Method and apparatus for changing the imaging scale in X-ray lithograph

Claim 2

In a method for changing the imaging scale in x-ray lithography, said method including exposing an object by directing a beam of collimated x-radiation through a mask to transfer an image of a mask structure by parallel projection onto the object which is arranged in a direction of the beam to follow the mask, the improvement comprising changing the imaging scale of the image by deforming the object at least in the region to be exposed into a curved surface and maintaining the radius of curvature for the individual surface points of the area being deformed constant during the irradiation of the object.

Claim 3

In a method according to claim 1, wherein the step of deforming deforms the surface of the object with the radius of curvature being constant, at least in the region to be exposed.

Claim 4

In a method according to claim 1, wherein the step of deforming comprises providing a holder having a curved surface and pressing the object against said curved surface.

Claim 5

In a method according to claim 1, wherein the step of deforming the object comprises holding the edges of the object and applying a force to a back surface of the object facing away from the mask.

Claim 6

In a method according to claim 1, wherein the step of bending the object includes providing an object having a thickness steadily increasing from the edges towards the center, holding the object at the edges, and applying a pressure to a back surface of the object facing away from the mask.

Claim 7

In a method according to claim 1, wherein the step of deforming the object deforms the object so that the surface facing the mask has a spherical curvature.

Claim 8

In a method according to claim 1, wherein the step of deforming the object deforms the object so that the surface facing the mask has a cylindrically curved surface.

Claim 9

In a method according to claim 1, wherein the step of directing a beam of x-radiation provides synchroton radiation.

Claim 10

In a method according to claim 1, wherein the step of exposing the object exposes the object in a step and repeat process, which includes displacing the object relative to the mask with a three-dimensional displacement at the completion of each step.

Claim 11

In a method according to claim 9, wherein the step of repositioning positions each region of the object with the center of the region being on a straight line extending through the mask and having the smallest distance from the mask.

Claim 12

In a method for changing the imaging scale in x-ray lithography, said method including directing a beam of collimated x-radiation through a mask onto a surface of an object, the improvement comprising deforming the object at least in the region to be exposed to deform the surface of the object into a cylindrically curved surface having a symmetry cylindrical axis lying in a plane extending perpendicular to a propagation direction of the beam of x-radiation and maintaining the radius of curvature for the individual surface points of the area being deformed constant during the irradiation of the object, shaping the x-ray beam to have a rectangular cross section with a dimension in the direction of the cylindrical axis being smaller than the direction perpendicular to the cylindrical axis, sweeping the x-ray beam across the mask in a direction of the cylindrical axis with a first speed, and displacing the mask relative to the object in the direction of the cylindrical axis with a second speed.

Claim 13

In a method for changing the imaging scale in x-ray lithography, said method including directing a beam of collimated x-radiation through a mask onto a surface of an object, the improvement comprising deforming the object at least in the region to be exposed to deform the surface of the object into a cylindrically curved surface having a symmetry cylindrical axis lying in a plane extending perpendicular to a propagation direction of the beam of x-radiation and maintaining the radius of curvature for the individual surface points of the area being deformed constant during the irradiation of the object, shaping the x-ray beam to have a rectangular cross section with a dimension in the direction of the cylindrical axis being smaller than the direction perpendicular to the cylindrical axis, sweeping the x-ray beam across the mask in a direction of the cylindrical axis with a first speed, and displacing the mask relative to the object in the direction of the cylindrical axis with a second speed.

Claim 14

In a method according to claim 11, wherein for the correction of orthoganal errors, the mask is displaced with a third speed relative to the object in a direction perpendicular to the cylindrical axis and perpendicular to the propagation further includes displacing the mask relative to the object direction of the x-ray beam.

Claim 15

In a method according to claim 11, wherein the step of sweeping the x-radiation across the mask includes providing a rotating mirror and directing the beam from the source onto the mirror, which sweeps it across the mask.

Claim 16

In a method according to claim 11, wherein the relative movement is by moving the mask and object through the x-ray beam in common.

Claim 17

In an apparatus for changing the imaging scale in an x-ray lithography, said apparatus including a radiation source for generating collimated x-radiation, means for shaping the x-radiation into a beam of x-radiation having a rectangular cross-section, means for supporting a mask in the beam path of the radiation to impose an image in the beam passing through the mask, means for mounting an object adjacent the mask to receive the image on a surface of the object, the improvements comprising means for changing the imaging scale of the image received on said surface comprising the means for mounting including means for holding the object and having means for deforming the object to create a curved surface for the surface of the object facing the mask.

Claim 18

In an apparatus for changing the imaging scale in an x-ray lithography, said apparatus including a radiation source for generating collimated x-radiation, means for shaping the x-radiation into a beam of x-radiation having a rectangular cross-section, means for supporting a mask in the beam path of the radiation to impose an image in the beam passing through the mask, means for mounting an object adjacent the mask to receive the image on a surface of the object, the improvements comprising means for changing the imaging scale of the image received on said surface comprising the means for mounting including means for holding the object and having means for deforming the object to create a curved surface for the surface of the object facing the mask.

Claim 19

In an apparatus according to claim 15, wherein the means for holding includes holding the edges of the object and means for applying force to a back surface of the object to cause the surface facing the mask to be bent into a curved surface.

Claim 20

In an apparatus according to claim 15, wherein the means for holding includes a curved surface facing a back surface of the object, said curved surface having at least one groove, said groove being connected by a line to a vacuum pump so that the object is held onto the curved surface by the vacuum applied in said groove.

Claim 21

In an apparatus according to claim 17, wherein the surface of the holder has a cylindrically curved surface.

Claim 22

In an apparatus according to claim 17, wherein the curved surface of the holder is a spherically curved surface.

Claim 23

In an apparatus according to claim 19, wherein the at least one groove is an annular groove.

Claim 24

In an apparatus for changing the imaging scale in an x-ray lithography, said apparatus including a radiation source for generating a collimated x-radiation, means for mounting a mask in the beam path of the radiation, means for holding an object adjacent the mask and in alignment with an x-ray beam passing through the mask, the improvement comprising the means for holding including a container having an elastic wall, said object being held on said container, said container having means for changing the pressure in the container to deform the object held on said elastic wall.

Claim 25

In an apparatus for changing the imaging scale in an x-ray lithography, said apparatus including a radiation source for generating a collimated x-radiation, means for mounting a mask in the beam path of the radiation, means for holding an object adjacent the mask and in alignment with an x-ray beam passing through the mask, the improvement comprising the means for holding including a container having an elastic wall, said object being held on said container, said container having means for changing the pressure in the container to deform the object held on said elastic wall.

Claim 26

In a method for changing the imaging scale in x-ray lithography, said method including directing a collimated x-radiation through a mask onto an object, the improvement comprising deforming the object at least in the region to be exposed and maintaining the radius of curvature for the individual surface points of the area being deformed constant during the irradiation of the object, said step of deforming the object comprising holding the edges of the object and applying a force at a single point to a back surface of the object facing away from the mask.

Claim 27

In a method for changing the imaging scale in x-ray lithography, said method including directing a collimated x-radiation through a mask onto an object, the improvement comprising deforming the object at least in the region to be exposed and maintaining the radius of curvature for the individual surface points of the area being deformed constant during the irradiation of the object, said step of deforming the object comprising holding the edges of the object and applying a force at a single point to a back surface of the object facing away from the mask.

Claim 28

In a method for changing the imaging scale in x-ray lithography, said method including directing a collimated x-radiation through a mask onto an object, the improvement comprising deforming the object at least in the region to be exposed and maintaining the radius of curvature for the individual surface points of the area being deformed constant during the irradiation of the object, said step of deforming the object comprising holding the edges of the object and applying a force along a line to a back surface of the object facing away from the mask to obtain a cylindrical curving of the object.

Claim 29

In a method for changing the imaging scale in x-ray lithography, said method including directing a collimated x-radiation through a mask onto an object, the improvement comprising deforming the object at least in the region to be exposed and maintaining the radius of curvature for the individual surface points of the area being deformed constant during the irradiation of the object, said step of deforming the object comprising holding the edges of the object and applying a force along a line to a back surface of the object facing away from the mask to obtain a cylindrical curving of the object.

Claim 30

In a method for changing the imaging scale in x-ray lithography, said method including directing a collimated x-radiation through a mask onto an object, the improvement comprising deforming the object at least in the region to be exposed and maintaining the radius or curvature for the individual surface points of the area being deformed constant during the irradiation of the object, said step of deforming the object including providing a container having an elastic wall, holding the object on said elastic wall and increasing the pressure in the container to bend the object by the elastic wall.

Claim 31

In a method for changing the imaging scale in x-ray lithography, said method including directing a collimated x-radiation through a mask onto an object, the improvement comprising deforming the object at least in the region to be exposed and maintaining the radius or curvature for the individual surface points of the area being deformed constant during the irradiation of the object, said step of deforming the object including providing a container having an elastic wall, holding the object on said elastic wall and increasing the pressure in the container to bend the object by the elastic wall.