending vertically; a second leg extending vertically and beyond said first leg; a first ring for holding at least one wafer and connected to said first and second legs, and a second ring for holding at least one wafer connected only to said second leg and spaced from said first ring wherein the mesa count on the films is held to a minimum.
Claim 2
Dependent Claim
80 words
A wafer holder for use in growing liquid phase epitaxial films on wafers comprising: a first leg extending vertically; a second leg extending vertically and beyond said first leg; a first ring for holding at least one wafer and connected to said first and second legs, and a second ring for holding at least one wafer connected only to said second leg and spaced from said first ring wherein the mesa count on the films is held to a minimum.
Claim 3
Dependent Claim
26 words
A wafer holder as described in claim 1 including means associated with said first ring to hold a pair of wafers in a substantially back-to-back relationship.
Claim 4
Dependent Claim
27 words
A wafer holder as described in claim 1 including at least one additional ring connected only to said second leg in spaced relationship to said second ring.
Claim 5
Dependent Claim
18 words
A wafer holder as described in claim 3 including 2 additional rings connected only to said second leg.
References Cited (Backward Citations)
US3974797A
Cited
US4190683A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-09-20 | 1986-03-22 | 1986-09-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-09-20 | 1990-03-22 | 1990-09-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-09-20 | 1994-03-22 | 1994-09-21 | $7700.00 | Window Closed / Lapsed |