Patent US5227010A successfully refreshed from Google Patents.
US5227010A
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Regeneration of ferric chloride etchants
Assignee: International Business Machines Corp
•
Filing: 1991-04-03
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Granted: 1993-07-13
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Expires: 2011-04-03
Abstract
Abstract Ferric chloride etching composition is regenerated by introducing such along with oxygen gas into a static mixing zone.
Inventors
- 👤 John S. Lubert
- 👤 Donald M. McGarigle
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 17:04
CPC Classifications
C; C23; C23F; C23F1/00; C23F1/46
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
122 words
A method for regenerating a ferric chloride etching composition which comprises introducing spent ferric chloride etching composition into a static mixing zone and introducing oxygen gas at a flow rate of about 4 to about 12 SCFM into said static mixing zone in concurrent flow with said ferric chloride etching composition; maintaining contact between the oxygen gas and said ferric chloride composition in said zone for at least about 2 seconds to thereby regenerate the ferric chloride etching compostion and wherein the back pressure on the ferric chloride etching composition in the static mixing zone is about 8 to about 12 psig, and the oxygen is fed at a pressure about 2 to about 10 psig above that of the etching composition.
Claim 2
Independent Claim
122 words
A method for regenerating a ferric chloride etching composition which comprises introducing spent ferric chloride etching composition into a static mixing zone and introducing oxygen gas at a flow rate of about 4 to about 12 SCFM into said static mixing zone in concurrent flow with said ferric chloride etching composition; maintaining contact between the oxygen gas and said ferric chloride composition in said zone for at least about 2 seconds to thereby regenerate the ferric chloride etching compostion and wherein the back pressure on the ferric chloride etching composition in the static mixing zone is about 8 to about 12 psig, and the oxygen is fed at a pressure about 2 to about 10 psig above that of the etching composition.
Claim 3
Dependent Claim
29 words
The process of claim 1 wherein the contact between the oxygen gas and the ferric chloride composition in the static mixing zone is about 2 to about 4 seconds.
Claim 4
Dependent Claim
20 words
The method of claim 1 wherein the ferric chloride etching composition that is regenerated has a pH of about -0.5.
Claim 5
Dependent Claim
20 words
The method of claim 1 wherein the oxygen is fed at a pressure of about 35 to about 55 psig.
Claim 6
Dependent Claim
29 words
The method of claim 1 wherein the flow rate of the spent ferric chloride etching composition into the mixing zone is about 50 to about 80 gallons per minute.
Claim 7
Independent Claim
127 words
A method for regenerating a ferric chloride etching composition which consists essentially of introducing spent ferric chloride etching composition into a static mixing zone and introducing a gas consisting essentially of oxygen at a flow rate of about 4 to about 12 SCFM into said static mixing zone in concurrent flow with said ferric chloride etching composition; maintaining contact between the oxygen and said ferric chloride composition in said zone for at least about 2 seconds to thereby regenerate the ferric chloride etching composition, and wherein the back pressure on the ferric chloride etching composition in the static mixing zone is about 8 to about 12 psig, and the oxygen is fed at a pressure about 2 to about 10 psig above that of the etching composition.
Claim 8
Independent Claim
127 words
A method for regenerating a ferric chloride etching composition which consists essentially of introducing spent ferric chloride etching composition into a static mixing zone and introducing a gas consisting essentially of oxygen at a flow rate of about 4 to about 12 SCFM into said static mixing zone in concurrent flow with said ferric chloride etching composition; maintaining contact between the oxygen and said ferric chloride composition in said zone for at least about 2 seconds to thereby regenerate the ferric chloride etching composition, and wherein the back pressure on the ferric chloride etching composition in the static mixing zone is about 8 to about 12 psig, and the oxygen is fed at a pressure about 2 to about 10 psig above that of the etching composition.
Claim 9
Dependent Claim
12 words
The method of claim 1 wherein the regeneration is carried out continously.
Claim 10
Dependent Claim
15 words
The method of claim 7 wherein the regeneration is carried on-line during an etching process.
Claim 11
Dependent Claim
20 words
The method of claim 6 wherein the ferric chloride etching composition that is regenerated as a pH of about -0.5.
Claim 12
Dependent Claim
28 words
The method of claim 6 wherein the contact between the oxygen and the ferric chloride composition in the static mixing zone is about 2 to about 4 seconds.
Claim 13
Dependent Claim
12 words
The method of claim 6 wherein the regeneration is carried out continuously.
Claim 14
Dependent Claim
20 words
The method of claim 6 wherein the oxygen is fed at a pressure of about 35 to about 55 psig.
Claim 15
Dependent Claim
29 words
The method of claim 6 wherein the flow rate of the spent ferric chloride etching composition into the mixing zone is about 50 to about 80 gallons per minute.
Claim 16
Dependent Claim
44 words
The method of claim 11 wherein the regeneration is carried on-line during an etching process. 7. The method of claim 1 wherein the regeneration is carried out continuously. 8. The method of claim 7 wherein the regeneration is carried on-line during an etching process.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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