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US5135609A
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Quantum lithography mask and fabrication method
Assignee: Leland Stanford Junior University
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Filing: 1990-07-06
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Granted: 1992-08-04
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Expires: 2010-07-06
Abstract
Abstract Thin film masks with precisely located and positioned features are manufactured using a methodology herein called quantum lithography. A thin film layer, such as a chromium film, is deposited on a substrate such as quartz glass. Then, a set of precisely located dividing lines is defined in the thin film layer. The dividing lines are spaced in accordance with a predefined coordinate system and intersect so as to define tiles between the dividing lines. An electron beam pattern generator may be used to generate a large number of identical masks having a thin film with precisely located dividing lines. These masks will each be customized by subsequent processing steps. Each such mask is customized by selectively identifying a subset of the tiles and removing the selected subset of tiles to form a mask pattern in the thin film layer. The resulting pattern has very precisely located edges because the edges correspond to dividing lines formed using a precision patterning system, such an electron beam pattern generator. However, the actual light blocking pattern of the mask can be defined using a much lower accuracy pattern generator. An alternate embodiment of the invention uses a quantized additive process. A set of precisely located boundary lines are formed on a substrate to form a generic mask. The generic mask is customized by removing a subset of the boundary lines, and then selectively depositing a masking material inside the closed regions defined by the remaining boundary lines.
Inventors
- 👤 R. Fabian W. Pease
- 👤 Nadim I. Maluf
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 12:09
CPC Classifications
B; B82; B82Y; B82Y10/00; G; G03; G03F; G03F1/00; G03F1/38; B82Y40/00; G03F1/50; G03F7/00; G03F7/0035; H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3174; H01J2237/00; H01J2237/30; H01J2237/317; H01J2237/3175; H01J2237/31777; H01J2237/31788
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
79 words
A method of patterning a thin film, the steps of the method comprising: forming a set of microscopically sized discrete thin film tiles in a periodic pattern on a substrate, each thin film tile covering a closed area of said substrate, said set of thin film tiles substantially covering an entire contiguous area of said substrate; selectively identifying a subset of said tiles; and removing said selected subset of tiles to form a pattern in said thin film layer.
Claim 2
Independent Claim
79 words
A method of patterning a thin film, the steps of the method comprising: forming a set of microscopically sized discrete thin film tiles in a periodic pattern on a substrate, each thin film tile covering a closed area of said substrate, said set of thin film tiles substantially covering an entire contiguous area of said substrate; selectively identifying a subset of said tiles; and removing said selected subset of tiles to form a pattern in said thin film layer.
Claim 3
Dependent Claim
60 words
The patterning method of claim 1, said forming step including forming precisely positioned microscopic dividing lines between said tiles, thereby precisely positioning said tiles so as to precisely position edges of said pattern formed by said removing step; wherein said microscopic dividing lines are positioned with a positioning accuracy characterized by a maximum misplacement which is less than 0.45 microns.
Claim 4
Independent Claim
114 words
A method of patterning a thin film, the steps of the method comprising: depositing a thin film layer on a substrate; defining a set of precisely located dividing lines in said thin film layer, wherein said dividing lines have microscopic width and are spaced in accordance with a predefined coordinate system and intersecting so as to define microscopically sized tiles between said dividing lines, said tiles substantially covering an entire contiguous area of said substrate; and selectively identifying a subset of said tiles and removing said selected subset of tiles to form a pattern in said thin film layer, said pattern having precisely defined edges coinciding with ones of said microscopic width dividing lines.
Claim 5
Independent Claim
114 words
A method of patterning a thin film, the steps of the method comprising: depositing a thin film layer on a substrate; defining a set of precisely located dividing lines in said thin film layer, wherein said dividing lines have microscopic width and are spaced in accordance with a predefined coordinate system and intersecting so as to define microscopically sized tiles between said dividing lines, said tiles substantially covering an entire contiguous area of said substrate; and selectively identifying a subset of said tiles and removing said selected subset of tiles to form a pattern in said thin film layer, said pattern having precisely defined edges coinciding with ones of said microscopic width dividing lines.
Claim 6
Dependent Claim
43 words
The patterning method of claim 3, said selectively identifying step including the step of physically tagging all tiles which are to be retained, thereby identifying said subset of tiles which are to be removed, and then removing all tiles which are not tagged.
Claim 7
Dependent Claim
42 words
The patterning method of claim 3, said selectively identifying step including the step of physically tagging all tiles which are to be removed, thereby identifying said subset of tiles which are to be removed, and then removing all of said tagged tiles.
Claim 8
Independent Claim
99 words
A method of patterning a thin film, the steps of the method comprising: providing a substrate; forming on said substrate a set of precisely located boundary lines, wherein said boundary lines are microscopic in width and are spaced in accordance with a predefined coordinate system and intersecting so as to define a periodic pattern of tiled regions of microscopic size between said boundary lines; and selectively depositing a thin film in a subset of said tiled regions to form a pattern on said substrate, said pattern having precisely defined edges coinciding with ones of said microscopic width boundary lines.
Claim 9
Independent Claim
99 words
A method of patterning a thin film, the steps of the method comprising: providing a substrate; forming on said substrate a set of precisely located boundary lines, wherein said boundary lines are microscopic in width and are spaced in accordance with a predefined coordinate system and intersecting so as to define a periodic pattern of tiled regions of microscopic size between said boundary lines; and selectively depositing a thin film in a subset of said tiled regions to form a pattern on said substrate, said pattern having precisely defined edges coinciding with ones of said microscopic width boundary lines.
Claim 10
Independent Claim
90 words
A method of patterning a thin film, the steps of the method comprising: providing a generic thin film mask having a set of periodically positioned, microscopically sized discrete thin film tiles on a substrate each one of which covers a microscopic closed area of said substrate; said set of tiles covering a contiguous area of said substrate, except for dividing lines of microscopic width between said tiles; selectively identifying a subset of said tiles; and removing said selected subset of tiles to form a pattern in said thin film mask.
Claim 11
Independent Claim
90 words
A method of patterning a thin film, the steps of the method comprising: providing a generic thin film mask having a set of periodically positioned, microscopically sized discrete thin film tiles on a substrate each one of which covers a microscopic closed area of said substrate; said set of tiles covering a contiguous area of said substrate, except for dividing lines of microscopic width between said tiles; selectively identifying a subset of said tiles; and removing said selected subset of tiles to form a pattern in said thin film mask.
Claim 12
Dependent Claim
49 words
The patterning method claim 7, said selectively identifying step including the step of physically tagging all tiles which are to be retained, thereby identifying said subset of tiles which are to be removed as all tiles which are not tagged, and then removing all tiles which are not tagged.
Claim 13
Dependent Claim
42 words
The patterning method of claim 7, said selectively identifying step including the step of physically tagging all tiles which are to be removed, thereby identifying said subset of tiles which are to be removed, and then removing all of said tagged tiles.
Claim 14
Independent Claim
120 words
A method of patterning a thin film, the steps of the method comprising: forming a set of microscopically sized discrete thin film tiles substantially covering an entire contiguous area of a substrate, each discrete thin film tile covering a closed area of said substrate, including forming trenches between said discrete thin film tiles, said trenches having a width which is less than a selected wavelength, wherein said selected wavelength is less than 0.45 microns; selectively identifying a subset of said tiles; and removing said selected subset of tiles to form a pattern in said thin film layer, said selecting and removing steps including projecting a mask onto said set of discrete thin film tiles using light having said selected wavelength.
Claim 15
Independent Claim
120 words
A method of patterning a thin film, the steps of the method comprising: forming a set of microscopically sized discrete thin film tiles substantially covering an entire contiguous area of a substrate, each discrete thin film tile covering a closed area of said substrate, including forming trenches between said discrete thin film tiles, said trenches having a width which is less than a selected wavelength, wherein said selected wavelength is less than 0.45 microns; selectively identifying a subset of said tiles; and removing said selected subset of tiles to form a pattern in said thin film layer, said selecting and removing steps including projecting a mask onto said set of discrete thin film tiles using light having said selected wavelength.
Claim 16
Dependent Claim
48 words
The patterning method of claim 10, said forming step precisely positioning said tiles so as to precisely position edges of said pattern formed by said removing step; wherein said trenches are positioned with a positioning accuracy characterized by a maximum misplacement which is less than said selected wavelength.
References Cited (Backward Citations)
US4199358A
Cited
US4738746A
Cited
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