Patent US5229320A successfully refreshed from Google Patents.
US5229320A
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US
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Method for forming quantum dots
Assignee: Sony Corp
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Filing: 1992-07-28
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Granted: 1993-07-20
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Expires: 2012-07-28
Abstract
Abstract Disclosed is a method which enabled the precise formation of a group of quantum dots. A device which functions on the principle of a transmission type electron microscope is used to produce a beam of electrons which are passed through a thin crystal membrane in order to produce an electron beam diffraction image. The energy distribution of the diffracted electron beam is used to produce masks, enable epitaxial growth and dry etching involved with the microscopic fabrication operations. For example, a thin GaAs membrane is used to form a diffracted electron beam image on a GaAs layer formed on a substrate. Carbon is then supplied and used to form carbon layers on the the locations where the beam energy is strongest. These carbon layers are used as a mask which allow selective etching of the GaAs layer. An AlGaAs insulating layer is then epitaxially grown on the exposed surface portions of the AlGaAs substrate to fill the spaces between each of the quantum dot defining GaAs portions which project up from the AlGaAs substrate surface.
Inventors
- 👤 Ryuichi Ugajin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 23:24
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3174; H01J37/3175; B; B82; B82Y; B82Y10/00; B82Y40/00; H10; H10D; H10D30/00; H10D30/01; H10D30/014; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/944; Y10S438/962
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
54 words
A method of forming quantum dots comprising: forming a diffraction image on a fabrication substrate by passing a de Broglie wave through a thin crystal material membrane; and forming a plurality of quantum dots at predetermined locations on the surface of said fabrication substrate in accordance with the distribution strength of the diffraction image.
Claim 2
Independent Claim
54 words
A method of forming quantum dots comprising: forming a diffraction image on a fabrication substrate by passing a de Broglie wave through a thin crystal material membrane; and forming a plurality of quantum dots at predetermined locations on the surface of said fabrication substrate in accordance with the distribution strength of the diffraction image.
Claim 3
Dependent Claim
77 words
A method of forming quantum dots as set forth in claim 1 further comprising the steps of: forming said thin crystal material membrane on a substrate using epitaxial growth; etching said substrate so that it assumes a predetermined configuration which can be fixed on said fabrication substrate; and supporting said thin crystal material membrane on said fabrication substrate using the etched substrate and using said crystal material membrane to project said diffraction image on said fabrication substrate.
Claim 4
Dependent Claim
33 words
A method of forming quantum dots as set forth in claim 1 wherein said de Broglie wave is one of an electron beam, an X ray, a neutron beam and a proton beam.
Claim 5
Dependent Claim
25 words
A method of forming quantum dots as set forth in claim 1 wherein said thin crystal material membrane is formed from a compound semiconductive material.
Claim 6
Dependent Claim
23 words
A method of forming quantum dots as set forth in claim 1 wherein said fabrication substrate is formed from a compound semiconductive material.
Claim 7
Independent Claim
65 words
A method of forming quantum dots comprising: projecting a diffraction image on a fabrication substrate using a thin crystal material membrane and passing a de Broglie wave therethrough; selectively forming a mask on a predetermined site of said fabrication substrate using the strength distribution of said diffraction image; using said mark to etch said fabrication substrate so that a group of quantum dots are defined.
Claim 8
Independent Claim
65 words
A method of forming quantum dots comprising: projecting a diffraction image on a fabrication substrate using a thin crystal material membrane and passing a de Broglie wave therethrough; selectively forming a mask on a predetermined site of said fabrication substrate using the strength distribution of said diffraction image; using said mark to etch said fabrication substrate so that a group of quantum dots are defined.
Claim 9
Dependent Claim
25 words
A method of forming quantum dots as set forth in claim 6 wherein said thin crystal material membrane is formed from a compound semiconductive material.
Claim 10
Dependent Claim
32 words
A method of forming quantum dots as set forth in claim 6 wherein said de Broglie wave is one of an electron beam, an X-ray, a neutron beam and a proton beam.
Claim 11
Dependent Claim
23 words
A method of forming quantum dots as set forth in claim 6 wherein said fabrication substrate is formed from a compound semiconductive material.
Claim 12
Independent Claim
67 words
A method of forming quantum dots comprising: projecting a diffraction image on a GaAs layer by passing an electron beam through a thin GaAs membrane; using the strength distribution of the diffraction image to form carbon layers on predetermined locations of the surface of the GaAs layer; and using the carbon layer as a mask and etching said GaAs layer to form a plurality of quantum dots.
Claim 13
Independent Claim
67 words
A method of forming quantum dots comprising: projecting a diffraction image on a GaAs layer by passing an electron beam through a thin GaAs membrane; using the strength distribution of the diffraction image to form carbon layers on predetermined locations of the surface of the GaAs layer; and using the carbon layer as a mask and etching said GaAs layer to form a plurality of quantum dots.
Claim 14
Independent Claim
92 words
A method of forming quantum dots comprising: epitaxially growing a thin AlGaAs membrane on the upper surface of a GaAs substrate; forming a support member from said GaAs substrate; fixing the support member to a fabrication substrate; passing an electron beam through said thin AlGaAs membrane to form a diffraction image on the fabrication substrate; forming carbon layers on predetermined portions of the surface of said fabrication substrate using the diffraction strength distribution; and using the carbon layers as masks and etching the fabrication substrate to form a plurality of quantum dots.
Claim 15
Independent Claim
92 words
A method of forming quantum dots comprising: epitaxially growing a thin AlGaAs membrane on the upper surface of a GaAs substrate; forming a support member from said GaAs substrate; fixing the support member to a fabrication substrate; passing an electron beam through said thin AlGaAs membrane to form a diffraction image on the fabrication substrate; forming carbon layers on predetermined portions of the surface of said fabrication substrate using the diffraction strength distribution; and using the carbon layers as masks and etching the fabrication substrate to form a plurality of quantum dots.
Claim 16
Independent Claim
82 words
A method of forming quantum dots comprising: forming a diffraction image on a surface of fabrication substrate by passing a de Broglie wave through a thin crystal material membrane; using the energy of the de Broglie wave to selectively decompose an organo-metallic compound and induce the epitaxial growth of a plurality of semi conductive chemical compound quantum dot defining layers in accordance with the diffraction strength distribution of the de Broglie wave which occur at predetermined portions of the fabrication substrate surface.
Claim 17
Independent Claim
82 words
A method of forming quantum dots comprising: forming a diffraction image on a surface of fabrication substrate by passing a de Broglie wave through a thin crystal material membrane; using the energy of the de Broglie wave to selectively decompose an organo-metallic compound and induce the epitaxial growth of a plurality of semi conductive chemical compound quantum dot defining layers in accordance with the diffraction strength distribution of the de Broglie wave which occur at predetermined portions of the fabrication substrate surface.
Claim 18
Dependent Claim
25 words
A method of forming quantum dots as set forth in claim 12 wherein said thin crystal material membrane is formed from a compound semiconductive material.
Claim 19
Dependent Claim
33 words
A method of forming quantum dots as set forth in claim 12 wherein said de Broglie wave is one of an electron beam, an X ray, a neutron beam and a proton beam.
Claim 20
Dependent Claim
23 words
A method of forming quantum dots as set forth in claim 12 wherein said fabrication substrate is formed from a compound semiconductive material.
Claim 21
Independent Claim
76 words
A method of forming quantum dots comprising: projecting a diffraction image onto a AlGaAs layer by passing an electron beam through a thin GaAs membrane; using the energy of the electron beam, to selectively decompose an organo-metallic compound and induce the epitaxial growth of a plurality of semi conductive chemical compound quantum dot defining layers in accordance with the diffraction strength distribution of the electron beam which occur at predetermined portions of the AlGaAs layer surface.
Claim 22
Independent Claim
76 words
A method of forming quantum dots comprising: projecting a diffraction image onto a AlGaAs layer by passing an electron beam through a thin GaAs membrane; using the energy of the electron beam, to selectively decompose an organo-metallic compound and induce the epitaxial growth of a plurality of semi conductive chemical compound quantum dot defining layers in accordance with the diffraction strength distribution of the electron beam which occur at predetermined portions of the AlGaAs layer surface.
Claim 23
Independent Claim
111 words
A method of forming quantum dots comprising: epitaxially growing a thin AlGaAs membrane on a GaAs substrate; forming a support member from said GaAs layer and securing the support member to a surface of a fabrication substrate; passing an electron beam through said thin AlGaAs membrane to form a diffraction image which is projected onto the surface of said fabrication substrate; using the energy of the electron beam, to selectively decompose an organo-metallic compound and induce epitaxial growth of a plurality of semi conductive chemical compound quantum dot defining layers in accordance with the diffraction strength distribution of the electron beam which occur at predetermined portions of the AlGaAs layer surface.
Claim 24
Independent Claim
111 words
A method of forming quantum dots comprising: epitaxially growing a thin AlGaAs membrane on a GaAs substrate; forming a support member from said GaAs layer and securing the support member to a surface of a fabrication substrate; passing an electron beam through said thin AlGaAs membrane to form a diffraction image which is projected onto the surface of said fabrication substrate; using the energy of the electron beam, to selectively decompose an organo-metallic compound and induce epitaxial growth of a plurality of semi conductive chemical compound quantum dot defining layers in accordance with the diffraction strength distribution of the electron beam which occur at predetermined portions of the AlGaAs layer surface.
Claim 25
Independent Claim
78 words
A method of forming quantum dots comprising: forming a diffraction image on a surface of fabrication substrate by passing a de Broglie wave through a thin crystal material membrane while exposing said surface of said fabrication substrate to an etching gas; and using the energy of the de Broglie wave to selectively etch said fabrication substrate in accordance with the diffraction strength distribution of the de Broglie wave which occur at predetermined portions of the fabrication substrate surface.
Claim 26
Independent Claim
78 words
A method of forming quantum dots comprising: forming a diffraction image on a surface of fabrication substrate by passing a de Broglie wave through a thin crystal material membrane while exposing said surface of said fabrication substrate to an etching gas; and using the energy of the de Broglie wave to selectively etch said fabrication substrate in accordance with the diffraction strength distribution of the de Broglie wave which occur at predetermined portions of the fabrication substrate surface.
Claim 27
Dependent Claim
25 words
A method of forming quantum dots as set forth in claim 18 wherein said thin crystal material membrane is formed from a compound semiconductive material.
Claim 28
Dependent Claim
32 words
A method of forming quantum dots as set forth in claim 18 wherein said de Broglie wave is one of an electron beam, X ray, a neutron beam and a proton beam.
Claim 29
Dependent Claim
23 words
A method of forming quantum dots as set forth in claim 18 wherein said fabrication substrate is formed from a compound semiconductive material.
Claim 30
Independent Claim
75 words
A method of forming quantum dots comprising: forming a diffraction image on a surface of a GaAs substrate by passing an electron beam through a thin GaAs membrane while exposing said surface of said GaAs substrate to an etching gas; and using the energy of the electron beam to selectively etch said GaAs substrate in accordance with the diffraction strength distribution of the electron beam which occur at predetermined portions of the GaAs substrate surface.
Claim 31
Independent Claim
75 words
A method of forming quantum dots comprising: forming a diffraction image on a surface of a GaAs substrate by passing an electron beam through a thin GaAs membrane while exposing said surface of said GaAs substrate to an etching gas; and using the energy of the electron beam to selectively etch said GaAs substrate in accordance with the diffraction strength distribution of the electron beam which occur at predetermined portions of the GaAs substrate surface.
Claim 32
Independent Claim
110 words
A method of forming quantum dots comprising: epitaxially growing a thin AlGaAs membrane on a GaAs substrate; forming a support member from said GaAs layer and securing the support member to a surface of a fabrication substrate; passing an electron beam through said thin AlGaAs membrane to form a diffraction image which is projected onto the surface of said fabrication substrate while the surface is exposed to an etching gas; and using the energy of the electron beam to excite the etching gas and selectively etch said fabrication substrate in accordance with the diffraction strength distribution of the electron beam which occurs at predetermined portions of the fabrication substrate surface.
Claim 33
Independent Claim
110 words
A method of forming quantum dots comprising: epitaxially growing a thin AlGaAs membrane on a GaAs substrate; forming a support member from said GaAs layer and securing the support member to a surface of a fabrication substrate; passing an electron beam through said thin AlGaAs membrane to form a diffraction image which is projected onto the surface of said fabrication substrate while the surface is exposed to an etching gas; and using the energy of the electron beam to excite the etching gas and selectively etch said fabrication substrate in accordance with the diffraction strength distribution of the electron beam which occurs at predetermined portions of the fabrication substrate surface.
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