Patent US4833319A successfully refreshed from Google Patents.
US4833319A
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Carrier gas cluster source for thermally conditioned clusters
Assignee: Raytheon Co
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Filing: 1987-02-27
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Granted: 1989-05-23
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Expires: 2007-02-27
Abstract
Abstract A source of clusters of atoms is provided, wherein the clusters are thermally conditioned after their formation so that the clusters are in the liquid state. A beam of clusters is first formed during the mixing of a stream of atoms and a carrier gas. The beam of clusters mixed with carrier gas is passed through a conditioner, preferably including a heated drift tube, to bring the clusters to a temperature whereat the clusters are in a condensed state without crystalline order, comparable to the liquid state. The conditioned cluster beam passes to vacuum, with separation and removal of a large portion of the carrier gas mixed therewith, so that cooling of the clusters in the cluster beam is minimized during their flight to the cluster target.
Inventors
- 👤 Wolfgang Knauer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 14:46
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; C23C14/228; C23C14/221; H; H01; H01J; H01J2237/00; H01J2237/06; H01J2237/08; H01J2237/0812
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
120 words
A carrier gas cluster source for providing clusters to a target, comprising: beam source means for generating a cluster beam, said beam source means comprising evaporation source means for emitting a beam of atoms and a gas mixing chamber wherein a carrier gas mixes with the beam of atoms to form a cluster beam having clusters of atoms mixed with a flow of the carrier gas; conditioning means for conditioning the cluster beam after the clusters are formed so that substantially all of the clusters are in the liquid state; and transmission means for transmitting the clusters of the conditioned cluster beam to the target with substantially all of the clusters in the liquid state prior to impacting the target.
Claim 2
Dependent Claim
120 words
A carrier gas cluster source for providing clusters to a target, comprising: beam source means for generating a cluster beam, said beam source means comprising evaporation source means for emitting a beam of atoms and a gas mixing chamber wherein a carrier gas mixes with the beam of atoms to form a cluster beam having clusters of atoms mixed with a flow of the carrier gas; conditioning means for conditioning the cluster beam after the clusters are formed so that substantially all of the clusters are in the liquid state; and transmission means for transmitting the clusters of the conditioned cluster beam to the target with substantially all of the clusters in the liquid state prior to impacting the target.
Claim 3
Dependent Claim
19 words
The cluster source of claim 1, wherein said conditioning means includes means for adjusting the temperature of the clusters.
Claim 4
Dependent Claim
20 words
The cluster source of claim 1, wherein said conditioning means is a drift tube through which the cluster beam passes.
Claim 5
Dependent Claim
18 words
The cluster source of claim 3, wherein said conditioning means further includes a heater for said drift tube.
Claim 6
Dependent Claim
28 words
The cluster source of claim 1, wherein said evaporation source is a crucible having a heater therefor, and having an aperture therein for emitting a beam of atoms.
Claim 7
Dependent Claim
26 words
The cluster source of claim 1, wherein said transmission means includes means for removing at least a portion of the carrier gas from the cluster beam.
Claim 8
Dependent Claim
14 words
The cluster source of claim 1, wherein said transmission means includes an expansion nozzle.
Claim 9
Dependent Claim
25 words
The cluster source of claim 1, wherein said transmission means includes a skimmer for removing a portion of the carrier gas from the cluster beam.
Claim 10
Dependent Claim
103 words
The carrier gas cluster source, comprising: a beam source including a gas mixing chamber and a crucible which emits a stream of atoms of a cluster material into said mixing chamber, wherein the stream of atoms and a carrier gas intermix so that a beam of clusters of the cluster material mixed with the carrier gas is formed; a drift tube through which the beam of clusters and the carrier gas passes after leaving said beam source; a heater for heating said drift tube; and a nozzle through which the beam of clusters and the carrier gas passes after leaving said drift tube.
Claim 11
Dependent Claim
103 words
The carrier gas cluster source, comprising: a beam source including a gas mixing chamber and a crucible which emits a stream of atoms of a cluster material into said mixing chamber, wherein the stream of atoms and a carrier gas intermix so that a beam of clusters of the cluster material mixed with the carrier gas is formed; a drift tube through which the beam of clusters and the carrier gas passes after leaving said beam source; a heater for heating said drift tube; and a nozzle through which the beam of clusters and the carrier gas passes after leaving said drift tube.
Claim 12
Dependent Claim
27 words
The cluster source of claim 9, wherein the length of said drift tube is from about one to about five times the diameter of said drift tube.
Claim 13
Dependent Claim
41 words
The cluster source of claim 9, further including a cooling tube through which the beam of clusters and the carrier gas pass prior to entering said drift tube, said cooling tube being positioned between said drift tube and said beam source.
Claim 14
Dependent Claim
77 words
A process for providing a cluster beam of high quality to impact upon a target, comprising the steps of: forming a cluster beam by mixing a carrier gas with a stream of atoms; conditioning the clusters in the cluster beam so that substantially all of the clusters are in the liquid state; and transmitting the conditioned cluster beam to the target, with substantially all of the clusters in the liquid state prior to impacting upon the target.
Claim 15
Dependent Claim
77 words
A process for providing a cluster beam of high quality to impact upon a target, comprising the steps of: forming a cluster beam by mixing a carrier gas with a stream of atoms; conditioning the clusters in the cluster beam so that substantially all of the clusters are in the liquid state; and transmitting the conditioned cluster beam to the target, with substantially all of the clusters in the liquid state prior to impacting upon the target.
Claim 16
Dependent Claim
13 words
The process of claim 12, wherein the carrier gas is an inert gas.
Claim 17
Dependent Claim
31 words
The process of claim 12, wherein said step of conditioning is accomplished by heating the clusters to a temperature wherein the clusters are in a condensed state but without crystalline order.
Claim 18
Dependent Claim
27 words
The process of claim 12, wherein said step of conditioning the clusters includes the step of passing the clusters through a drift tube to heat the clusters.
Claim 19
Dependent Claim
28 words
The process of claim 12, wherein said step of transmitting includes the step of separating and removing at least a portion of the carrier gas from the clusters.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-05-22 | 1992-11-21 | 1993-05-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-05-22 | 1996-11-21 | 1997-05-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-05-22 | 2000-11-21 | 2001-05-23 | $7700.00 | Window Closed / Lapsed |