Patent US5488007A successfully refreshed from Google Patents.
US5488007A
Expired / Lapsed
US
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Method of manufacture of a semiconductor device
Assignee: Samsung Electronics Co Ltd
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Filing: 1993-04-16
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Granted: 1996-01-30
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Expires: 2013-04-16
Abstract
Abstract A method for manufacturing a semiconductor device having a closed step portion and a global step portion including an insulating layer is provided. A dummy pattern is formed by forming an insulating layer on the global step portion and then patterning through a photolithography process. After forming the dummy pattern for compensating steps in the global step portion and between the closed step portion and the global step portion, a BPSG layer is formed on both the closed step portion and the global step portion, and then the BPSG layer is heat-treated to cause it to reflow. The BPSG layer as an insulating interlayer having a planarized surface. The improved planarization decreases the occurrence of notching and discontinuities in the succeeding metallization processes thereby enhancing the yield and electrical characteristics of the semiconductor device.
Inventors
- 👤 Kyeong-tae Kim
- 👤 Yun-Seung Shin
- 👤 Young-hun Park
- 👤 Won-mo Park
- 👤 Ji-hong Ahn
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 18:09
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/30; H10B12/31; H10P; H10P95/00; H10P95/06; H10P95/062; H10P95/064; H10P95/066; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/092; Y; Y10; Y10S; Y10S438/00; Y10S438/926
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
128 words
A method for manufacturing a semiconductor device having a closed step portion and at least one global step portion, a step difference being defined by the respective surfaces of said closed step portion and said global step portion, comprising the steps of: forming a first insulating layer, said first insulating layer comprising an inorganic material, on said closed step portion and said global step portion; forming a photoresist pattern for forming a dummy pattern on said global step portion through a photolithography method; etching said first insulating layer to form said dummy pattern, using said photoresist pattern as an etching mask; removing said photoresist pattern; forming a second insulating layer, said second insulating layer comprising an inorganic material, on said closed step portion and said global step portion.
Claim 2
Independent Claim
128 words
A method for manufacturing a semiconductor device having a closed step portion and at least one global step portion, a step difference being defined by the respective surfaces of said closed step portion and said global step portion, comprising the steps of: forming a first insulating layer, said first insulating layer comprising an inorganic material, on said closed step portion and said global step portion; forming a photoresist pattern for forming a dummy pattern on said global step portion through a photolithography method; etching said first insulating layer to form said dummy pattern, using said photoresist pattern as an etching mask; removing said photoresist pattern; forming a second insulating layer, said second insulating layer comprising an inorganic material, on said closed step portion and said global step portion.
Claim 3
Dependent Claim
37 words
A method for manufacturing a semiconductor device as in claim 1, further comprising a step of planarizing said second insulating layer by reflowing said second insulating layer by a heat treatment after forming said second insulating layer.
Claim 4
Dependent Claim
28 words
A method for manufacturing a semiconductor device as in claim 2, wherein said first insulating layer is completely removed from said closed step portion during said etch step.
Claim 5
Dependent Claim
28 words
A method for manufacturing a semiconductor device as in claim 2, wherein said first insulating layer is partially removed from said closed step portion during said etch step.
Claim 6
Dependent Claim
20 words
A method for manufacturing a semiconductor device as in claim 2, wherein said second insulating layer consists essentially of BPSG.
Claim 7
Independent Claim
253 words
A method for planarizing semiconductor device wherein said device includes an impurity-doped region formed around the surface of a semiconductor substrate; a field oxide layer for defining an active region formed on said semiconductor substrate; a cell array region including a bit line formed on said field oxide layer, a first insulating layer for insulating said bit line, a storage electrode of a capacitor formed on said first insulating layer by being electrically connected with said impurity-doped region, a dielectric film formed on said storage electrode, and a plate electrode formed on said dielectric film; and a peripheral circuit region formed adjacent to said cell array region, a step difference being defined by the respective surfaces of said cell array region and said peripheral circuit region, with said first insulating layer extending over said peripheral circuit region, said method comprising the steps of: forming a second insulating layer, said second insulating layer comprising an inorganic material, on said cell array portion and said peripheral circuit portion; forming a photoresist pattern for forming a dummy pattern on said second insulating layer through a photolithography method; etching said second insulating layer to form said dummy pattern, using said photoresist pattern as an etching mask; removing said photoresist pattern; said dummy pattern compensating for said step difference; forming a third insulating layer on said dummy pattern and said plate electrode, said third insulating layer comprising an inorganic material; and planarizing the surface of said third insulating layer by reflowing said insulating layer by a heat treatment.
Claim 8
Independent Claim
253 words
A method for planarizing semiconductor device wherein said device includes an impurity-doped region formed around the surface of a semiconductor substrate; a field oxide layer for defining an active region formed on said semiconductor substrate; a cell array region including a bit line formed on said field oxide layer, a first insulating layer for insulating said bit line, a storage electrode of a capacitor formed on said first insulating layer by being electrically connected with said impurity-doped region, a dielectric film formed on said storage electrode, and a plate electrode formed on said dielectric film; and a peripheral circuit region formed adjacent to said cell array region, a step difference being defined by the respective surfaces of said cell array region and said peripheral circuit region, with said first insulating layer extending over said peripheral circuit region, said method comprising the steps of: forming a second insulating layer, said second insulating layer comprising an inorganic material, on said cell array portion and said peripheral circuit portion; forming a photoresist pattern for forming a dummy pattern on said second insulating layer through a photolithography method; etching said second insulating layer to form said dummy pattern, using said photoresist pattern as an etching mask; removing said photoresist pattern; said dummy pattern compensating for said step difference; forming a third insulating layer on said dummy pattern and said plate electrode, said third insulating layer comprising an inorganic material; and planarizing the surface of said third insulating layer by reflowing said insulating layer by a heat treatment.
Claim 9
Dependent Claim
20 words
A method for planarizing a semiconductor device as in claim 6, wherein said third insulating layer consists essentially of BPSG.
Claim 10
Dependent Claim
38 words
A method for planarizing a semiconductor device as in claim 6, wherein said cell array region is formed in a portion of said semiconductor substrate that is recessed relative to the semiconductor substrate in said peripheral circuit region.
Claim 11
Dependent Claim
33 words
A method for planarizing a semiconductor device as in claim 6, wherein said dummy pattern formed on said peripheral circuit region overlaps a portion of said plate electrode adjacent said peripheral circuit region.
Claim 12
Independent Claim
250 words
A method for manufacturing a semiconductor device, said device having a closed step portion, said closed step portion having first device elements thereon, and at least one global step portion, a first step difference being defined by the respective surfaces of said closed step portion and said global step portion, comprising the steps of: forming a first insulating layer, said first insulating layer comprising an inorganic material, on said closed step portion and said global step portion; forming a photoresist pattern for forming a dummy pattern on said global step portion of said first insulating layer through a photolithography method; using said photoresist pattern as an etching mask, partially etching said first insulating layer to form said dummy pattern, wherein said dummy pattern retains a portion of said first insulating layer over said first device elements, a second step difference being defined by the respective surfaces of said first insulating layer in said closed step portion and said first insulating layer in said global step portion, the surface of said first insulating layer in said closed step portion being recessed relative to the surface of said first insulating layer in said global step portion; removing said photoresist pattern; forming second device elements in said closed step portion, said second device elements compensating for said second step difference; forming a second insulating layer on said closed step portion and said global step portion; and planarizing the surface of said second insulating layer by reflowing said insulating layer by a heat treatment.
Claim 13
Independent Claim
250 words
A method for manufacturing a semiconductor device, said device having a closed step portion, said closed step portion having first device elements thereon, and at least one global step portion, a first step difference being defined by the respective surfaces of said closed step portion and said global step portion, comprising the steps of: forming a first insulating layer, said first insulating layer comprising an inorganic material, on said closed step portion and said global step portion; forming a photoresist pattern for forming a dummy pattern on said global step portion of said first insulating layer through a photolithography method; using said photoresist pattern as an etching mask, partially etching said first insulating layer to form said dummy pattern, wherein said dummy pattern retains a portion of said first insulating layer over said first device elements, a second step difference being defined by the respective surfaces of said first insulating layer in said closed step portion and said first insulating layer in said global step portion, the surface of said first insulating layer in said closed step portion being recessed relative to the surface of said first insulating layer in said global step portion; removing said photoresist pattern; forming second device elements in said closed step portion, said second device elements compensating for said second step difference; forming a second insulating layer on said closed step portion and said global step portion; and planarizing the surface of said second insulating layer by reflowing said insulating layer by a heat treatment.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1999-01-29 | 1999-07-31 | 2000-01-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-01-29 | 2003-07-31 | 2004-01-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-01-29 | 2007-07-31 | 2008-01-30 | $7700.00 | Window Closed / Lapsed |