Polyimide copolymer film for lift-off metallization

Claim 2

A soluble polyimide copolymer film for use as a metallization lift-off layer for integrated circuit substrates consisting essentially of from 25 to 45 mole % of 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride, and from 55 to 75 mole % of oxydiphthalic dianhydride, based on the total molar amount of dianhydride components; and from 55 to 85 mole % of 4,4'-oxydianiline and from 15 to 45 mole % of m-phenylene diamine, based on the total molar amount of diamine components.

Claim 3

The polyimide copolymer lift-off film of claim 1 having a thickness of at least 12 microns after baking at 85° C., 150° C. and 230° C. for 30 minutes at each temperature and which completely dissolves in N-methylpyrrolidone solvent in less than 10 minutes at 85° C.

Claim 4

The polyimide copolymer lift-off film of claim 2 consisting essentially of from 30 to 40 mole % of 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride, from 60 to 70 mole % of oxydiphthalic dianhydride, from 20 to 40 mole % of m-phenylene diamine and from 60 to 80 mole % of 4,4'-oxydianiline.

Claim 5

The polyimide copolymer lift-off film of claim 3 consisting essentially of 40 mole % of 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride, 60 mole % of oxydiphthalic dianhydride, 40 mole % of m-phenylene diamine and 60 mole % of 4,4'-oxydianiline.

Claim 6

The polyimide copolymer lift-off film of claim 3 consisting essentially of 40 mole % of 2,2-bis(3,4dicarboxyphenyl)hexafluoropropane dianhydride, 60 mole % of oxydiphthalic dianhydride, 30 mole % of m-phenylene diamine and 70 mole % of 4,4'-oxydianiline. PG,24

Claim 7

The polyimide copolymer lift-off film of claim 3 consisting essentially of 30 mole % of 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride, 70 mole % of oxydiphthalic dianhydride, 40 mole % of m-phenylene diamine and 60 mole % of 4,4'-oxydianiline.

Claim 8

The polyimide copolymer lift-off film of claim 3 consisting essentially of 40 mole % of 2,2-bis(3,4dicarboxyphenyl)hexafluoropropane dianhydride, 60 mole % of oxydiphthalic dianhydride, 20 mole % of m-phenylene diamine and 80 mole % of 4,4'-oxydianiline.

Claim 9

A lift-off method for forming a patterned metallic film on a substrate comprising: a) forming a lift-off layer of a polyimide copolymer, consisting essentially of from 25 to 45 mole % of 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride, from 55 to 75 mole % of oxydiphthalic dianhydride, from 55 to 85 mole 20 % of 4,4'-oxydianiline and from 15 to 45 mole % of m-phenylene diamine, on said substrate; b) forming a silicon nitride layer, having openings in a preselected pattern, on said lift-off layer; c) etching openings through said lift-off layer extending through to said substrate, wherein said openings are aligned with and are laterally wider than said openings in said silicon nitride layer; d) depositing a thin metallic film layer onto the surface of said silicon nitride layer and said substrate exposed through said openings; and e) removing said lift-off layer together with said silicon nitride layer with said metallic film deposited thereon, thereby leaving said thin metallic film deposited on said substrate exposed through said openings.

Claim 10

A lift-off method for forming a patterned metallic film on a substrate comprising: a) forming a lift-off layer of a polyimide copolymer, consisting essentially of from 25 to 45 mole % of 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride, from 55 to 75 mole % of oxydiphthalic dianhydride, from 55 to 85 mole 20 % of 4,4'-oxydianiline and from 15 to 45 mole % of m-phenylene diamine, on said substrate; b) forming a silicon nitride layer, having openings in a preselected pattern, on said lift-off layer; c) etching openings through said lift-off layer extending through to said substrate, wherein said openings are aligned with and are laterally wider than said openings in said silicon nitride layer; d) depositing a thin metallic film layer onto the surface of said silicon nitride layer and said substrate exposed through said openings; and e) removing said lift-off layer together with said silicon nitride layer with said metallic film deposited thereon, thereby leaving said thin metallic film deposited on said substrate exposed through said openings.

Claim 11

The lift-off method of claim 8 wherein said polyimide copolymer lift-off layer has a thickness of at least 12 microns after baking at 85° C., 150° C. and 230° C. for 30 minutes at each temperatures and completely dissolves in N-methyl pyrrolidone solvent in less than 10 minutes at 85° C.

Claim 12

The lift-off method of claim 8 wherein said lift-off layer is removed by immersion in an organic solvent.

Claim 13

The lift-off method of claim 8 wherein said etching is reactive ion etching using oxygen as a reactive gas.

Claim 14

The lift-off method of claim 8 wherein said substrate is a semiconductor substrate.

Claim 15

The lift-off method of claim 8 wherein said substrate is a metallic oxide.

Claim 16

The lift-off method of claim 8 wherein said substrate is silicon dioxide.